Vacuum pump shaft seal preassembling tool, preassembling system and vacuum pump shaft seal

By designing the pre-assembled tooling for the vacuum pump shaft seal, the uniform assembly of the shaft seal and the shaft sleeve is achieved, the seal failure problem caused by uneven stress on the shaft seal lip is solved, and the reliability and stability of the vacuum pump are improved.

CN222910763UActive Publication Date: 2025-05-27BEIJING GRAND RAY TECH CO LTD +1
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Patent Information

Application Number
CN202422043179.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-22
Publication Date
2025-05-27
Estimated Expiration
2034-08-22

AI Technical Summary

Technical Problem

In the prior art, during the assembly process of the vacuum pump shaft seal, the shaft seal lip is unevenly subjected to the force, resulting in local deformation, surface scratches and inversion, resulting in seal failure, and thus causing process objects or dust in the cavity to enter the oil tank, contaminating the lubricating oil, and affecting the normal operation of the vacuum pump.

Method used

A pre-installed tooling for vacuum pump shaft seal is designed. The top outer diameter of the pre-installed body is smaller than the initial size of the shaft seal lip, the bottom outer diameter is larger than the outer diameter of the shaft sleeve, and the top to the bottom is smoothly transitioned. Through sliding assembly, the shaft seal and the shaft sleeve are uniformly fitted to avoid local deformation and scratches.

Benefits of technology

The shaft seal lip is uniformly subjected to the force, avoiding local deformation, scratches and inversion, ensuring sealing effect, preventing process objects or dust from entering the oil tank, avoiding lubricating oil pollution and high-temperature damage to the bearing, and improving the reliability of the vacuum pump.

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Abstract

The embodiment of the utility model provides a vacuum pump shaft seal preassembling tool, a preassembling system and a vacuum pump shaft seal. The preassembling tool comprises a preassembling body, and the bottom of the preassembling body is used for being connected with a shaft sleeve; in the tool, the outer diameter of the top of a pre-assembling body is smaller than the initial size of a shaft seal lip, the outer diameter of the bottom of the pre-assembling body is larger than that of a shaft sleeve, and the pre-assembling body is in smooth transition from the top to the bottom of the pre-assembling body. During assembling, the shaft seal slides to the bottom of the pre-assembling body from the top of the pre-assembling body and continues to slide to be separated from the bottom of the pre-assembling body so that the shaft seal can be assembled to the shaft sleeve. In the whole assembling process, the shaft seal lip is evenly attached to the side wall of the pre-assembling body, even if the two sides of the shaft seal lip are each of an outwards-turned structure, when the pre-assembling tool is used for assembling, the shaft seal lip is evenly stressed, the problems of local deformation, scratching, inwards-turned and the like do not exist, and sealing failure caused by uneven local stress and deformation of the shaft seal lip is avoided; sealing failure caused by scratch of the local surface of the shaft seal lip is avoided, and sealing failure caused by inward turning of the shaft seal lip is avoided.
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Description

Technical Field

[0001] The embodiments of the present disclosure belong to the technical field of vacuum pump shaft seals, and particularly relate to a pre-assembly tooling for a vacuum pump shaft seal, a pre-assembly system, and a vacuum pump shaft seal. Background Art

[0002] Dry vacuum pumps are essential vacuum source devices in the fields of semiconductor, photovoltaic, panel, chemical, and medical industries. Due to the particularity of the industries where they are used, the working environment of vacuum pumps is extremely harsh.

[0003] As a core component of a dry vacuum pump, the shaft seal plays an important role in isolating the cavity from the oil tank in the dry vacuum pump system, thereby preventing the process materials and dust in the dry vacuum pump cavity from entering the oil tank.

[0004] Currently, the assembly of shaft seals is mostly manual. During the manual assembly process, since the initial inner diameter of the shaft seal lip is much smaller than the outer diameter of the shaft sleeve that the shaft seal mates with, and the shaft seal lip is designed with a structure that turns outward on both sides, it is impossible for the edges of the outward-turned shaft seal lip to fit over the shaft sleeve during the assembly of the shaft seal and the shaft sleeve. Without the aid of tooling for assembly, it is impossible to control the uniform force during the assembly of the shaft seal lip and the shaft sleeve. For example, the shaft seal lip will be subjected to uneven external force extrusion, which will cause local deformation of the lip, surface scratches, and even in severe cases, the lip will turn inward and the seal will fail.

[0005] When the shaft seal lip is locally deformed, scratched on the surface, or turned inward, resulting in seal failure, the process materials or dust in the cavity will enter the oil tank, contaminating the lubricating oil that provides cooling circulation and lubrication in the oil tank. Over time, the lubricating oil will emulsify, the internal cooling circulation and lubrication of the pump body will be blocked, the bearing will quickly heat up due to the high temperature, and the bearing will be damaged due to the high temperature, ultimately resulting in the shutdown of the machine.

[0006] In summary, the following problems exist in the manual assembly of shaft seals:

[0007] 1) The force on the shaft seal lip during manual assembly is uneven, resulting in local deformation and seal failure;

[0008] 2) The force on the shaft seal lip during manual assembly is uneven, resulting in surface scratches and seal failure;

[0009] 3) The shaft seal lip turns inward during manual assembly, resulting in seal failure.

[0010] In view of the above problems, it is necessary to propose a pre-assembly tooling for a vacuum pump shaft seal, a pre-assembly system, and a vacuum pump shaft seal that are reasonably designed and can effectively improve the above problems. Summary of the Utility Model

[0011] The embodiments of the present disclosure aim to at least solve one of the technical problems existing in the prior art, and provide a pre-assembly tooling for a vacuum pump shaft seal, a pre-assembly system, and a vacuum pump shaft seal.

[0012] One aspect of the embodiments of the present disclosure provides a pre-assembly tool for a vacuum pump shaft seal, which is used to assemble the shaft seal to its corresponding shaft sleeve. The pre-assembly tool includes a pre-assembly body, and the bottom of the pre-assembly body is used to connect to the shaft sleeve;

[0013] The outer diameter dimension of the top of the pre-assembly body is smaller than the initial dimension of the shaft seal lip;

[0014] The outer diameter dimension of the bottom of the pre-assembly body is larger than the outer diameter dimension of the shaft sleeve;

[0015] The top of the pre-assembly body to the bottom of the pre-assembly body has a smooth transition;

[0016] During assembly, the shaft seal slides from the top of the pre-assembly body to the bottom of the pre-assembly body and continues to slide away from the bottom of the pre-assembly body to assemble the shaft seal to the shaft sleeve.

[0017] Optionally, the pre-assembly body includes a first sliding part and a second sliding part integrally formed from the top to the bottom; wherein,

[0018] The outer diameter dimension of the first sliding part is less than or equal to the outer diameter dimension of the second sliding part.

[0019] Optionally, the outer diameter dimension of the first sliding part gradually increases from its first end to its second end, and the maximum outer diameter of the first sliding part is less than or equal to the outer diameter dimension of the second sliding part;

[0020] The second sliding part extends with an equal diameter along its axial direction.

[0021] Optionally, the top edge of the pre-assembly body is provided with a circular arc chamfer.

[0022] Optionally, the bottom of the pre-assembly body is provided with a counterbore structure, and the counterbore structure matches the shaft sleeve.

[0023] Optionally, the height range of the counterbore structure is 2 mm to 3 mm, and the wall thickness range of the counterbore structure is 1.5 mm to 2 mm.

[0024] Optionally, the surface roughness of the pre-assembly body < Ra1.6.

[0025] Optionally, the pre-assembly body is formed by using a flexible material.

[0026] Another aspect of the embodiments of the present disclosure provides a vacuum pump shaft seal pre-assembly system, including a shaft seal, a shaft sleeve and a vacuum pump shaft seal pre-assembly tool. The shaft seal is assembled to the shaft sleeve through the vacuum pump shaft seal pre-assembly tool; wherein,

[0027] The vacuum pump shaft seal pre-assembly tool uses the vacuum pump shaft seal pre-assembly tool described above.

[0028] Another aspect of the embodiments of the present disclosure provides a shaft seal for a vacuum pump. The shaft seal is assembled to its corresponding shaft sleeve by using the shaft seal pre-assembly tooling described above.

[0029] The shaft seal pre-assembly tooling, pre-assembly system and shaft seal provided by the embodiments of the present disclosure. Among them, the outer diameter dimension of the top of the pre-assembly body in the pre-assembly tooling is smaller than the initial dimension of the shaft seal lip, the outer diameter dimension of the bottom of the pre-assembly body is larger than the outer diameter dimension of the shaft sleeve, and the top of the pre-assembly body is smoothly transitioned to the bottom of the pre-assembly body. During assembly, the shaft seal slides from the top of the pre-assembly body to the bottom of the pre-assembly body and continues to slide out of the bottom of the pre-assembly body to assemble the shaft seal to the shaft sleeve. During the entire assembly process, the shaft seal lip is evenly attached to the side wall of the pre-assembly body. Even if both sides of the shaft seal lip are outward-turning structures, when using the pre-assembly tooling for assembly, the shaft seal lip is evenly stressed, without problems such as local deformation, scratching, and inward-turning, avoiding seal failure caused by uneven local stress deformation of the shaft seal lip, avoiding seal failure caused by local surface scratching of the shaft seal lip, and avoiding seal failure caused by inward-turning of the shaft seal lip. Description of the Drawings

[0030] Figure 1 It is a schematic structural diagram and a cross-sectional view along the A-A direction of a shaft seal pre-assembly tooling for a vacuum pump according to an embodiment in the embodiments of the present disclosure;

[0031] Figure 2 It is a schematic diagram of the assembly process of a shaft seal assembled to a shaft sleeve by a pre-assembly tooling and a cross-sectional view along the A-A direction according to another embodiment in the embodiments of the present disclosure;

[0032] Figure 3 It is a schematic structural diagram and a cross-sectional view along the B-B direction after the shaft seal is assembled according to another embodiment in the embodiments of the present disclosure. Detailed Embodiments

[0033] To enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the following further describes the embodiments of the present disclosure in detail in conjunction with the drawings and specific embodiments.

[0034] As Figure 1 and Figure 2 shown, one aspect of the embodiments of the present disclosure provides a shaft seal pre-assembly tooling for assembling a shaft seal 210 to its corresponding shaft sleeve 220. The pre-assembly tooling includes a pre-assembly body 110, and the bottom of the pre-assembly body 110 is used to connect to the shaft sleeve 220.

[0035] The outer diameter dimension of the top of the pre-assembly body 110 is smaller than the initial dimension of the shaft seal lip 211.

[0036] The outer diameter dimension of the bottom of the pre-assembly body 110 is larger than the outer diameter dimension of the shaft sleeve 220.

[0037] The top of the pre-installed body 110 transitions smoothly to the bottom of the pre-installed body 110 .

[0038] During assembly, the shaft seal 210 slides from the top of the pre-assembled body 110 to the bottom of the pre-assembled body 110 , and continues to slide away from the bottom of the pre-assembled body 110 , so as to assemble the shaft seal 210 on the shaft sleeve 220 .

[0039] Specifically, before the shaft seal is assembled, the shaft sleeve 220 is placed horizontally on the workbench, the bottom of the pre-assembled body 110 is assembled onto the shaft sleeve 220, and the end of the shaft seal 210 with the vent upward is upward, and it is slowly slid vertically downward from the top of the pre-assembled body 110 to the bottom of the pre-assembled body 110. During the sliding process, the shaft seal lip 211 increases from the initial size to the preset size; then the shaft seal 210 continues to slide downward until it is separated from the bottom of the packaging body 110. The separated shaft seal 210 will be sleeved on the shaft sleeve 220, and the pre-assembled body 110 and the shaft sleeve 220 are separated, and the position of the shaft seal 210 is adjusted so that the vent hole of the shaft seal 210 is aligned with the shaft sleeve 220. Figure 3 The shaft seal 210 and the shaft sleeve 220 are shown assembled.

[0040] The vacuum pump shaft seal pre-installation tooling provided in the embodiment of the present disclosure has a top outer diameter dimension of a pre-installed body in the pre-installation tooling that is smaller than the initial dimension of the shaft seal lip, a bottom outer diameter dimension of the pre-installed body that is larger than the outer diameter dimension of the shaft sleeve, and a smooth transition from the top of the pre-installed body to the bottom of the pre-installed body. During the entire assembly process, the shaft seal lip is evenly fitted to the side wall of the pre-installed body, and even if both sides of the shaft seal lip are outward-turned structures, the shaft seal lip is evenly stressed during assembly using the pre-installation tooling, without local deformation, scratches, inversion, and other problems. This solves the problem of failure of the vacuum pump internal seal due to local deformation, surface scratches, and inversion of the lip, which leads to process materials or dust in the cavity entering the oil tank, causing the cooling circulation and lubrication lubricating oil in the oil tank to be contaminated, resulting in emulsification of the lubricating oil over a long period of time, obstruction of cooling circulation and lubrication inside the pump body, and rapid heating of the bearings, which is damaged by high temperature and ultimately causes the machine to shut down.

[0041] For example, Figure 1 As shown, the pre-installed body 110 includes a first sliding portion 111 and a second sliding portion 112 integrally formed from the top to the bottom of the pre-installed body 110. The outer diameter of the first sliding portion 111 is less than or equal to the outer diameter of the second sliding portion 112. In other words, the shaft seal 210 slides from the first sliding portion 111 to the second sliding portion 112. The connection between the first sliding portion 111 and the second sliding portion 112 is an arc transition without sharp points or steps.

[0042] Exemplarily, the outer diameter dimension of the first sliding portion 111 gradually increases from its first end to its second end, and the maximum outer diameter of the first sliding portion 111 is less than or equal to the outer diameter dimension of the second sliding portion 112. As Figure 1 shown, in this embodiment, the side wall of the first sliding portion 111 is an arc-shaped inclined surface.

[0043] The second sliding portion 112 extends with an equal diameter along its axial direction. As Figure 1 shown, in this embodiment, the side wall of the second sliding portion 112 is a vertical surface.

[0044] Specifically, when the shaft seal 210 is sleeved into the first sliding portion 111 from its first end and slides towards the second end of the first sliding portion 111, the size of the shaft seal lip 211 will gradually increase to a preset size. Then, the shaft seal lip 211 slides vertically along the first end of the second sliding portion 112 to the second end of the second sliding portion 112 at the preset size.

[0045] Exemplarily, as Figure 1 and Figure 2 shown, the top edge of the pre-assembled body 110 is provided with a rounded chamfer. That is to say, the top edge area of the pre-assembled body 110 is smoothly arranged. In this way, when the shaft seal 210 is sleeved from the top of the pre-assembled body 110, the shaft seal lip will not be damaged.

[0046] Exemplarily, as Figure 1 shown, a counterbore structure 120 is provided at the bottom of the pre-assembled body 110, and the counterbore structure 120 is matched with the shaft sleeve 220. Before the shaft seal is assembled, the shaft sleeve 210 is placed horizontally on the workbench, and the pre-assembled body 110 is assembled onto the shaft sleeve 220 through the counterbore structure 120 at its bottom.

[0047] Exemplarily, the height range of the counterbore structure 120 is 2 mm to 3 mm, and the wall thickness range of the counterbore structure 120 is 1.5 mm to 2 mm. The dimensions of the counterbore structure 120 are not specifically limited in this embodiment and can be adjusted according to the dimensions of the shaft sleeve 220 as long as it can be assembled with the shaft sleeve.

[0048] Exemplarily, in this embodiment, the surface roughness of the pre-assembled body 110 < Ra1.6, which can reduce the friction between the shaft seal lip 211 and the surface of the pre-assembled body 110, enable the shaft seal 210 to slide better from the top of the pre-assembled body 110 to the bottom of the pre-assembled body 110, and avoid scratching the shaft seal lip 211.

[0049] Exemplarily, the pre-assembled body 110 is prepared from a flexible material, which can avoid scratching the shaft seal lip 211 when assembling the shaft seal. In this embodiment, the material of the pre-assembled body 110 is nylon. Of course, the pre-assembled body 110 can also be made of other flexible materials, such as rubber, etc., as long as it can avoid scratching the shaft seal lip 211.

[0050] As Figure 2 shown, another aspect of the embodiments of the present disclosure provides a pre-assembly system for a vacuum pump shaft seal, including a shaft seal 210, a shaft sleeve 220, and a pre-assembly tooling for the vacuum pump shaft seal. The shaft seal 210 is assembled to the shaft sleeve 220 through the pre-assembly tooling for the vacuum pump shaft seal. Among them, the pre-assembly tooling for the vacuum pump shaft seal adopts the pre-assembly tooling for the vacuum pump shaft seal described above. The specific structure of the pre-assembly tooling for the vacuum pump shaft seal has been described in detail above and will not be elaborated here.

[0051] In the pre-assembly system for the vacuum pump shaft seal of the embodiments of the present disclosure, the shaft seal is assembled to the shaft sleeve through the pre-assembly tooling described above. During the entire assembly process, the lip of the shaft seal is evenly attached to the side wall of the pre-assembled body. Even if both sides of the lip of the shaft seal are outward-turning structures, when using the pre-assembly tooling for assembly, the lip of the shaft seal is evenly stressed, without problems such as local deformation, scratching, and inward-turning. It avoids seal failure caused by uneven local stress deformation of the lip of the shaft seal, avoids seal failure caused by local surface scratching of the lip of the shaft seal, and avoids seal failure caused by inward-turning of the lip of the shaft seal.

[0052] Another aspect of the embodiments of the present disclosure provides a vacuum pump shaft seal. The shaft seal is assembled to its corresponding shaft sleeve by using the pre-assembly tooling for the vacuum pump shaft seal described above. The specific structure of the pre-assembly tooling for the vacuum pump shaft seal has been described in detail above and will not be elaborated here.

[0053] The vacuum pump shaft seal of the embodiments of the present disclosure can solve the problem that the internal seal of the vacuum pump fails due to local deformation, surface scratching, and inward-turning of the lip of the shaft seal, resulting in the entry of process materials or dust in the cavity into the fuel tank, contaminating the lubricating oil with cooling circulation and lubrication in the fuel tank, causing the lubricating oil to emulsify over time, hindering the internal cooling circulation and lubrication of the pump body, and the bearing being damaged due to rapid temperature rise and high temperature, ultimately leading to downtime problems, and improving the reliability of the vacuum pump shaft seal.

[0054] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principles of the embodiments of the present disclosure. However, the embodiments of the present disclosure are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present disclosure, and these modifications and improvements are also regarded as the protection scope of the embodiments of the present disclosure.

Claims

1. A vacuum pump shaft seal pre-assembly tool, used to assemble the shaft seal into a corresponding shaft sleeve, characterized in that: The pre-installed tooling comprises a pre-installed body, the bottom of which is used to be connected with the shaft sleeve; The top outer diameter of the pre-installed body is smaller than the initial size of the shaft seal lip; The outer diameter of the bottom of the pre-assembled body is larger than the outer diameter of the sleeve; The top of the pre-installed body transitions smoothly to the bottom of the pre-installed body; During assembly, the shaft seal slides from the top of the pre-installed body to the bottom of the pre-installed body, and continues to slide away from the bottom of the pre-installed body, so that the shaft seal is assembled to the shaft sleeve.

2. The pre-installed tooling according to claim 1, characterized in that: The pre-installed body includes a first sliding portion and a second sliding portion integrally formed from the top to the bottom; wherein The outer diameter of the first sliding portion is smaller than or equal to the outer diameter of the second sliding portion.

3. The pre-installed tooling according to claim 2, characterized in that: The outer diameter of the first sliding part gradually increases from the first end to the second end, and the maximum outer diameter of the first sliding part is less than or equal to the outer diameter of the second sliding part; The second sliding portion extends with equal diameter along the axial direction thereof.

4. The pre-installation tool according to any one of claims 1 to 3, characterized in that: The top edge of the pre-installed body is arranged in the form of an arc chamfer.

5. The pre-installation tool according to any one of claims 1 to 3, characterized in that: A sink structure is provided at the bottom of the pre-installed body, and the sink structure matches the shaft sleeve.

6. The pre-installation tool according to claim 5, characterized in that: The height of the sinking platform structure ranges from 2 mm to 3 mm, and the wall thickness of the sinking platform structure ranges from 1.5 mm to 2 mm.

7. The pre-installation tool according to any one of claims 1 to 3, characterized in that: The surface roughness of the pre-installed body is less than Ra1.

6.

8. The pre-installation tool according to any one of claims 1 to 3, characterized in that: The pre-installed body is made of flexible material.

9. A vacuum pump shaft seal pre-installation system, characterized in that: It comprises a shaft seal, a shaft sleeve and a vacuum pump shaft seal pre-installation tool, wherein the shaft seal is assembled on the shaft sleeve through the vacuum pump shaft seal pre-installation tool; wherein, The vacuum pump shaft seal pre-installation tooling adopts the vacuum pump shaft seal pre-installation tooling according to any one of claims 1 to 8.

10. A vacuum pump shaft seal, characterized in that: The vacuum pump shaft seal pre-assembly tooling according to any one of claims 1 to 8 is used to assemble the shaft seal to the corresponding shaft sleeve.