Waterproof breathable piece, sensor and electronic equipment

Abstract

The utility model provides a waterproof breathable piece, sensor and electronic equipment, relate to the sensor technical field, waterproof breathable piece includes the sheet body and forms a plurality of micropore unit group on the sheet body, every micropore unit group includes connecting portion and the periphery of connecting portion surrounding, connecting portion forms a plurality of through-hole, and the through-hole is equipped with a plurality of through-hole. The thickness of the outer edge part is larger than that of the connecting part. The outer edge part is thicker, and a plurality of supporting parts are formed on the sheet-shaped body, so that the strength of the waterproof breathable piece can be effectively improved. Meanwhile, the connecting part is thinner, so that the depth of the through hole is smaller, the friction between the air and the inner side wall of the through hole when the air passes through the through hole can be effectively reduced, the wind resistance is reduced, and the ventilation volume is increased. The waterproof breathable piece has the advantages of high consistency, high strength, low probability of deformation, low wind resistance and capability of effectively increasing the air permeability.

Description

Technical Field

[0001] The utility model relates to the technical field of sensors, in particular to a waterproof and breathable component, a sensor and an electronic device. Background Art

[0002] At present, a waterproof breathable membrane is generally used for waterproofing sensors. However, in actual use, it is found that the waterproof function has poor consistency and large fluctuations.

[0003] In view of this, it is necessary to provide a new waterproof and breathable component, a sensor and an electronic device to solve or at least alleviate the above technical defects. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide a waterproof and breathable component, a sensor and an electronic device, aiming at solving the technical problem of poor consistency of the waterproof function of sensors with waterproof breathable membranes in the prior art.

[0005] To achieve the above object, according to one aspect of the utility model, the utility model provides a waterproof and breathable component, including a sheet-shaped body and a plurality of micropore unit groups formed on the sheet-shaped body. Each micropore unit group includes a connecting portion and an outer edge portion surrounding the outer periphery of the connecting portion. The connecting portion is formed with a plurality of through holes, and the thickness of the outer edge portion is greater than that of the connecting portion.

[0006] In some embodiments, the sheet-shaped body includes a functional section and an adhesive section. The adhesive section surrounds the outer periphery of the functional section, and the functional section is formed with a plurality of the micropore unit groups.

[0007] In some embodiments, the waterproof and breathable component further includes a support member, and the support member is connected to one side of the adhesive section.

[0008] In some embodiments, the plurality of through holes are evenly distributed at intervals in the connecting portion.

[0009] In some embodiments, the shape of the micropore unit group is a regular hexagon, a circle or a square.

[0010] In some embodiments, the thickness of the outer edge portion is 3 microns - 10 microns, and the thickness of the connecting portion is 0 microns - 2 microns.

[0011] In some embodiments, the micropore unit group is a regular hexagon, the side length of the micropore unit group is 8 microns - 12 microns, the through hole is a circular hole, and the diameter of the through hole is 1 micron - 5 microns.

[0012] In some embodiments, a waterproof layer is provided on the surface of the sheet-shaped body.

[0013] In some embodiments, the waterproof and breathable component is a waterproof and breathable silicon wafer.

[0014] According to another aspect of the present invention, the present invention further provides a sensor, which includes a substrate and a housing covering the substrate. An accommodation cavity is formed by the cooperation of the substrate and the housing. A MEMS chip and an ASIC chip with signal connection are arranged in the accommodation cavity. A sound hole communicating with the accommodation cavity is formed on the substrate. The waterproof and breathable component as described above is further included, and the waterproof and breathable component is arranged on the side of the sound hole facing the accommodation cavity.

[0015] In some embodiments, the MEMS chip is mounted on the bonding section of the waterproof and breathable component, and the sensitive film of the MEMS chip faces the microporous unit group, so that the air entering from the sound hole can be received by the sensitive film of the MEMS chip through the through holes of the microporous unit group.

[0016] In some embodiments, the MEMS chip includes a substrate body and a sensitive film mounted on the substrate body. The substrate body is mounted on the substrate, and the waterproof and breathable component is arranged in the front cavity formed by surrounding the MEMS chip and the substrate.

[0017] According to another aspect of the present invention, the present invention further provides an electronic device, which is characterized in that the electronic device includes the sensor as described above.

[0018] In the above solution, the waterproof and breathable component includes a sheet-shaped body and a plurality of microporous unit groups formed on the sheet-shaped body. Each microporous unit group includes a connecting portion and an outer edge portion surrounding the outer periphery of the connecting portion. The connecting portion is formed with a plurality of through holes, and the thickness of the outer edge portion is greater than that of the connecting portion. The waterproof and breathable component includes a thin sheet-shaped body, and a plurality of microporous unit groups are formed on the sheet-shaped body. Each microporous unit group includes a plurality of through holes. The waterproof and breathable component can be made of a silicon wafer, that is, the waterproof and breathable component is a waterproof and breathable silicon wafer. By means of semiconductor process manufacturing method, a plurality of microporous unit groups are formed on the silicon wafer, and a plurality of through holes are designed on each microporous unit group. Using semiconductor process manufacturing can make the shape and size of each through hole more consistent, and thousands of through holes can be designed on a sheet-shaped body. The size of the through holes can be designed to be smaller, which can better play the role of waterproofing. Furthermore, the microporous unit group includes a connecting portion and an outer edge portion. The connecting portion is arranged in the middle part, and the outer edge portion is arranged around the connecting portion on the outer periphery. The connecting portion and the outer edge portion are connected together. A plurality of through holes are arranged in the connecting portion. And in order to improve the strength of the sheet-shaped body, the thickness of the outer edge portion is set to be greater than that of the connecting portion, which can play the role of increasing strength and support. Setting the outer edge portion to be thicker and forming a plurality of such support portions on the sheet-shaped body can effectively improve the strength of the waterproof and breathable component. At the same time, setting the connecting portion to be thinner, the depth of the through hole is also smaller, which can effectively reduce the friction between the air and the inner side wall of the through hole when the air passes through the through hole, reduce the wind resistance, and increase the air permeability. The utility model has the advantages of high consistency, large strength and not easy to deform, and small wind resistance can effectively increase the air permeability. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0020] Figure 1 It is a schematic structural diagram of the sheet-shaped body of the waterproof and breathable component in the embodiment of the present utility model;

[0021] Figure 2 It is a schematic structural diagram of the microporous unit group of the waterproof and breathable component in the embodiment of the present utility model;

[0022] Figure 3 For Figure 2 It is a schematic cross-sectional structural diagram in the A-A direction;

[0023] Figure 4 It is a schematic structural diagram of the waterproof and breathable component in the embodiment of the present utility model;

[0024] Figure 5 This is a schematic structural diagram of a sensor according to another embodiment of the present utility model;

[0025] Figure 6 This is another schematic structural diagram of a sensor according to another embodiment of the present utility model.

[0026] Label description:

[0027] 100, sensor;

[0028] 10, waterproof and breathable component; 1, sheet body; 11, bonding section; 12, functional section; 121, microporous unit group; 1211, outer edge part; 1212, connecting part; 12121, through hole; 2, support member;

[0029] 20, MEMS chip; 21, substrate; 22, sensitive film; 30, ASIC chip; 40, substrate; 50, housing; 60, sound hole; 70, accommodation cavity.

[0030] The realization, functional features and advantages of the purpose of the present utility model will be further described in conjunction with the embodiments with reference to the accompanying drawings. Specific embodiments

[0031] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0032] It should be noted that all directional indications (such as up, down...) in the embodiments of the present utility model are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0033] In addition, the descriptions such as "first" and "second" in the present utility model are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature.

[0034] Moreover, the technical solutions between the various embodiments of the present utility model can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement it. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0035] There are various types of sensors, which can be acoustic sensors, amount-of-substance sensors, pressure sensors, etc. An acoustic sensor is often referred to as a microphone. Since it is necessary to adapt to an underwater or humid environment, in related technologies, a waterproof and breathable membrane is attached to the sound hole of the microphone. The waterproof and breathable membrane can block water vapor from entering the accommodation cavity of the sensor, but does not block air from entering. That is, air can also enter the accommodation cavity through the waterproof and breathable membrane and be received by the MEMS chip, without affecting the monitoring function of the MEMES chip.

[0036] However, the applicant has found that the consistency of the waterproof and breathable membrane is poor. Even for waterproof and breathable membranes produced in the same batch, the consistency between them is also poor. After careful research, the applicant found that there is a step of stretch forming in the manufacturing process of the waterproof and breathable membrane. During the stretching process, the micropores on the waterproof and breathable membrane will be stretched and deformed, some with large deformations and some with small deformations. The size of the deformation is not easy to control, that is, the size and shape of the holes cannot be controlled, resulting in poor performance consistency of the product.

[0037] Therefore, the present utility model provides a waterproof and breathable component.

[0038] Referring to Figures 1 to 3 , according to one aspect of the present utility model, the present utility model provides a waterproof and breathable component 10, including a sheet-shaped body 1 and a plurality of micropore unit groups 121 formed on the sheet-shaped body 1. Each micropore unit group 121 includes a connecting portion 1212 and an outer edge portion 1211 surrounding the outer periphery of the connecting portion 1212. The connecting portion 1212 is formed with a plurality of through holes 12121, and the thickness of the outer edge portion 1211 is greater than the thickness of the connecting portion 1212.

[0039] In the above embodiments, the waterproof and breathable member 10 is used to allow air to pass through while blocking water vapor, thereby playing a role in waterproofing and breathability. Specifically, the waterproof and breathable member 10 includes a sheet-shaped body 1, and a plurality of micropore unit groups 121 are formed on the sheet-shaped body 1. Each micropore unit group 121 includes a plurality of through holes 12121. The waterproof and breathable member 10 can be made of a silicon wafer, that is, the waterproof and breathable member 10 is a waterproof and breathable silicon wafer. A plurality of micropore unit groups 121 are formed on the silicon wafer by means of semiconductor processing. A plurality of through holes 12121 are designed on each micropore unit group 121. Using semiconductor processing can make the shape and size of each through hole 12121 more consistent, and thus ensure the consistency of the performance of the waterproof and breathable member 10. And tens of thousands of through holes 12121 can be designed on a sheet-shaped body 1, and the size of the through holes 12121 can be designed to be smaller, which can better play the role of waterproofing. Furthermore, the micropore unit group 121 includes a connecting portion 1212 and an outer edge portion 1211. The connecting portion 1212 is arranged in the middle part, and the outer edge portion 1211 is arranged around the connecting portion 1212 on the periphery. The connecting portion 1212 and the outer edge portion 1211 are connected together. A plurality of through holes 12121 are arranged in the connecting portion 1212. And in order to improve the strength of the sheet-shaped body 1, the thickness of the outer edge portion 1211 is set to be greater than the thickness of the connecting portion 1212, which can play a role in increasing strength and support. By setting the outer edge portion 1211 to be thicker, a plurality of such supporting outer edge portions 1211 are formed on the sheet-shaped body 1, which can effectively improve the strength of the waterproof and breathable member 10. At the same time, by setting the connecting portion 1212 to be thinner, the depth of the through hole 12121 is also smaller, which can effectively reduce the friction between the air and the inner side wall of the through hole 12121 when the air passes through the through hole 12121, reduce the wind resistance, and increase the air permeability. This embodiment has the advantages of high consistency, large strength and not easy to deform, and small wind resistance, which can effectively increase the air permeability.

[0040] Referring to Figure 2 and Figure 3 , in some embodiments, the sheet-shaped body 1 includes a functional section 12 and an adhesive section 11. The adhesive section 11 is disposed around the outer periphery of the functional section 12, and a plurality of micropore unit groups 121 are formed on the functional section 12. The adhesive section 11 refers to the part of the sheet-shaped body 1 connected to other components, and the functional section 12 refers to the part for realizing the waterproof and breathable function. The functional section 12 is located in the middle position, and the adhesive section 11 is located in the outer peripheral part and is formed around the outer periphery of the functional section 12 in a circle. Dividing the sheet-shaped body 1 into the functional section 12 and the adhesive section 11, with each part having different functions, can avoid blocking the through holes 12121 due to the connection between the functional section 12 and other components.

[0041] Referring to Figure 4, in some embodiments, the waterproof and breathable member 10 further includes a support member 2, and the support member 2 is connected to one side of the bonding section 11. The support member 2 can be a side surround, and its shape can be a circular side surround or a square side surround. When the waterproof and breathable member 10 is applied to the sensor 100, the support member 2 can be disposed in the accommodation cavity, connected to the substrate 40, and disposed around the sound hole 60. The functional section 12 faces the sound hole 60, so that the air entering from the sound hole 60 needs to pass through the functional section 12 before being received by the MEMS chip 20.

[0042] Referring to Figure 2 , in some embodiments, a plurality of through holes 12121 are evenly distributed at the connection portion 1212. The present invention does not limit the specific shape of the through holes 12121, which can be square, circular or other shapes, and can be evenly distributed or unevenly distributed. Similarly, the present invention does not specifically limit the shape of the micropore unit group 121, which can be a regular hexagon, a circle or a square. As long as the shapes of the through holes 12121 and the micropore unit group 121 can achieve the function of the present invention, they are within the protection scope of the present invention. In some specific embodiments, the micropore unit group 121 is a regular hexagon, the side length of the micropore unit group 121 is 8 to 12 micrometers, the through holes 12121 are circular holes, and the diameter of the through holes 12121 is 1 to 5 micrometers.

[0043] In some embodiments, the thickness of the outer edge portion 1211 is 3 to 10 micrometers, and the thickness of the connection portion 1212 is 0 to 2 micrometers. Because it is necessary to play a supporting role, or to improve the strength, the outer edge portion 1211 without the through holes 12121 will be set to a relatively thick thickness, which can be set to 3 to 10 micrometers. In order to reduce the wind resistance, the thickness of the connection portion 1212 provided with the through holes 12121 is designed to be relatively small, such as 0 to 2 micrometers.

[0044] In some embodiments, a waterproof layer is provided on the surface of the sheet-like body 1. The surface of the sheet-like body 1 or the surface of the waterproof and breathable member 10 can be treated with a waterproof material to form a waterproof layer to play a waterproof role.

[0045] Referring to Figure 5 and Figure 6According to another aspect of the utility model, the utility model further provides a sensor 100, the sensor 100 comprises a substrate 40, a housing 50 covering the substrate 40, the substrate 40 and the housing 50 cooperate to form a housing cavity 70, the housing cavity 70 is provided with a signal-connected MEMS chip 20 and an ASIC chip 30, the substrate 40 is formed with a sound hole 60 communicating with the housing cavity 70, and the sensor 100 also comprises the above-mentioned waterproof breathable member 10, the waterproof breathable member 10 is arranged on the side of the sound hole 60 facing the housing cavity 70. Specifically, the waterproof breathable member 10 can be a silicon wafer, which is attached to the sound hole 60 by surface mounting technology. In this way, the air coming in from the sound hole 60 needs to pass through the waterproof breathable member 10, remove the water vapor, and then enter the housing cavity 70, and finally be received by the MEMS chip 20. Since the sensor 100 includes all the technical solutions of all the embodiments of the above-mentioned waterproof breathable member 10, it has at least all the beneficial effects brought by all the above-mentioned technical solutions, which will not be repeated here one by one.

[0046] The waterproof breathable member 10 can be installed in at least two positions:

[0047] Reference Figure 5 In the first embodiment, the MEMS chip 20 is mounted on the bonding section 11 of the waterproof breathable member 10, and the sensitive film 22 of the MEMS chip 20 is arranged facing the microporous unit group 121, so that the air entering from the sound hole 60 can be received by the sensitive film 22 of the MEMS chip 20 through the through hole 12121 of the microporous unit group 121. In this embodiment, the MEMS chip 20 is mounted on the waterproof breathable member 10. In a specific embodiment, the waterproof breathable member 10 also includes a support member 2, the support member 2 is connected to the substrate 40, and the MEMS chip 20 is arranged on the side of the sheet body 1 away from the support member 2. In this embodiment, the MEMS chip 20 and the waterproof breathable member 10 are stacked vertically, which can reduce the lateral size of the sensor 100.

[0048] Reference Figure 6 In the second embodiment, the MEMS chip 20 includes a base 21 and a sensitive membrane 22 mounted on the base 21, the base 21 is mounted on the substrate 40, and the waterproof breathable component 10 is arranged in the front cavity formed by the MEMS chip 20 and the substrate 40. In this embodiment, the waterproof breathable component 10 is mounted on the substrate 40, and the MEMS chip 20 is also mounted on the substrate 40. Specifically, the MEMS chip 20 and the substrate 40 are surrounded to form a front cavity, and the waterproof breathable component 10 is arranged in the front cavity. The manufacturing process of this embodiment is simpler, and the MEMS chip 20 and the waterproof breathable component 10 can be directly bonded to the substrate 40, and the mounting accuracy requirement is not high. And the vertical size of the sensor 100 can be reduced.

[0049] According to another aspect of the present utility model, the present utility model further provides an electronic device, characterized in that the electronic device includes the above-mentioned sensor 100. The electronic device can be a smart wearable device, such as a mobile phone, earphone, bracelet, ring, or can also be a computer, tablet or iPad. Since the electronic device includes all the technical solutions of all the embodiments of the above-mentioned sensor 100, therefore, it has at least all the beneficial effects brought by the above-mentioned all technical solutions, which will not be elaborated herein one by one.

[0050] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and do not limit the patent scope of the present utility model; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: under the technical concept of the present utility model, it is still possible to modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacement on some or all of the technical features therein; or directly / indirectly apply them in other related technical fields, and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various embodiments of the present application, and they should all be covered by the scope of the claims and the specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in each embodiment can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A waterproof breathable component, characterized in that: It includes a sheet-like body and a plurality of microporous unit groups formed on the sheet-like body, each of the microporous unit groups includes a connecting portion and an outer edge portion surrounding the outer periphery of the connecting portion, the connecting portion is formed with a plurality of through holes, and the thickness of the outer edge portion is greater than the thickness of the connecting portion.

2. The waterproof breathable member according to claim 1, characterized in that: The sheet-like body comprises a functional section and a bonding section, wherein the bonding section is arranged around the periphery of the functional section, and the functional section is formed with a plurality of the microporous unit groups.

3. The waterproof breathable member according to claim 2, characterized in that: The waterproof and breathable member further comprises a supporting member, and the supporting member is connected to one side of the bonding section.

4. The waterproof breathable member according to claim 1, characterized in that: The plurality of through holes are evenly distributed at intervals in the connecting portion.

5. The waterproof breathable member according to claim 1, characterized in that: The shape of the microporous unit group is a regular hexagon, a circle or a square.

6. The waterproof breathable member according to claim 1, characterized in that: The thickness of the outer edge portion is 3 micrometers to 10 micrometers, and the thickness of the connecting portion is 0 micrometers to 2 micrometers.

7. The waterproof breathable member according to claim 1, characterized in that: The micropore unit group is a regular hexagon, the side length of the micropore unit group is 8 micrometers to 12 micrometers, the through hole is a circular hole, and the diameter of the through hole is 1 micrometer to 5 micrometers.

8. The waterproof breathable member according to claim 1, characterized in that: A waterproof layer is arranged on the surface of the sheet-like body.

9. The waterproof breathable member according to claim 1, characterized in that: The waterproof and breathable component is a waterproof and breathable silicon sheet.

10. A sensor, characterized in that: The sensor includes a substrate and a shell covering the substrate, wherein the substrate and the shell cooperate to form a accommodating cavity, wherein a signal-connected MEMS chip and an ASIC chip are arranged in the accommodating cavity, and an acoustic hole connected to the accommodating cavity is formed on the substrate, and further includes the waterproof and breathable component according to any one of claims 1 to 9, wherein the waterproof and breathable component is arranged on the side of the acoustic hole facing the accommodating cavity.

11. The sensor according to claim 10, characterized in that The MEMS chip is mounted on the bonding section of the waterproof breathable component, and the sensitive membrane of the MEMS chip is arranged facing the microporous unit group, so that the air entering from the sound hole can pass through the through hole of the microporous unit group and be received by the sensitive membrane of the MEMS chip.

12. The sensor according to claim 10, characterized in that The MEMS chip comprises a base and a sensitive membrane mounted on the base. The base is mounted on the substrate. The waterproof and breathable component is arranged in a front cavity formed by the MEMS chip and the substrate.

13. An electronic device, characterized in that: The electronic device includes the sensor according to any one of claims 10 to 12.

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