Fixing mechanism for semiconductor diamond production

Abstract

The utility model relates to the technical field of machining auxiliary fixing, in particular to a fixing mechanism for semiconductor diamond production, which comprises a fixing back plate, and supporting side plates are fixed at the front ends of the left side and the right side of the fixing back plate; a fine adjustment lead screw is assembled between the two sets of supporting side plates through a bearing in a supporting mode, the two sides of the fine adjustment lead screw are in threaded connection with a left sliding base and a right sliding base which are symmetrically arranged, threads on the two sides of the fine adjustment lead screw are symmetrically and oppositely arranged, and fixing chucks are assembled and supported at the front ends of the left sliding base and the right sliding base through bending assemblies. And the fixed chuck, the bent component, the left sliding seat and the right sliding seat are supported and assembled through an expansion cylinder wall, and a micro-rotation clamping arm is further assembled between the bent component and the fixed chuck. According to the utility model, semiconductor diamonds with different specifications can be conveniently adjusted, clamped, fixed and finely adjusted according to processing requirements, so that the use is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of machining auxiliary fixing, in particular to a fixing mechanism for semiconductor diamond production. Background Art

[0002] Diamond semiconductors have excellent properties such as high voltage resistance. It is believed that power loss can be reduced to one fifty thousandth of that of silicon products. Diamond power semiconductors are also highly heat-resistant and radiation-resistant. The CVD method for preparing artificial diamonds is generally considered to be the best material for preparing the next generation of high-power, high-frequency, high-temperature and low-power loss electronic devices due to its many advantages such as high voltage resistance, large radio frequency, low cost and high temperature resistance. It is divided into polycrystalline diamond and single crystal diamond according to the different atomic arrangements. CVD artificial diamonds can be made into large-area single crystal wafers by wafer splicing. As a semiconductor chip substrate, it can solve the heat dissipation problem and utilize the many super-excellent physical and chemical properties of diamond to manufacture semiconductors. During processing, the material needs to be fixed and clamped for processing operations.

[0003] In this regard, China has applied for patent number: CN202322305779.5, which discloses a single crystal diamond surface cleaning device for CVD semiconductors, including a box body, a partition is fixedly connected to the middle of the inner cavity of the box body, and the inner cavity of the box body is divided into two cavities, a cleaning chamber and a drying chamber, by the partition. This application puts the single crystal diamond into the inner cavity of the cleaning chamber through the feed port through the coordination of the rotating shaft, the stirring rod, the partition net and other structures, and drives the rotating shaft to rotate by the first motor so that the stirring rod stirs the single crystal diamond, so that the single crystal diamond can be cleaned more fully. After cleaning, the water barrier can be pulled to discharge the sewage through the sponge pad into the bottom of the inner cavity of the cleaning chamber and discharged through the drain pipe. After the sewage is discharged, the baffle is pulled out, and the threaded rod is driven to rotate by the second motor so that the scraper pushes the single crystal diamond into the inner cavity of the drying chamber, and the single crystal diamond is collected by rolling into the storage box through the first brush plate.

[0004] However, it is inconvenient to adjust, clamp, fix and assist fine-tune semiconductor diamonds of different specifications according to processing needs in existing processing devices, which affects the operating efficiency;

[0005] Therefore, in order to solve the above-mentioned problems, a fixing mechanism for semiconductor diamond production is proposed. Utility Model Content

[0006] The purpose of the utility model is to provide a fixing mechanism for semiconductor diamond production, so as to solve the problem that the existing processing device proposed in the above background technology is inconvenient to adjust, clamp, fix and assist fine-tune semiconductor diamonds of different specifications according to processing needs, thereby affecting the operating efficiency.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: A fixing mechanism for semiconductor diamond production, comprising a fixing back plate, wherein the front ends of the left and right sides of the fixing back plate are fixed with supporting side plates;

[0008] A fine-tuning screw is assembled between the two groups of supporting side plates through bearing supports, and the fine-tuning screw is threadedly connected to a symmetrically arranged left slide and right slide on both sides, and the threads on both sides of the fine-tuning screw are symmetrically and oppositely arranged, and the front ends of the left slide and the right slide are assembled and supported with a fixed chuck through a bending component, and the fixed chuck, the bending component and the left slide and the right slide are assembled and supported by the extended cylinder wall, and a micro-rotation clamp arm is also assembled between the bending component and the fixed chuck.

[0009] Preferably, a support slide rod is inserted through the rear side of the left slide and the right slide, and both ends of the support slide rod are fixed to the inner wall of the support side plate. Springs are sleeved on both sides of the support slide rod, and two groups of springs are respectively located between the inner wall of the support side plate and the left slide and between the inner wall of the support side plate and the outer wall of the right slide.

[0010] Preferably, a rotating shaft is installed in the center of the back of the fixed back plate through a bearing insertion, a mounting plate is fixed to the rear end of the rotating shaft, an outer rotating plate is fixed to the front end of the rotating shaft, the outer rotating plate is located on the front side of the fixed back plate, and a positioning pin is threadedly connected to the side of the outer rotating plate, the inner end of the positioning pin abuts against the front side wall of the fixed back plate, an inner ring half is provided on the rear side of the fixed back plate, and the inner ring half is fixed on the surface of the rotating shaft, and an assembly hole is opened inside the side of the mounting plate.

[0011] Preferably, the side of the expansion cylinder wall is equipped with a docking center beam, and the side of the docking center beam, the side of the bending assembly, the side of the fixed clamp, the front end of the left slide seat and the front end of the right slide seat are all provided with the same docking plug, and the side of the expansion cylinder wall and the side of the micro-rotation clamp arm are both provided with docking slots corresponding to the docking plugs, and the docking plugs are inserted into the docking slots and assembled and fixed by self-tapping screws.

[0012] Preferably, the cross-sections of the docking plug and the docking slot are both hexagonal, the docking center beam and the sides of the bending assembly are both glued and fixed with washers, and the outer end of the fixing clamp is fixedly equipped with a hollow clamp ring frame.

[0013] Preferably, the micro-rotation clamp arm comprises a side rotating cylinder and a side fixed cylinder, and an inner shaft column is fixed to the inner end of the side fixed cylinder, the inner shaft column is inserted into the inner end of the side rotating cylinder, and an inner shaft column is fixed on the surface of the inner shaft column, and the outer ring of the inner shaft column is fixed to the inner wall of the side rotating cylinder.

[0014] Preferably, an inner bearing is threadedly inserted into the outer wall of the inner end of the side fixed cylinder, and the inner side of the inner bearing is inserted inside the outer wall of the inner end of the side rotating cylinder, and the outer wall of the inner end of the side rotating cylinder is evenly provided with limiting holes corresponding to the limiting pins.

[0015] Preferably, the outer ends of both sides of the fine-tuning screw are assembled with turning handles through bolts, the outer side of the turning handle is assembled with a turning rod, and the inner end of the turning rod is integrally provided with a fastening screw pin, the fastening screw pin is threadedly inserted into the side of the turning handle, and the inner end of the fastening screw pin can be tightened to contact the outer wall of the supporting side plate.

[0016] Compared with the prior art, the utility model has the following beneficial effects: the utility model is convenient for adjusting, clamping, fixing and assisting fine adjustment of semiconductor diamonds of different specifications according to processing needs, making it more convenient to use;

[0017] 1. The utility model is provided with a fine-tuning screw rod, which drives the left slide and the right slide to move relative to each other when rotating, so as to realize telescoping and expansion, so as to drive the bending assembly and the fixed chuck to clamp and fix semiconductor diamond materials of different specifications, making subsequent processing operations more convenient and efficient. Through this design, the convenience and practicality of the fixing mechanism for semiconductor diamond production are improved.

[0018] 2. The utility model is provided with an expansion cylinder wall and a micro-rotation clamp arm, which facilitates the expansion and assembly of the left slide seat, the bending assembly and the fixed clamp head, and facilitates the increase or decrease of the expansion and assembly according to their scale, making it more convenient to use. Through this design, the convenience and practicality of the fixing mechanism for semiconductor diamond production are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a frontal perspective schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a side view cross-sectional stereoscopic schematic diagram of the overall structure of the utility model;

[0021] Figure 3 It is a side view cross-sectional stereoscopic schematic diagram of the local structure of the expansion cylinder wall of the utility model;

[0022] Figure 4 It is an exploded three-dimensional schematic diagram of the top view of the assembly of the local structure of the micro-rotating clamp arm of the utility model;

[0023] In the figure: 100, fixed back plate; 110, supporting side plate; 200, fine-tuning screw; 201, turning handle; 202, turning rod; 203, fastening screw; 210, left slide; 220, right slide; 230, bending assembly; 240, fixed clamp; 241, hollow clamp ring frame; 250, expansion cylinder wall; 251, docking middle beam; 252, docking plug; 253, docking slot; 254, gasket; 260, micro-turn clamp arm; 261, side rotating cylinder; 262, side fixed cylinder; 263, inner shaft column; 264, inner bearing; 265, limit pin; 266, limit socket; 270, supporting slide; 271, spring; 280, rotating shaft; 281, mounting plate; 282, outer rotating plate; 283, positioning pin; 284, inner ring half; 285, assembly hole. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-4 , an embodiment provided by the utility model:

[0026] A fixing mechanism for semiconductor diamond production includes a fixing back plate 100, and support side plates 110 are fixed to the front ends of the left and right sides of the fixing back plate 100;

[0027] A fine-tuning screw 200 is assembled between the two sets of supporting side plates 110 through bearing support, and the two sides of the fine-tuning screw 200 are threadedly connected with a symmetrically arranged left slide 210 and a right slide 220, and the threads on both sides of the fine-tuning screw 200 are symmetrically and oppositely arranged, and the front ends of the left slide 210 and the right slide 220 are assembled and supported with a fixed chuck 240 through a bending component 230, and the fixed chuck 240, the bending component 230 and the left slide 210 and the right slide 220 are supported and assembled through an expansion cylinder wall 250, and a fine-rotation clamp arm 260 is also assembled between the bending component 230 and the fixed chuck 240;

[0028] Furthermore, a support slide bar 270 is inserted and installed in the rear inner part of the left slide seat 210 and the right slide seat 220, and the two ends of the support slide bar 270 are fixed to the inner wall of the support side plate 110. Springs 271 are sleeved on both sides of the support slide bar 270, and the two groups of springs 271 are respectively located between the inner wall of the support side plate 110 and the left slide seat 210 and the inner wall of the support side plate 110 and the outer wall of the right slide seat 220. Through this design, it is convenient to assist the expansion of the left slide seat 210 and the right slide seat 220, making the expansion and contraction more convenient and stable, and making the subsequent use more convenient;

[0029] Furthermore, a rotating shaft 280 is installed in the center of the back of the fixed back plate 100 through a bearing insertion, a mounting plate 281 is fixed to the rear end of the rotating shaft 280, an outer rotating plate 282 is fixed to the front end of the rotating shaft 280, the outer rotating plate 282 is located at the front side of the fixed back plate 100, and a positioning pin 283 is threadedly connected to the side of the outer rotating plate 282, the inner end of the positioning pin 283 abuts against the front side wall of the fixed back plate 100, an inner ring half 284 is provided at the rear side of the fixed back plate 100, and the inner ring half 284 is fixed to the surface of the rotating shaft 280, and an assembly hole 285 is opened inside the side of the mounting plate 281. Through this design, it is convenient to support and assemble the fixed back plate 100 and to assist in fine-tuning the assembly and limiting.

[0030] Furthermore, the side of the expansion cylinder wall 250 is equipped with a docking middle beam 251, and the side of the docking middle beam 251, the side of the bending component 230, the side of the fixing clamp 240, the front end of the left slide 210 and the front end of the right slide 220 are all provided with the same docking plug 252, and the side of the expansion cylinder wall 250 and the side of the micro-rotation clamp arm 260 are both provided with a docking slot 253 corresponding to the docking plug 252, and the docking plug 252 is inserted into the docking slot 253 and assembled and fixed by self-tapping screws. Through this design, it is convenient to relatively insert and assemble the bending component 230, the fixing clamp 240 and the left slide 210 and the right slide 220, making the expansion use more convenient;

[0031] Furthermore, the cross-sections of the docking plug 252 and the docking slot 253 are both hexagonal, the sides of the docking middle beam 251 and the bending assembly 230 are both glued and fixed with washers 254, and the outer end of the fixing clamp 240 is fixedly equipped with a hollow clamp ring frame 241. Through this design, it is easy to insert and limit, making the subsequent support and clamping more convenient;

[0032] Furthermore, the micro-rotating clamp arm 260 comprises a side rotating cylinder 261 and a side fixed cylinder 262, and an inner shaft column 263 is fixed to the inner end of the side fixed cylinder 262, the inner shaft column 263 is inserted into the inner end of the side rotating cylinder 261, and an inner shaft column 263 is fixed to the surface of the inner shaft column 263, and the outer ring of the inner shaft column 263 is fixed to the inner wall of the side rotating cylinder 261. Through this design, the auxiliary rotation of the micro-rotating clamp arm 260 is facilitated, so that it is easy to rotate and fine-tune after clamping, making it more convenient to use;

[0033] Furthermore, an inner bearing 264 is threadedly inserted into the outer wall of the inner end of the side fixed cylinder 262, and the inner side of the inner bearing 264 is inserted inside the inner wall of the inner end of the side rotating cylinder 261, and the inner wall of the inner end of the side rotating cylinder 261 is evenly provided with limiting holes 266 corresponding to the limiting pins 265. Through this design, it is convenient to perform limiting support when rotation is not required, and it is convenient for stable fixed assembly processing;

[0034] Furthermore, the outer ends of both sides of the fine-tuning screw 200 are assembled with a turning handle 201 through bolts, the outer side of the turning handle 201 is assembled with a turning rod 202, and the inner end of the turning rod 202 is integrally provided with a fastening screw 203, the fastening screw 203 is threadedly inserted into the inside of the side of the turning handle 201, and the inner end of the fastening screw 203 can be tightened to contact the outer wall of the supporting side plate 110, so as to facilitate the rotation and limiting of the fine-tuning screw 200.

[0035] Working principle: When assembled and used, the fixed back plate 100 is assembled in a suitable position of the processing machine through the relevant bolts under the cooperation of the mounting plate 281 and the assembly hole 285. For example, when cleaning processing is required, it is assembled inside the cleaning frame. When grinding and shearing are required, it can also be assembled in a suitable position to fix and clamp the semiconductor diamond material for subsequent processing. When in use, the expansion of the barrel wall 250 and the docking middle beam 251 can be carried out under the cooperation of the docking slot 253 and the docking plug 252 to expand the bending assembly 230, the fixed clamp 240 and the micro-rotation clamp arm 260, so as to facilitate the auxiliary For clamping materials of different specifications, further, through the cooperation of the turning handle 201 and the turning rod 202, it is convenient to rotate the fine-tuning screw rod 200, and then tighten the turning rod 202 to contact the outer wall of the supporting side plate 110 with the cooperation of the fastening screw pin 203, so as to keep it motionless, making subsequent operations more convenient. When fine-tuning rotation is required, the micro-turn clamping arm 260 can be used to facilitate rotation with the cooperation of the side rotating cylinder 261 and the side fixed cylinder 262, and the inclination angle of the fixed back plate 100 can also be adjusted with the assistance of the rotating shaft 280 and the outer turntable 282, making it more convenient to use. The operation ends here.

[0036] The above description is only a preferred embodiment of the utility model and does not limit the utility model in any form. Any ordinary technician in the industry can smoothly implement the utility model as shown in the drawings of the specification and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the utility model using the technical content disclosed above are all equivalent embodiments of the utility model. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the utility model are still within the protection scope of the technical solution of the utility model.

Claims

1. A fixing mechanism for semiconductor diamond production, comprising a fixing back plate (100), wherein the front ends of the left and right sides of the fixing back plate (100) are fixed with supporting side plates (110); Features: A fine-tuning screw (200) is assembled between the two groups of supporting side plates (110) through bearing support, and the fine-tuning screw (200) is threadedly connected to a symmetrically arranged left slide seat (210) and a right slide seat (220) on both sides, and the threads on both sides of the fine-tuning screw (200) are symmetrically arranged in opposite directions. The front ends of the left slide seat (210) and the right slide seat (220) are assembled and supported with a fixed chuck (240) through a bending component (230), and the fixed chuck (240), the bending component (230) and the left slide seat (210) and the right slide seat (220) are supported and assembled through an expansion cylinder wall (250), and a fine-rotation clamp arm (260) is also assembled between the bending component (230) and the fixed chuck (240).

2. A fixing mechanism for semiconductor diamond production according to claim 1, characterized in that: A support slide bar (270) is inserted and installed through the rear interior of the left slide seat (210) and the right slide seat (220), and both ends of the support slide bar (270) are fixed to the inner wall of the support side plate (110). Springs (271) are sleeved on both sides of the support slide bar (270), and two groups of springs (271) are respectively located between the inner wall of the support side plate (110) and the left slide seat (210) and between the inner wall of the support side plate (110) and the outer wall of the right slide seat (220).

3. A fixing mechanism for semiconductor diamond production according to claim 1, characterized in that: A rotating shaft (280) is installed in the center of the back of the fixed back plate (100) through a bearing insertion, a mounting plate (281) is fixed to the rear end of the rotating shaft (280), an outer rotating plate (282) is fixed to the front end of the rotating shaft (280), the outer rotating plate (282) is located at the front side of the fixed back plate (100), and a positioning pin (283) is threadedly connected to the side of the outer rotating plate (282), the inner end of the positioning pin (283) abuts against the front side wall of the fixed back plate (100), an inner ring half (284) is provided on the rear side of the fixed back plate (100), and the inner ring half (284) is fixed to the surface of the rotating shaft (280), and an assembly hole (285) is opened inside the side of the mounting plate (281).

4. A fixing mechanism for semiconductor diamond production according to claim 1, characterized in that: The side of the expansion cylinder wall (250) is equipped with a docking middle beam (251), and the side of the docking middle beam (251), the side of the bending assembly (230), the side of the fixing clamp (240), the front end of the left slide seat (210) and the front end of the right slide seat (220) are all provided with the same docking plug (252), and the side of the expansion cylinder wall (250) and the side of the micro-rotation clamp arm (260) are both provided with a docking slot (253) corresponding to the docking plug (252), and the docking plug (252) is inserted into the docking slot (253) and assembled and fixed by self-tapping screws.

5. A fixing mechanism for semiconductor diamond production according to claim 4, characterized in that: The docking plug (252) and the docking slot (253) are both hexagonal in cross-section, washers (254) are glued and fixed to the sides of the docking center beam (251) and the bending assembly (230), and a hollow clamp ring frame (241) is fixedly mounted on the outer end of the fixing clamp (240).

6. A fixing mechanism for semiconductor diamond production according to claim 1, characterized in that: The micro-rotating clamp arm (260) comprises a side rotating cylinder (261) and a side fixed cylinder (262), and an inner shaft column (263) is fixed to the inner end of the side fixed cylinder (262), the inner shaft column (263) is inserted into the inner end of the side rotating cylinder (261), and an inner shaft column (263) is fixed to the surface of the inner shaft column (263), and the outer ring of the inner shaft column (263) is fixed to the inner wall of the side rotating cylinder (261).

7. A fixing mechanism for semiconductor diamond production according to claim 6, characterized in that: An inner bearing (264) is threadedly inserted into the outer wall of the inner end of the side fixed cylinder (262), and the inner side of the inner bearing (264) is inserted inside the outer wall of the inner end of the side rotating cylinder (261), and the outer wall of the inner end of the side rotating cylinder (261) is evenly provided with limit insertion holes (266) corresponding to the limit pins (265).

8. The fixing mechanism for semiconductor diamond production according to claim 1, characterized in that: The outer ends of both sides of the fine-tuning screw rod (200) are assembled with a turning handle (201) by means of bolts, the outer side of the turning handle (201) is assembled with a turning rod (202), and the inner end of the turning rod (202) is integrally provided with a fastening screw pin (203), the fastening screw pin (203) is threadedly inserted inside the side of the turning handle (201), and the inner end of the fastening screw pin (203) can be tightened to abut against the outer wall of the supporting side plate (110).

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