Gas-liquid collecting and separating device

Abstract

The utility model discloses a gas-liquid collecting and separating device which comprises a cup structure, a flow guide module arranged in the cup structure, a collecting module located outside the cup structure and a waste discharge channel communicated with the cup structure, the flow guide module and the collecting module, and the waste discharge channel is located outside the cup structure. A gas pipeline and a liquid pipeline are arranged at the end, away from the end communicated with the cup structure, of the waste discharge channel, and an inlet of the liquid pipeline is formed in the lowest position of the waste discharge channel. According to the device, gas and liquid generated in the wafer cleaning process can be collected in all directions, meanwhile, the waste discharge channel is arranged outside the cup structure, the waste discharge channel is arranged to be in a Y shape and is wide, on one hand, the Y-shaped structure cannot affect element installation of cleaning equipment, on the other hand, a large channel space is provided, and blocking is further avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of gas-liquid separation, and in particular to a gas-liquid collecting and separating device. Background Art

[0002] In the wafer processing process of the prior art, the wafer is adsorbed on the mounting table, and the processing liquid is supplied while rotating so that the surface of the wafer meets the required process requirements. During the rotation of the wafer, the processing liquid will be spun away. In order to prevent the spun processing liquid from contaminating the equipment, a cup structure is set around the wafer. The processing liquid is mixed with air, and a gas-liquid separation device is also set in the cup structure to separate the gas from the processing liquid and collect the processing liquid.

[0003] The cup structure integrated gas-liquid separation device in the prior art has a relatively small gas-liquid separation channel due to space limitations. If a treatment liquid with a higher viscosity is used, the treatment liquid will condense after splashing, blocking the gas-liquid separation channel and causing channel blockage. At the same time, the existing gas-liquid separation device cannot achieve all-round collection of the gas and liquid generated by cleaning. For example, if a cleaning brush is provided, the treatment liquid dripping from the bristles of the cleaning brush cannot be collected, and the versatility is low. Utility Model Content

[0004] The purpose of the utility model is to provide a gas-liquid collecting and separating device to solve the technical problems existing in the above-mentioned background technology.

[0005] The utility model provides a gas-liquid collection and separation device, comprising a cup structure, a flow guide module arranged in the cup structure, a collection module and a waste discharge channel located outside the cup structure, wherein the waste discharge channel is connected with the cup structure, the flow guide module and the collection module, and the waste discharge channel is located outside the cup structure;

[0006] The waste discharge channel is provided with a gas pipeline and a liquid pipeline away from the end communicating with the cup structure, and the inlet of the liquid pipeline is arranged at the lowest point of the waste discharge channel.

[0007] In a preferred embodiment, the waste discharge channel is configured in a Y shape.

[0008] In a preferred embodiment, a guide pipe 1 is provided at the bottom of the cup structure, and the guide pipe 1 is movably connected to the waste discharge channel. A sealing gasket is provided at the interface of the waste discharge channel.

[0009] In a preferred embodiment, the collection module includes a liquid receiving box 1 and a liquid receiving box 2, and the bottoms of the liquid receiving box 1 and the liquid receiving box 2 are respectively connected to a diversion pipe 2 and a diversion pipe 3, and the diversion pipe 2 and the diversion pipe 3 are both connected to the waste discharge channel.

[0010] In a preferred embodiment, the flow guide module includes a flow guide plate and a flow guide cover located outside the flow guide plate, a plurality of flow guide holes are arranged circumferentially at the edge of the flow guide plate, and the flow guide cover is connected to the exhaust channel through a flow guide pipe 4.

[0011] In a preferred embodiment, the inner wall of the cup structure is a smooth surface.

[0012] The beneficial effects of the technical solution of the utility model are:

[0013] This device can collect the gas and liquid generated in the wafer cleaning process in all directions, and at the same time, the waste discharge channel is set outside the cup structure. The waste discharge channel is set to be Y-shaped and the channel is relatively wide. On the one hand, the Y-shaped structure will not affect the component installation of the cleaning equipment, and on the other hand, it provides a larger channel space to further avoid blockage. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a diagram showing the relationship between the utility model and the cleaning equipment position.

[0015] Figure 2 This is a schematic diagram of the overall structure of the utility model.

[0016] Figure 3 This is a side view of the utility model.

[0017] Figure 4 It is a schematic diagram of the overall structure of the guide component of the utility model.

[0018] Explanation of the reference numerals: 1 cup structure, 11 guide pipe one, 12 sealing gasket, 2 waste discharge channel, 21 gas pipeline, 22 liquid pipeline, 3 collection module, 31 liquid receiving box one, 32 liquid receiving box two, 33 guide pipe two, 34 guide pipe three, 4 guide module, 41 guide plate, 42 guide hole, 43 guide cover, 44 guide pipe four, 5 cleaning brush, 6 loading table. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the sake of illustration and convenience of description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

[0020] like Figure 1-4As shown, the utility model provides a gas-liquid collection and separation device, which can realize gas-liquid collection and separation after cleaning. The wafer is placed on the mounting table 6 during cleaning; the suction cup arranged on the mounting table 6 absorbs the wafer to stabilize the wafer on the mounting table 6, and the motor is connected to the mounting table 6, and the mounting table 6 is driven to rotate during the cleaning process. The cleaning brush 5 is also used to clean the side and surface of the wafer during the cleaning process. During the whole process of wafer cleaning, the waste gas and liquid generated are collected and separated by this device.

[0021] The device includes a cup structure 1, a flow guide module 4 arranged in the cup structure 1, a collection module 3 located outside the cup structure 1, and a waste discharge channel 2 connected to the cup structure 1, the flow guide module 4 and the collection module 3, wherein the waste discharge channel 2 is located outside the cup structure 1. The cup structure 1 collects a portion of the cleaning liquid and prevents the cleaning liquid from flying out. The flow guide module 4 guides and collects the liquid generated by wafer cleaning and prevents the cleaning liquid from flowing into the mounting table 6. The collection module 3 collects the cleaning liquid dripping from the bristles of the cleaning brush 5. The cleaning liquid collected in the above process is all passed into the waste discharge channel 2.

[0022] The waste discharge channel 2 is provided with a gas pipeline 21 and a liquid pipeline 22 away from the end connected to the cup structure 1, and the inlet of the liquid pipeline 22 is arranged at the lowest part of the waste discharge channel 2. The above arrangement makes the entire waste discharge pipeline a flow path for waste liquid and waste gas, and even if the treated liquid condenses, it will not cause blockage of the channel. The inlet of the liquid pipeline 22 is arranged at the lowest point of the waste discharge pipeline, which can ensure that the treated liquid completely flows into the liquid pipeline 22 and prevent the treated liquid from remaining in the waste discharge pipeline.

[0023] The bottom of the cup structure 1 is provided with a guide pipe 11, which is movably connected to the waste discharge channel 2, and a sealing gasket 12 is provided at the interface of the waste discharge channel 2. The waste discharge channel 2 is set in a Y shape, and two guide pipes 11 are provided. The Y-shaped structure will not affect the installation of components of the cleaning equipment on the one hand, and on the other hand, it provides a larger channel space to further avoid blockage. The sealing gasket 12 ensures the sealing between the guide pipe 11 and the waste discharge channel.

[0024] The collecting module 3 includes a liquid receiving box 1 31 and a liquid receiving box 2 32, and the bottoms of the liquid receiving box 1 31 and the liquid receiving box 2 32 are respectively connected to a guide pipe 2 33 and a guide pipe 3 34, and the guide pipe 2 33 and the guide pipe 3 34 are both connected to the waste discharge channel 2. The cleaning brush 5 is driven to the wafer by a driving mechanism to clean the side and surface of the wafer. After cleaning, the cleaning brush 5 returns to its original position, that is, located in the liquid receiving box 1 31 and the liquid receiving box 2 32. The cleaning liquid dripped from the bristles of the cleaning brush 5 is collected by the liquid receiving box 1 31 and the liquid receiving box 2 32, and then enters the waste discharge channel 2 through the guide pipe 2 33 and the guide pipe 3 34.

[0025] The flow guide module 4 includes a flow guide plate 41 and a flow guide cover 43 located outside the flow guide plate 41. A plurality of flow guide holes 42 are arranged circumferentially at the edge of the flow guide plate 41. The flow guide cover 43 is connected to the waste discharge channel through a flow guide pipe 44. The cleaning liquid on the back of the wafer first falls on the flow guide plate 41 and then enters the flow guide cover 43 through the flow guide holes 42 on the flow guide plate 41, and finally enters the waste liquid discharge pipeline through the flow guide pipe 44 on the flow guide cover 43.

[0026] The inner wall of the cup structure 1 is a smooth surface without any protrusions, so that after the processing liquid splashes onto the inner wall of the cup, it can flow smoothly into the waste discharge pipe. No protrusions are provided to avoid turbulence during the rotation of the wafer, which makes the processing liquid on the wafer surface unevenly distributed.

[0027] The device can collect gas and liquid generated in the wafer cleaning process in all directions, and at the same time, the waste discharge channel is arranged outside the cup structure 1, and the waste discharge channel 2 is wider to avoid pipeline blockage.

[0028] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A gas-liquid collection and separation device, characterized in that: It includes a cup structure, a flow guide module arranged in the cup structure, a collection module and a waste discharge channel located outside the cup structure, wherein the waste discharge channel is connected with the cup structure, the flow guide module and the collection module, and the waste discharge channel is located outside the cup structure; The waste discharge channel is provided with a gas pipeline and a liquid pipeline away from the end communicating with the cup structure, and the inlet of the liquid pipeline is arranged at the lowest point of the waste discharge channel.

2. A gas-liquid collection and separation device according to claim 1, characterized in that: The waste discharge channel is arranged in a Y shape.

3. A gas-liquid collection and separation device according to claim 1, characterized in that: A guide pipe 1 is arranged at the bottom of the cup structure, and the guide pipe 1 is movably connected to the waste discharge channel. A sealing gasket is arranged at the interface of the waste discharge channel.

4. A gas-liquid collection and separation device according to claim 1, characterized in that: The collecting module comprises a first liquid receiving box and a second liquid receiving box. The bottoms of the first liquid receiving box and the second liquid receiving box are respectively connected with a second diversion pipe and a third diversion pipe. The second diversion pipe and the third diversion pipe are both connected to the waste discharge channel.

5. A gas-liquid collection and separation device according to claim 1, characterized in that: The flow guide module includes a flow guide plate and a flow guide cover located outside the flow guide plate. A plurality of flow guide holes are circumferentially arranged at the edge of the flow guide plate. The flow guide cover is connected to the waste discharge channel through a flow guide pipe four.

6. A gas-liquid collection and separation device according to claim 1, characterized in that: The inner wall of the cup structure is a smooth surface.

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