Heat insulation structure of substrate table

Abstract

The utility model discloses a heat insulation structure of a substrate table, and relates to the technical field of semiconductor production, the heat insulation structure comprises a mounting rack, a heater and a heat insulation assembly, the mounting rack is provided with a connecting rod, a first heat insulation sleeve for separating the connecting rod and the mounting rack is arranged between the connecting rod and the mounting rack, and heat transfer between the connecting rod and the mounting rack can be reduced; the heater is fixedly connected to the other end, away from the mounting frame, of the connecting rod, the heat insulation assembly comprises a wrapping part wrapping the periphery of the heater and a heat insulation plate located between the mounting frame and the heater, heat radiation of the heater is reduced through the wrapping part, heat transfer is reduced, and a second heat insulation sleeve is arranged between the wrapping part and the heater. And a third heat insulation sleeve is arranged between the coating piece and the heat insulation plate, and the second heat insulation sleeve and the third heat insulation sleeve are arranged on the connecting rod in a sleeving manner, so that heat transfer between the coating piece and the heater and between the heat insulation plate and the coating piece is further reduced, the temperature of other moving parts is reduced, and the operation stability of the equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a heat insulation structure of a substrate stage. Background Art

[0002] In the coating process of vacuum coating equipment, the substrate stage is one of the important parts of the equipment. During the coating process, the substrate on which the thin film is deposited is in the substrate stage. The stability of the substrate stage movement affects the coating quality. The substrate usually needs to be heated to a higher temperature (such as 1000°C), and the transmission parts of the substrate stage also need to withstand higher temperatures. In order to prevent the transmission parts from thermal expansion and failure due to high temperature, the thermal insulation performance of the substrate stage heater is crucial. The currently used stainless steel insulation sheet has poor thermal insulation effect, and the transmission parts are still exposed to higher temperatures. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a heat insulation structure of a substrate stage, which can improve the heat insulation effect and effectively reduce the temperature of moving parts.

[0004] According to an embodiment of the utility model, a heat insulation structure of a substrate stage includes:

[0005] The mounting frame is provided with a connecting rod, and a first heat insulating sleeve is provided between the connecting rod and the mounting frame to separate the two;

[0006] The heater is fixedly connected to the other end of the connecting rod away from the mounting frame;

[0007] The thermal insulation assembly includes a covering member covering the outer periphery of the heater and an insulation board located between the mounting frame and the heater, a connecting rod passing through the covering member and the insulation board, a second insulation sleeve is provided between the covering member and the heater, a third insulation sleeve is provided between the covering member and the insulation board, and the second insulation sleeve and the third insulation sleeve are both provided on the connecting rod.

[0008] A thermal insulation structure of a substrate stage according to an embodiment of the utility model has at least the following beneficial effects: this embodiment is provided with a mounting frame, a heater and a thermal insulation assembly, the mounting frame is provided with a connecting rod, a first thermal insulation sleeve is provided between the connecting rod and the mounting frame to separate the two, which can reduce the heat transfer between the connecting rod and the mounting frame; the heater is fixedly connected to the other end of the connecting rod away from the mounting frame, the thermal insulation assembly includes a covering member covering the outer periphery of the heater and a thermal insulation plate located between the mounting frame and the heater, the thermal radiation of the heater is reduced by the covering member, and the heat transfer is reduced, a second thermal insulation sleeve is provided between the covering member and the heater, a third thermal insulation sleeve is provided between the covering member and the thermal insulation plate, and the second thermal insulation sleeve and the third thermal insulation sleeve are both mounted on the connecting rod, which further reduces the heat transfer between the covering member and the heater, and between the thermal insulation plate and the covering member, thereby reducing the temperature of other moving parts and improving the operating stability of the equipment.

[0009] According to some embodiments of the present invention, the covering member includes a first covering member and a second covering member that are stacked, and a second heat insulating sleeve that is sleeved in the connecting rod is provided between the first covering member and the second covering member.

[0010] According to some embodiments of the present invention, the heat insulation board includes a first heat insulation board, a second heat insulation board and a third heat insulation board arranged along the axis direction of the connecting rod, and at least one of the first heat insulation board, the second heat insulation board and the third heat insulation board is made of ceramic material.

[0011] According to some embodiments of the present invention, both the covering member and the heat insulation plate are provided with mounting holes for passing the connecting rod, and the inner diameter of the mounting hole is larger than the outer diameter of the connecting rod.

[0012] According to some embodiments of the present invention, the third heat insulation board is disposed on one end of the connecting rod close to the covering member.

[0013] According to some embodiments of the present invention, a second insulation sleeve is provided between the first insulation board and the second insulation board, a third insulation sleeve is provided between the second insulation board and the third insulation board, and a first insulation board is provided between the third insulation board and the covering member.

[0014] According to some embodiments of the utility model, a mounting seat is provided on the heater, and the connecting rod is fixedly connected to the mounting seat.

[0015] According to some embodiments of the present invention, along the axial direction of the connecting rod, the first heat insulation sleeve has a first pad portion abutting against the side wall of the mounting frame and the first heat insulation board.

[0016] According to some embodiments of the present invention, a mounting section connected to the mounting frame is provided on the connecting rod, and the first heat insulation sleeve has a second pad portion covering the radial outer periphery of the mounting section.

[0017] According to some embodiments of the present utility model, the first heat insulation sleeve, the second heat insulation sleeve, and the third heat insulation sleeve are all made of ceramic material.

[0018] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Description of the Drawings

[0019] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0020] Figure 1 is a cross-sectional view of a heat insulation structure of a substrate table in an embodiment of the present utility model;

[0021] Figure 2 is a front view of the connection between the heat insulation component and the mounting bracket in an embodiment of the present utility model;

[0022] Figure 3 is a cross-sectional view of the connection between the heat insulation component and the mounting bracket in an embodiment of the present utility model;

[0023] Figure 4 is Figure 3 an enlarged view of A in

[0024] Figure 5 is Figure 3 an enlarged view of B in

[0025] Reference Numerals:

[0026] Mounting bracket 100; Connecting rod 101; Mounting section 102; Heater 103; Mounting seat 104; First heat insulation sleeve 105; First cushion portion 106; Second cushion portion 107; Second heat insulation sleeve 108; Third heat insulation sleeve 109;

[0027] Heat insulation component 110; First covering member 111; Second covering member 112; First heat insulation plate 113; Second heat insulation plate 114; Third heat insulation plate 115; Mounting hole 116; Movable member 117. Detailed Embodiments

[0028] The following details the embodiments of the present utility model. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0029] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0032] Reference Figure 1 and Figure 2 In an embodiment of the utility model, a heat insulation structure of a substrate stage includes a mounting frame 100, a heater 103 and a heat insulation assembly 110. The mounting frame 100 is provided with a connecting rod 101. A first heat insulation sleeve 105 is provided between the connecting rod 101 and the mounting frame 100 to separate the two, which can reduce the heat transfer between the connecting rod 101 and the mounting frame 100. The heater 103 is fixedly connected to the other end of the connecting rod 101 away from the mounting frame 100. It can be understood that at least three connecting rods 101 are arranged along the circumference of the mounting frame 100, which helps to improve the connection stability between the heater 103 and the mounting frame 100. Further, a mounting seat 104 is provided on the heater 103, and the connecting rod 101 is fixedly connected to the mounting seat 104. It can be understood that a transmission component is provided on the side of the mounting frame 100 away from the heater 103, and the transmission component can drive the mounting frame 100 to move, thereby realizing the movement of the heater 103 to meet the production process requirements.

[0033] Reference Figure 5, along the axial direction of the connecting rod 101, the first heat insulation sleeve 105 has a first pad 106 that abuts against the side wall of the mounting frame 100 and the first heat insulation board 113. It can be understood that the first pad 106 extends radially outward along the connecting rod 101, so that there is a gap between the first heat insulation board 113 and the mounting frame 100 to avoid contact heat transfer. Further, the connecting rod 101 is provided with a mounting section 102 connected to the mounting frame 100, and the outer diameter of the mounting section 102 is smaller than the maximum outer diameter of the connecting rod 101. The first heat insulation sleeve 105 has a second pad 107 covering the radial outer periphery of the mounting section 102. The second pad 107 can realize the positioning of the mounting section 102 on the mounting frame 100, and can reduce the heat transfer of the connecting rod 101 to the mounting frame 100.

[0034] The heat insulation assembly 110 includes a covering member covering the outer periphery of the heater 103 and a heat insulation board located between the mounting frame 100 and the heater 103. It can be understood that the covering member covers the radial outer periphery of the heater 103 and the end facing the mounting seat 104 at the same time. Since the substrate stage works in a vacuum environment, heat is mainly transferred by contact and radiation. The surrounding and shielding of the heater 103 by the covering member can effectively reduce the heat transfer of the heater 103 in the axial and radial directions, thereby reducing the temperature of the surrounding parts. Furthermore, a second heat insulation sleeve 108 is provided between the covering member and the heater 103, and a third heat insulation sleeve 109 is provided between the covering member and the heat insulation board. The second heat insulation sleeve 108 and the third heat insulation sleeve 109 are both sleeved on the connecting rod 101, further reducing the heat transfer between the covering member and the heater 103, and between the heat insulation board and the covering member through contact, thereby reducing the temperature of other moving parts and improving the operating stability of the equipment. Furthermore, since the connecting rod 101 is made of metal and has good thermal conductivity, both the covering and the insulation board are provided with mounting holes 116 for passing the connecting rod 101, and the inner diameter of the mounting hole 116 is larger than the outer diameter of the connecting rod 101, that is, the covering and the insulation board do not directly contact the connecting rod 101, thereby reducing heat transfer to the covering and the insulation board through contact, thereby reducing heat dissipation of the heater 103.

[0035] Reference Figure 3 and Figure 4The covering member includes a first covering member 111 and a second covering member 112 which are stacked, and a second heat insulating sleeve 108 is provided between the first covering member 111 and the second covering member 112, which is sleeved in the connecting rod 101. It can be understood that the first covering member 111 and the second covering member 112 are simultaneously covered on the radial periphery of the heater 103 and the end facing the mounting seat 104, so as to reduce the heat radiation of the heater 103 to the outside. In addition, the first covering member 111 and the second covering member 112 are separated by the second heat insulating sleeve 108, so that there is a gap between the two, which helps to reduce the heat transfer caused by contact, thereby reducing the temperature of the transmission parts around the heater 103 and stabilizing the transmission. It can be understood that the second covering member 112 is covered on the outer periphery of the heater 103, the first covering member 111 is covered on the outer periphery of the second covering member 112, and a second heat insulating sleeve 108 is also provided between the second covering member 112 and the mounting seat 104 of the heater 103 to separate the two, which can reduce contact heat transfer.

[0036] Furthermore, the heat insulation plate includes a first heat insulation plate 113, a second heat insulation plate 114 and a third heat insulation plate 115 arranged along the axial direction of the connecting rod 101, and is used to block the heat radiation of the heater 103 along the axial direction of the connecting rod 101. Further, the third heat insulation plate 115 is provided on the connecting rod 101 at one end close to the covering part. It can be understood that the third heat insulation plate 115 is mainly used to block the heat of the heater 103 from being transferred by radiation along the axial direction of the connecting rod 101. The first heat insulation plate 113 and the second heat insulation plate 114 are located on the side close to the mounting frame 100, and are used to block the heat transferred by radiation from reaching the mounting frame 100.

[0037] Furthermore, a second heat insulation sleeve 108 is provided between the first heat insulation board 113 and the second heat insulation board 114, a third heat insulation sleeve 109 is provided between the second heat insulation board 114 and the third heat insulation board 115, and a first heat insulation board 113 is provided between the third heat insulation board 115 and the covering member. At the same time, the first heat insulation sleeve 105, the second heat insulation sleeve 108 and the third heat insulation sleeve 109 are all made of ceramic material, which can effectively reduce heat transfer. Further, at least one of the first heat insulation board 113, the second heat insulation board 114 and the third heat insulation board 115 is made of ceramic material. In this embodiment, the third heat insulation board 115 is made of ceramic material, and the third heat insulation board 115 is close to the heater 103, which helps to effectively reduce the heat of the heater 103 from being transferred to the mounting frame 100. Further, the first heat insulation board 113 and the second heat insulation board 114 are made of stainless steel, which helps to reduce material costs while maintaining good thermal insulation performance.

[0038] It can be understood that the first insulation sleeve 105, the second insulation sleeve 108 and the third insulation sleeve 109 are all sleeved on the connecting rod 101, and along the radial direction of the connecting rod 101, there are gaps between the first insulation sleeve 105, the second insulation sleeve 108 and the third insulation sleeve 109 and the connecting rod 101, which helps to reduce heat transfer due to contact.

[0039] It can be understood that the second insulation sleeve 108 is placed on the mounting seat 104 and supports the second cover 112, the second insulation sleeve 108 arranged on the second cover 112 supports the first cover 111, the third insulation sleeve 109 is located on the first cover 111 and supports the second insulation board 114, the second insulation board 114 is provided with the second insulation sleeve 108 capable of supporting the first insulation board 113, the first insulation board 113 is provided with the first insulation sleeve 105 capable of abutting the mounting frame 100, that is, multiple insulation boards and multiple covering parts are separated by a stacked structure, so as to reduce heat transfer while achieving installation positioning.

[0040] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A thermal insulation structure for a substrate stage, characterized in that: include: A mounting frame, provided with a connecting rod, wherein a first heat insulating sleeve is provided between the connecting rod and the mounting frame to separate the two; A heater, fixedly connected to the other end of the connecting rod away from the mounting frame; The thermal insulation assembly includes a covering member covering the outer periphery of the heater and an insulation plate located between the mounting frame and the heater, the connecting rod is passed through the covering member and the insulation plate, a second insulation sleeve is provided between the covering member and the heater, a third insulation sleeve is provided between the covering member and the insulation plate, and the second insulation sleeve and the third insulation sleeve are both sleeved on the connecting rod.

2. The thermal insulation structure of a substrate stage according to claim 1, characterized in that: The covering member includes a first covering member and a second covering member which are stacked, and the second heat insulating sleeve which is sleeved in the connecting rod is provided between the first covering member and the second covering member.

3. The thermal insulation structure of a substrate stage according to claim 1, characterized in that: The heat insulation board includes a first heat insulation board, a second heat insulation board and a third heat insulation board arranged along the axis direction of the connecting rod, and at least one of the first heat insulation board, the second heat insulation board and the third heat insulation board is made of ceramic material.

4. The thermal insulation structure of a substrate stage according to claim 1, characterized in that: The covering member and the heat insulation plate are both provided with mounting holes for passing the connecting rod, and the inner diameter of the mounting hole is larger than the outer diameter of the connecting rod.

5. The thermal insulation structure of a substrate stage according to claim 3, characterized in that: The third heat insulation board is arranged on one end of the connecting rod close to the covering member.

6. The thermal insulation structure of a substrate stage according to claim 3, characterized in that: The second insulation sleeve is arranged between the first insulation board and the second insulation board, the third insulation sleeve is arranged between the second insulation board and the third insulation board, and the first insulation board is arranged between the third insulation board and the covering member.

7. The thermal insulation structure of a substrate stage according to claim 1, characterized in that: The heater is provided with a mounting seat, and the connecting rod is fixedly connected to the mounting seat.

8. The thermal insulation structure of a substrate stage according to claim 6, characterized in that: Along the axial direction of the connecting rod, the first heat insulation sleeve has a first pad portion abutting against the side wall of the mounting frame and the first heat insulation board.

9. The thermal insulation structure of a substrate stage according to claim 7, characterized in that: The connecting rod is provided with a mounting section connected to the mounting frame, and the first heat insulation sleeve has a second pad portion covering the radial outer periphery of the mounting section.

10. The thermal insulation structure of a substrate stage according to claim 1, characterized in that: The first thermal insulation sleeve, the second thermal insulation sleeve and the third thermal insulation sleeve are all made of ceramic material.

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