Cleaning unit and chemical mechanical polishing equipment

Abstract

The utility model discloses a cleaning unit and chemical mechanical polishing equipment, the cleaning unit comprises a fan module, and the fan module is used for blowing out clean gas; the conveying module comprises a cavity, the cavity comprises a top wall assembly, a bottom wall, a first side wall assembly and a second side wall, the first side wall assembly and the second side wall are oppositely arranged, the top wall assembly is provided with a first air inlet, the first side wall assembly is provided with a second air inlet, the second side wall is provided with an air outlet, and the first air inlet is communicated with the air outlet. The air outlet and the second air inlet are oppositely arranged, and the fan module communicates with the first air inlet and the second air inlet; and the cleaning module is located below the bottom wall, and the cleaning module is provided with a cleaning opening facing the cavity. According to the technical scheme, the airflow in the cavity is stable, the turbulence and vortex phenomena cannot be formed, and the cleanliness of the environment in the cavity is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a cleaning unit and a chemical mechanical polishing device. Background Art

[0002] After the chemical mechanical polishing (CMP) process, the wafer needs to go through a cleaning process. After cleaning to a certain degree of cleanliness, it is transferred back to the wafer box to continue the subsequent process. Usually, the wafer needs to go through a multi-step cleaning process during cleaning, and after drying, it returns to the wafer box through the equipment front end module (EFEM). The multi-step cleaning process is completed in different cleaning modules in a cleaning unit. Therefore, the wafer is also frequently transferred between different cleaning modules. During the wafer transfer process, the particles in the cleaning unit environment will contaminate the wafer and affect the cleaning effect. In the high-process production process, the cleaning effect directly affects the yield of the chip. Therefore, it is particularly important to effectively control the particles in the cleaning unit environment. Usually, an equipment fan filter unit (EFU) is set up in the cleaning unit to continuously blow high-clean gas to the cleaning module to take away the particles in the gas and ensure the cleanliness of the cleaning unit environment.

[0003] After cleaning, the wafers are stained with liquid. Since the wafers need to be transferred between different cleaning modules, the liquid on the wafers will drip during the transfer process. Therefore, a water tray is usually set on the top of the cleaning module, and a cleaning port is opened on the water tray corresponding to the top of each cleaning module to take and place the wafer, so that the dripping liquid can be collected and drained uniformly. In order to ensure the cleanliness of the gas within the wafer transmission range, an EFU unit is usually set on the top of the cleaning unit. The EFU blows air vertically downward, and the blowing range can cover the entire wafer transmission range. However, since the water tray is an integral planar structure, the gas blown vertically downward by the EFU will rebound and flow upward when it encounters the water tray on the top of the cleaning module, colliding with the vertically downward airflow, causing turbulence in the cleaning unit. This will not only bring the contaminated particles on the water tray to circulate in the entire environment, but even some corners will form eddy current dead corners. These contaminated particles will always exist, affecting the environmental cleanliness of the cleaning unit. Utility Model Content

[0004] In response to the above-mentioned deficiencies in the prior art, the present application discloses a cleaning unit and a chemical mechanical polishing device, which can blow clean gas into the transmission module in the vertical and horizontal directions through the fan module, and blow the airflow rebounding upward from the top of the cleaning module to the side wall outlet, so as to stabilize the airflow in the cleaning unit and reduce turbulence and eddy currents in the cleaning unit.

[0005] In order to achieve the above object, the present application discloses a cleaning unit, comprising:

[0006] A fan module, wherein the fan module is used to blow out clean gas;

[0007] A transmission module, wherein the transmission module comprises a cavity, wherein the cavity comprises a top wall assembly, a bottom wall, a first side wall assembly and a second side wall, wherein the first side wall assembly and the second side wall are arranged opposite to each other, wherein the top wall assembly is provided with a first air inlet, wherein the first side wall assembly is provided with a second air inlet, wherein the second side wall is provided with an air outlet, wherein the air outlet and the second air inlet are arranged opposite to each other, and wherein the fan module is connected to the first air inlet and the second air inlet;

[0008] A cleaning module, the cleaning module is located below the bottom wall, and the cleaning module has a cleaning port facing the cavity;

[0009] The top wall assembly includes a top plate and a first air guide plate, a first air guide channel is formed between the top plate and the first air guide plate, the first side wall assembly includes a side plate and a second air guide plate, a second air guide channel is formed between the side plate and the second air guide plate, the side plate is connected to the top plate, the second air guide plate is connected to the first air guide plate, the first air guide channel is communicated with the second air guide channel, the second air inlet is provided on the second air guide plate, and the fan module is communicated with the first air guide channel;

[0010] Alternatively, the fan module includes a first fan and a second fan, the first side wall assembly includes a side panel and a second air guide plate, the second air inlet is arranged on the second air guide plate, the second air guide plate is respectively connected to the top wall assembly and the bottom wall, a second guide channel is formed between the side panel and the second air guide plate, the first fan is connected to the cavity, and the second fan is connected to the second guide channel.

[0011] In one possible implementation, the cavity also includes a third side wall and a fourth side wall that are relatively arranged, one end of the first air guide plate is sealed connected to the third side wall, the other end of the first air guide plate is sealed connected to the fourth side wall, one end of the second air guide plate is sealed connected to the third side wall, and the other end of the second air guide plate is sealed connected to the fourth side wall.

[0012] In one possible implementation, the first air guide plate is provided with a plurality of evenly distributed ventilation holes.

[0013] In a possible implementation, the diameter of the ventilation hole is 1.5 mm to 10 mm.

[0014] In a possible implementation, the distance between the first air guide plate and the top plate is 30 mm to 100 mm, and the distance between the second air guide plate and the side plate is 50 mm to 100 mm.

[0015] In a possible implementation, a wind guide surface is formed at a connection between the first wind guide plate and the second wind guide plate, and the wind guide surface is an arc-shaped surface.

[0016] In one possible implementation, the second air inlet is provided with a first adjustable air door, and the first adjustable air door is used to adjust the size of the second air inlet. The air outlet is provided with a second adjustable air door, and the second adjustable air door is used to adjust the size of the air outlet.

[0017] In a possible implementation, the first adjustable damper is slidably disposed on the second air inlet in a vertical direction to adjust the height of the second air inlet, and the second adjustable damper is slidably disposed on the air outlet in a vertical direction to adjust the height of the air outlet;

[0018] Alternatively, the first adjustable damper is slidably disposed on the second air inlet in a horizontal direction to adjust the width of the second air inlet, and the second adjustable damper is slidably disposed on the air outlet in a horizontal direction to adjust the width of the air outlet.

[0019] In a possible implementation, the second air inlet includes a plurality of air inlets, and the plurality of the second air inlets are arranged along a first direction; the air outlet includes a plurality of air outlets, and the plurality of the air outlets are arranged along the first direction.

[0020] In one possible implementation, at least two sensors are provided in the cavity for measuring the pressure difference in the cavity.

[0021] In a possible implementation, the distance between the lower end of the second air inlet and the bottom wall is 30 mm to 80 mm, and the distance between the lower end of the air outlet and the bottom wall is 30 mm to 80 mm.

[0022] The present application also discloses a chemical mechanical polishing device, comprising a front unit, a polishing unit and any one of the cleaning units described above, wherein the front unit and the polishing unit are respectively located at two ends of the cleaning unit.

[0023] Compared with the prior art, the beneficial effects of this application are:

[0024] In the present application, the clean gas blown out by the fan module is blown vertically downward into the cavity through the first air inlet of the top wall assembly of the cavity of the transmission module to ensure the cleanliness of the environment in the cavity. The fan module also blows the clean gas into the cavity in a horizontal direction through the second air inlet. This part of the clean gas that enters will reach the clean gas that rebounds upward on the bottom wall or the clean gas that has not reached the bottom wall will be blown to the position of the air outlet and discharged through the air outlet of the second side wall, so that the airflow in the cavity is stable, turbulence and eddy current phenomena will not be formed, and the cleanliness of the environment in the cavity is ensured.

[0025] A first guide channel and a second guide channel are formed inside the transmission module, the first guide channel is connected to the second guide channel, and the fan module is connected to the first guide channel, so that the clean gas blown into the cavity in the horizontal direction is guided by the gas blown to the first guide channel by the fan module, and the clean gas blown into the cavity vertically downward is from the same gas source, which reduces the number of fans, reduces the total energy consumption, is conducive to energy conservation and emission reduction, and saves the space occupied by the fan installation, reducing the cost;

[0026] Alternatively, a second guide channel is formed inside the transmission module, and the fan module supplies air through a first fan that blows gas into the cavity and a second fan that blows gas into the second guide channel. In this way, the power and size of the first fan and the second fan can be set according to different air intake requirements, which can more accurately meet the specific requirements of different locations or areas for air volume and wind speed, achieve flexible configuration, and make the energy utilization of the entire system more efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of this specification, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 One of the overall structural schematic diagrams of a cleaning unit provided in an embodiment of the utility model;

[0029] Figure 2 The second schematic diagram of the overall structure of a cleaning unit provided by an embodiment of the utility model;

[0030] Figure 3 A third schematic diagram of the overall structure of a cleaning unit provided in an embodiment of the utility model;

[0031] Figure 4 A schematic diagram of the structure of the hidden side panel provided by an embodiment of the utility model;

[0032] Figure 5A cross-sectional view of a cleaning unit provided in an embodiment of the utility model;

[0033] Figure 6 A schematic diagram of the structure of a first air guide plate provided in an embodiment of the utility model;

[0034] Figure 7 A schematic diagram of the structure of a second air guide plate provided in an embodiment of the utility model;

[0035] Figure 8 A schematic diagram of the structure of the second side wall provided in an embodiment of the utility model;

[0036] Fig. 9 The present invention provides a schematic diagram of the overall structure of a chemical mechanical polishing device according to an embodiment of the present invention.

[0037] Description of reference numerals:

[0038] 10- front unit;

[0039] 20-cleaning unit; 21-blower module; 22-transmission module; 220-cavity; 221-top wall assembly; 2211-top plate; 2212-first air guide plate; 22121-ventilation hole; 22122-folded edge; 222-bottom wall; 223-first side wall assembly; 2231-side plate; 2232-second air guide plate; 22321-second air inlet; 22322-first adjustable air door; 22323-air guide surface; 224-second side wall; 2241-air outlet; 2242-second adjustable air door; 225-third side wall; 226-fourth side wall; 227-wafer transmission assembly; 23-cleaning module;

[0040] 30-Polishing unit. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0042] In this application, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0044] After the polishing process, the wafer needs to be cleaned to a certain degree of cleanliness. The cleaning process requires multiple cleaning processes, and after drying, it returns to the wafer box through the front-end module of the equipment. The multi-step cleaning process is completed in different cleaning modules in a cleaning unit, so that the wafer is frequently transferred between different cleaning modules. During the wafer transfer process, the particles in the cleaning unit environment will contaminate the wafer and affect the cleaning effect.

[0045] Usually, an equipment-side fan filter unit (EFU) is installed in the cleaning unit to continuously blow high-clean gas to the cleaning module to remove particles in the gas and ensure the cleanliness of the cleaning unit environment. A water tray is usually installed on the top of the cleaning module, and a cleaning port is opened on the water tray corresponding to the top of each cleaning module to pick up and place the wafer, so that the dripping liquid can be collected and discharged uniformly. The gas blown vertically downward by the EFU will rebound and flow upward when it encounters the water tray, colliding with the vertically downward airflow, causing turbulence in the cleaning unit, and the polluted particles on the water tray will follow the turbulence to diffuse into the entire environment and circulate, and even some corners will form eddy current dead corners, in which the polluted particles will always exist, eventually affecting the environmental cleanliness of the cleaning unit.

[0046] In view of this, some embodiments of the present application provide a cleaning unit and a chemical mechanical polishing device.

[0047] The present application is described in detail below through specific embodiments:

[0048] The cleaning unit of the embodiment of the present application is as follows Figure 1-Figure 5 As shown, it includes a frame, on which a fan module 21, a transmission module 22, a cleaning module 23 and a pipeline module are arranged. The fan module 21 is used to blow out clean gas, and the transmission module 22 includes a cavity 220, such as Figure 4As shown, a wafer transfer assembly 227 is provided in the cavity 220, and the cavity 220 includes a top wall assembly 221, a bottom wall 222, a first side wall assembly 223 and a second side wall 224, the first side wall assembly 223 and the second side wall 224 are arranged opposite to each other, the top wall assembly 221 is provided with a first air inlet, the first side wall assembly 223 is provided with a second air inlet 22321, and the second side wall 224 is provided with an air outlet 2241, the air outlet 2241 and the second air inlet 22321 are arranged opposite to each other, the fan module 21 is connected with the first air inlet and the second air inlet 22321, so that the clean gas blown out by the fan module 21 is blown into the cavity 220 via the first air inlet and the second air inlet 22321, the cleaning module 23 is located below the bottom wall 222, the cleaning module 23 has a cleaning port facing the cavity 220, the pipeline module is located below the cleaning module 23 (not shown in the figure), and the fan module in this embodiment is an equipment-end fan filter unit (EFU).

[0049] The clean gas blown out by the fan module 21 is blown vertically downward into the cavity 220 through the first air inlet of the top wall assembly 221 of the cavity 220 of the transmission module 22, so as to ensure the cleanliness of the environment in the cavity 220. The fan module 21 also blows the clean gas into the cavity 220 in a horizontal direction through the second air inlet 22321. This part of the clean gas that enters can bounce the clean gas that reaches the bottom wall 222 upward or blow the clean gas that does not reach the bottom wall 222 to the position of the air outlet 2241, and discharge it through the air outlet 2241 of the second side wall 224, so that the airflow in the cavity 220 is stable, and turbulence and eddy current will not be formed, thereby ensuring the cleanliness of the environment in the cavity 220.

[0050] Specifically, Figure 5As shown, the top wall assembly 221 includes a top plate 2211 and a first air guide plate 2212, a first guide channel is formed between the top plate 2211 and the first air guide plate 2212, the first side wall assembly 223 includes a side plate 2231 and a second air guide plate 2232, a second guide channel is formed between the side plate 2231 and the second air guide plate 2232, the side plate 2231 is connected to the top plate 2211, the side plate 2231 in this embodiment is a door assembly, and the door assembly is in a sealed state when closed to ensure the sealing of the second guide channel with the outside, the second air guide plate 2232 is connected to the first air guide plate 2212, so that the first guide channel and the second guide channel are connected, the second air inlet 22321 is arranged on the second air guide plate 2232, the fan module 21 is arranged on the top of the transmission module 22, and the fan module 21 is installed on the upper surface of the top plate 2211 On the top plate 2211, an opening corresponding to the size of the air outlet of the fan module 21 is provided, and the opening is a first air inlet, so that the fan module 21 is connected with the first guide channel, and a part of the clean gas is guided to the second guide channel through the first guide channel, and then enters the cavity 220 through the second air inlet 22321, so that the clean gas blown vertically downward into the cavity 220 and the clean gas blown horizontally into the cavity 220 are both blown out by the fan module 21 arranged on the top plate 2211, so that the clean gas blown into the cavity 220 in the horizontal direction is guided by the gas blown to the first guide channel by the fan module 21, and is the same gas source as the clean gas blown vertically downward into the cavity 220, thereby reducing the number of fans, reducing the total energy consumption, and being beneficial to energy conservation and emission reduction, while saving the space occupied by the fan installation and reducing the cost.

[0051] Alternatively, in a possible implementation, the fan module 21 includes a first fan and a second fan, in which case the top wall assembly 221 only includes a top plate 2211, the first fan is connected to the cavity 220, the first side wall assembly 223 includes a side plate 2231 and a second air guide plate 2232, the second air inlet 22321 is arranged on the second air guide plate 2232, and at the same time, the second air guide plate 2232 can be connected to the top wall assembly 221 and the bottom wall 222, respectively, so that the side plate 2231, the second air guide plate 2232, the top plate 2211 and the bottom wall 222 2, the second fan is connected to the second guide channel, and the second fan is specifically arranged at the top wall component 221 position corresponding to the second guide channel. The fan module 21 respectively realizes air supply through the first fan blowing gas into the cavity 220 and the second fan blowing gas into the second guide channel. In this way, the power and size of the first fan and the second fan can be set according to different air intake requirements, which can more accurately meet the specific requirements of different positions or regions for air volume and wind speed, realize flexible configuration, and make the energy utilization of the whole system more efficient.

[0052] The fan module 21 may include one fan or multiple fans. When only one fan is provided, the size of the fan may be the same as the size of the top wall assembly 221 corresponding to the cavity 220. When the fan module 21 includes multiple fans, the sizes of the fans may be the same or may be set to different sizes corresponding to the air intake requirements. The power of the fans may also be set to the same or to different powers, which is not limited here.

[0053] The first air guide plate 2212 may be provided with folded edges on the edges other than the edges connected to the second air guide plate 2232, and each folded edge is connected to the top plate 2211 to form a first guide channel between the top plate 2211, and the second air guide plate 2232 may be provided with folded edges on the edges other than the edges connected to the second air guide plate 2232 and the bottom wall 222, and each folded edge is connected to the side plate 2231 to form a second guide channel between the side plate 2231. In this embodiment, Figure 4 As shown, the cavity 220 further includes a third side wall 225 and a fourth side wall 226 arranged opposite to each other, one end of the first air guide plate 2212 is sealedly connected to the third side wall 225, and the other end of the first air guide plate 2212 is sealedly connected to the fourth side wall 226. In order to avoid the wafer transmission component 227, one end of the first air guide plate 2212 is provided with a folded edge 22122, and the folded edge 22122 is connected to the top plate 2211, so that the top plate 2211, the first air guide plate 2212, the third side wall 225 and the fourth side wall 226 are sealedly connected. 26 forms a first guide channel, one end of the second air guide plate 2232 is sealed with the third side wall 225, and the other end of the second air guide plate 2232 is sealed with the fourth side wall 226, so that the side plate 2231, the second air guide plate 2232, the third side wall 225, the fourth side wall 226 and the bottom wall 222 form a second guide channel, which is convenient to set up, so that the structure of the first air guide plate 2212 and the second air guide plate 2232 is relatively simple, and the horizontal air intake range of the two guide channels is larger, and the flow stabilization effect is better.

[0054] The clean gas blown vertically downward by the fan module 21 enters the cavity 220 through the first air guide plate 2212. When the fan module 21 includes multiple fans, the multiple fans blow air vertically downward at the same time, and the area other than directly below the fan may not be blown by the clean gas, resulting in uneven cleanliness in the cavity 220. Therefore, Figure 6 As shown, the first air guide plate 2212 is provided with a plurality of evenly distributed ventilation holes 22121, so that the clean gas blown vertically downward by the fan module 21 will first pass through the first air guide plate 2212, and enter the cavity 220 through the evenly distributed ventilation holes 22121 of the first air guide plate 2212, so that even clean gas is formed in the cavity 220, ensuring that every area in the cavity 220 can be blown. At this time, the opening on the top plate 2211 corresponding to the air outlet size of the fan module 21 is the first air inlet.

[0055] When the clean gas of the fan module 21 passes through the first air guide plate 2212, if the ventilation hole 22121 is set too small, the ventilation may be too slow, so that most of the clean gas is guided to the second guide channel through the first guide channel. If the ventilation hole 22121 is set too large, the clean gas is directly blown vertically downward into the cavity 220 through the ventilation hole 22121 directly opposite to the fan module 21, which does not achieve a uniform effect. Therefore, in order to achieve a good uniform effect, the aperture of the ventilation hole 22121 of the first air guide plate 2212 is set to 1.5mm~10mm. By setting the aperture of the ventilation hole 22121 within the range of 1.5mm~10mm, a better uniform effect can be produced without affecting the air intake. Specifically, the aperture is set to 1.5mm, 5mm or 10mm, etc. It is only necessary to make the aperture of the ventilation hole 22121 within the range of 1.5mm~10mm. The embodiments of the present application are not listed one by one here.

[0056] The distance between the first air guide plate 2212 and the top plate 2211 should not be too large or too small. If it is too large, most of the clean gas will be diverted to the second guide channel through the first guide channel, affecting the vertical downward air intake effect of the clean gas. If it is too small, the first guide channel will be too narrow, and most of the clean gas will directly enter the cavity 220 through the ventilation holes 22121 of the first air guide plate 2212, affecting the clean gas entering through the second air inlet 22321, thereby affecting the flow stabilization effect. The distance between the second air guide plate 2232 and the side plate 2231 is also the same. Therefore, in this embodiment, the first air guide plate 22 The distance between the first air guide plate 2212 and the top plate 2211 is 30mm-100mm, and the distance between the second air guide plate 2232 and the side plate 2231 is 50mm-100mm. Specifically, the distance between the first air guide plate 2212 and the top plate 2211 is set to 30mm, 60mm or 100mm, etc. It is only necessary to make the distance between the first air guide plate 2212 and the top plate 2211 within the range of 30mm-100mm, and the distance between the second air guide plate 2232 and the side plate 2231 is set to 50mm, 75mm or 100mm, etc. The embodiments of the present application are not listed one by one here.

[0057] Since the first guide channel and the second guide channel are connected, in order to achieve a better guide effect, a guide surface 22323 is formed at the connection between the first guide plate 2212 and the second guide plate 2232. In this embodiment, the guide surface 22323 can be an arcuate surface or an inclined surface, so that the clean gas plays a certain guiding role when entering the second guide channel through the first guide channel. The guide surface 22323 can be set on the first guide plate 2212 and / or the second guide plate 2232. In this embodiment, Figure 7As shown, the second air guide plate 2232 includes a curved surface, and the first air guide plate 2212 is connected to the curved surface of the second air guide plate 2232. Of course, in a possible implementation method, the first air guide plate 2212 and the second air guide plate 2232 can also be formed in one piece, so that the bending parts of the first air guide plate 2212 and the second air guide plate 2232 can be made into curved surfaces. When the first air guide plate 2212 and the second air guide plate 2232 are made separately, they can be connected by other methods such as welding or bonding.

[0058] Since the wind pressure in the cavity 220 will constantly change, the airflow conditions will also be different. Therefore, in order to balance the wind pressure at various locations in the cavity 220 and achieve a steady flow effect in the cavity, in this embodiment, Figure 3 As shown, the second air inlet 22321 is provided with a first adjustable damper 22322, and the first adjustable damper 22322 is used to adjust the opening size of the second air inlet 22321, as shown in FIG. Figure 2 As shown, the air outlet 2241 is provided with a second adjustable damper 2242, and the second adjustable damper 2242 is used to adjust the opening size of the air outlet 2241. When the air pressure in the cavity 220 is too high, the opening of the first adjustable damper 22322 can be reduced, and / or the opening of the second adjustable damper 2242 can be increased to reduce the clean gas blown into the cavity 220 or increase the outflow of clean gas in the cavity 220, thereby reducing the air pressure in the cavity 220 and making the internal airflow more stable.

[0059] Specifically, the first adjustable damper 22322 can be adjustably arranged on the second air inlet 22321 in the vertical direction to adjust the height of the second air inlet 22321. In one possible implementation method, connecting holes are respectively provided on both sides of the second air guide plate 2232 close to the second air inlet 22321 in the horizontal direction, and a vertical long hole is provided at a position corresponding to the through hole on the first adjustable damper 22322. Bolts pass through the connecting holes and the vertical long holes and are locked at different positions of the vertical long holes by the bolts to realize the position of the first adjustable damper 22322 relative to the second air inlet 22321, thereby realizing the height adjustment of the second air inlet 22321. Similarly, the second adjustable damper 2242 can also be adjustably arranged on the air outlet 2241 in the vertical direction by adopting the same connection method to adjust the height of the air outlet 2241. Alternatively, the first adjusting damper and the second air guide plate 2232 may also be connected by a slide rail and arranged at the second air inlet 22321 to achieve height adjustment of the second air inlet 22321. Figure 8 As shown, the second air inlet 22321 and the air outlet 2241 are configured as rectangular openings, and correspondingly, the first adjustable damper 22322 and the second adjustable damper 2242 are configured as rectangular plates slightly larger than the second air inlet 22321 and the air outlet 2241 .

[0060] Of course, in order to adjust the width of the second air inlet 22321 and the air outlet 2241, the first adjustable damper 22322 can be adjustably set on the second air inlet 22321 along the horizontal direction, and the second adjustable damper 2242 can be adjustably set on the air outlet 2241 along the horizontal direction. Specifically, it can be achieved by using the same connection method as the above-mentioned height adjustment.

[0061] In this embodiment, in order to more accurately adjust the interior of the cavity 220, the second air inlet 22321 includes a plurality of second air inlets 22321, and the plurality of second air inlets 22321 are arranged along the first direction, and the air outlet 2241 includes a plurality of air outlets 2241, and the plurality of air outlets 2241 are arranged along the first direction, so that the adjustment can be performed according to the cavity conditions at different positions corresponding to each second air inlet 22321, and the adjustment accuracy is higher. For example, Figure 3 As shown, the fan module 21 includes three fans, and there are three second air inlets 22321. The three second air inlets 22321 are arranged along the first direction. In this embodiment, the first direction is the length direction of the cavity 220. In other embodiments, it can also be the width direction of the cavity 220. This is not limited here. Figure 8 As shown, there are three air outlets 2241, and the three air outlets 2241 are arranged along the first direction. The distance between the lower end of the second air inlet 22321 and the bottom wall 222 is set to 30mm~80mm, and the distance between the lower end of the air outlet 2241 and the bottom wall 222 is set to 30mm~80mm, which can be specifically set to 30mm, 50mm or 80mm, etc. The embodiments of the present application are no longer listed one by one here, wherein the number of fans in this embodiment and the number of second air inlets 22321 are only used as exemplary illustrations, and there is no necessary connection between the two.

[0062] Since clean gas continuously enters the cavity 220, in order to ensure the structural strength and durability of the cavity 220 during long-term use, the first air guide plate 2212, the second air guide plate 2232 and the second side wall 224 are in constant contact with the clean gas. Therefore, the material of the first air guide plate 2212, the second air guide plate 2232 and the second side wall 224 is set to stainless steel or corrosion-resistant plastic to ensure that the structure of the cavity 220 is more durable and reliable.

[0063] Differential pressure sensors are provided at different positions inside the cavity 220 to understand the wind pressure conditions at different positions inside the cavity. Specifically, the differential pressure sensor can be provided at the position inside the cavity corresponding to each second air inlet 22321 to monitor the air pressure inside the cavity corresponding to each different air inlet, and then adjust the size of the air inlets at different positions. For example, when the air pressure inside the cavity corresponding to one of the air inlets is too large, the adjustable damper of the air inlet is correspondingly reduced to reduce the entry of more clean gas and thus reduce the wind pressure, and accurately control the pressure distribution inside the cavity 220, so that the pressure inside the entire cavity 220 is balanced, and the airflow stability inside the cavity 220 is ensured. The pressure difference at different positions can also be used to analyze whether the ambient airflow conditions inside the cavity 220 meet the design requirements. The measurement of the wind pressure inside the cavity 220 can also be measured by a pressure sensor, and specifically, a plurality of pressure sensors are provided at different positions inside the cavity 220.

[0064] The present application also discloses a chemical mechanical polishing device, including a front unit 10, a polishing unit 30 and a cleaning unit 20. Fig. 9 As shown, the front unit 10 and the polishing unit 30 are respectively located at the two ends of the cleaning unit 20. The front unit 10 includes a device front-end module. The device front-end module transfers the single wafer to the wafer front-end transmission system of the process and detection module through a precision manipulator in a high-clean environment. In the polishing unit 30, the wafer surface is flattened by the relative movement between the grinding head and the grinding pad that clamp the wafer by using the coordinated cooperation of chemical corrosion and mechanical grinding. The cleaning unit 20 in the chemical mechanical polishing device is the above-mentioned cleaning unit 20. Therefore, the chemical mechanical polishing device in this embodiment has substantially the same technical effect as the above-mentioned cleaning unit 20. Since the technical effect of the cleaning unit 20 has been fully described, it will not be repeated here.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A cleaning unit, characterized in that: include: A fan module, wherein the fan module is used to blow out clean gas; A transmission module, wherein the transmission module comprises a cavity, wherein the cavity comprises a top wall assembly, a bottom wall, a first side wall assembly and a second side wall, wherein the first side wall assembly and the second side wall are arranged opposite to each other, wherein the top wall assembly is provided with a first air inlet, wherein the first side wall assembly is provided with a second air inlet, wherein the second side wall is provided with an air outlet, wherein the air outlet and the second air inlet are arranged opposite to each other, and wherein the fan module is connected to the first air inlet and the second air inlet; A cleaning module, the cleaning module is located below the bottom wall, and the cleaning module has a cleaning port facing the cavity; The top wall assembly includes a top plate and a first air guide plate, a first air guide channel is formed between the top plate and the first air guide plate, the first side wall assembly includes a side plate and a second air guide plate, a second air guide channel is formed between the side plate and the second air guide plate, the side plate is connected to the top plate, the second air guide plate is connected to the first air guide plate, the first air guide channel is communicated with the second air guide channel, the second air inlet is provided on the second air guide plate, and the fan module is communicated with the first air guide channel; Alternatively, the fan module includes a first fan and a second fan, the first side wall assembly includes a side panel and a second air guide plate, the second air inlet is arranged on the second air guide plate, the second air guide plate is respectively connected to the top wall assembly and the bottom wall, a second guide channel is formed between the side panel and the second air guide plate, the first fan is connected to the cavity, and the second fan is connected to the second guide channel.

2. The cleaning unit according to claim 1, characterized in that: The cavity also includes a third side wall and a fourth side wall arranged opposite to each other, one end of the first air guide plate is sealed connected to the third side wall, the other end of the first air guide plate is sealed connected to the fourth side wall, one end of the second air guide plate is sealed connected to the third side wall, and the other end of the second air guide plate is sealed connected to the fourth side wall.

3. The cleaning unit according to claim 1, characterized in that: The first air guide plate is provided with a plurality of evenly distributed ventilation holes.

4. The cleaning unit according to claim 3, characterized in that: The diameter of the ventilation hole is 1.5 mm to 10 mm.

5. The cleaning unit according to claim 1, characterized in that: The distance between the first air guide plate and the top plate is 30 mm to 100 mm, and the distance between the second air guide plate and the side plate is 50 mm to 100 mm.

6. The cleaning unit according to claim 1, characterized in that: A wind guide surface is formed at a connection between the first wind guide plate and the second wind guide plate, and the wind guide surface is an arc-shaped surface.

7. The cleaning unit according to any one of claims 1 to 6, characterized in that: The second air inlet is provided with a first adjustable air door, and the first adjustable air door is used to adjust the size of the second air inlet. The air outlet is provided with a second adjustable air door, and the second adjustable air door is used to adjust the size of the air outlet.

8. The cleaning unit according to claim 7, characterized in that: The first adjustable damper is slidably disposed on the second air inlet in a vertical direction to adjust the height of the second air inlet, and the second adjustable damper is slidably disposed on the air outlet in a vertical direction to adjust the height of the air outlet; Alternatively, the first adjustable damper is slidably disposed on the second air inlet in a horizontal direction to adjust the width of the second air inlet, and the second adjustable damper is slidably disposed on the air outlet in a horizontal direction to adjust the width of the air outlet.

9. The cleaning unit according to any one of claims 1 to 6, characterized in that: The second air inlets include a plurality of air inlets, and the plurality of the second air inlets are arranged along a first direction. The air outlets include a plurality of air outlets, and the plurality of the air outlets are arranged along the first direction.

10. The cleaning unit according to any one of claims 1 to 6, characterized in that: At least two sensors are arranged in the cavity for measuring the pressure difference in the cavity.

11. The cleaning unit according to any one of claims 1 to 6, characterized in that: The distance between the lower end of the second air inlet and the bottom wall is 30 mm to 80 mm, and the distance between the lower end of the air outlet and the bottom wall is 30 mm to 80 mm.

12. A chemical mechanical polishing device, characterized in that: It comprises a front unit, a polishing unit and the cleaning unit according to any one of claims 1 to 11, wherein the front unit and the polishing unit are respectively located at two ends of the cleaning unit.

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