Fixing felt
By designing a fixed felt structure in a single crystal furnace, the contact area between the soft felt and the graphite electrodes is reduced and the thermal conductivity method is changed, the problems of soft felt pulverization and heat loss in the solid felt at the bottom of the furnace are solved, and more efficient insulation and energy savings are achieved.
Patent Information
- Application Number
- CN202422011890.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-19
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-08-19
AI Technical Summary
In the furnace bottom solid felt used in the existing single crystal furnace heat field, the contact area between the soft felt part and the main bottom electrode and the heater is too large, resulting in the soft felt pulverization, affecting the service life of graphite parts and product quality. At the same time, the direct heat conduction between solids and solids leads to heat loss, increasing the power and production cost of the furnace table.
A fixed felt structure is designed, in which two fixed felts are the main structures, and only soft felts are provided therebetween to reduce the contact area between the soft felt and the graphite electrode, and a groove is opened on the top of the upper fixed felt to change the thermal conductivity between solids and solids to the thermal conductivity between gas and solids, and reduce heat loss.
By reducing the usage rate and contact area of soft felt, the powdering rate of soft felt is reduced, the loss of heat is reduced, the insulation of the single crystal furnace bottom is ensured, the power of the furnace is reduced, the energy saving, the service life of graphite parts is extended and the product quality is improved.
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Figure CN222908147U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a fixed felt. Background Art
[0002] Currently, for the bottom fixed felt used in the thermal field of a single crystal furnace, the bottom fixed felt generally includes an upper fixed felt and a lower fixed felt, and a large circular hole structure needs to be drilled in the middle of both. During furnace closing, 24 layers of soft felt are filled in the aforementioned large circular hole to ensure the height and heat preservation of the bottom of the thermal field, and 7 circular holes need to be drilled in the soft felt part. These circular holes are used to avoid the support rod (1), the main bottom electrode (4), and the air guide cylinder (2).
[0003] The above bottom fixed felt will have the following problems in actual application: the contact area between the soft felt part and the main bottom electrode is too large, resulting in the soft felt being pulverized due to the high temperature of the main bottom electrode during use. The volatiles generated during single crystal drawing will remain in the gap between the graphite electrode and the electrode hole, and may form a path over a long time, resulting in furnace platform ignition, affecting the service life of the graphite parts. Moreover, the pulverization of the soft felt may also cause the quality of the drawn crystal bar to decline. In addition, due to the large contact area between the bottom heater and the bottom fixed felt, and it belongs to the direct heat conduction process between solids, further heat loss at the bottom will cause the power of the furnace platform to remain high during single crystal drawing, increasing the production cost of the product. Summary of the Utility Model
[0004] The purpose of the present application is to provide a fixed felt, which to a certain extent solves the technical problems existing in the prior art that in the process of using the bottom fixed felt in the thermal field of a single crystal furnace, the contact area between the soft felt part and the main bottom electrode and the heater is large, and the high temperature causes it to be pulverized, affecting the service life of the graphite parts and the quality of the products processed in the furnace. Moreover, the contact area between the soft felt part and the bottom heater is large, and it belongs to the direct heat conduction between solids, resulting in heat loss at the bottom, increasing the furnace platform power and wasting energy.
[0005] The present application provides a fixed felt, including: a first fixed felt, an intermediate soft felt, and a second fixed felt; wherein, along a preset direction, the first fixed felt and the second fixed felt are sequentially installed on the inner wall of the furnace, and the first fixed felt is arranged closer to the inside of the furnace, and the intermediate soft felt is installed between the first fixed felt and the second fixed felt;
[0006] Along the preset direction, the first fixed felt is formed with a first groove and an installation through hole that are sequentially arranged and communicated, and the first groove is arranged closer to the inner side of the furnace; along the preset direction, both the soft felt and the fixed felt are formed with through holes corresponding to the installation through hole.
[0007] In the above technical solution, further, the fixed felt further includes a bottom soft felt, and the bottom soft felt is installed between the second fixed felt and the furnace inner wall, and the bottom soft felt is formed with through holes.
[0008] In any of the above technical solutions, further, the number of the intermediate soft felts is multiple, and they are sequentially arranged between the first fixed felt and the second fixed felt along the preset direction.
[0009] In any of the above technical solutions, further, at least one of the sides of the first fixed felt and the second fixed felt that are close to each other is formed with a second groove, and the second groove is communicated with the installation through hole and the through hole.
[0010] In any of the above technical solutions, further, the side of the second fixed felt facing away from the first fixed felt is formed with a third groove, and the third groove is communicated with the through hole.
[0011] In any of the above technical solutions, further, the center line of the first groove coincides with the center line of the first fixed felt.
[0012] In any of the above technical solutions, further, the number of the installation through holes is multiple.
[0013] In any of the above technical solutions, further, one of the multiple installation through holes is arranged at the center of the first fixed felt, and the remaining installation through holes are arranged in a circular ring with the center of the first fixed felt as the center.
[0014] In any of the above technical solutions, further, the diameter of the first fixed felt is 1560 mm, and the thickness of the first fixed felt along the preset direction is 110 mm; the diameter of the first groove is 1005 mm, and the depth of the first groove is 50 mm.
[0015] In any of the above technical solutions, further, the first fixed felt is in a disc shape.
[0016] In any of the above technical solutions, further, the second fixed felt is in a disc shape.
[0017] In any of the above technical solutions, further, the intermediate soft felt is in a disc shape.
[0018] Compared with the prior art, the beneficial effects of the present application are:
[0019] The present application provides a novel furnace bottom fixing felt. Among them, two fixing felts serve as the main structure, and only a soft felt is designed between the two, greatly reducing the usage rate of the furnace bottom soft felt, reducing the direct contact area between the soft felt and the graphite electrode, reducing the pulverization rate of the small soft felt, and a first groove is opened at the top of the first fixing felt, that is, the upper fixing felt, thereby reducing the contact area between the heater and the upper fixing felt. Moreover, gas accumulates in the first groove, thus changing the original heat conduction mode between solids to the heat conduction mode between gas and solid, reducing the heat dissipation rate at the bottom, ensuring the heat preservation of the single crystal furnace bottom, thereby reducing the power of the furnace platform during the production process, greatly saving energy. A soft felt is arranged between the first fixing felt, that is, the upper fixing felt and the second fixing felt, that is, the lower fixing felt, further reducing heat transfer and further saving resources. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0021] Figure 1 Structural schematic diagram of the fixing felt provided by the embodiment of the present application;
[0022] Figure 2 Another structural schematic diagram of the fixing felt provided by the embodiment of the present application;
[0023] Figure 3 For Figure 2 Cross-sectional view along the A-A section;
[0024] Figure 4 Structural schematic diagram of the first fixing felt provided by the embodiment of the present application;
[0025] Figure 5 Another structural schematic diagram of the first fixing felt provided by the embodiment of the present application;
[0026] Figure 6 Structural schematic diagram of the intermediate soft felt provided by the embodiment of the present application;
[0027] Figure 7 Structural schematic diagram of the second fixing felt provided by the embodiment of the present application;
[0028] Figure 8 Another structural schematic diagram of the second fixing felt provided by the embodiment of the present application;
[0029] Figure 9Schematic diagram of the bottom soft felt provided by the embodiment of the present application.
[0030] Reference numerals:
[0031] 1 - First fixing felt, 11 - First groove, 12 - Mounting through - hole, 13 - Second groove, 2 - Second fixing felt, 21 - Third groove, 3 - Intermediate soft felt, 4 - Bottom soft felt, 5 - Through - hole. Detailed implementation manners
[0032] The technical solutions of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application.
[0033] Generally, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application claimed, but merely represents the selected embodiments of the present application.
[0034] All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.
[0035] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.
[0036] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "mount", "connect", "couple" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.
[0037] Next, refer to Figures 1 to 9 Describe the fixing felt according to some embodiments of the present application.
[0038] See Figures 1 to 9As shown in the figure, an embodiment of the present application provides a fixing felt, including a first fixing felt 1, an intermediate soft felt 3, and a second fixing felt 2. Among them, along a preset direction, the first fixing felt 1 and the second fixing felt 2 are sequentially installed on the inner wall of the furnace, and the first fixing felt 1 is arranged close to the inside of the furnace, and the intermediate soft felt 3 is installed between the first fixing felt 1 and the second fixing felt 2.
[0039] Along the preset direction, the first fixing felt 1 is formed with a first groove 11 and an installation through-hole 12 that are sequentially arranged and communicated, and the first groove 11 is arranged close to the inner side of the furnace. Along the preset direction, both the soft felt and the fixing felt are formed with through-holes 5 corresponding to the installation through-hole 12.
[0040] Based on the above-described structure, the present application provides a new type of furnace bottom fixing felt. Among them, the two fixing felts serve as the main structure, and only a soft felt is designed between them, greatly reducing the usage rate of the furnace bottom soft felt, reducing the direct contact area between the soft felt and the graphite electrode, reducing the pulverization rate of the small soft felt, and opening a first groove 11 at the top of the first fixing felt 1, that is, the upper fixing felt, thereby reducing the contact area between the heater and the upper fixing felt. Moreover, gas accumulates in the first groove 11, thus changing the original heat conduction method between solids to the heat conduction method between gas and solid, reducing the heat dissipation rate at the bottom, ensuring the heat preservation of the single crystal furnace bottom, thereby reducing the power of the furnace platform during the production process, greatly saving energy. A soft felt is arranged between the first fixing felt 1, that is, the upper fixing felt, and the second fixing felt 2, that is, the lower fixing felt, further reducing heat transfer and further saving resources.
[0041] In this embodiment, preferably, as Figure 1 、 Figure 3 and Figure 9 shown, the fixing felt further includes a bottom soft felt 4, and the bottom soft felt 4 is installed between the second fixing felt 2 and the inner wall of the furnace, such as the furnace bottom wall, and the bottom soft felt 4 is formed with a through-hole 5.
[0042] According to the above-described structure, a bottom soft felt 4 is designed between the inner wall of the furnace, such as the furnace bottom wall, and the second fixing felt 2, that is, the lower fixing felt, thus avoiding the problem that the second fixing felt 2, that is, the lower fixing felt, directly contacts the furnace bottom plate, resulting in a short service life of the fixing felt. Moreover, the bottom soft felt 4 occupies a part of the height of the fixing felt, so the height of the fixing felt can be reduced, which helps to save materials, that is, helps to reduce the material cost.
[0043] In this embodiment, preferably, as Figure 3 shown, the number of the intermediate soft felts 3 is two, and they are sequentially arranged between the first fixing felt 1 and the second fixing felt 2 along the preset direction.
[0044] According to the structure described above, the two soft felts can separate the first fixed felt 1, i.e. the upper fixed felt, and the second fixed felt 2, i.e. the lower fixed felt, to reduce heat transfer. Moreover, the number of soft felts is small and powdering is not likely to occur.
[0045] It should be noted that the number of the middle soft felt 3 is not limited to two, but can also be one or more than two, such as three or four, etc., which is selected according to actual needs.
[0046] In this embodiment, preferably, Figure 3 and Figure 5 As shown, a second groove 13 is formed on one side of the first fixing felt 1 close to the second fixing felt 2 , and the second groove 13 is connected to both the mounting through hole 12 and the through hole 5 .
[0047] According to the structure described above, it can be seen that by opening the second groove 13 on the side of the first fixed felt 1 close to the second fixed felt 2, the contact area is reduced, the solid-solid heat transfer is converted into solid-gas heat transfer, the heat damage at the bottom is reduced, and the thermal insulation of the single crystal furnace bottom is guaranteed, thereby reducing the power of the furnace during the production process and greatly saving energy.
[0048] It should be noted that the second groove 13 is not limited to being formed on the side of the first fixing felt 1 close to the second fixing felt 2, but the second groove 13 can also be opened on the side of the second fixing felt 2 close to the first fixing felt 1, or the second groove 13 can be opened on both the side of the first fixing felt 1 close to the second fixing felt 2 and the side of the second fixing felt 2 close to the first fixing felt 1.
[0049] In this embodiment, preferably, Figure 3 and Figure 8 As shown, a third groove 21 is formed on the side of the second fixing felt 2 facing away from the first fixing felt 1 , and the third groove 21 is connected to the through hole 5 .
[0050] According to the structure described above, it can be known that by opening a second groove 13 on the side of the second fixed felt 2 close to the furnace wall, such as the furnace bottom wall, the contact area is reduced, solid-solid heat transfer is converted into solid-gas heat transfer, the heat damage at the bottom is reduced, and the thermal insulation of the single crystal furnace bottom is ensured, thereby reducing the power of the furnace during the production process and greatly saving energy.
[0051] In this embodiment, preferably, Figure 1 and Figure 3 As shown, the center line of the first groove 11 extending along the preset direction coincides with the center line of the first fixed felt 1 along the preset direction.
[0052] According to the structure described above, align the center of the first groove 11 with the center line of the first fixing felt 1 to ensure the assembly accuracy between the furnace body and other components inside the furnace, and improve the stability and reliability of the support of the fixing felt for the internal components of the furnace.
[0053] Furthermore, preferably, the center lines of the aforementioned second groove 13 and third groove 21 extending along the preset direction coincide with the center line of the first groove 11. Of course, it is not limited to this.
[0054] It should be noted that: it is not limited to the "center line of the first groove 11 extending along the preset direction coincides with the center line of the first fixing felt 1 along the preset direction" described above, and there can also be a certain deviation between the center lines of the two, which is specifically designed according to actual needs.
[0055] In this embodiment, preferably, as Figure 1 shown, the number of mounting through holes 12 is seven.
[0056] According to the structure described above, a plurality of mounting through holes 12 are designed to respectively install structures such as support rods, main bottom electrodes, and air guide cylinders, improving the convenience of assembly.
[0057] It should be noted that: the number of mounting through holes 12 is not limited to the seven mentioned above. The number of mounting through holes 12 can also be less than seven, such as five, four, or three, etc. The number of mounting through holes 12 can also be greater than seven, such as eight, nine, or eleven, etc., and is specifically selected according to actual needs.
[0058] In this embodiment, preferably, as Figure 1 shown, one of the plurality of mounting through holes 12 is arranged at the center of the first fixing felt 1, and the remaining mounting through holes 12 are arranged in a circular ring with the center of the first fixing felt 1 as the center.
[0059] According to the structure described above, the arrangement of the plurality of mounting through holes 12 is more regular, facilitating processing and manufacturing as well as subsequent assembly.
[0060] Furthermore, preferably, except for the mounting through hole 12 at the center, the number of the remaining mounting through holes 12 can be an even number, and the even number of mounting through holes 12 is divided into two groups with the same number of mounting through holes 12, and the two groups of mounting through holes 12 are symmetrically arranged. The central angle between two adjacent mounting through holes 12 in each group of mounting through holes 12 is 45°. Of course, it is not limited to this, and the number and arrangement of the mounting through holes 12 can also be designed according to actual needs.
[0061] In this embodiment, preferably, the diameter of the first fixing felt 1 is 1560 mm, and the thickness of the first fixing felt 1 along the preset direction is 110 mm; the diameter of the first groove 11 is 1005 mm, and the depth of the first groove 11 is 50 mm.
[0062] According to the structure described above, the depth of the first groove 11 is approximately half of the thickness of the first fixing felt 1. While ensuring the support effect, it ensures that the first groove 11 has sufficient depth to accommodate enough gas, and also forms a heat conduction method between the gas and the solid, reducing the heat dissipation rate at the bottom, ensuring the heat preservation of the single crystal furnace bottom, thereby reducing the power of the furnace platform during the production process and greatly saving energy.
[0063] It should be noted that: the diameter and depth of the first fixing felt 1 are not limited to the above, and can be greater or less than the above data. The diameter and depth of the first groove 11 are not limited to the above, and can be greater or less than the above data, and are specifically selected according to actual needs.
[0064] In this embodiment, preferably, as Figures 6 to 9 shown, the first fixing felt 1, the second fixing felt 2, the intermediate soft felt 3, and the bottom soft felt 4 are all in a disk-shaped structure that matches each other.
[0065] According to the structure described above, the first fixing felt 1, the second fixing felt 2, and the soft felt all adopt a disk-shaped structure, which meets the usage environment of the furnace bottom, and has a more regular shape, facilitating processing, manufacturing, and assembly.
[0066] It should be noted that: the first fixing felt 1 is not limited to a disk-shaped structure, and can also adopt other shapes. For example: the first fixing felt 1 can also be square, hexagonal, or oval, etc., and is specifically selected according to actual needs;
[0067] The second fixing felt 2 is not limited to a disk-shaped structure either, and can also adopt other shapes. For example: the first fixing felt 1 can also be square, hexagonal, or oval, etc., and is specifically selected according to actual needs;
[0068] The intermediate soft felt 3 and the bottom soft felt 4 are not limited to a disk-shaped structure either, and can also adopt other shapes. For example: the intermediate soft felt 3 and the bottom soft felt 4 can also be square, hexagonal, or oval, etc., and are specifically selected according to actual needs.
[0069] In addition, it should also be noted that: preferably, the materials of the first fixing felt and the second fixing felt are the same as those of the upper fixing felt and the lower fixing felt in the prior art; the materials of the intermediate soft felt and the bottom soft felt are the same as those of the soft felt in the prior art.
[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A fixed felt, characterized in that: include: A first fixed felt, a second fixed felt and an intermediate soft felt; wherein the first fixed felt and the second fixed felt are sequentially installed on the inner wall of the furnace along a preset direction, and the first fixed felt is arranged close to the furnace, and the intermediate soft felt is installed between the first fixed felt and the second fixed felt; Along the preset direction, the first fixed felt is formed with a first groove and an installation through hole which are arranged in sequence and connected, and the first groove is arranged close to the inner side of the furnace; along the preset direction, the soft felt and the fixed felt are both formed with through holes corresponding to the installation through holes.
2. The fixing felt according to claim 1, characterized in that: The fixed felt further includes a bottom soft felt, and the bottom soft felt is installed between the second fixed felt and the furnace inner wall, and the bottom soft felt is formed with a through hole.
3. The fixing felt according to claim 1, characterized in that: There are a plurality of intermediate soft felts, which are sequentially arranged between the first fixed felt and the second fixed felt along the preset direction.
4. The fixing felt according to claim 1, characterized in that: A second groove is formed on at least one of the sides of the first fixing felt and the second fixing felt that are close to each other, and the second groove is communicated with both the mounting through hole and the through hole.
5. The fixing felt according to claim 1, characterized in that: A third groove is formed on a side of the second fixing felt facing away from the first fixing felt, and the third groove is communicated with the through hole.
6. The fixing felt according to claim 1, characterized in that: The center line of the first groove coincides with the center line of the first fixing felt.
7. The fixing felt according to claim 6, characterized in that: The number of the mounting through holes is multiple.
8. The fixing felt according to claim 7, characterized in that: One of the plurality of mounting through holes is disposed at the center of the first fixing felt, and the remaining mounting through holes are arranged in a circular ring with the center of the first fixing felt as the center.
9. The fixing felt according to claim 1, characterized in that: The diameter of the first fixing felt is 1560 mm, and the thickness of the first fixing felt along the preset direction is 110 mm; the diameter of the first groove is 1005 mm, and the depth of the first groove is 50 mm.
10. The fixing felt according to any one of claims 1 to 9, characterized in that The first fixed felt is in the shape of a disc; and / or The second fixed felt is in the shape of a disc; and / or The middle soft felt is in a disc shape.