Bar coating clamp suitable for ion beam sputtering coating machine

Abstract

The utility model discloses a bar coating clamp suitable for an ion beam sputter coating machine, which belongs to the technical field of ion beam sputter coating machines and comprises a substrate disc, a rotating structure used for driving is mounted at the top of the substrate disc, a fixing frame is mounted at the top of the rotating structure, a driving structure used for driving is mounted on the inner side of the fixing frame, and the rotating structure is mounted on the inner side of the fixing frame. The two sides of the fixed frame are each provided with three rotating frames which are evenly arranged, the outward ends of the rotating frames are provided with fixing grooves, the peripheries of the outer sides of the rotating frames are each provided with a supporting frame, one end of each movable frame is connected with a clamping plate, and the movable frames drive the clamping plates to clamp and fix a rod-shaped workpiece; and therefore, the four clamping plates clamp the outer surface of the rod-shaped workpiece in four directions, and the problems that the fixing effect of existing equipment on the rod-shaped workpiece is poor, the workpiece is likely to deviate or break away, the workpiece cannot be conveniently driven to rotate in multiple directions, and the convenience of the equipment on coating operation on the workpiece is reduced are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion beam sputtering coating machines, in particular to a rod coating fixture suitable for ion beam sputtering coating machines. Background Art

[0002] Ion beam sputtering coating technology uses ions to bombard the surface of the target material. The phenomenon of the atoms of the target material being knocked out is called sputtering, and the atoms produced by sputtering are deposited on the surface of the substrate to form a film, which is called sputtering coating. Usually, gas discharge is used to produce gas ionization. The positive ions bombard the cathode target at high speed under the action of the electric field, knocking out the atoms or molecules of the cathode target, flying to the surface of the substrate to be plated and deposited into a thin film. The substrate clamping mechanism of the existing ion beam sputtering coating machine is generally only suitable for flat plate-like substrates, and has a poor fixing effect on cylindrical rod-shaped workpieces, which can easily cause the workpiece to shake or fall off.

[0003] The existing equipment is not effective in fixing rod-shaped workpieces, which can easily cause the workpieces to shift or detach, and cannot conveniently drive the workpieces to rotate in multiple directions, reducing the convenience of the equipment in coating the workpieces. Therefore, technical personnel in this field provide a rod coating fixture suitable for ion beam sputtering coating machines to solve the problems raised in the above background technology. Utility Model Content

[0004] The utility model aims to provide a rod coating fixture suitable for an ion beam sputtering coating machine to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a rod coating fixture suitable for an ion beam sputtering coating machine, comprising a substrate disc, a rotating structure for driving is installed on the top of the substrate disc, a fixed frame is installed on the top of the rotating structure, a driving structure for driving is installed on the inner side of the fixed frame, three rotating frames evenly arranged are respectively installed on both sides of the fixed frame, a fixing groove is opened toward the outer end of the rotating frame, support frames are respectively installed around the outer side of the rotating frame, a screw rod for driving is penetrated by the support frame, a movable frame for connecting is sleeved on the outer side of the screw rod, and a clamping plate is connected to one end of the movable frame;

[0006] The rotating structure drives the workpiece to rotate horizontally through the fixed frame, and the driving structure drives the workpiece to rotate in the vertical direction through the rotating frame. The screw penetrates the supporting frame and is rotatably connected thereto, the screw penetrates the movable frame and is threaded thereto, and the movable frame penetrates the rotating frame and is slidably connected thereto.

[0007] Preferably, the rotating structure includes a rotating disk installed on the top of the substrate disk. A first gear is installed on the top of the substrate disk and outside the rotating disk. A driving member is installed inside the first gear and at the bottom of the substrate disk. A toothed ring is sleeved outside the rotating disk. The first gear meshes with the toothed ring. The toothed ring is fixedly connected to the rotating disk. The rotating disk is fixedly connected to the fixing frame.

[0008] Preferably, the driving structure includes three first motors arranged evenly on the top of the fixing frame. A first bevel gear is sleeved on the output shaft at the bottom of the first motor. A second bevel gear is sleeved at the other end of the rotating frame. The first bevel gear meshes with the second bevel gear.

[0009] Preferably, two second gears for limiting are installed on the top of the substrate disk. A fixing shaft is connected between the second gear and the substrate disk. The second gear meshes with the toothed ring.

[0010] Preferably, an anti-slip pad for anti-slip is installed on the other side of the clamping plate. A plurality of anti-slip portions arranged evenly are provided on the side of the anti-slip pad in contact with the workpiece. The cross-section of the anti-slip pad is arc-shaped.

[0011] Preferably, the driving member includes a second motor provided at the bottom of the substrate disk. A rotating shaft is connected to the output shaft end at the top of the second motor. The rotating shaft is fixedly connected to the first gear.

[0012] Preferably, four limiting blocks arranged in a circular pattern are connected to the bottom of the rotating disk. A limiting groove is provided on the top of the substrate disk and outside the limiting blocks. The limiting block is slidably connected to the limiting groove. The cross-sections of the limiting block and the limiting groove are both "convex" shaped.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0014] 1. In the present utility model, by setting the fixing frame and the rotating frame, the rotating structure on the top of the substrate disk drives the workpiece to rotate horizontally through the fixing frame, and the driving structure drives the workpiece to rotate in the vertical direction through the rotating frame, so as to facilitate the multi-directional rotation of the workpiece. The screw on one side of the support frame can drive the movable frame to slide in the fixing groove, so that the movable frame drives the clamping plate to clamp and fix the rod-shaped workpiece, so that the four clamping plates clamp the outer surface of the rod-shaped workpiece in four directions, improving the stability of fixing the workpiece.

[0015] 2. In the present utility model, by setting the rotating disk and the first gear, the driving member is used to drive the first gear to rotate, so that the first gear drives the rotating disk to rotate on the top of the substrate disk through the toothed ring, so as to facilitate the rotating disk to drive a plurality of workpieces to rotate in the horizontal direction through the fixing frame.

[0016] 3. In the present utility model, by providing a first bevel gear and a second bevel gear which are meshed with each other, the first bevel gear can drive the rotating frame to rotate through the second bevel gear, and the rotating frame can drive the workpiece to rotate in the vertical direction, improving the convenience of the equipment for coating rod-shaped workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0018] Figure 2 is a left-side sectional perspective view of the overall structure of the present utility model;

[0019] Figure 3 is a front-side sectional perspective view of the overall structure of the present utility model;

[0020] Figure 4 is the overall structure of the present utility model Figure 3 enlarged view of part A.

[0021] In the figure: 1, substrate disk; 2, fixing frame; 3, rotating frame; 4, fixing groove; 5, support frame; 6, screw; 7, movable frame; 8, clamping plate; 9, rotating disk; 10, first gear; 11, toothed ring; 12, first motor; 13, first bevel gear; 14, second bevel gear; 15, second gear; 16, fixed shaft; 17, anti-slip pad; 18, anti-slip part; 19, second motor; 20, rotating shaft; 21, limiting block; 22, limiting groove. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figures 1 to 4 , in the embodiment of the present utility model, a bar coating fixture applicable to an ion beam sputtering coater includes a substrate disk 1, a rotating structure for driving is installed on the top of the substrate disk 1, a fixing frame 2 is installed on the top of the rotating structure, a driving structure for driving is installed inside the fixing frame 2, three rotating frames 3 are evenly installed on both sides of the fixing frame 2, a fixing groove 4 is opened at the outer end of the rotating frame 3, support frames 5 are respectively installed around the outer sides of the rotating frame 3, a screw 6 for driving is penetrated through the support frames 5, a movable frame 7 for connecting is sleeved on the outer side of the screw 6, and a clamping plate 8 is connected to one end of the movable frame 7

[0024] During use, the rotating structure at the top of the substrate disk 1 drives the workpiece to rotate horizontally through the fixing bracket 2, and the driving structure drives the workpiece to rotate in the vertical direction through the rotating bracket 3, so as to facilitate the multi-directional rotation of the workpiece. The screw 6 on one side of the support bracket 5 can drive the movable bracket 7 to slide in the fixed slot 4, so that the movable bracket 7 drives the clamping plate 8 to clamp and fix the rod-shaped workpiece, so that the four clamping plates 8 clamp the outer surface of the rod-shaped workpiece in four directions, improving the stability of fixing the workpiece.

[0025] In one embodiment, specifically, the rotating structure includes a rotating disk 9 installed on the top of the substrate disk 1. A first gear 10 is installed on the top of the substrate disk 1 and outside the rotating disk 9. A driving member is installed inside the first gear 10 and at the bottom of the substrate disk 1. A toothed ring 11 is sleeved outside the rotating disk 9. The first gear 10 meshes with the toothed ring 11. The toothed ring 11 is fixedly connected to the rotating disk 9. The rotating disk 9 is fixedly connected to the fixing bracket 2. The driving member drives the first gear 10 to rotate, so that the first gear 10 drives the rotating disk 9 to rotate on the top of the substrate disk 1 through the toothed ring 11, so as to facilitate the rotating disk 9 to drive multiple workpieces to rotate in the horizontal direction through the fixing bracket 2.

[0026] Among them, the driving structure includes three first motors 12 evenly arranged on the top of the fixing bracket 2. A first bevel gear 13 is sleeved on the output shaft at the bottom of the first motor 12. A second bevel gear 14 is sleeved at the other end of the rotating bracket 3. The first bevel gear 13 meshes with the second bevel gear 14. The first bevel gear 13 meshes with the second bevel gear 14. The first bevel gear 13 can drive the rotating bracket 3 to rotate through the second bevel gear 14, and the rotating bracket 3 can drive the workpiece to rotate in the vertical direction.

[0027] Furthermore, two second gears 15 for limiting are installed on the top of the substrate disk 1. A fixed shaft 16 is connected between the second gear 15 and the substrate disk 1. The second gear 15 meshes with the toothed ring 11. The fixed shaft 16 can support the second gear 15, and the two second gears 15 can assist in limiting the toothed ring 11, improving the stability of the first gear 10 driving the toothed ring 11 to rotate.

[0028] In one embodiment, specifically, an anti-slip pad 17 for anti-slip is installed on the other side of the clamping plate 8. A plurality of anti-slip portions 18 arranged evenly are provided on the side of the anti-slip pad 17 in contact with the workpiece. The cross section of the anti-slip pad 17 is arc-shaped, which can increase the contact area between the anti-slip pad 17 and the workpiece. The anti-slip pad 17 on one side of the clamping plate 8 is in close contact with the workpiece, preventing the workpiece from sliding.

[0029] Among them, four limit blocks 21 arranged in a circle are connected to the bottom of the rotating disk 9, and a limit groove 22 is opened on the top of the substrate disk 1 and located on the outside of the limit block 21. The limit block 21 is slidably connected with the limit groove 22. The cross-sections of the limit block 21 and the limit groove 22 are both "convex" shaped. The limit groove 22 can guide and limit the limit block 21 to prevent the limit block 21 from escaping from the limit groove 22, thereby improving the stability of the rotating disk 9 on the surface of the substrate disk 1.

[0030] The working principle of this utility model:

[0031] First, one end of the workpiece is placed in the fixed groove 4 on one side of the rotating frame 3, and then the screw 6 is rotated on the supporting frame 5, and at the same time, the screw 6 drives the movable frame 7 to slide in the fixed groove 4, and then the movable frame 7 drives the clamping plate 8 to clamp and fix the rod-shaped workpiece, and the four clamping plates 8 clamp the outer surface of the rod-shaped workpiece in four directions at the same time, and then the second motor 19 is started to rotate the first gear 10 through the rotating shaft 20, and then the first gear 10 drives the rotating disk 9 to rotate on the surface of the substrate disk 1 through the gear ring 11, and the gear ring 11 drives the second gear 15 to rotate on the outside of the fixed shaft 16, and at the same time, the rotating disk 9 drives the limit block 21 to slide in the limit groove 22, and then the first motor 12 is started to drive the first bevel gear 13 to rotate, and at this time, the first bevel gear 13 drives the rotating frame 3 to rotate through the second bevel gear 14, and at the same time, the rotating frame 3 drives the workpiece to rotate in the vertical direction.

[0032] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A rod coating fixture suitable for an ion beam sputtering coating machine, comprising a substrate plate (1), characterized in that: A rotating structure for driving is installed on the top of the substrate disk (1), a fixed frame (2) is installed on the top of the rotating structure, a driving structure for driving is installed on the inner side of the fixed frame (2), three rotating frames (3) are evenly arranged on both sides of the fixed frame (2), the rotating frame (3) is provided with a fixing groove (4) toward the outer end, and support frames (5) are installed on the outer sides of the rotating frame (3), a screw rod (6) for driving is passed through the support frame (5), and a movable frame (7) for connecting is sleeved on the outer side of the screw rod (6), and one end of the movable frame (7) is connected to a clamping plate (8); The rotating structure drives the workpiece to rotate horizontally through the fixed frame (2), and the driving structure drives the workpiece to rotate in the vertical direction through the rotating frame (3). The screw rod (6) penetrates the supporting frame (5) and is rotatably connected thereto. The screw rod (6) penetrates the movable frame (7) and is threadedly connected thereto. The movable frame (7) penetrates the rotating frame (3) and is slidably connected thereto.

2. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 1, characterized in that: The rotating structure comprises a rotating disk (9) mounted on the top of a substrate disk (1); a first gear (10) is mounted on the top of the substrate disk (1) and located outside the rotating disk (9); a driving member is mounted inside the first gear (10) and located at the bottom of the substrate disk (1); a gear ring (11) is mounted on the outside of the rotating disk (9); the first gear (10) is meshed with the gear ring (11); the gear ring (11) is fixedly connected to the rotating disk (9); and the rotating disk (9) is fixedly connected to a fixed frame (2).

3. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 1, characterized in that: The driving structure comprises three first motors (12) mounted on the top of a fixed frame (2) and arranged evenly, the bottom output shaft of the first motor (12) is sleeved with a first bevel gear (13), the other end of the rotating frame (3) is sleeved with a second bevel gear (14), and the first bevel gear (13) and the second bevel gear (14) are meshed.

4. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 1, characterized in that: Two second gears (15) for limiting position are installed on the top of the substrate disc (1); a fixed shaft (16) is connected between the second gears (15) and the substrate disc (1); and the second gears (15) are meshed with the gear ring (11).

5. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 1, characterized in that: An anti-skid pad (17) is installed on the other side of the clamping plate (8) for preventing skidding. The anti-skid pad (17) is provided with a plurality of evenly arranged anti-skid portions (18) on the side in contact with the workpiece. The cross section of the anti-skid pad (17) is arc-shaped.

6. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 2, characterized in that: The driving member comprises a second motor (19) arranged at the bottom of the substrate disk (1); the top output shaft end of the second motor (19) is connected to a rotating shaft (20); and the rotating shaft (20) is fixedly connected to the first gear (10).

7. The rod coating fixture suitable for an ion beam sputtering coating machine according to claim 2, characterized in that: The bottom of the rotating disk (9) is connected to four circumferentially arranged limit blocks (21), and a limit groove (22) is provided on the top of the substrate disk (1) and outside the limit block (21). The limit block (21) and the limit groove (22) are slidably connected, and the cross-sections of the limit block (21) and the limit groove (22) are both in the shape of a "convex" character.

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