Position error identification and compensation device

Abstract

The utility model provides a position error identification and compensation device, which comprises a base, a lower motion platform and a visual system, the lower motion platform and the visual system are respectively and fixedly arranged on the base, a lower loading platform is connected to the lower motion platform in a sliding manner, the lower loading platform is provided with a lower wafer bearing station, and the lower loading platform is provided with a first identifier, a second identifier, a third identifier and a fourth identifier. The first identifier and the second identifier are arranged at the end part of the downloading platform at an interval along a first direction; the third identifier and the fourth identifier are arranged at an interval along the first direction and are close to the lower wafer bearing station; the two visual systems are arranged at intervals in the first direction. According to the position error identification and compensation device provided by the utility model, the movement of the lower stage between the loading position and the alignment position and the detection of the position error of the front and back two times at the alignment position are realized, so that the pose variation of the lower wafer is indirectly obtained, and a basis is provided for the target position compensation of the upper wafer; therefore, the alignment precision of the upper wafer and the lower wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor process equipment, in particular to a position error identification and compensation device. Background Art

[0002] As the characteristic size of transistors is approaching the physical limit, it is becoming increasingly difficult to continue to follow Moore's Law to improve the performance of integrated circuits and reduce power consumption by reducing the size of transistors. 3D integration is a crucial research direction that goes beyond Moore's Law. In 3D integration technology, wafer-level bonding is the most important link in realizing this technology.

[0003] As a key component of wafer bonding equipment, the wafer alignment device, the accuracy it can achieve will directly affect the success of wafer bonding. In the wafer alignment process, the mark of the lower wafer is first identified and positioned through a precision optical vision system, and then the lower carrier is moved from the alignment position to the loading position. After the upper carrier moves to the target position, the mark of the upper wafer is identified and the position is adjusted. Finally, the lower carrier returns to the alignment position to complete the alignment between the upper and lower wafers. However, during the large-stroke station exchange process of the download stage, position errors will occur, resulting in alignment accuracy errors between the upper and lower wafers. Therefore, it is necessary to measure, calculate and compensate for the position error of the download stage to improve the alignment accuracy. Utility Model Content

[0004] The utility model provides a position error identification and compensation device for solving the technical problem in the prior art that a position error may be generated during the large-stroke station exchange process of a download table, resulting in an alignment accuracy error between upper and lower wafers.

[0005] The utility model provides a position error identification and compensation device, comprising:

[0006] Pedestal;

[0007] A lower moving platform is fixedly arranged on the base, the unloading platform is slidably connected to the lower moving platform along the second direction, the unloading platform is provided with a lower wafer carrying station, the unloading platform is provided with a first mark, a second mark, a third mark and a fourth mark, the first mark and the second mark are arranged at intervals at the end of the unloading platform along the first direction; the third mark and the fourth mark are arranged at intervals along the first direction and are close to the lower wafer carrying station; the first mark, the second mark, the third mark and the fourth mark have a preset relative position relationship; and,

[0008] A visual system, wherein the visual system has two and is arranged on the base at intervals along the first direction, and is used to identify the first position information of the first mark and the second position information of the second mark respectively;

[0009] The second direction is perpendicular to the first direction.

[0010] The utility model provides a position error identification and compensation device, which realizes detection of the position error of the unloading platform at the alignment position twice before and after the unloading platform moves between the loading position and the alignment position by arranging two visual systems on the base and arranging the first mark, the second mark, the third mark and the fourth mark on the unloading platform, so as to indirectly obtain the position change of the lower wafer, provide a basis for the target position compensation of the upper wafer, and thus improve the alignment accuracy of the upper wafer and the lower wafer.

[0011] Furthermore, the visual system includes a second imaging component and a linear driver, the second imaging component includes a second optical path component, a second camera, a second light source and a second objective lens, the second optical path component is fixed to the base, the second camera is fixed to one end of the second optical path component, and the second light source is fixed to the side of the second optical path component; the linear driver is fixed to the base, the second objective lens is fixed to the power output end of the linear driver and is located above the second optical path component, and the linear driver is used to drive the second objective lens to move up and down for focusing.

[0012] Further, the base is fixedly provided with a first mounting plate, and the linear drive member is fixedly provided on the first mounting plate;

[0013] The base is fixedly provided with a second mounting plate, the second optical path component is fixedly provided on the second mounting plate; the second mounting plate is fixedly provided on the first mounting plate;

[0014] A mounting frame is fixedly arranged at the power output end of the linear driving member, and the second objective lens is fixedly arranged at the upper end of the mounting frame.

[0015] Furthermore, the visual system also includes a shell, and the second optical path component is arranged in the shell; the shell includes a first side plate, a second side plate and a third side plate arranged in a circumferential direction, and the lower ends of the first side plate, the second side plate and the third side plate are all connected to the base; the first side plate is connected to the second mounting plate; the first side plate is provided with a first avoidance hole, and the second camera passes through the first avoidance hole; the shell also includes a cover plate, and the cover plate is respectively connected to the second mounting plate and the mounting frame; the cover plate is provided with a second avoidance hole, and the second objective lens passes through the second avoidance hole.

[0016] Further, the base is provided with a first limiting plate, the first limiting plates have two and are arranged relatively spaced apart along the first direction, and the first mounting plate is mounted on the base through the first limiting plate; the first limiting plate is provided with a first adjusting screw, and the first adjusting screw is used to adjust the gap between the first limiting plate and the first mounting plate;

[0017] And / or, the base is provided with a second limit plate, the second limit plates have two and are arranged relatively spaced apart along the second direction, the first mounting plate is installed on the base through the second limit plate, the second limit plate is provided with a second adjustment screw, and the second adjustment screw is used to adjust the gap between the second limit plate and the first mounting plate.

[0018] Furthermore, the position error identification and compensation device also includes a measuring tool, which includes a crossbeam, a drive component, a first imaging component and a position detection component, wherein the crossbeam is detachably mounted on the end of the lower moving platform and extends along the first direction; the drive component is mounted on the crossbeam, and the first imaging component is fixed to the power output end of the drive component, and the drive component is used to drive the first imaging component to move along the first direction to determine the relative position relationship between the first marker, the second marker, the third marker and the fourth marker; the position detection component is used to detect the displacement of the first imaging component along the first direction.

[0019] The utility model provides a position error identification and compensation device, which realizes the determination of the preset relative position relationship between a first mark, a second mark, a third mark and a fourth mark by setting a measuring tool.

[0020] Furthermore, the driving assembly includes a guide rail, a connecting plate and a linear motor, the guide rail is fixed to the beam and extends along the first direction; the connecting plate is slidably connected to the guide rail, and the first imaging assembly is fixed to the connecting plate; the linear motor is fixed to the beam, and the power output end of the linear motor is connected to the connecting plate, which is used to drive the connecting plate to drive the first imaging assembly to move along the guide rail.

[0021] Furthermore, the first imaging component includes a first optical path component, a first camera, a first light source and a first objective lens, the first optical path component is slidably connected to the connecting plate along a vertical direction; the first camera is fixed to one side of the first optical path component; the first light source is fixed to the other side of the first optical path component; the first objective lens is arranged below the first optical path component and is coaxial with the first optical path component.

[0022] Furthermore, the position detection device includes a reading head and a grating ruler, the grating ruler is fixed to the beam and located on one side of the guide rail; the reading head is fixed to the connecting plate.

[0023] Furthermore, a bottom plate is fixedly provided at the lower end of the crossbeam, and the bottom plate is detachably connected to the downloading platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A partial structural diagram of a position error identification and compensation device provided by an embodiment of the utility model;

[0025] Figure 2 A schematic diagram of the structure of a download platform in a position error identification and compensation device provided by an embodiment of the utility model;

[0026] Figure 3 A partial exploded schematic diagram of a visual system in a position error identification and compensation device provided by an embodiment of the utility model;

[0027] Figure 4 An exploded schematic diagram of a visual system in a position error identification and compensation device provided by an embodiment of the utility model;

[0028] Figure 5 A schematic diagram of a measuring tool structure in a position error identification and compensation device provided in an embodiment of the utility model Figure 1 ;

[0029] Figure 6 A schematic diagram of a measuring tool structure in a position error identification and compensation device provided in an embodiment of the utility model Figure 2 ;

[0030] Figure 7 A schematic diagram of a state in which a measuring tool identifies a first mark and a second mark in a position error identification and compensation device provided by an embodiment of the utility model;

[0031] Figure 8 A schematic diagram of a state in which a measuring tool recognizes a third mark and a fourth mark in a position error recognition and compensation device provided by an embodiment of the utility model;

[0032] Description of reference numerals:

[0033] 10. base; 101. first mounting plate; 102. first limiting plate;

[0034] 20, lower moving platform; 210, download platform; 220, identification carrier; 221, first identification; 222, second identification; 223, third identification; 224, fourth identification; 230, measuring tool; 231, bottom plate; 232, crossbeam; 241, guide rail; 242, connecting plate; 243, linear motor; 250, first imaging component; 251, first optical path component; 252, first camera; 253, first light source; 254, first objective lens; 260, position detection component; 261, reading head; 262, grating ruler;

[0035] 30. Visual system; 310. Second imaging component; 311. Second mounting plate; 312. Second optical path component; 313. Second camera; 314. Second light source; 315. Mounting bracket; 316. Second objective lens; 320. Linear drive; 330. Shell; 331. First side plate; 332. Second side plate; 333. Third side plate; 334. Cover plate. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned purpose, features and advantages of the present invention more obvious and easy to understand, the following is a brief description of the present invention in conjunction with the attached Figure 1 —8 A detailed description is given of the specific embodiments of the present invention.

[0037] In the present invention, the terms "connection" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated structure.

[0038] In the present invention, terms such as "inside", "outside", "upper" and "lower" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the present invention.

[0039] The present invention provides a position error identification and compensation device, see attached Figure 1 and 2The position error identification and compensation device includes a base 10, a lower moving platform 20 and a visual system 30, the lower moving platform 20 is fixed on the base 10, the downloading platform 210 is slidably connected to the lower moving platform 20 along the second direction, the downloading platform 210 is provided with a lower wafer carrying station, the downloading platform 210 is provided with a first mark 221, a second mark 222, a third mark 223 and a fourth mark 224, the first mark 221 and the second mark 222 are arranged at intervals at the end of the downloading platform 210 along the first direction; the third mark 223 and the fourth mark 224 are arranged at intervals along the first direction and are close to the lower wafer carrying station; the first mark 221, the second mark 222, the third mark 223 and the fourth mark 224 have a preset relative position relationship between them; the visual system 30 has two and is arranged at intervals on the base 10 along the first direction, respectively used to identify the first position information of the first mark 221 and the second position information of the second mark 222, wherein the second direction is perpendicular to the first direction.

[0040] It should be noted that the third mark 223 and the fourth mark 224 are axially symmetrically arranged relative to the central axis of the lower wafer carrying station along the second direction.

[0041] It should be noted that the first mark 221 and the second mark 222 may be calibration points, calibration patterns, standard patterns or calibration patterns, etc., and the visual system 30 may calculate the center positions of the first mark 221 and the second mark 222 .

[0042] It should be noted that the working principle of a position error identification and compensation device provided by the embodiment of the utility model is as follows:

[0043] 1) Move the unloading platform 210 from the loading position to the alignment position, and identify and photograph the first mark 221 and the second mark 222 based on the two visual systems 30 to obtain the first position information of the first mark 221 and the second position information of the second mark 222;

[0044] 2) Return the unloading platform 210 to the loading position and move it to the alignment position again. Based on the two visual systems 30, the first mark 221 and the second mark 222 are respectively identified and photographed to obtain the first position information of the first mark 221 and the second position information of the second mark 222 again;

[0045] 3) Based on the first position information of the first marker 221 before and after the movement of the unloading platform 210 and the second position information of the second marker 222, as well as the preset relative position relationship between the first marker 221, the second marker 222, the third marker 223 and the fourth marker 224, the posture change of the lower wafer before and after the movement of the unloading platform 210 is determined, and this is used as the compensation value to compensate for the target position of the upper wafer.

[0046] Therefore, a position error identification and compensation device provided by an embodiment of the utility model, by setting two visual systems 30 on the base 10 and setting a first mark 221, a second mark 222, a third mark 223 and a fourth mark 224 on the unloading platform 210, realizes the detection of the position error of the unloading platform 210 at the alignment position twice before and after moving between the loading position and the alignment position, thereby indirectly obtaining the posture change of the lower wafer, providing a basis for compensating the target position of the upper wafer, thereby improving the alignment accuracy of the upper wafer and the lower wafer.

[0047] In the embodiment of the utility model, the downloading platform 210 is provided with four identification carriers 220 , and the first identification 221 , the second identification 222 , the third identification 223 and the fourth identification 224 are respectively provided on the identification carriers 220 .

[0048] See attached Figure 3 In the embodiment of the utility model, the visual system 30 includes a second imaging component 310 and a linear driver 320. The second imaging component 310 includes a second optical path component 312, a second camera 313, a second light source 314 and a second objective lens 316. The second optical path component 312 is fixed to the base 10, the second camera 313 is fixed to one end of the second optical path component 312, and the second light source 314 is fixed to the side of the second optical path component 312; the linear driver 320 is fixed to the base 10, the second objective lens 316 is fixed to the power output end of the linear driver 320 and is located above the second optical path component 312, and the linear driver 320 is used to drive the second objective lens 316 to move up and down for focusing. With such a configuration, the visual system 30 has a simple and compact structure.

[0049] It should be noted that the linear drive member 320 may be a linear motor 243 or an electric push rod.

[0050] In the embodiment of the utility model, the base 10 is fixed with a first mounting plate 101, and the linear drive member 320 is fixed with a first mounting plate 101. Figure 3 , on the first mounting plate 101; the base 10 is fixedly provided with a second mounting plate 311, and the second optical path component 312 is fixedly provided on the second mounting plate 311; the second mounting plate 311 is fixedly provided on the first mounting plate 101; the power output end of the linear drive member 320 is fixedly provided with a mounting frame 315, and the second objective lens 316 is fixedly provided on the upper end of the mounting frame 315.

[0051] See attached Figure 4In the embodiment of the utility model, the visual system 30 further includes a housing 330, and the second optical path component 312 is arranged in the housing 330; the housing 330 includes a first side plate 331, a second side plate 332 and a third side plate 333 arranged in the circumferential direction, and the lower ends of the first side plate 331, the second side plate 332 and the third side plate 333 are all connected to the base 10; the first side plate 331 is connected to the second mounting plate 311; the first side plate 331 is provided with a first avoidance hole, and the second camera 313 passes through the first avoidance hole; the housing 330 further includes a cover plate 334, and the cover plate 334 is respectively connected to the second mounting plate 311 and the mounting frame 315; the cover plate 334 is provided with a second avoidance hole, and the second objective lens 316 passes through the second avoidance hole. In this way, dust prevention is achieved.

[0052] See attached Figure 3 In the embodiment of the utility model, the base 10 is provided with a first limiting plate 102, which has two and is arranged relatively spaced along the first direction, and the first mounting plate 101 is mounted on the base 10 through the first limiting plate 102; the first limiting plate 102 is provided with a first adjusting screw, and the first adjusting screw is used to adjust the gap between the first limiting plate 102 and the first mounting plate 101. Such a configuration facilitates the adjustment of the position of the first mounting plate 101.

[0053] In the embodiment of the utility model, the base 10 is provided with a second limit plate, which has two and is arranged relatively spaced along the second direction, and the first mounting plate 101 is mounted on the base 10 through the second limit plate, and the second limit plate is provided with a second adjustment screw, which is used to adjust the gap between the second limit plate and the first mounting plate 101; wherein the second direction is perpendicular to the first direction. Such an arrangement facilitates the adjustment of the position of the first mounting plate 101.

[0054] It should be noted that the preset relative position relationship among the first mark 221 , the second mark 222 , the third mark 223 and the fourth mark 224 may be known or may be obtained by measuring the measuring tool 230 .

[0055] Participate in the Figure 5 In an embodiment of the utility model, the position error identification and compensation device also includes a measuring tool 230, which includes a beam 232, a driving component, a first imaging component 250 and a position detection component 260. The beam 232 is detachably mounted on the end of the lower moving platform 20 and extends along the first direction; the driving component is mounted on the beam 232, and the first imaging component 250 is fixedly arranged at the power output end of the driving component. The driving component is used to drive the first imaging component 250 to move along the first direction to determine the preset relative position relationship between the first mark 221, the second mark 222, the third mark 223 and the fourth mark 224; the position detection component 260 is used to detect the displacement of the first imaging component 250 along the first direction.

[0056] It should be noted that, see Appendix Figure 7 and Figure 8 , the working principle of a position error identification and compensation device provided by the embodiment of the utility model is:

[0057] 1) Install the measuring tool 230 at the end of the lower moving platform 20, and adjust the depth of field of the first imaging assembly 250 so that the projection clarity of the first mark 221, the second mark 222, the third mark 223 and the fourth mark 224 all meet the preset conditions, and the positions are all within the preset range;

[0058] 2) Move the first imaging component 250 of the test fixture along the first direction, identify and photograph the first mark 221 and the second mark 222 respectively, and record the first moving distance of the first imaging component 250;

[0059] 3) Move the download platform 210 along the second direction and the first imaging component 250 along the first direction, identify and photograph the third identifier 223 and the fourth identifier 224 respectively, and record the displacement of the download platform 210 and the second moving distance of the first imaging component 250;

[0060] 4) Based on the displacement of the download platform 210, the first moving distance of the first imaging component 250, and the second moving distance of the second imaging component 310, the preset relative position relationship between the first identifier 221, the second identifier 222, the third identifier 223, and the fourth identifier 224 is determined to achieve calibration between the first identifier 221, the second identifier 222, the third identifier 223, and the fourth identifier 224;

[0061] 5) Remove the measuring tool 230, move the unloading platform 210 from the loading position to the alignment position along the second direction, start the visual system 30, and identify and photograph the first mark 221 and the second mark 222 based on the two visual systems 30 to obtain the first position information of the first mark 221 and the second position information of the second mark 222;

[0062] 6) Return the unloading platform 210 to the loading position and move it to the alignment position again. Based on the two visual systems 30, the first mark 221 and the second mark 222 are respectively identified and photographed to obtain the first position information of the first mark 221 and the second position information of the second mark 222 again;

[0063] 7) Based on the first position information of the first marker 221 before and after the movement of the unloading platform 210 and the second position information of the second marker 222, as well as the preset relative position relationship between the first marker 221, the second marker 222, the third marker 223 and the fourth marker 224, the posture change of the lower wafer before and after the movement of the unloading platform 210 is determined, and this is used as the compensation value to compensate for the target position of the upper wafer.

[0064] The embodiment of the utility model provides a position error identification and compensation device, which determines the preset relative position relationship between the first mark 221, the second mark 222, the third mark 223 and the fourth mark 224 by setting a measuring tool 230.

[0065] See attached Figure 5 In this embodiment of the utility model, the driving assembly includes a guide rail 241, a connecting plate 242 and a linear motor 243. The guide rail 241 is fixed to the beam 232 and extends along the first direction; the connecting plate 242 is slidably connected to the guide rail 241, and the first imaging assembly 250 is fixed to the connecting plate 242; the linear motor 243 is fixed to the beam 232, and the power output end of the linear motor 243 is connected to the connecting plate 242, which is used to drive the connecting plate 242 to drive the first imaging assembly 250 to move along the guide rail 241.

[0066] See attached Figure 5 In the embodiment of the utility model, the first imaging assembly 250 includes a first optical path assembly 251, a first camera 252, a first light source 253 and a first objective lens 254. The first optical path assembly 251 is slidably connected to the connecting plate 242 along the vertical direction; the first camera 252 is fixedly arranged on one side of the first optical path assembly 251; the first light source 253 is fixedly arranged on the other side of the first optical path assembly 251; and the first objective lens 254 is arranged below the first optical path assembly 251 and is coaxial with the first optical path assembly 251. With such an arrangement, the first imaging assembly 250 has a simple and compact structure.

[0067] It should be noted that the first optical path component 251 is slidably connected to the connecting plate 242 along the vertical direction, so that the depth of field of the first imaging component 250 can be adjusted.

[0068] See attached Figure 6 In the embodiment of the utility model, the position detection device includes a reading head 261 and a grating ruler 262. The grating ruler 262 is fixed to the crossbeam 232 and located on one side of the guide rail 241; the reading head 261 is fixed to the connecting plate 242. In this way, the moving distance of the first optical path component 251 can be measured.

[0069] See attached Figure 6 In the embodiment of the utility model, a bottom plate 231 is fixedly provided at the lower end of the cross beam 232 , and the bottom plate 231 is detachably connected to the unloading platform 210 .

[0070] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A position error identification and compensation device, characterized in that: include: Base (10); A lower moving platform (20) is fixedly arranged on the base (10); a downloading platform (210) is slidably connected to the lower moving platform (20) along a second direction; the downloading platform (210) is provided with a lower wafer carrying station; the downloading platform (210) is provided with a first mark (221), a second mark (222), a third mark (223) and a fourth mark (224); the first mark (221) and the second mark (222) are arranged at intervals at the end of the downloading platform (210) along the first direction; the third mark (223) and the fourth mark (224) are arranged at intervals along the first direction and are close to the lower wafer carrying station; the first mark (221), the second mark (222), the third mark (223) and the fourth mark (224) have a preset relative position relationship; and, a visual system (30), the visual system (30) having two parts and being arranged on the base (10) at intervals along the first direction, and being used to respectively identify first position information of the first mark (221) and second position information of the second mark (222); The second direction is perpendicular to the first direction.

2. The position error identification and compensation device according to claim 1, characterized in that: The visual system (30) comprises a second imaging component (310) and a linear driving component (320), wherein the second imaging component (310) comprises a second optical path component (312), a second camera (313), a second light source (314) and a second objective lens (316), wherein the second optical path component (312) is fixedly mounted on the base (10), the second camera (313) is fixedly mounted on one end of the second optical path component (312), and the second light source (314) is fixedly mounted on the side of the second optical path component (312); the linear driving component (320) is fixedly mounted on the base (10), the second objective lens (316) is fixedly mounted on the power output end of the linear driving component (320) and is located above the second optical path component (312), and the linear driving component (320) is used to drive the second objective lens (316) to move up and down for focusing.

3. The position error identification and compensation device according to claim 2, characterized in that: The base (10) is fixedly provided with a first mounting plate (101), and the linear drive component (320) is fixedly provided on the first mounting plate (101); The base (10) is fixedly provided with a second mounting plate (311); the second optical path component (312) is fixedly provided on the second mounting plate (311); the second mounting plate (311) is fixedly provided on the first mounting plate (101); A mounting frame (315) is fixedly mounted on the power output end of the linear drive member (320), and the second objective lens (316) is fixedly mounted on the upper end of the mounting frame (315).

4. The position error identification and compensation device according to claim 3, characterized in that: The visual system (30) further comprises a shell (330), wherein the second optical path assembly (312) is arranged in the shell (330); the shell (330) comprises a first side plate (331), a second side plate (332) and a third side plate (333) arranged in a circumferential direction, wherein the lower ends of the first side plate (331), the second side plate (332) and the third side plate (333) are all connected to the base (10); the first side plate (331) is connected to the second mounting plate (311); the first side plate (331) is provided with a first avoidance hole, and the second camera (313) passes through the first avoidance hole; the shell (330) further comprises a cover plate (334), wherein the cover plate (334) is respectively connected to the second mounting plate (311) and the mounting frame (315); the cover plate (334) is provided with a second avoidance hole, and the second objective lens (316) passes through the second avoidance hole.

5. The position error identification and compensation device according to claim 3, characterized in that: The base (10) is provided with a first limiting plate (102), the first limiting plates (102) having two and arranged relatively spaced apart along the first direction, and the first mounting plate (101) is mounted on the base (10) via the first limiting plates (102); the first limiting plates (102) are provided with a first adjusting screw, and the first adjusting screw is used to adjust the gap between the first limiting plates (102) and the first mounting plate (101); And / or, the base (10) is provided with a second limit plate, the second limit plates are two and are arranged relatively spaced apart along the second direction, the first mounting plate (101) is mounted on the base (10) via the second limit plate, the second limit plate is provided with a second adjustment screw, and the second adjustment screw is used to adjust the gap between the second limit plate and the first mounting plate (101).

6. The position error identification and compensation device according to claim 1, characterized in that: The position error identification and compensation device also includes: A measuring tool (230) comprises a crossbeam (232), a driving assembly, a first imaging assembly (250) and a position detection assembly (260); the crossbeam (232) is detachably mounted on the end of the lower moving platform (20) and extends along the first direction; the driving assembly is mounted on the crossbeam (232); the first imaging assembly (250) is fixedly arranged at the power output end of the driving assembly; the driving assembly is used to drive the first imaging assembly (250) to move along the first direction to determine the relative position relationship between the first mark (221), the second mark (222), the third mark (223) and the fourth mark (224); and the position detection assembly (260) is used to detect the displacement of the first imaging assembly (250) along the first direction.

7. The position error identification and compensation device according to claim 6, characterized in that: The driving assembly comprises a guide rail (241), a connecting plate (242) and a linear motor (243); the guide rail (241) is fixedly arranged on the crossbeam (232) and extends along the first direction; the connecting plate (242) is slidably connected to the guide rail (241), and the first imaging assembly (250) is fixedly arranged on the connecting plate (242); the linear motor (243) is fixedly arranged on the crossbeam (232), and a power output end of the linear motor (243) is connected to the connecting plate (242) for driving the connecting plate (242) to drive the first imaging assembly (250) to move along the guide rail (241).

8. The position error identification and compensation device according to claim 7, characterized in that: The first imaging component (250) comprises a first optical path component (251), a first camera (252), a first light source (253) and a first objective lens (254); the first optical path component (251) is slidably connected to the connecting plate (242) along a vertical direction; the first camera (252) is fixedly arranged on one side of the first optical path component (251); the first light source (253) is fixedly arranged on the other side of the first optical path component (251); and the first objective lens (254) is arranged below the first optical path component (251) and is coaxial with the first optical path component (251).

9. The position error identification and compensation device according to claim 7, characterized in that: The position detection component (260) comprises a reading head (261) and a grating ruler (262); the grating ruler (262) is fixed to the crossbeam (232) and is located on one side of the guide rail (241); the reading head (261) is fixed to the connecting plate (242).

10. The position error identification and compensation device according to claim 6, characterized in that: A bottom plate (231) is fixedly provided at the lower end of the crossbeam (232), and the bottom plate (231) is detachably connected to the download platform (210).

Images