Sealing structure of magnetron sputtering equipment

Abstract

The utility model relates to a magnetron sputtering equipment sealing structure which comprises supporting legs, a sealing box and a sealing door, a mounting groove is formed in the side wall of the sealing door, a sealing ring is arranged in the mounting groove, an L-shaped plate is fixed to the sealing door, a mounting plate is fixed to the inner top wall of the sealing box, a rotating shaft is rotatably connected to the side wall of the mounting plate, and a locking disc is fixed to one end of the rotating shaft. The locking disc is provided with an installation opening for the L-shaped plate to penetrate through, the thickness of the locking disc is gradually increased from one side of the installation opening to the other side of the installation opening in the circumferential direction of the installation opening, a driving assembly is installed on the sealing box, after the sealing door is closed, the L-shaped plate on the sealing door penetrates through the installation opening in the locking disc, and a worker drives the locking disc to rotate through the driving assembly. The locking disc is arranged on the sealing box, so that the locking disc moves the L-shaped plate towards the interior of the sealing box in the rotating process, the sealing door presses the sealing box and abuts against the sealing ring, the sealing performance between the sealing door and the sealing box is improved, and the probability that external dust, gas and the like enter the sealing box to affect the vacuum coating quality is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a sealing structure of magnetron sputtering equipment. Background Art

[0002] Magnetron sputtering is a physical vapor deposition technology that introduces a magnetic field on the target cathode surface and uses the magnetic field to confine charged particles to increase the plasma density and the sputtering rate. This technology has the advantages of simple equipment, easy control, large coating area and strong adhesion, and is particularly suitable for the preparation of metals, semiconductors, insulators and other materials.

[0003] A Chinese utility model patent with publication number CN210341046U discloses a magnetron sputtering device with opposed targets, including a box body and a sealed door, which is movably connected to the box body by hinges; a fixing mechanism is installed inside the box body, and the fixing mechanism includes a fixing plate and an arc-shaped fixing frame, the fixing plate is horizontally installed inside the box body, and the arc-shaped fixing frame is vertically installed at the middle position of the top of the fixing plate, and two identical fixing mechanisms are installed on the inner bottom and inner top of the box body.

[0004] Regarding the above-mentioned related technologies, the inventor believes that the following defects exist: the above-mentioned patent only lacks a reinforcement structure for the sealing door. Since magnetron sputtering is carried out in a vacuum environment, if the sealing of the magnetron sputtering equipment box is not good, external dust, gas, etc. will enter the box and affect the vacuum environment, thereby affecting the quality of vacuum coating. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a sealing structure of a magnetron sputtering device.

[0006] The above-mentioned technical purpose of the utility model is achieved through the following technical solutions: a sealing structure of a magnetron sputtering equipment, comprising a plurality of supporting legs, a sealing box on the top ends of the supporting legs, and a sealing door connected to the sealing box by a hinge, the side wall of the sealing door is provided with an installation groove, a sealing ring is arranged in the installation groove, an L-shaped plate is fixed on the sealing door, a mounting plate is fixed on the top wall of the sealing box, a rotating shaft is rotatably connected to the side wall of the mounting plate, a locking disk is fixed on the end of the rotating shaft away from the mounting plate, a mounting opening for the L-shaped plate to pass through is opened on the locking disk, the thickness of the locking disk gradually increases from one side of the mounting opening along the circumference of the mounting opening to the other side of the mounting opening, and a driving component for driving the rotating shaft to rotate is installed on the sealing box.

[0007] By adopting the above technical scheme, the sealing ring is made of rubber material with good sealing performance. After closing the sealing door, the L-shaped plate on the sealing door passes through the installation port on the locking disk, and the staff drives the rotating shaft to rotate through the driving assembly, thereby causing the locking disk to rotate. Since the thickness of the locking disk gradually increases along the circumference of the installation port from one side of the installation port to the other side of the installation port, the locking disk moves the L-shaped plate toward the inside of the sealing box during rotation, thereby causing the sealing door to press the sealing box and press against the sealing ring, thereby improving the sealing between the sealing door and the sealing box, and reducing the probability of external dust, gas, etc. entering the sealing box and affecting the quality of vacuum coating.

[0008] Furthermore, the driving assembly includes a driving motor fixed to the upper surface of the sealing box, the output shaft of the driving motor passes through the upper surface of the sealing box and is rotatably connected, and the driving assembly also includes a driving bevel gear fixed to the end of the output shaft of the driving motor and a driven bevel gear fixedly sleeved on the rotating shaft and meshing with the driving bevel gear.

[0009] By adopting the above technical solution, when the locking disk needs to be rotated, the staff only needs to drive the active bevel gear to rotate through the driving motor, so that the driven bevel gear meshing with the active bevel gear and the rotating shaft fixed to the driven bevel gear rotate, thereby driving the locking disk to rotate to lock the sealing door, which is convenient for locking or opening the sealing door.

[0010] Furthermore, a limiting plate is fixed to the side wall of the locking disk close to the mounting plate, and the limiting plate is arranged on the thicker side close to the mounting opening.

[0011] By adopting the above technical solution and setting the limit plate, the range of rotation of the L-shaped plate on the locking plate is limited, thereby preventing the L-shaped plate from falling off from the thicker side of the installation opening.

[0012] Furthermore, a rounded corner is provided at the intersection between the side wall of the locking disk and the inner wall of the installation opening.

[0013] By adopting the above technical solution, the rounded corners are provided, which reduces the difficulty of the L-shaped plate passing through the installation opening, and is conducive to aligning the L-shaped plate with the installation opening and passing it through.

[0014] Furthermore, a protective shell for covering the driving bevel gear and the driven bevel gear is fixed to the top wall of the sealing box and the side wall of the mounting plate, and the rotating shaft passes through the side wall of the protective shell and is rotatably connected.

[0015] By adopting the above technical solution, the protective shell protects the driving bevel gear and the driven bevel gear, reducing the probability of the driving bevel gear and the driven bevel gear being damaged by external forces such as accidental contact.

[0016] Furthermore, an extension plate is fixed to the side wall of the sealing door, and the side wall of the extension plate abuts against the outer wall of the sealing box.

[0017] By adopting the above technical solution and arranging the extension plate, the extension plate abuts against the sealing outer wall after the sealing door is closed, thereby enhancing the sealing performance of the sealing door to the sealing box.

[0018] Furthermore, the cross section of the sealing ring is elliptical.

[0019] By adopting the above technical solution, the elliptical cross section of the sealing ring increases the contact area between the sealing ring and the sealing door, thereby enhancing the sealing effect of the sealing ring.

[0020] Furthermore, a protective cover for covering the driving motor is provided on the upper surface of the sealing box.

[0021] By adopting the above technical solution, the protective cover protects the drive motor, thereby reducing the probability of the drive motor being damaged under the action of external force.

[0022] In summary, the utility model has the following beneficial effects:

[0023] 1. In the present application, the sealing ring is made of rubber material, and the material has good sealing performance. After the sealing door is closed, the L-shaped plate on the sealing door passes through the installation opening on the locking disk. The staff drives the rotating shaft to rotate through the driving assembly, so that the locking disk rotates. Since the thickness of the locking disk gradually increases from one side of the installation opening along the circumference of the installation opening to the other side of the installation opening, the locking disk moves the L-shaped plate toward the inside of the sealing box during the rotation process, so that the sealing door presses the sealing box and presses the sealing ring, thereby improving the sealing between the sealing door and the sealing box, and reducing the probability of external dust, gas, etc. entering the sealing box to affect the quality of vacuum coating;

[0024] 2. In the present application, when the locking disk needs to be rotated, the staff only needs to drive the active bevel gear to rotate through the driving motor, so that the driven bevel gear meshing with the active bevel gear and the rotating shaft fixed to the driven bevel gear rotate, thereby driving the locking disk to rotate to lock the sealing door, which is convenient for locking or opening the sealing door;

[0025] 3. In the present application, the setting of the limit plate limits the range of rotation of the L-shaped plate on the locking plate, thereby preventing the L-shaped plate from falling off from the thicker side of the installation opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0027] Figure 2 It is a schematic cross-sectional structure diagram of an embodiment of the utility model;

[0028] Figure 3 It is a schematic diagram of the structure of the locking disk in the embodiment of the utility model.

[0029] In the figure: 1. support leg; 2. sealing box; 21. mounting groove; 3. sealing door; 4. sealing ring; 5. L-shaped plate; 6. mounting plate; 7. rotating shaft; 8. locking plate; 81. mounting port; 82. fillet; 9. driving assembly; 91. driving motor; 92. driving bevel gear; 93. driven bevel gear; 10. limiting plate; 11. protective shell; 12. extension plate; 13. protective cover. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0031] like Figure 1-3 As shown, an embodiment of the present application discloses a sealing structure of a magnetron sputtering device, including a support leg 1, a sealing box 2, a sealing door 3, a sealing ring 4, an L-shaped plate 5, a mounting plate 6, a rotating shaft 7, a locking disk 8 and a driving assembly 9.

[0032] The supporting leg 1 is a rectangular parallelepiped structure, and a plurality of supporting legs 1 are provided. The sealed box 2 is a rectangular parallelepiped box structure, and the sealed box 2 is fixed to the upper ends of the plurality of supporting legs 1. One side of the sealed box 2 is open, and a mounting groove 21 is provided on the side wall of the sealed box 2. The sealed door 3 is a rectangular parallelepiped structure, and the sealed door 3 is connected to the sealed box 2 by a hinge. The sealing ring 4 is a sealing ring 4 made of rubber material, and the sealing ring 4 is arranged in the mounting groove 21. The L-shaped plate 5 is a plate-like structure with an L-shaped cross section, and the L-shaped plate 5 is fixed to the sealed door 3. The mounting plate 6 is a rectangular plate-like structure, and the mounting plate 6 is fixed to the inner top wall of the sealed box 2. The rotating shaft 7 is a horizontally arranged round rod-like structure, and the rotating shaft 7 is rotatably connected to the side wall of the mounting plate 6. The locking disk 8 is a disc-shaped structure. The locking disk 8 is fixed to one end of the rotating shaft 7 away from the mounting plate 6. A mounting opening 81 is opened on the locking disk 8 for the L-shaped plate 5 to pass through. The thickness of the locking disk 8 gradually increases from one side of the mounting opening 81 along the circumference of the mounting opening 81 to the other side of the mounting opening 81.

[0033] The driving assembly 9 is installed on the sealing box 2 and is used to drive the rotating shaft 7 to rotate. The driving assembly 9 includes a driving motor 91, a driving bevel gear 92 and a driven bevel gear 93. The driving motor 91 is fixed on the upper surface of the sealing box 2, and the output shaft of the driving motor 91 passes through the upper surface of the sealing box 2 and is rotatably connected. The driving bevel gear 92 is fixed to the end of the output shaft of the driving motor 91, and the axis of the driving bevel gear 92 coincides with the axis of the output shaft of the driving motor 91. The driven bevel gear 93 is fixedly sleeved on the rotating shaft 7, and the driven bevel gear 93 is meshed with the driving bevel gear 92, and the driven bevel gear 93 is meshed with the driving bevel gear 92.

[0034] The sealing ring 4 is made of rubber material, and its material has good sealing performance. After closing the sealing door 3, the L-shaped plate 5 on the sealing door 3 passes through the installation port 81 on the locking disk 8, and the staff drives the active bevel gear 92 to rotate through the driving motor 91, so that the driven bevel gear 93 meshing with the active bevel gear 92 and the rotating shaft 7 fixed to the driven bevel gear 93 rotate, thereby rotating the locking disk 8. Since the thickness of the locking disk 8 gradually increases from one side of the installation port 81 along the circumference of the installation port 81 to the other side of the installation port 81, the locking disk 8 moves the L-shaped plate 5 toward the inside of the sealing box 2 during the rotation process, so that the sealing door 3 presses the sealing box 2 and presses against the sealing ring 4, thereby improving the sealing between the sealing door 3 and the sealing box 2, and reducing the probability of external dust, gas, etc. entering the sealing box 2 and affecting the quality of vacuum coating.

[0035] In order to prevent the L-shaped plate 5 from falling off from the thicker side of the mounting opening 81, a limiting plate 10 is fixed to the side wall of the locking plate 8 close to the mounting plate 6. The limiting plate 10 is arranged on the thicker side close to the mounting opening 81. The setting of the limiting plate 10 limits the range of rotation of the L-shaped plate 5 on the locking plate 8, thereby preventing the L-shaped plate 5 from falling off from the thicker side of the mounting opening 81.

[0036] In order to facilitate the L-shaped plate 5 to be aligned with the installation opening 81 and pass through, a rounded corner 82 is provided at the intersection between the side wall of the locking plate 8 and the inner wall of the installation opening 81. The provision of the rounded corner 82 reduces the difficulty of the L-shaped plate 5 passing through the installation opening 81, thereby facilitating the L-shaped plate 5 to be aligned with the installation opening 81 and pass through.

[0037] In order to protect the active bevel gear 92 and the driven bevel gear 93, a protective shell 11 for covering the active bevel gear 92 and the driven bevel gear 93 is fixed to the inner top wall of the sealing box 2 and the side wall of the mounting plate 6. The rotating shaft 7 passes through the side wall of the protective shell 11 and is rotatably connected. The protective shell 11 protects the active bevel gear 92 and the driven bevel gear 93, thereby reducing the probability of damage to the active bevel gear 92 and the driven bevel gear 93 due to external forces such as accidental contact.

[0038] In order to enhance the sealing performance of the sealing door 3 to the sealing box 2, an extension plate 12 is fixed to the side wall of the sealing door 3, and the side wall of the extension plate 12 abuts against the outer wall of the sealing box 2. The setting of the extension plate 12 enables the extension plate 12 to abut against the sealed outer wall after the sealing door 3 is closed, thereby enhancing the sealing performance of the sealing door 3 to the sealing box 2.

[0039] In order to enhance the sealing effect of the sealing ring 4 , the cross section of the sealing ring 4 is elliptical. The elliptical cross section of the sealing ring 4 increases the contact area between the sealing ring 4 and the sealing door 3 , thereby enhancing the sealing effect of the sealing ring 4 .

[0040] In order to protect the driving motor 91 , a protective cover 13 for covering the driving motor 91 is provided on the upper surface of the sealing box 2 . The protective cover 13 protects the driving motor 91 , thereby reducing the probability of the driving motor 91 being damaged by external forces.

[0041] The use principle of a sealing structure of a magnetron sputtering device in this embodiment is as follows: the sealing ring 4 is made of rubber material, and its material has good sealing performance. After closing the sealing door 3, the L-shaped plate 5 on the sealing door 3 passes through the mounting opening 81 on the locking disk 8, and the staff drives the active bevel gear 92 to rotate through the driving motor 91, so that the driven bevel gear 93 meshing with the active bevel gear 92 and the rotating shaft 7 fixed to the driven bevel gear 93 rotate, thereby rotating the locking disk 8. Since the thickness of the locking disk 8 gradually increases from one side of the mounting opening 81 along the circumference of the mounting opening 81 to the other side of the mounting opening 81, the locking disk 8 moves the L-shaped plate 5 toward the inside of the sealing box 2 during the rotation process, so that the sealing door 3 presses the sealing box 2 and presses against the sealing ring 4, thereby improving the sealing between the sealing door 3 and the sealing box 2, and reducing the probability of external dust, gas, etc. entering the sealing box 2 and affecting the quality of vacuum coating.

[0042] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A sealing structure for a magnetron sputtering device, comprising a plurality of support legs (1), a sealing box (2) at the top of the support legs (1), and a sealing door (3) connected to the sealing box (2) by a hinge, wherein: The sealing door (3) has a side wall provided with a mounting groove (21), a sealing ring (4) is arranged in the mounting groove (21), an L-shaped plate (5) is fixed on the sealing door (3), a mounting plate (6) is fixed on the top wall of the sealing box (2), a rotating shaft (7) is rotatably connected to the side wall of the mounting plate (6), a locking plate (8) is fixed at one end of the rotating shaft (7) away from the mounting plate (6), a mounting opening (81) for the L-shaped plate (5) to pass through is provided on the locking plate (8), the thickness of the locking plate (8) gradually increases from one side of the mounting opening (81) along the circumference of the mounting opening (81) to the other side of the mounting opening (81), and a driving component (9) for driving the rotating shaft (7) to rotate is installed on the sealing box (2).

2. The sealing structure of a magnetron sputtering device according to claim 1, characterized in that: The driving assembly (9) comprises a driving motor (91) fixed to the upper surface of the sealing box (2), the output shaft of the driving motor (91) passing through the upper surface of the sealing box (2) and being rotatably connected, and the driving assembly (9) further comprises a driving bevel gear (92) fixed to the end of the output shaft of the driving motor (91) and a driven bevel gear (93) fixedly sleeved on the rotating shaft (7) and meshing with the driving bevel gear (92).

3. The sealing structure of a magnetron sputtering device according to claim 2, characterized in that: A limiting plate (10) is fixed to the side wall of the locking disk (8) close to the mounting plate (6), and the limiting plate (10) is arranged on the thicker side close to the mounting opening (81).

4. The sealing structure of a magnetron sputtering device according to claim 3, characterized in that: A rounded corner (82) is provided at the intersection between the side wall of the locking disk (8) and the inner wall of the mounting opening (81).

5. The sealing structure of a magnetron sputtering device according to claim 4, characterized in that: A protective shell (11) for covering a driving bevel gear (92) and a driven bevel gear (93) is fixed to the inner top wall of the sealing box (2) and the side wall of the mounting plate (6), and the rotating shaft (7) passes through the side wall of the protective shell (11) and is rotatably connected.

6. The sealing structure of a magnetron sputtering device according to claim 5, characterized in that: An extension plate (12) is fixed to the side wall of the sealing door (3), and the side wall of the extension plate (12) abuts against the outer wall of the sealing box (2).

7. The sealing structure of a magnetron sputtering device according to claim 1, characterized in that: The cross section of the sealing ring (4) is elliptical.

8. The sealing structure of a magnetron sputtering device according to claim 2, characterized in that: The upper surface of the sealing box (2) is provided with a protective cover (13) for covering the driving motor (91).

Images