Single-chip cleaning jig

Abstract

The utility model relates to the technical field of manufacturing of semiconductor substrate materials, and particularly discloses a single-chip cleaning jig which comprises two coaxial and oppositely arranged water passing discs, water guiding cavities are formed in the opposite surfaces of the two water passing discs, water inlet holes communicated with the water guiding cavities are formed in the water passing discs, and the water passing discs are provided with water outlet holes communicated with the water guiding cavities. A first water spraying disc and a second water spraying disc are arranged between the two water passing discs, corresponding limiting columns are arranged on the opposite surfaces of the first water spraying disc and the second water spraying disc correspondingly, and a cleaning groove position used for containing a substrate slice is formed between the first water spraying disc and the second water spraying disc through the limiting columns. Water spraying holes are formed in the first water spraying disc and the second water spraying disc, the water spraying direction of the water spraying holes and the axis of the first water spraying disc or the axis of the second water spraying disc form an inclined angle, and the water spraying directions of the water spraying holes in the first water spraying disc and the second water spraying disc are the same so that rotational flow used for washing the substrate slices can be formed in the cleaning groove position. The cleaning device has the advantages of being high in cleaning efficiency and cleaner in cleaning.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor substrate material manufacturing, in particular to a single-chip cleaning jig. Background Art

[0002] Indium phosphide substrates have an application market in the fields of manufacturing high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. At present, in the preparation of indium phosphide substrates, vacuum adsorption and manual picking of the back of the substrate are mostly used to clean indium phosphide substrates. This method is only suitable for cleaning substrates with single-sided polishing and no requirements on the back, and cannot meet the cleaning of double-sided polished substrates with high requirements for the cleanliness of the back. Vacuum adsorption and manual picking of the back of the substrate will inevitably leave traces and cannot ensure the quality of the substrate; and because the thickness of the substrate is very thin, vacuum adsorption is easy to cause deformation and depression of the substrate, resulting in unsatisfactory cleaning effect. In order to avoid the defects of the above-mentioned technology, a cleaning jig is designed in the prior art to replace vacuum adsorption. When cleaning, the substrate needs to be placed in the jig, and the substrate is cleaned by a water jet perpendicular to the substrate. After cleaning, the substrate is turned over for cleaning. However, during the cleaning process, one side of the substrate is always in contact with the jig, and the cleaning efficiency is low and the cleanliness of the cleaning cannot be guaranteed. Utility Model Content

[0003] The technical problem to be solved by the utility model is: how to solve the problems of low cleaning efficiency and unsatisfactory cleaning effect in the prior art.

[0004] In order to solve the above technical problems, the utility model provides a single-chip cleaning fixture, including two coaxial and relatively arranged water-passing trays, the facing surfaces of the two water-passing trays are provided with water guide cavities, each of the water-passing trays is provided with a water inlet hole connected to the water guide cavity, a first water spray tray and a second water spray tray are provided between the two water-passing trays, the facing surfaces of the first water spray tray and the second water spray tray are respectively provided with corresponding limiting columns, the limiting columns form a cleaning slot for placing substrate sheets between the first water spray tray and the second water spray tray, the first water spray tray and the second water spray tray are both provided with water spray holes arranged in a circular array, the water spraying direction of the water spray holes is at an inclination angle with the axis of the first water spray tray or the second water spray tray, and the water spraying directions of the water spray holes on the first water spray tray and the second water spray tray are the same, so as to form a vortex in the cleaning slot for washing substrate sheets.

[0005] Further preferably, there are a plurality of the limiting columns, and the plurality of limiting columns are arranged on the outer edge of the first water spray disc or the second water spray disc around the axis of the first water spray disc or the second water spray disc.

[0006] Further preferably, each of the limiting columns is arranged to extend radially along the first water spray disc or the second water spray disc.

[0007] Further preferably, a drainage channel communicating with the cleaning tank is formed between two adjacent limiting columns on the first water spray disc or the second water spray disc.

[0008] Further preferably, the water spraying directions of all the water spraying holes on the first water spraying disk have the same inclination angle with the axis of the first water spraying disk, and the water spraying directions of all the water spraying holes on the second water spraying disk have the same inclination angle with the axis of the second water spraying disk.

[0009] Further preferably, the inclination angle formed by the water spraying direction of the water spray hole and the axis of the first water spray plate or the second water spray plate is an acute inclination angle.

[0010] More preferably, the acute inclination angle is 30-60°.

[0011] Further preferably, the acute inclination angle is 45°.

[0012] Compared with the prior art, the single-piece cleaning fixture provided by the utility model has the following beneficial effects:

[0013] The utility model is provided with two water-passing trays, and a water-guiding cavity is formed on the water-passing trays. When in use, pressurized water is introduced into the water-guiding cavity through the water inlet hole, and the pressurized water is sprayed toward the surfaces of both sides of the substrate sheet in the cleaning slot through the water spray holes on the water spray tray, so that the substrate sheet can be suspended in the cleaning slot, and the substrate sheet is prevented from contacting with the first water spray tray or the second water spray tray, thereby realizing the cleaning of the substrate sheet; during the cleaning process, the water spray holes of the first water spray tray or the second water spray tray are arranged in a circular array, and the water spraying direction of the water spray holes is designed to be at an inclination angle with the axis of the first water spray tray or the second water spray tray, and the water spraying directions of the water spray holes on the first water spray tray and the second water spray tray are the same, so as to form a vortex in the cleaning slot for washing the substrate sheet, and by forming a vortex on the surfaces of both sides of the substrate sheet, the substrate sheet can be suspended and rotated in the cleaning slot during the washing process of the substrate sheet, thereby improving the cleaning efficiency and ensuring a cleaner cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of a single-chip cleaning fixture described in the utility model.

[0015] Figure 2 It is a front view of a single-chip cleaning fixture described in the utility model.

[0016] Figure 3 This utility model Figure 2 Cross-sectional view of section AA.

[0017] Figure 4 It is a structural schematic diagram of the first water-passing tray or the second water-passing tray of the utility model.

[0018] Figure 5 It is a structural schematic diagram of the first water spray disc or the second water spray disc of the utility model.

[0019] Figure 6 It is a demonstration diagram of placing the substrate sheet of the utility model on the second water spray tray.

[0020] Figure 7 It is a schematic structural diagram of the first water spray disc or the second water spray disc after being combined in the utility model.

[0021] In the figure:

[0022] 10. First water tray; 11. First water inlet hole; 12. First water guide cavity;

[0023] 20. Second water tray; 21. Second water inlet hole; 22. Second water guide cavity;

[0024] 30. First water spray plate; 31. First limiting column; 32. First water spray hole;

[0025] 40. Second water spray plate; 41. Second limiting column; 42. Second water spray hole;

[0026] 50. Drainage channel;

[0027] 60. Cleaning slots;

[0028] 70. Substrate sheet. DETAILED DESCRIPTION

[0029] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like used in the present invention to indicate the orientation or position relationship is based on the orientation or position relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0032] In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0035] like Figure 1-Figure 7As shown, the present embodiment provides a single-piece cleaning fixture, including a first water-passing tray 10 and a second water-passing tray 20 that are coaxially and oppositely arranged, and water-conducting cavities are provided on the surfaces facing each other of the two water-passing trays. Specifically, a first water-conducting cavity 12 is provided on a side of the first water-passing tray 10 facing the second water-passing tray 20, and a first water inlet hole 11 communicating with the first water-conducting cavity 12 is provided on the first water-conducting tray 10, and a second water-conducting cavity 22 is provided on a side of the second water-conducting tray 20 facing the first water-conducting tray 10, and a second water inlet hole 21 communicating with the second water-conducting cavity 22 is provided on the second water-conducting tray 20. A first water spray tray 30 and a second water spray tray 40 are provided between a water-passing tray 10 and a second water-passing tray 20, wherein a cleaning slot 60 for placing a substrate sheet 70 is formed between the first water spray tray 30 and the second water spray tray 40; wherein the first water spray tray 30 and the second water spray tray 40 are both provided with water spray holes, so that pressurized water is introduced into the first water guide cavity 12 and the second water guide cavity 22 through the first water inlet hole 11 and the second water inlet hole 21 respectively, and the pressurized water is then sprayed onto the two sides of the substrate sheet 70 through the water spray holes on the first water spray tray 30 and the second water spray tray 40 for cleaning.

[0036] In the above embodiment, by providing the first water spray tray 30 and the second water spray tray 40, both sides of the substrate sheet 70 can be cleaned simultaneously, and the substrate sheet 70 can be suspended during the cleaning process, effectively preventing the substrate sheet 70 from contacting the fixture during the cleaning process and affecting the cleaning effect.

[0037] In some embodiments, the first water spray plate 30 is sealed with the first water passing plate 10, and the second water spray plate 40 is sealed with the second water passing plate 20 to ensure that the pressurized water in the first water guiding cavity 12 and the second water guiding cavity 22 can be sprayed toward the two sides of the substrate sheet 70 through the water spray holes.

[0038] In the specific embodiment, the second water guiding cavity 22, the first water spray disc 30 and the second water spray disc 40 are respectively provided with corresponding first limiting columns 31 and second limiting columns 41 on the surfaces facing each other. The first limiting columns 31 and the second limiting columns 41 separate the first water spray disc 30 and the second water spray disc 40 by a certain distance to form a cleaning slot 60 for placing the substrate sheet 70. There are multiple first limiting columns 31 and second limiting columns 41. Multiple first limiting columns 31 are arranged at the outer edge of the first water spray disc 30 around the axis of the first water spray disc 30, and multiple second limiting columns 41 are arranged at the outer edge of the second water spray disc 40 around the axis of the second water spray disc 40. Multiple limiting columns can limit the radial direction of the substrate sheet 70 to prevent the substrate sheet 70 from falling off and being damaged during the cleaning process.

[0039] In some embodiments, each first limiting column 31 is extended radially along the first water spray disk 30, and each second limiting column 41 is extended radially along the second water spray disk 40; and a drainage channel 50 connected to the cleaning slot 60 is formed between two adjacent limiting columns on the first water spray disk 30 or the second water spray disk 40; thus, the limiting columns are designed to extend radially, which can reduce the blocking area of ​​the water flow by the limiting columns, and is conducive to the water flow after cleaning the substrate sheet 70 to be able to flow out of the outside of the fixture from the drainage channel 50 in time, so as to avoid sewage remaining inside the fixture and affecting the cleaning effect of the substrate sheet 70.

[0040] In some embodiments, the first water spraying plate 30 is provided with first water spraying holes 32, which are arranged in a circular array on the first water spraying plate 30, and the second water spraying holes 42 are provided on the second water spraying plate 40, which are arranged in a circular array on the second water spraying plate 40, wherein the first water spraying holes 32 and the second water spraying holes 42 are both arranged at an angle. Specifically, the water spraying direction of the first water spraying hole 32 is at an angle of inclination to the axis of the first water spraying plate 30, the water spraying direction of the second water spraying hole 42 is at an angle of inclination to the axis of the second water spraying plate 40, and the water spraying directions of the water spraying holes on the first water spraying plate 30 and the second water spraying plate 40 are the same, so as to form a vortex for washing the substrate sheet 70 in the cleaning tank 60. In this way, by forming a vortex on both sides of the substrate sheet 70, the substrate sheet 70 can be suspended and rotated in the cleaning tank 60 during the washing process of the substrate sheet 70, thereby improving the cleaning efficiency and ensuring a cleaner cleaning.

[0041] In some embodiments, the water spraying direction of the first water spray hole 32 has the same inclination angle as the axis of the first water spray disk 30, and the second water spray hole 42 has the same inclination angle as the axis of the second water spray disk 40; thereby, the jets sprayed through the first water spray hole 32 and the second water spray hole 42 form a stable vortex on the two side surfaces of the substrate sheet 70, so that the substrate sheet 70 can be suspended and rotated in the cleaning tank 60 during the process of flushing the substrate sheet 70, thereby improving the cleaning efficiency while ensuring cleaner cleaning.

[0042] In some embodiments, the water spraying direction of the water spray hole and the axis of the first water spray plate 30 or the second water spray plate 40 form an acute angle. Specifically, the acute angle is 30-60°, and the preferred acute angle is 45° in this embodiment. Setting the acute angle to 45° can reduce the impact force of the water jet on the surface of the substrate sheet 70, and can also generate a greater rotational impulse when the water jet contacts the substrate sheet 70, thereby driving the substrate sheet 70 to rotate.

[0043] In summary, the embodiment of the utility model provides a single-chip cleaning fixture, which is provided with two water-passing trays and a water-conducting cavity is formed on the water-passing trays. When in use, pressurized water is introduced into the water-conducting cavity through the water inlet hole, and the pressurized water is sprayed to the two side surfaces of the substrate sheet 70 in the cleaning tank 60 through the water spray holes on the water spray tray, so that the substrate sheet 70 can be suspended in the cleaning tank 60, avoiding the substrate sheet 70 from contacting with the first water spray tray 30 or the second water spray tray 40, thereby achieving the cleaning of the substrate sheet 70; during the cleaning process, the first water spray tray 30 or the second water spray tray 40 is placed on the cleaning tank 60. The water spray holes of the water spray disk 40 are arranged in a circular array, and the water spray direction of the water spray holes is designed to be at an inclination angle with the axis of the first water spray disk 30 or the second water spray disk 40. The water spray directions of the water spray holes on the first water spray disk 30 and the second water spray disk 40 are the same, so as to form a vortex in the cleaning tank 60 for washing the substrate sheet 70. By forming a vortex on both side surfaces of the substrate sheet 70, the substrate sheet 70 can be suspended and rotated in the cleaning tank 60 during the washing process of the substrate sheet 70, thereby improving the cleaning efficiency and ensuring cleaner cleaning.

[0044] The above is only a preferred embodiment of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the utility model, and these improvements and substitutions should also be regarded as the protection scope of the utility model. The above shows and describes the basic principles, main features and advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above preferred embodiments. The embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the utility model.

[0045] In addition, it should be understood that although this specification is described according to implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A single-chip cleaning jig, characterized in that: The invention comprises two coaxial and oppositely arranged water-passing trays, the facing surfaces of the two water-passing trays are provided with water-guiding cavities, each of the water-passing trays is provided with a water inlet hole connected with the water-guiding cavity, a first water-spraying tray and a second water-spraying tray are provided between the two water-passing trays, the facing surfaces of the first water-spraying tray and the second water-spraying tray are provided with corresponding limiting columns, the limiting columns form a cleaning slot for placing substrate sheets between the first water-spraying tray and the second water-spraying tray, the first water-spraying tray and the second water-spraying tray are provided with water-spraying holes arranged in a circular array, the water-spraying direction of the water-spraying holes is at an inclination angle with the axis of the first water-spraying tray or the second water-spraying tray, the water-spraying directions of the water-spraying holes on the first water-spraying tray and the second water-spraying tray are the same, so as to form a vortex in the cleaning slot for washing substrate sheets.

2. A single-chip cleaning jig according to claim 1, characterized in that: There are multiple limiting columns, and the multiple limiting columns are arranged on the outer edge of the first water spray disc or the second water spray disc around the axis of the first water spray disc or the second water spray disc.

3. A single-chip cleaning jig according to claim 2, characterized in that: Each of the limiting columns is arranged to extend radially along the first water spray disc or the second water spray disc.

4. A single-chip cleaning jig according to claim 2, characterized in that: A drainage channel connected to the cleaning slot is formed between two adjacent limiting columns on the first water spray disc or the second water spray disc.

5. A single-chip cleaning jig according to claim 1, characterized in that: The water spraying directions of all the water spraying holes on the first water spraying disk have the same inclination angle with the axis of the first water spraying disk, and the water spraying directions of all the water spraying holes on the second water spraying disk have the same inclination angle with the axis of the second water spraying disk.

6. A single-chip cleaning jig according to claim 5, characterized in that: The inclination angle formed by the water spraying direction of the water spraying hole and the axis of the first water spraying plate or the second water spraying plate is an acute inclination angle.

7. A single-chip cleaning jig according to claim 6, characterized in that: The acute inclination angle is 30-60°.

8. A single-chip cleaning jig according to claim 7, characterized in that: The acute inclination angle is 45°.

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