Vacuum pressure sintering furnace

Abstract

The utility model relates to the technical field of pressure sintering furnaces, in particular to a vacuum pressure sintering furnace, which comprises a first double-sided sealing gate valve, a second double-sided sealing gate valve, a third double-sided sealing gate valve, a fourth double-sided sealing gate valve, a fifth double-sided sealing gate valve, a preheating area, a reducing area, a vacuum crimping area and a first cooling area. The preheating area, the reduction area, the vacuum pressure welding area and the first cooling area are arranged according to the working process, and the sealing performance of the vacuum pressure sintering furnace is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure sintering furnaces, in particular to a vacuum pressure sintering furnace. Background Art

[0002] A chip pressure sintering furnace is a device for processing products by heating and pressing. In a common chip pressure sintering furnace, the furnace cavity is not a completely closed structure. When the chip is sintered, the temperature is relatively high, and the chip and the substrate are prone to oxidation or doping with other impurities during sintering, which affects the quality of chip pressure sintering and encapsulation. Therefore, it is of great significance to realize better preheating and cooling of the chip pressure sintering furnace and reduce the oxidation of the chip and the substrate for improving the product quality. A pressure sintering furnace with high sealing performance is very important for reducing oxidation. Summary of the Invention

[0003] The utility model provides a vacuum pressure sintering furnace to solve the problem of poor sealing performance of the gate valve in the prior art.

[0004] The utility model provides a vacuum pressure sintering furnace, which includes a first double-sided sealing gate valve, a second double-sided sealing gate valve, a third double-sided sealing gate valve, a fourth double-sided sealing gate valve, a fifth double-sided sealing gate valve, a preheating zone, a reduction zone, a vacuum pressure bonding zone and a first cooling zone; the preheating zone, the reduction zone, the vacuum pressure bonding zone and the first cooling zone are arranged according to the working process. The inlet end of the preheating zone is hermetically provided with the first double-sided sealing gate valve, the outlet end of the preheating zone is hermetically provided with the second double-sided sealing gate valve, the inlet end of the reduction zone is hermetically provided with the second double-sided sealing gate valve, the outlet end of the reduction zone is hermetically provided with the third double-sided sealing gate valve, the inlet end of the vacuum pressure bonding zone is hermetically provided with the third double-sided sealing gate valve, the outlet end of the vacuum pressure bonding zone is hermetically provided with the fourth double-sided sealing gate valve, the inlet end of the first cooling zone is hermetically provided with the fourth double-sided sealing gate valve, and the outlet end of the first cooling zone is hermetically provided with the fifth double-sided sealing gate valve.

[0005] According to the vacuum pressure sintering furnace of the utility model, the first double-sided sealing gate valve includes a driving assembly, an installation frame, a driving body assembly, a gas pipe, a first valve plate and a second valve plate; the driving assembly is fixed at the middle position of the upper part of the installation frame, passes through the upper cross beam of the installation frame and is fixedly connected with the driving body assembly. The first valve plate and the second valve plate are hermetically hinged on both sides of the driving body assembly, and the gas pipe is arranged at the lower part of the installation frame.

[0006] According to the vacuum pressure sintering furnace of the utility model, the driving assembly includes a cylinder and a corrugated push rod. The cylinder is arranged above the corrugated push rod, and the corrugated push rod is fixedly connected with the middle position of the driving body assembly.

[0007] The vacuum pressure sintering furnace according to the present utility model further includes a first roller assembly, and a plurality of first roller assemblies are arranged on both sides of the driving body assembly.

[0008] The vacuum pressure sintering furnace according to the present utility model further includes a second roller and a third roller. Second rollers are arranged on both sides of the first valve plate, third rollers are arranged on both sides of the second valve plate, and the second rollers and the third rollers are arranged in the middle of the first roller assembly.

[0009] In the vacuum pressure sintering furnace according to the present utility model, at least one limiting wheel assembly is arranged on the lower cross beam of the installation frame.

[0010] In the vacuum pressure sintering furnace according to the present utility model, the diameters of the second roller and the third roller are smaller than the diameter of the first roller of the first roller assembly.

[0011] In the vacuum pressure sintering furnace according to the present utility model, the hinge setting is specifically that the first valve plate and the driving body assembly are hinged through a first hinge, the second valve plate and the driving body assembly are hinged through a second hinge, and the included angle between the first hinge and the second hinge during operation is 80 - 85 degrees.

[0012] The first roller assembly of the vacuum pressure sintering furnace according to the present utility model includes a first roller, a fourth roller and a roller shaft. The roller shaft passes through the center of the first roller, and the fourth roller is perpendicular to the first roller and fixed on the roller shaft.

[0013] The vacuum pressure sintering furnace according to the present utility model further includes a second cooling zone and a third cooling zone. The second cooling zone is the next working station area of the first cooling zone, and the third cooling zone is the next working station area of the second cooling zone.

[0014] Nitrogen is filled into the plug valve through a gas pipe, and due to the pressure inside the plug valve, the first valve plate and the second valve plate have better sealing performance, improving the sealing performance of the plug valve, and thus providing the sealing performance of the vacuum pressure sintering furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for describing the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic front view structure diagram of the vacuum pressure sintering furnace;

[0017] Figure 2 Schematic diagram of the three-dimensional structure of the first double-sided sealed plug valve Figure 1 ;

[0018] Figure 3 Schematic diagram of the three-dimensional structure of the first double-sided sealed plug valve Figure 2 ;

[0019] Figure 4 Schematic diagram of the three-dimensional structure of the driving body assembly;

[0020] Figure 5 Schematic diagram of the three-dimensional structure of the first roller assembly;

[0021] Reference numerals: 1. Installation frame; 2. Driving assembly; 3. Driving body assembly; 4. First valve plate; 5. Second valve plate; 6. First roller assembly; 7. Second roller; 8. Third roller; 9. Gas pipe; 10. Limiting wheel assembly; 11. First double-sided sealed plug valve; 12. Second double-sided sealed plug valve; 13. Third double-sided sealed plug valve; 14. Fourth double-sided sealed plug valve; 15. Fifth double-sided sealed plug valve; 16. Sixth double-sided sealed plug valve; 17. Seventh double-sided sealed plug valve; 24. Preheating zone; 25. Reduction zone; 26. Vacuum crimping zone; 27. First cooling zone; 28. Second cooling zone; 29. Third cooling zone; 20. Lifting mechanism; 21. Cylinder; 22. Bellows; 31. First hinge; 33. Second hinge; 34. Driving body; 61. Fourth roller; 62. Roller shaft; 63. First roller. Detailed implementation manners

[0022] The following further describes in detail the implementation manners of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0023] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0024] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0025] In the embodiments of the present utility model, unless otherwise clearly specified and defined, a first feature being "on" or "under" a second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, a first feature being "above", "over" and "on top of" a second feature may be that the first feature is directly above or obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. A first feature being "under", "below" and "beneath" a second feature may be that the first feature is directly below or obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0026] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0027] The following is combined with Figures 1-5Describe a vacuum pressure sintering furnace according to an embodiment of the present utility model, including a first double-sided sealed flap valve 11, a second double-sided sealed flap valve 12, a third double-sided sealed flap valve 13, a fourth double-sided sealed flap valve 14, a fifth double-sided sealed flap valve 15, a preheating zone 24, a reduction zone 25, a vacuum bonding zone 26 and a first cooling zone 27; The preheating zone 24, the reduction zone 25, the vacuum bonding zone 26 and the first cooling zone 27 are arranged according to the working process. The inlet end of the preheating zone 24 is sealed with a first double-sided sealed flap valve 11, and the outlet end of the preheating zone 24 is sealed with a second double-sided sealed flap valve 12. The inlet end of the reduction zone 25 is sealed with the second double-sided sealed flap valve 12, and the outlet end of the reduction zone 25 is sealed with a third double-sided sealed flap valve 13. The inlet end of the vacuum bonding zone 26 is sealed with the third double-sided sealed flap valve 13, and the outlet end of the vacuum bonding zone 26 is sealed with a fourth double-sided sealed flap valve 14. The inlet end of the first cooling zone 27 is sealed with the fourth double-sided sealed flap valve 14, and the outlet end of the first cooling zone 27 is sealed with a fifth double-sided sealed flap valve 15.

[0028] The first double-sided sealed flap valve 11, the second double-sided sealed flap valve 12, the third double-sided sealed flap valve 13, the fourth double-sided sealed flap valve 14 and the fifth double-sided sealed flap valve 15 are all the same flap valves or partially the same flap valves.

[0029] In this embodiment, it further includes a second cooling zone 28 and a third cooling zone 29. The second cooling zone 28 is the next working station area of the first cooling zone 27, and the third cooling zone 29 is the next working station area of the second cooling zone. The inlet end of the second cooling zone 28 is provided with a fifth double-sided sealed flap valve 15, the outlet end of the second cooling zone 28 is provided with a sixth double-sided sealed flap valve 16, the inlet end of the third cooling zone 29 is provided with the sixth double-sided sealed flap valve 16, and the outlet end of the third cooling zone 29 is provided with a seventh double-sided sealed flap valve 17.

[0030] In this embodiment, the first double-sided sealed flap valve 11 includes a driving assembly 2, a mounting frame 1, a driving body assembly 3, a gas pipe 9, a first valve plate 4 and a second valve plate 5; The driving assembly 2 is fixed at the upper middle position of the mounting frame 1, passes through the upper cross beam of the mounting frame 1 and is fixedly connected to the driving body assembly 3. The first valve plate 4 and the second valve plate 5 are hinged on both sides of the driving body assembly 3, and a gas pipe 9 is arranged at the lower part of the mounting frame 1. There are 2 vertical plates arranged outside the mounting frame 1, and the first valve plate 4 and the second valve plate 5 tightly press the sealing strips on the vertical plates for sealing. The gas pipe 9 is filled with inert gas, preferably nitrogen. The gas pipe 9 preferably has both an air inlet and an air outlet.

[0031] In this embodiment, the driving assembly 2 includes a cylinder 21 and a corrugated push rod 22. The cylinder 21 is arranged above the corrugated push rod 22, and the corrugated push rod 22 is fixedly connected to the middle position of the driving body assembly 3. Specifically, the cylinder 21 is fixed on the upper cross beam of the mounting frame 1 through a buffer gasket, and the corrugated push rod 22 drives the driving body assembly 3 to move up and down for sealing.

[0032] In this embodiment, a first roller assembly 6 is further included. A plurality of first roller assemblies 6 are arranged on both sides of the driving body assembly 3. The first roller assembly 6 includes a first roller 63, a fourth roller 61 and a roller shaft 62. The roller shaft 62 passes through the center of the first roller 63, and the fourth roller 61 is perpendicular to the first roller 63 and fixed on the roller shaft 62. The up and down movement of the cylinder 21 causes the first roller 63 to move up and down on the vertical plate for sealing. The fourth roller 61 also moves up and down.

[0033] In this embodiment, a second roller 7 and a third roller 8 are further included. The second roller 7 is arranged on both sides of the first valve plate 4, and the third roller 8 is arranged on both sides of the second valve plate 5. The second roller 7 and the third roller 8 are arranged in the middle of the first roller assembly 6.

[0034] In this embodiment, at least one limiting wheel assembly 10 is arranged on the lower cross beam of the mounting frame 1. The limiting wheel assembly 10 limits the movement range of the driving body assembly 3. The movement safety of the driving body assembly 3 is ensured.

[0035] In this embodiment, the diameters of the second roller 7 and the third roller 8 are smaller than the diameter of the first roller 63 of the first roller assembly 3. It is ensured that the first valve plate 4 and the second valve plate 5 are not stuck by the vertical plate.

[0036] In this embodiment, the driving body assembly 3 includes a plurality of first hinges 31, a plurality of second hinges 32 and a driving body 33. The first hinges 31 are arranged on one side of the driving body 33, and the second hinges 32 are arranged on the other side of the driving body 33. The articulated setting is specifically that the first valve plate 4 and the driving body assembly 3 are articulated through the first hinges 31, and the second valve plate 5 and the driving body assembly 3 are articulated through the second hinges 32. The included angle between the first hinge 31 and the second hinge 32 during operation is 80 - 85 degrees.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A vacuum pressure sintering furnace, characterized in that: It comprises a first double-sided sealed gate valve, a second double-sided sealed gate valve, a third double-sided sealed gate valve, a fourth double-sided sealed gate valve, a fifth double-sided sealed gate valve, a preheating zone, a reduction zone, a vacuum pressing zone and a first cooling zone; the preheating zone, the reduction zone, the vacuum pressing zone and the first cooling zone are arranged according to the working process, the inlet end of the preheating zone is sealed with the first double-sided sealed gate valve, the outlet end of the preheating zone is sealed with the second double-sided sealed gate valve, the inlet end of the reduction zone is sealed with the second double-sided sealed gate valve, the outlet end of the reduction zone is sealed with the third double-sided sealed gate valve, the inlet end of the vacuum pressing zone is sealed with the third double-sided sealed gate valve, the outlet end of the vacuum pressing zone is sealed with the fourth double-sided sealed gate valve, the inlet end of the first cooling zone is sealed with the fourth double-sided sealed gate valve, and the outlet end of the first cooling zone is sealed with the fifth double-sided sealed gate valve.

2. The vacuum pressure sintering furnace according to claim 1, characterized in that: The first double-sided sealed gate valve includes a drive assembly, a mounting frame, a drive body assembly, a gas pipe, a first valve plate and a second valve plate; the drive assembly is fixed at the upper middle position of the mounting frame, and is fixedly connected to the drive body assembly through an upper cross beam of the mounting frame, the first valve plate and the second valve plate are hingedly sealed on both sides of the drive body assembly, and a gas pipe is provided at the lower part of the mounting frame.

3. The vacuum pressure sintering furnace according to claim 2, characterized in that: The driving assembly comprises a cylinder and a corrugated push rod, wherein the cylinder is arranged above the corrugated push rod, and the corrugated push rod is fixedly connected to the middle position of the driving body assembly.

4. The vacuum pressure sintering furnace according to claim 2, characterized in that: It also includes a first roller assembly, and a plurality of first roller assemblies are arranged on both sides of the driving body assembly.

5. The vacuum pressure sintering furnace according to claim 4, characterized in that: It also includes a second roller and a third roller. The second rollers are arranged on both sides of the first valve plate, the third rollers are arranged on both sides of the second valve plate, and the second roller and the third roller are arranged in the middle of the first roller assembly.

6. The vacuum pressure sintering furnace according to claim 2, characterized in that: At least one limiting wheel assembly is arranged on the lower cross beam of the installation frame.

7. The vacuum pressure sintering furnace according to claim 5, characterized in that: The diameters of the second roller and the third roller are smaller than the diameter of the first roller of the first roller assembly.

8. The vacuum pressure sintering furnace according to claim 2, characterized in that: The hinged setting is specifically that the first valve plate and the driving body assembly are hinged through a first hinge, the second valve plate and the driving body assembly are hinged through a second hinge, and the angle between the first hinge and the second hinge during operation is 80-85 degrees.

9. The vacuum pressure sintering furnace according to claim 4, characterized in that: The first roller assembly comprises a first roller, a fourth roller and a roller shaft, the roller shaft passes through the center of the first roller, and the fourth roller is perpendicular to the first roller and fixed on the roller shaft.

10. The vacuum pressure sintering furnace according to claim 1, characterized in that: It also includes a second cooling zone and a third cooling zone, wherein the second cooling zone is the next working zone of the first cooling zone, and the third cooling zone is the next working zone of the second cooling zone.

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