Electrode member and evaporation device

Abstract

The utility model provides an electrode component and an evaporation device. The electrode component comprises a pair of electrodes, the pair of electrodes are oppositely arranged in the first direction, each electrode is provided with multiple layers of mounting steps, and the multiple layers of mounting steps are sequentially arranged in the second direction; any same layer of installation steps of the pair of electrodes can be used for supporting the evaporation boat. The pair of electrodes respectively form a positive electrode and a negative electrode for supplying power to the evaporation boat, and the evaporation boat can be placed on any same layer of installation step on the pair of electrodes by arranging multiple layers of installation steps on each electrode, so that when the evaporation distance needs to be adjusted, only the evaporation boat needs to be replaced, and the operation is convenient. Compared with an existing evaporation distance adjusting mode, the evaporation distance adjusting method is more convenient and easier to use.

Description

Technical Field

[0001] This application relates to the technical field of vacuum evaporation manufacturing, and in particular to an electrode member and an evaporation device. Background Art

[0002] During vacuum evaporation, the evaporation distance is an important factor affecting the film-forming effect of vacuum evaporation technology. By adjusting the evaporation distance, the density, electrical, mechanical, and interfacial properties of the film can be affected.

[0003] In the prior art, the evaporation source structure is arranged in the up-down direction. When the evaporation distance needs to be adjusted, the whole is translated by a lead screw or a new evaporation source is replaced. However, at present, it is very time-consuming to adjust the evaporation distance of the evaporation equipment. For a large chamber, the time required to adjust the evaporation distance usually takes two days. At present, there is a lack of an electrode member that is convenient and easy to adjust the evaporation distance. Summary of the Utility Model

[0004] This application provides an electrode member and an evaporation device to solve the technical problem that it is difficult to adjust the evaporation distance of the existing electrode member.

[0005] In the first aspect of the present utility model, an electrode member is provided, including a pair of electrodes; the pair of electrodes are arranged opposite to each other in a first direction, and each electrode is provided with multiple layers of mounting steps, which are arranged in sequence in a second direction; any same-layer mounting steps of the pair of electrodes can be used to support an evaporation boat.

[0006] In this solution, the pair of electrodes are respectively formed as the positive and negative electrodes for supplying power to the evaporation boat. By providing multiple layers of mounting steps on each electrode, the evaporation boat can be placed on any same-layer mounting steps of the pair of electrodes. Thus, when the evaporation distance needs to be adjusted, only the evaporation boat needs to be replaced and placed on different-layer mounting steps of the pair of electrodes, which is more convenient and simple compared with the existing evaporation distance adjustment method.

[0007] In a further solution of the present utility model, any same-layer mounting steps of the pair of electrodes are used to directly support the evaporation boat; or the electrode member further includes a fixture, and the fixture cooperates with at least one layer of mounting steps, and the fixture is used to limit the evaporation boat.

[0008] In this solution, when the length or thickness of the evaporation boat is appropriate, the evaporation boat can be directly installed on the installation step. When adjusting the evaporation distance, only the evaporation boat needs to be replaced; or the evaporation boat can be installed on the installation step through a fixture. Specifically, the fixture cooperates with at least one layer of installation step to fix the evaporation boat on a pair of electrodes. The fixture can also achieve the effect of length compensation for the evaporation boat. That is, when there is a fixture, only the fixture needs to be replaced, and then the fixture is set on different layers of installation steps to achieve the purpose of adjusting the evaporation distance. When using a fixture to install the evaporation boat 200, the fixture can be used as a length compensation element. If the evaporation distance needs to be adjusted, replace the fixture with a changed compensation length to install the evaporation boat, and then place the fixture and the evaporation boat on different layers of installation steps to achieve the adjustment of the evaporation length. If the thickness of the evaporation boat is not convenient for installation, the fixture can also be used to achieve the effect of thickness adjustment.

[0009] In a further solution of the present utility model, the evaporation boat is supported by the fixture on the same layer of installation steps of a pair of electrodes; or the installation step of one of the electrodes directly limits the evaporation boat, and the installation step of the other electrode on the same layer limits the evaporation boat through the fixture.

[0010] In this solution, two fixtures can be set at the same time to be respectively fixed on a pair of electrodes to fix the evaporation boat, or one end can be fixed on the installation step by the fixture and the other end can be directly lapped on the electrode, which can improve the versatility of the entire electrode component.

[0011] In a further solution of the present utility model, the fixture is provided with multiple layers of mating steps, and the multiple layers of mating steps cooperate with the corresponding installation steps to enable the fixture to be installed on the electrode. The electrode is electrically connected to the evaporation boat through the corresponding fixture.

[0012] In this solution, by setting multiple layers of mating steps on the fixture, and the mating steps can cooperate with the installation steps to enable the fixture to be installed on the electrode, the mating steps make the installation of the fixture and the electrode more stable.

[0013] In a further solution of the present utility model, the fixture is provided with a notch for receiving the corresponding end of the evaporation boat.

[0014] In this solution, by setting the notch to receive the evaporation boat, the stability of the evaporation boat fixed on the fixture is stronger.

[0015] In a further solution of the present utility model, the fixture includes a body part and a protruding part. The body part is provided with multiple layers of mating steps, and the protruding part protrudes from the body part and together with the body part encloses the notch.

[0016] In this solution, the protruding portion protrudes from the main body, so that the main body and the protruding portion can form a gap, and the evaporation boat can be placed on the gap to be fixed.

[0017] In a further solution of the utility model, the protrusion protrudes from the main body along the first direction and is located on the side of the main body away from the installation step, and the protrusion is used to support the evaporation boat; or the protrusion protrudes from the main body in the second direction, and the main body is used to support the evaporation boat.

[0018] In a further solution of the utility model, the electrode component also includes a connecting piece, and the connecting piece connects the fixture and the corresponding electrode.

[0019] In this solution, the connection stability between the fixture and the corresponding electrode can be increased by the connecting piece, thereby preventing the fixture from sliding after being installed on the electrode.

[0020] In a further solution of the utility model, each installation step has a first step surface and a first connecting surface, the first connecting surface extends along the second direction and connects the first step surfaces of two installation steps; the connecting piece is inserted through the first step surface and / or the first connecting surface.

[0021] In this solution, the first connecting surface extends along the second direction and connects the first step surfaces of two layers of mounting steps, thereby forming a multi-layer mounting step. The connecting member is connected to the first step surface and connected to the fixture, thereby limiting the fixture.

[0022] In a further embodiment of the present invention, each layer of the mating step has a second step surface and a second connecting surface, the second connecting surface extends along the second direction and connects the second step surfaces of the two layers of the mating steps; one end of the connecting piece is passed through the first step surface of the installation step, and the other end is passed through the second step surface of the mating step; or, one end of the connecting piece is passed through the first connecting surface of the installation step, and the other end is passed through the second connecting surface of the mating step.

[0023] In this solution, the first step surface and the second step surface are parallel, the second connecting surface and the second connecting surface are perpendicular, and the connecting piece is connected and passed through the first connecting surface and the second connecting surface to fix the fixture on the installation step, or the connecting piece can also be passed through the first step surface and the second step surface.

[0024] In a further solution of the utility model, the connecting member includes a first connecting member and a second connecting member, the first connecting member is arranged through the first step surface, and the second connecting member is arranged through the first connecting surface. The length of the evaporation boat is greater than the spacing between a pair of electrodes and less than the spacing between any one level of mounting steps on a pair of electrodes.

[0025] In a further embodiment of the present utility model, the height of each installation step is 1 - 20 mm, the width is 1 - 20 mm, the spacing between each layer of any installation step on a pair of electrodes is 50 - 200 mm, and the length of the evaporation boat is less than 50 mm.

[0026] The second aspect of the present utility model provides an evaporation device, including an evaporation boat and the electrode member provided in the first aspect of the present utility model; the evaporation boat is arranged on the same layer of installation steps of a pair of electrodes and is electrically connected to the pair of electrodes.

[0027] In summary, the electrode member and the evaporation device provided in this application have at least the following beneficial effects:

[0028] A pair of electrodes are respectively formed as the positive and negative electrodes for supplying power to the evaporation boat. By providing multiple layers of installation steps on each electrode, the evaporation boat can be placed on any same layer of installation steps of the pair of electrodes. Thus, when it is necessary to adjust the evaporation distance, only the evaporation boat needs to be replaced and placed on different layers of installation steps of the pair of electrodes. Compared with the existing evaporation distance adjustment methods, it is more convenient and simple. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0030] Figure 1 It is a schematic structural diagram of the electrode member provided by the embodiment of the present application;

[0031] Figure 2 It is a schematic structural diagram of the electrode member provided by another embodiment of the present application; and

[0032] Figure 3 It is a schematic structural diagram of the electrode member provided by another embodiment of the present application.

[0033] The reference numerals are as follows:

[0034] 100, electrode member;

[0035] 10, electrode; 10A, installation step; 10A1, first step surface; 10A2, first connection surface; 20, clamp; 21, body part; 22, protruding part; 20A, mating step; 20A1, second step surface; 20A2, second connection surface; 20B, notch; 30, connecting piece; 31, first connecting piece; 32, second connecting piece;

[0036] 200. Evaporation boat;

[0037] L, first direction; H, second direction. Detailed implementation manners

[0038] In the description of the present application, it should be understood that when terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are used to indicate the orientation or positional relationship, without special instructions, it is understood as the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0039] In addition, features defined with "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Features defined with "first" and "second" may explicitly or implicitly include at least one of the defined features. When the description "a plurality of" appears, it generally means at least two, such as two, three, etc., unless otherwise specifically defined.

[0040] In the present application, unless otherwise clearly specified and limited, when terms such as "installed", "connected", "connected to", "fixed" are used, they should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium. It may be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0041] In the description of this specification, when terms such as "an embodiment", "some embodiments", "examples", "specific examples", or "some examples" appear, it means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0042] Please refer to Figures 1 - 3 , the first aspect of the present utility model provides an electrode member 100, including a pair of electrodes 10; the pair of electrodes 10 are oppositely arranged along the first direction L, and each electrode 10 is provided with multiple layers of mounting steps 10A, and the multiple layers of mounting steps 10A are arranged in sequence along the second direction H; any same layer of mounting steps 10A of the pair of electrodes 10 can be used to support the evaporation boat 200.

[0043] In this solution, the pair of electrodes 10 are respectively formed as the positive and negative electrodes for supplying power to the evaporation boat 200. By arranging multiple layers of mounting steps 10A on each electrode 10, the evaporation boat 200 can be placed on any same layer of mounting steps 10A of the pair of electrodes 10. Thus, when it is necessary to adjust the evaporation distance, only the evaporation boat 200 needs to be replaced and the evaporation boat 200 is placed on different layers of mounting steps 10A of the pair of electrodes 10. Compared with the existing evaporation distance adjustment method, it is more convenient and simple.

[0044] In a further embodiment of the present utility model, any same layer of mounting steps 10A of the pair of electrodes 10 is used to directly support the evaporation boat 200 (i.e., Figure 3 the solution shown); or the electrode member 100 further includes a fixture 20, and the fixture 20 cooperates with at least one layer of mounting steps 10A, and the fixture 20 is used to limit the evaporation boat 200, Figure 1 and Figure 2 the solution shown is the fixture 20.

[0045] In this solution, the evaporation boat 200 can be directly installed on the mounting steps 10A, or installed on the mounting steps 10A through the fixture 20. Specifically, the fixture 20 cooperates with at least one layer of mounting steps 10A, and then fixes the evaporation boat 200 on the pair of electrodes 10. The fixture 20 can also achieve the effect of length compensation for the evaporation boat 200, that is, when there is a fixture 20, only the fixture 20 needs to be replaced, and then the fixture 20 is set on different layers of mounting steps 10A to achieve the purpose of adjusting the evaporation distance.

[0046] Specifically, the fixture 20 can limit the evaporation boat 200 in a supporting manner, that is, directly place the evaporation boat 200 on the fixture 20, and the fixture 20 is only used as a length compensation part; or a connecting element can be used to detachably connect the evaporation boat 200 to the fixture 20, for example, the evaporation boat 200 is connected to the fixture 20 by bolts; or a slot can also be used to limit the evaporation boat.

[0047] In a further embodiment of the utility model, the mounting steps 10A on the same layer of a pair of electrodes 10 are both used to limit the evaporation boat 200 by the fixture 20; or the mounting steps 10A of one electrode 10 directly support the evaporation boat 200, and the mounting steps 10A on the same layer of the other electrode 10 are used to limit the evaporation boat 200 by the fixture 20.

[0048] In this solution, two clamps 20 can be provided at the same time to be fixed on a pair of electrodes 10 respectively, thereby fixing the evaporation boat 200. Alternatively, one end can be fixed on the mounting step 10A by the clamp 20, and the other end can be directly overlapped on the electrode 10, thereby improving the versatility of the entire electrode component 100.

[0049] In a further embodiment of the present invention, the fixture 20 is provided with multiple layers of matching steps 20A, which match with corresponding mounting steps 10A to enable the fixture 20 to be mounted on the electrode 10. The electrode 10 is electrically connected to the evaporation boat 200 through the corresponding fixture 20.

[0050] In this solution, multiple layers of matching steps 20A are provided on the fixture 20, and the matching steps 20A can cooperate with the installation steps 10A so that the fixture 20 is installed on the electrode 10. Thus, the matching steps 20A make the installation of the fixture 20 and the electrode 10 more stable.

[0051] In a further embodiment of the present invention, the fixture 20 is provided with a notch 20B, and the notch 20B is used to receive a corresponding end of the evaporation boat 200 .

[0052] In this solution, the notch 20B is provided to accommodate the evaporation boat 200 , so that the evaporation boat 200 is more stable when fixed on the fixture 20 .

[0053] In a further embodiment of the present invention, the clamp 20 includes a main body 21 and a protruding portion 22 . The main body 21 is provided with multiple layers of matching steps 20A. The protruding portion 22 protrudes from the main body 21 and forms a gap 20B together with the main body 21 .

[0054] In this solution, the protrusion 22 protrudes from the main body 21 , so that the main body 21 and the protrusion 22 can form a gap 20B, and the evaporation boat 200 can be placed on the gap 20B to be fixed.

[0055] In further embodiments of the present invention, please refer to Figure 2 The protrusion 22 protrudes from the main body 21 along the first direction L and is located on the side of the main body 21 away from the installation step 10A. The protrusion 22 is used to support the evaporation boat 200; or, please refer to Figure 3, the protrusion 22 protrudes from the main body portion 21 in the second direction H, and the main body portion 21 is used to support the evaporation boat 200.

[0056] In a further embodiment of the present invention, the electrode member 100 further includes a connecting member 30, and the connecting member 30 connects the fixture 20 and the corresponding electrode 10.

[0057] In this solution, through the connecting member 30, the connection stability between the fixture 20 and the corresponding electrode 10 can be increased, and the sliding of the fixture 20 after being installed on the electrode 10 can be avoided.

[0058] In a further embodiment of the present invention, each layer of the installation step 10A has a first step surface 10A1 and a first connection surface 10A2, and the first connection surface 10A2 extends in the second direction H and connects the first step surfaces 10A1 of two layers of installation steps 10A; the connecting member 30 passes through the first step surface 10A1 and / or the first connection surface 10A2.

[0059] In this solution, the first connection surface 10A2 extends in the second direction H and connects the first step surfaces 10A1 of two layers of installation steps 10A, thereby forming multiple layers of installation steps 10A. The connecting member 30 forms a limit on the fixture 20 by connecting the first step surface 10A1 and connecting the fixture 20. Specifically, the above-mentioned second direction H is the thickness direction of the evaporation boat 200.

[0060] In a further embodiment of the present invention, each layer of the mating step 20A has a second step surface 20A1 and a second connection surface 20A2, and the second connection surface 20A2 extends in the second direction H and connects the second step surfaces 20A1 of two layers of mating steps 20A; one end of the connecting member 30 passes through the first step surface 10A1 of the installation step 10A, and the other end passes through the second step surface 20A1 of the mating step 300A; alternatively, one end of the connecting member 30 passes through the first connection surface 10A2 of the installation step 10A, and the other end passes through the second connection surface 20A2 of the mating step 20A.

[0061] In this solution, the first step surface 10A1 and the second step surface 30A1 are parallel, the second connection surface 20A2 and the second connection surface 20A2 are perpendicular, and the connecting member 30 connects and passes through the first connection surface 10A2 and the second connection surface 20A2 to fix the fixture 20 on the installation step 10A. Alternatively, the connecting member 30 can also pass through the first step surface 10A1 and the second step surface 20A1.

[0062] In a further embodiment of the present invention, the connecting member 30 includes a first connecting member 31 and a second connecting member 32, the first connecting member 31 passes through the first step surface 10A1, and the second connecting member 32 passes through the first connection surface 10A2.

[0063] In a further embodiment of the present utility model, the length of the evaporation boat 200 can be less than the minimum distance between the mounting steps 10A of a pair of electrodes 10 and is arranged on the corresponding same-layer mounting steps 10A through a fixture 20. The length of the evaporation boat 200 can also be greater than the minimum distance between the mounting steps 10A of a pair of electrodes 10 and less than the maximum distance between the mounting steps 10A of a pair of electrodes 10 and is directly placed or placed on the corresponding same-layer mounting steps 10A through a fixture 20. The present utility model does not make specific limitations.

[0064] In a further embodiment of the present utility model, the height of each layer of mounting steps 10A (i.e., the dimension in the second direction H) is 1 - 20 mm, the width (i.e., the dimension in the first direction L) is 1 - 20 mm, the distance between any same-layer mounting steps 10A on a pair of electrodes 10 is 50 - 200 mm, and the length of the evaporation boat 200 is less than 50 mm.

[0065] The second aspect of the present utility model provides an evaporation device, including an evaporation boat 200 and the electrode component 100 provided in the first aspect of the present utility model; the evaporation boat 200 is arranged on the same-layer mounting steps 10A of a pair of electrodes 10 and is electrically connected to a pair of electrodes 10.

[0066] In actual application, if it is necessary to adjust the evaporation distance, an evaporation boat 200 with a longer length can be replaced, and then different layers of mounting steps 10A can be replaced, and then it can be placed on a pair of electrodes 10; when the evaporation boat 200 is installed by a fixture 20, the fixture 20 can be used as a length compensation element. If it is necessary to adjust the evaporation distance, a fixture 20 with a changed compensation length is replaced to install the evaporation boat 200, and then the fixture 20 and the evaporation boat 200 are placed on different layers of mounting steps 1020A, and the adjustment of the evaporation length can be achieved.

[0067] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limitations on the present application. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. An electrode component (100), characterized in that: comprising a pair of electrodes (10); A pair of electrodes (10) are arranged opposite to each other along a first direction (L), each electrode (10) is provided with a plurality of mounting steps (10A), and the plurality of mounting steps (10A) are arranged in sequence along a second direction (H); Any same layer of the mounting steps (10A) of a pair of electrodes (10) can be used to support the evaporation boat (200).

2. The electrode component according to claim 1, characterized in that Any same layer of the mounting steps (10A) of a pair of electrodes (10) is used to directly support the evaporation boat (200); or The electrode component (100) further comprises a fixture (20), wherein the fixture (20) cooperates with at least one layer of the installation step (10A), and the fixture (20) is used to limit the position of the evaporation boat (200).

3. The electrode component (100) according to claim 2, characterized in that: The installation steps (10A) on the same layer of a pair of electrodes (10) are both limited by the fixture (20) to position the evaporation boat (200); or The mounting step (10A) of one of the electrodes (10) directly supports the evaporation boat (200), and the mounting step (10A) of another electrode (10) located at the same layer limits the evaporation boat (200) via the fixture (20).

4. The electrode component (100) according to claim 2, characterized in that: The fixture (20) is provided with multiple layers of matching steps (20A), and the multiple layers of matching steps (20A) cooperate with the corresponding installation steps (10A) so that the fixture (20) can be installed on the electrode (10).

5. The electrode component (100) according to claim 4, characterized in that: The fixture (20) is provided with a notch (20B), and the notch (20B) is used to accommodate a corresponding end of the evaporation boat (200).

6. The electrode component (100) according to claim 5, characterized in that: The clamp (20) comprises a main body (21) and a protruding portion (22), wherein the main body (21) is provided with multiple layers of matching steps (20A), and the protruding portion (22) protrudes from the main body (21) and together with the main body (21) forms the notch (20B).

7. The electrode component (100) according to claim 6, characterized in that: The protrusion (22) protrudes from the main body (21) along the first direction (L) and is located on a side of the main body (21) away from the installation step (10A), and the protrusion (22) is used to support the evaporation boat (200); or The protruding portion (22) protrudes from the main body (21) in the second direction (H), and the main body (21) is used to support the evaporation boat (200).

8. The electrode component (100) according to claim 4, characterized in that: The electrode component (100) further comprises a connecting member (30), wherein the connecting member (30) connects the fixture (20) and the corresponding electrode (10); Each layer of the installation steps (10A) has a first step surface (10A1) and a first connecting surface (10A2), and the first connecting surface (10A2) extends along the second direction (H) and connects the first step surfaces (10A1) of two layers of the installation steps (10A); The connecting member (30) is disposed through the first step surface (10A1) and / or the first connecting surface (10A2).

9. The electrode component (100) according to claim 8, characterized in that: Each layer of the matching step (20A) has a second step surface (20A1) and a second connecting surface (20A2), and the second connecting surface (20A2) extends along the second direction (H) and connects the second step surfaces (20A1) of the two layers of the matching step (20A); One end of the connecting piece (30) is inserted through the first step surface (10A1) of the installation step (10A), and the other end is inserted through the second step surface (20A1) of the matching step (20A); or, one end of the connecting piece (30) is inserted through the first connecting surface (10A2) of the installation step (10A), and the other end is inserted through the second connecting surface (20A2) of the matching step (20A).

10. An evaporation device, characterized in that: It comprises an evaporation boat (200) and an electrode component (100) according to any one of claims 1 to 9; The evaporation boat (200) is disposed on the same layer of the mounting step (10A) as the pair of electrodes (10) and is electrically connected to the pair of electrodes (10).

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