Conveying device for silicon wafer scribing

Abstract

The utility model relates to the technical field of silicon wafer scribing processing, and discloses a transmission device for silicon wafer scribing, which comprises a transmission device body, the front surface of the transmission device body is fixedly connected with a first frame, the surface of the first frame is symmetrically provided with fixed clamping grooves, the surface of the first frame is symmetrically provided with fixed positioning mechanisms, and the fixed clamping grooves are fixedly connected with the transmission device body. According to the silicon wafer conveying device, the top of the conveying device body can be shielded by arranging the connecting dustproof cover, dust in air on the outer side is prevented from contaminating the surface of a scribed silicon wafer, and meanwhile the position of the fixing clamping groove can be fixed through the fixing positioning mechanism; and therefore, the positions of the connecting mounting insertion block and the connecting dust cover can be limited and fixed, the connecting dust cover can be stably located at the top of the conveying device body to be used, and operation is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer slicing processing, and more specifically to a transmission device for silicon wafer slicing. Background Art

[0002] The silicon wafer dicing process refers to the process of mechanically dividing silicon wafers into wafers of different sizes. It is also an important part of semiconductor manufacturing. After the silicon wafer dicing process is completed, it is usually necessary to use a transmission device for transportation and processing.

[0003] The existing transmission device can mainly transport through a conveyor belt, but it is usually in a direct exposed state. However, in actual use, there cannot be dust or impurities on the surface of the silicon wafer after dicing, and the silicon wafer dicing cannot be isolated from the external environment. For this reason, we propose a transmission device for silicon wafer dicing. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a transmission device for silicon wafer dicing to solve the problems existing in the above-mentioned background technology.

[0005] The utility model provides the following technical solution: a transmission device for silicon wafer dicing, comprising a transmission device body, a first frame is fixedly connected to the front surface of the transmission device body, a fixed card slot is symmetrically opened on the surface of the first frame, a fixed positioning mechanism is symmetrically arranged on the surface of the first frame, a connection card block is movably connected to the inner side of the fixed card slot, a connection installation plug block is fixedly connected to the surface of the connection card block, a connection dust cover is fixedly connected to the rear surface of the connection installation plug block, shielding curtains are arranged on the inner sides of both ends of the connection dust cover, and a transparent observation plate is arranged on the inner side of the top end of the connection dust cover;

[0006] Furthermore, the front surface of the connecting dust cover is fixedly connected to a fixed connecting pipe, a fixed support block is fixedly sleeved on the outer side of the surface of the fixed connecting pipe, one end of the fixed support block and the surface of the connecting dust cover are fixedly connected to each other, one end of the fixed connecting pipe is fixedly connected to an exhaust fan, and one side of the exhaust fan is fixedly connected to a filtering mechanism.

[0007] Furthermore, a connecting plug is fixedly connected to the rear surface of the connecting dust cover, and a second frame is fixedly connected to the rear surface of the transmission device body.

[0008] Furthermore, the fixed positioning mechanism includes a connecting sleeve block, the interior of the connecting sleeve block is movably connected to a movable positioning rod, the outer surface of the movable positioning rod is fixedly sleeved with a force ring, one side of the force ring is fixedly connected to a force spring, and one end of the movable positioning rod is fixedly connected to a connecting pull rod.

[0009] Furthermore, the outer side of the other end surface of the movable positioning rod is slidably fitted with the inside of the connecting block, and the outer side of the surface of the connecting block is fitted with the inner side of the fixed slot.

[0010] Furthermore, the filtering mechanism includes a connecting frame, a fixed slot is opened inside the connecting frame, a filter plate is movably connected to the inner side of the fixed slot, one end of the filter plate is fixedly connected to a connecting end block, the upper and lower ends of the connecting frame are fixedly connected to a limiting sleeve block, and bolts are connected between the connecting end block and the limiting sleeve block.

[0011] Furthermore, the outer side of the surface of the filter plate fits with the inner side of the fixing slot, and the outer side of the end surface of the connecting end block fits with the inner side of the limiting sleeve block.

[0012] Technical effects and advantages of the utility model:

[0013] 1. The utility model can shield the top of the transmission device body by providing a connection dust cover to prevent dust in the outside air from contaminating the surface of the silicon wafer dicing. At the same time, the fixed positioning mechanism can fix the position of the fixed card slot, and then limit and fix the position of the connection installation plug and the connection dust cover, so that the connection dust cover can be stably placed on the top of the transmission device body for use, which is easy to operate.

[0014] 2. The utility model is provided with a fixed connecting pipe, an exhaust fan and a filtering mechanism, and can transport external air to the inside of the connected dust cover through the exhaust fan, so that the internal air of the connected dust cover flows, and the inner side of the connected dust cover is in a dust-free state. At the same time, when the external air enters the inner side of the fixed connecting pipe through the exhaust fan, the external air can be filtered under the action of the filtering mechanism, and the operation is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 It is a schematic diagram of the exploded structure of the utility model.

[0017] Figure 3 This is a schematic diagram of the structure of the filtering mechanism of the utility model.

[0018] Figure 4 This is a structural schematic diagram of the fixed positioning mechanism of the utility model.

[0019] The accompanying drawings are marked as follows: 1. Transmission device body; 2. First frame; 3. Fixed card slot; 4. Fixed positioning mechanism; 5. Connecting card block; 6. Connecting mounting plug block; 7. Connecting dust cover; 8. Transparent observation panel; 9. Shielding curtain; 10. Fixed connecting pipe; 11. Fixed support block; 12. Exhaust fan; 13. Filter mechanism; 14. Connecting plug block; 15. Second frame; 16. Connecting sleeve block; 17. Movable positioning plug rod; 18. Force-bearing sleeve ring; 19. Force-bearing spring; 20. Connecting pull rod; 21. Connecting frame; 22. Fixed slot; 23. Filter plate; 24. Connecting end block; 25. Limiting sleeve block. DETAILED DESCRIPTION

[0020] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative, and the present invention is not limited to the various structures recorded in the following embodiments. All other implementations obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0021] Reference Figure 1-4 The utility model provides a transmission device for silicon wafer dicing, comprising a transmission device body 1, a first frame 2 is fixedly connected to the front surface of the transmission device body 1, a fixed card slot 3 is symmetrically opened on the surface of the first frame 2, a fixed positioning mechanism 4 is symmetrically arranged on the surface of the first frame 2, a connection card block 5 is movably connected to the inner side of the fixed card slot 3, a connection installation plug block 6 is fixedly connected to the surface of the connection card block 5, a connection dust cover 7 is fixedly connected to the rear surface of the connection installation plug block 6, shielding curtains 9 are arranged on the inner sides of both ends of the connection dust cover 7, and a transparent observation plate 8 is arranged on the inner side of the top of the connection dust cover 7;

[0022] Among them, a fixed connecting pipe 10 is fixedly connected to the front surface of the dust cover 7, a fixed supporting block 11 is fixedly sleeved on the outer side of the surface of the fixed connecting pipe 10, one end of the fixed supporting block 11 and the surface of the dust cover 7 are fixedly connected to each other, one end of the fixed connecting pipe 10 is fixedly connected to an exhaust fan 12, and one side of the exhaust fan 12 is fixedly connected to a filtering mechanism 13.

[0023] Among them, a connecting plug block 14 is fixedly connected to the rear surface of the connecting dust cover 7, and a second frame 15 is fixedly connected to the rear surface of the transmission device body 1, so that when the connecting dust cover 7 is located at the top of the transmission device body 1 for use, the connecting plug block 14 can be stably inserted into the inner side of the second frame 15, thereby limiting the connection.

[0024] Among them, the fixed positioning mechanism 4 includes a connecting sleeve block 16, the interior of the connecting sleeve block 16 is movably connected with a movable positioning rod 17, the outer surface of the movable positioning rod 17 is fixedly sleeved with a force-bearing ring 18, one side of the force-bearing ring 18 is fixedly connected with a force spring 19, and one end of the movable positioning rod 17 is fixedly connected with a connecting pull rod 20, which is convenient for pulling the connecting pull rod 20 to drive the movable positioning rod 17 and the force-bearing ring 18 to move, causing compression on the force spring 19, so that the end of the movable positioning rod 17 can be pulled out from the inside of the connecting block 5, thereby quickly disassembling the connecting block 5, the connecting installation block 6 and the connecting dust cover 7, and vice versa, they can also be quickly installed and used, and the operation is convenient.

[0025] Among them, the outer side of the other end surface of the movable positioning rod 17 slides and fits with the inside of the connecting block 5, and the outer side of the surface of the connecting block 5 fits with the inner side of the fixed slot 3, so that the end of the movable positioning rod 17 can be stably inserted into the inside of the connecting block 5, and the connecting block 5 can be stably inserted into the inner side of the fixed slot 3, thereby achieving a stable connection.

[0026] Among them, the filtering mechanism 13 includes a connecting frame 21, a fixed slot 22 is opened inside the connecting frame 21, a filter plate 23 is movably connected to the inner side of the fixed slot 22, one end of the filter plate 23 is fixedly connected to a connecting end block 24, and the upper and lower ends of the connecting frame 21 are fixedly connected to a limiting sleeve block 25, and bolts are connected between the connecting end block 24 and the limiting sleeve block 25, so that the filter plate 23 can be inserted into the inner side of the fixed slot 22, so that the connecting end block 24 can be stably sleeved on the outer side of the end surface of the connecting frame 21, so that the end of the connecting end block 24 can be inserted into the inner side of the limiting sleeve block 25, and connected and fixed by bolts, so that the filter plate 23 can filter the air, and the operation is convenient.

[0027] Among them, the outer surface of the filter plate 23 fits with the inner side of the fixed slot 22, and the outer surface of the end of the connecting end block 24 fits with the inner side of the limiting sleeve 25, so that the filter plate 23 can be stably inserted into the inner side of the fixed slot 22, and the end of the connecting end block 24 can be stably inserted into the inner side of the limiting sleeve 25, which is easy to operate.

[0028] The working principle of the utility model is as follows: during use, the connecting rod 20 is first pulled to drive the movable positioning rod 17 and the force-bearing ring 18 to move, compressing the force-bearing spring 19, so that one end of the movable positioning rod 17 can be retracted toward the inside of the connecting sleeve 16, and then the connecting dust cover 7 drives the connecting installation block 6, the connecting card block 5, and the connecting card block 14 to move, so that the connecting installation block 6 can be inserted into the inner side of the first frame 2, and the connecting card block 5 can be inserted into the inner side of the fixed card slot 3, and the connecting card block 14 can be inserted into the inner side of the second frame 15. At this time, the connecting rod 20 is released, and when the force-bearing ring 18 is acted upon by the force-bearing spring 19, the movable positioning rod 17 is driven to reset, so that one end of the movable positioning rod 17 can be stably inserted into the inside of the connecting card block 5, compressing the connecting card block 5, the connecting installation block 6 and the connecting dust cover The position of 7 is fixed, and in the process of transmitting the silicon wafer slicing, the external air is transported to the inside of the connecting dust cover 7 through the exhaust fan 12. At the same time, when the external air enters the inner side of the fixed connecting pipe 10 through the exhaust fan 12, the external air can be filtered under the action of the filter plate 23, so that the internal air of the connecting dust cover 7 flows, so that the inner side of the connecting dust cover 7 is in a dust-free state, and dust is prevented from being contaminated on the surface of the silicon wafer slicing. When it is necessary to clean the surface of the filter plate 23, the connecting bolts between the connecting end block 24 and the limiting sleeve block 25 are rotated and disassembled, and the end of the connecting end block 24 is pulled out from the inner side of the limiting sleeve block 25, so that the connecting end block 24 drives the filter plate 23 to move horizontally, so that the filter plate 23 can be pulled out from the inner side of the fixed slot 22, thereby disassembling and cleaning the filter plate 23, which is easy to operate.

[0029] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0030] Secondly: In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0031] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A transmission device for silicon wafer dicing, comprising a transmission device body (1), characterized in that: The front surface of the transmission device body (1) is fixedly connected to a first frame (2), the surface of the first frame (2) is symmetrically provided with fixed card slots (3), the surface of the first frame (2) is symmetrically provided with fixed positioning mechanisms (4), the inner side of the fixed card slot (3) is movably connected to a connecting card block (5), the surface of the connecting card block (5) is fixedly connected to a connecting installation block (6), the rear surface of the connecting installation block (6) is fixedly connected to a connecting dust cover (7), the inner sides of both ends of the connecting dust cover (7) are provided with shielding curtains (9), and the inner side of the top end of the connecting dust cover (7) is provided with a transparent observation panel (8).

2. A silicon wafer dicing transmission device according to claim 1, characterized in that: The front surface of the connecting dust cover (7) is fixedly connected to a fixed connecting pipe (10), the outer side of the surface of the fixed connecting pipe (10) is fixedly sleeved with a fixed support block (11), one end of the fixed support block (11) and the surface of the connecting dust cover (7) are fixedly connected to each other, one end of the fixed connecting pipe (10) is fixedly connected to an exhaust fan (12), and one side of the exhaust fan (12) is fixedly connected to a filtering mechanism (13).

3. The silicon wafer dicing transmission device according to claim 1, characterized in that: A connecting plug block (14) is fixedly connected to the rear surface of the connecting dust cover (7), and a second frame (15) is fixedly connected to the rear surface of the transmission device body (1).

4. The silicon wafer dicing transmission device according to claim 1, characterized in that: The fixed positioning mechanism (4) comprises a connecting sleeve (16), the interior of the connecting sleeve (16) is movably connected to a movable positioning rod (17), the outer surface of the movable positioning rod (17) is fixedly sleeved with a force-bearing ring (18), one side of the force-bearing ring (18) is fixedly connected to a force-bearing spring (19), and one end of the movable positioning rod (17) is fixedly connected to a connecting pull rod (20).

5. A silicon wafer dicing transmission device according to claim 4, characterized in that: The outer side of the other end surface of the movable positioning rod (17) is slidably fitted with the inside of the connecting block (5), and the outer side of the surface of the connecting block (5) is fitted with the inner side of the fixed slot (3).

6. The silicon wafer dicing transmission device according to claim 2, characterized in that: The filtering mechanism (13) comprises a connecting frame (21), a fixed slot (22) is provided inside the connecting frame (21), a filter plate (23) is movably connected to the inner side of the fixed slot (22), one end of the filter plate (23) is fixedly connected to a connecting end block (24), the upper and lower ends of the connecting frame (21) are fixedly connected to a limiting sleeve block (25), and bolts are connected between the connecting end block (24) and the limiting sleeve block (25).

7. The silicon wafer dicing transmission device according to claim 6, characterized in that: The outer surface of the filter plate (23) is in contact with the inner side of the fixed slot (22), and the outer surface of the end of the connecting end block (24) is in contact with the inner side of the limiting sleeve block (25).

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