Vacuum packaging film air leakage detection device

Abstract

The utility model relates to detection of an outer packaging film bag of a semiconductor wafer silicon wafer box, in particular to an air leakage detection device for a vacuum packaging film. The air leakage detection device is equipment for detecting the air leakage of the packaging film of the semiconductor silicon wafer, and can accurately detect whether the package is intact or not under the condition of not causing any damage to the silicon wafer. Comprising a pre-pressing unit, and a floating unit is arranged at the bottom of the pre-pressing unit. The pre-pressing unit comprises a supporting frame, a linear motion mechanism is arranged on the supporting frame, the linear motion mechanism is connected with a horizontally-arranged pre-pressing plate, at least two guide pressing rods are arranged at the bottom of the pre-pressing plate, and the free ends of the two guide pressing rods are each provided with a round pressing head. The floating unit comprises a floating plate in sliding connection with the guide pressing rod, a suction cup is arranged at the bottom of the floating plate, the top of the floating plate is connected with a piston rod of a linear air cylinder through an inverted U-shaped support, and a cylinder body of the linear air cylinder is installed at the bottom of the pre-pressing plate; a distance measuring sensor is installed at the bottom of the pre-pressing plate.

Description

Technical Field

[0001] The utility model relates to the detection of the outer packaging film bag of semiconductor wafer silicon wafers, and particularly to a leakage detection device for a vacuum packaging film. Background Art

[0002] The packaging quality of semiconductor wafer silicon wafers has a decisive impact on the product qualification rate and the safety during transportation and storage. In order to ensure that the wafer silicon wafers can maintain their optimal performance during transfer, the packaging materials used must meet strict standards. After loading the semiconductor wafer silicon wafers, they are usually placed in a special film bag and vacuum treatment is carried out to exclude external air, avoid damage to the wafers due to oxidation or corrosion, and at the same time effectively reduce the potential threats of pollutants such as dust and microorganisms to semiconductor components, thereby reducing the scrap rate caused by contamination.

[0003] On the production line, the vacuum-packed wafer boxes will be further packed into cases. Before this, leak testing of the vacuum-packed wafer boxes is a necessary step to ensure packaging integrity. However, there are still technical challenges in effectively detecting air leakage in the product-packed boxes, and no completely satisfactory solution has been found yet. In particular, the common leak detection methods in conventional product packaging, such as water immersion and pressurization detection, are not applicable to semiconductor wafer silicon wafers. This is because wafer silicon wafers are precision and high-value products, and any detection process that may damage the wafers is unacceptable. Summary of the Invention

[0004] The utility model aims at the defects existing in the prior art and provides a leakage detection device for a vacuum packaging film. It is a device for detecting air leakage in the packaging film of semiconductor silicon wafers, which can accurately detect whether the packaging is intact without causing any damage to the wafers, thereby ensuring the safety and performance stability of the wafer silicon wafers during the entire transportation and storage process.

[0005] To achieve the above object, the utility model adopts the following technical scheme. A leakage detection device for a vacuum packaging film includes a pre-pressing unit arranged above a product conveying line, and a floating unit is arranged at the bottom of the pre-pressing unit.

[0006] The pre-pressing unit includes a support frame, a linear motion mechanism is arranged on the support frame, the linear motion mechanism is connected to a horizontally arranged pre-pressing plate and drives the pre-pressing plate to move up and down; at least two guiding pressure rods are arranged at the bottom of the pre-pressing plate, and a circular pressing head is arranged at the free end of each of the two guiding pressure rods.

[0007] The floating unit includes a floating plate slidably connected to a guiding pressure rod. A suction cup is provided at the bottom of the floating plate. The top of the floating plate is connected to the piston rod of a linear cylinder through an inverted U-shaped bracket, and the cylinder block of the linear cylinder is installed at the bottom of the pre-pressing plate. A distance measuring sensor is installed at the bottom of the pre-pressing plate to detect the upward displacement of the floating plate to determine whether the packaging film is air-leaking.

[0008] Further, the support frame includes a column installed on one side of the conveying line frame. An upper support plate and a lower support plate are installed in parallel on the column. The upper support plate and the lower support plate are used to support a lead screw. A nut slider is drivingly connected to the lead screw. The nut slider is connected to the pre-pressing plate. And a motor is installed on the upper support plate. The motor is used to drive the lead screw to rotate, forming a linear motion mechanism, and driving the pre-pressing plate to move up and down through the nut slider.

[0009] Further, the lead screw is rotatably connected to the upper support plate and the lower support plate respectively.

[0010] Further, two guiding shafts are vertically arranged between the upper support plate and the lower support plate, and the two guiding shafts (307) are parallel to the lead screw. The pre-pressing plate is slidably connected to the two guiding shafts respectively. The guiding shafts are used to provide smooth linear motion of the pre-pressing plate in the vertical direction.

[0011] Further, there are 4 guiding pressure rods. The top of each guiding pressure rod is fixedly connected to the bottom of the pre-pressing plate, and the bottom of each guiding pressure rod is connected to its respective circular pressing head.

[0012] Further, the circular pressing head is made of rubber material. During detection, the circular pressing head acts on the top of the box-shaped product with a vacuum packaging film.

[0013] Further, the conveying line adopts a roller conveying line.

[0014] Further, the distance measuring sensor is installed at the bottom of the pre-pressing plate through a mounting bracket.

[0015] Further, the top of the inverted U-shaped bracket is connected to the rod end of the piston rod of the linear cylinder, and the bottom end of the top of the inverted U-shaped bracket is fixedly connected to the top of the floating plate.

[0016] Further, a plurality of through holes for the guiding pressure rods to pass through are provided on the floating plate, and the number of through holes is equal to the number of guiding pressure rods and the positions correspond. The floating plate is slidably connected to the guiding pressure rods through the through holes.

[0017] The beneficial effects of the present utility model compared with the prior art.

[0018] The detection device of the utility model is installed on the product packaging production line, which can realize online detection and perform the last vacuum leakage detection process on the products before boxing, with high detection efficiency. The device uses a pre-pressing unit to fix and position the detected products, facilitating the subsequent vacuum detection process; during the vacuum detection, a vacuum suction cup is used to adsorb and pull the packaging film, and a ranging sensor is used to monitor the pulling stroke to determine whether there is air leakage in the vacuum packaging film. Brief Description of the Drawings

[0019] The following further describes the utility model in conjunction with the drawings and specific embodiments. The protection scope of the utility model is not limited to the description of the following content.

[0020] Figure 1 It is a three-dimensional view of a vacuum packaging film air leakage detection device.

[0021] Figure 2 It is a front view of a vacuum packaging film air leakage detection device.

[0022] Figure 3 It is a side view of a vacuum packaging film air leakage detection device.

[0023] Figure 4 It is a front view of the air leakage state of a vacuum packaging film air leakage detection device.

[0024] In the figure, 1, conveyor line; 2, wafer silicon box; 3, pre-pressing unit; 4, floating unit; 5, vacuum packaging film;

[0025] 301, column; 302, lower support plate; 303, upper support plate; 304, motor; 305, pre-pressing plate; 306, lead screw; 307, guide shaft; 308, guide pressure bar; 309, pressing head; 310, fixing nut;

[0026] 401, cylinder; 402, U-shaped bracket; 403, floating plate; 404, mounting rod; 405, suction cup; 406, mounting frame; 407, ranging sensor. Detailed Embodiments

[0027] To better understand the technical solution of the utility model, the following specific implementation schemes are provided; and the following schemes are only for illustration.

[0028] As Figures 1-4 shown, taking the wafer silicon box with a vacuum packaging film as an example of the box-shaped product, the specific structure of the utility model is described.

[0029] The vacuum packaging film air leakage detection device includes a conveyor line 1 for transporting the wafer silicon box 2 with a vacuum packaging film. Above the conveyor line 1, a pre-pressing unit 3 is arranged, and a floating unit 4 is arranged at the bottom of the pre-pressing unit 3.

[0030] The pre-stressing unit 3 includes a support frame, on which a linear motion mechanism is arranged. The linear motion mechanism is connected to a horizontally arranged pre-stressing plate 305, driving the pre-stressing plate 305 to move up and down; at least two guide pressure rods 308 are arranged at the bottom of the pre-stressing plate 305, and a circular pressure head is respectively arranged at the free end of the two guide pressure rods 308.

[0031] The floating unit 4 includes a floating plate 403 slidably connected to the guide pressure rod 308, a suction cup 405 is arranged at the bottom of the floating plate 403, and the top of the floating plate 403 is connected to the piston rod of a linear cylinder 401 through an inverted U-shaped bracket 402, and the cylinder body of the linear cylinder 401 is installed at the bottom of the pre-pressing plate 305; a distance sensor 407 is installed at the bottom of the pre-pressing plate 305 to detect the upward displacement of the floating plate 403 to determine whether the packaging film is leaking. The distance sensor 407 is installed at the bottom of the pre-pressing plate 305 through a mounting bracket 406.

[0032] Preferably, the support frame includes a column 301 installed on one side of the frame of the conveyor line 1, and the conveyor line 1 adopts a roller conveyor line. An upper support plate 303 and a lower support plate 302 are installed in parallel on the column 301, and the upper support plate 303 and the lower support plate 302 are used to support a screw rod 306, and a nut slider is connected to the screw rod 306; the nut slider is connected to the pre-pressing plate 305; and a motor 304 is installed on the upper support plate 303, and the motor 304 is used to drive the screw rod 306 to rotate, forming a linear motion mechanism, and driving the pre-pressing plate 305 to rise and fall through the nut slider. Among them, the screw rod 306 is rotatably connected to the upper support plate 303 and the lower support plate 302 respectively.

[0033] Preferably, two guide shafts 307 are vertically arranged between the upper support plate 303 and the lower support plate 302, and the two guide shafts 307 and the screw rod 306 are parallel to each other; the pre-load plate 305 is slidingly connected to the two guide shafts 307 respectively; the guide shaft 307 is used to provide the pre-load plate 305 with smooth linear motion in the vertical direction.

[0034] Preferably, there are four guide pressure rods 308, the top of each guide pressure rod 308 is fixedly connected to the bottom of the pre-pressing plate 305, and the bottom of each guide pressure rod 308 is connected to its own circular pressure head 309. The circular pressure head 309 is made of rubber material, and during detection, the circular pressure head 309 acts on the top of the wafer silicon box 2.

[0035] Preferably, the top of the inverted U-shaped bracket 402 is connected to the piston rod end of the linear cylinder 401 , and the top and bottom ends of the inverted U-shaped bracket 402 are fixedly connected to the top of the floating plate 403 .

[0036] Preferably, a plurality of through holes for guiding the pressing rod 308 to pass through are provided on the floating plate 403, the number of the through holes is equal to the number of the guiding pressing rods 308, and the positions correspond to each other; the floating plate 403 is slidably connected to the guiding pressing rod 308 through the through holes.

[0037] Principle description:

[0038] The detection device of the utility model adopts the pre-pressing unit 3, which can fix and position the detected product, facilitating the next vacuum detection; for the vacuum detection, the vacuum chuck 405 is used to adsorb and pull the packaging film, and the traction stroke is monitored by the distance measuring sensor to judge whether there is air leakage in the vacuum packaging film.

[0039] The suction cup 405 has a diameter of more than 25 mm. In this way, the vacuum adsorption force of the suction cup 405 can always hold the packaging film; the upward pulling force of the air cylinder is limited such that when there is air leakage in the packaging film, a gap can be generated between the upper surface of the wafer cassette and the packaging film, so that the air cylinder rod can effectively retract a certain distance; when there is no air leakage in the packaging film, no gap is generated between the upper surface of the wafer cassette and the packaging film, so that the air cylinder rod has an upward pulling force but the air cylinder rod has no retraction distance.

[0040] If there is a vacuum air leakage between the wafer cassette and the packaging film, after the suction cup 405 adsorbs the packaging film and the air cylinder rod retracts, under the upward pulling action, a gap will be generated between the upper surface of the wafer cassette and the packaging film, causing the suction cup 405 to move upward a certain distance. The suction cup 405 is installed on the floating plate 403, so that the floating plate 403 will move upward a certain distance. The upper surface of the floating plate 403 will trigger the travel contact of the distance measuring sensor, and the distance measuring sensor outputs the upward travel data of the floating plate 403. When the travel distance exceeds the preset value in advance, it indicates that the packaging film has air leakage.

[0041] If there is no vacuum air leakage between the wafer cassette and the packaging film, after the suction cup 405 adsorbs the packaging film and the air cylinder rod retracts, under the upward pulling action, the packaging film still remains in close contact with the upper surface of the packaging box. At this time, the position of the suction cup 405 does not move, so that the floating plate 403 does not move upward either. The distance measuring sensor outputs the upward travel data of the floating plate 403. When the travel distance does not exceed the preset value in advance, it indicates that the packaging film has no air leakage.

[0042] The working process of the vacuum packaging film air leakage detection device of the utility model:

[0043] 1. When the silicon wafer cassette completes the last vacuum packaging, a layer of vacuum packaging film is formed on the outer surface of the silicon wafer cassette and tightly adsorbed on the surface of the silicon wafer cassette.

[0044] 2. The wafer cassette with a vacuum packaging film enters the next detection process for vacuum leak detection. The wafer cassette is transported by the conveyor line to be positioned below the packaging film detection device.

[0045] 3. The pre-pressing unit of the vacuum packaging film leak detection device is fixedly installed on the side of the conveyor line. When the wafer cassette reaches below the detection device, the motor of the pre-pressing unit starts. The motor drives the pre-pressing plate to move downward through the connected lead screw. A guiding pressure rod is fixedly arranged below the pre-pressing plate, and a pressing head is arranged at the lower end of the guiding pressure rod. The downward movement of the pre-pressing plate makes the pressing head press on the upper surface of the wafer cassette; the pressing head adopts a non-metallic flexible rubber structure and will not damage the surface of the wafer cassette. The magnitude of the pressing force is set by controlling the torque value of the motor.

[0046] 4. When the pressing head presses the wafer cassette tightly, at this time, the air cylinder fixed below the pre-pressing plate is started, and its cylinder rod extends to push the U-shaped bracket connected thereto. The U-shaped bracket is fixedly connected to the floating plate 403. The U-shaped bracket pushes the floating plate 403 to move downward along the guiding pressure rod, so that the suction cup 405 contacts the packaging film on the upper surface of the wafer cassette. The pneumatic vacuum generating system makes the suction cup 405 generate a vacuum to adsorb the sealing film and establish a vacuum system.

[0047] 5. The cylinder rod retracts, driving the U-shaped bracket and the floating plate 403 to move upward. Since the suction cup 405 adsorbs the packaging film, at this time, the suction cup 405 generates an upward pulling force on the packaging film when the cylinder rod retracts.

[0048] 6. If there is a vacuum leak between the wafer cassette and the packaging film, then under the action of the upward pulling of the suction cup 405 on the packaging film, a gap will be generated between the upper surface of the wafer cassette and the packaging film, so that the floating plate 403 will move upward a certain distance. The upper surface of the floating plate 403 will trigger the travel contact of the distance measuring sensor, and the distance measuring sensor outputs the upward travel data of the floating plate 403. When the travel distance output by the distance measuring sensor exceeds the set distance, it indicates that there is a leak in the wafer cassette packaging film. When the travel distance output by the distance measuring sensor does not exceed the set distance, it indicates that there is no leak in the wafer cassette packaging film.

[0049] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that; it is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; therefore, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope defined by the claims of the present invention.

Claims

1. A vacuum packaging film leakage detection device, comprising a pre-pressing unit (3) arranged above a product conveying line (1), characterized in that: A floating unit (4) is provided at the bottom of the pre-pressing unit (3); The pre-pressing unit (3) comprises a support frame, on which a linear motion mechanism is arranged, and the linear motion mechanism is connected to a horizontally arranged pre-pressing plate (305), driving the pre-pressing plate (305) to move up and down; at least two guide pressure rods (308) are arranged at the bottom of the pre-pressing plate (305), and a circular pressure head is arranged at each free end of the two guide pressure rods (308); The floating unit (4) comprises a floating plate (403) slidably connected to the guide pressure rod (308), a suction cup (405) is arranged at the bottom of the floating plate (403), the top of the floating plate (403) is connected to the piston rod of a linear cylinder (401) through an inverted U-shaped bracket (402), and the cylinder body of the linear cylinder (401) is installed at the bottom of the pre-pressing plate (305); a distance measuring sensor (407) is installed at the bottom of the pre-pressing plate (305) for detecting the rising displacement of the floating plate (403) to determine whether the packaging film is leaking.

2. A vacuum packaging film leakage detection device according to claim 1, characterized in that: The support frame comprises a column (301) installed on one side of a frame of a conveyor line (1); an upper support plate (303) and a lower support plate (302) are installed in parallel on the column (301); the upper support plate (303) and the lower support plate (302) are used to support a screw rod (306); a nut slider is transmission-connected to the screw rod (306); the nut slider is connected to a pre-pressing plate (305); and a motor (304) is installed on the upper support plate (303); the motor (304) is used to drive the screw rod (306) to rotate, thereby forming a linear motion mechanism, and the pre-pressing plate (305) is driven to move up and down through the nut slider.

3. A vacuum packaging film leakage detection device according to claim 2, characterized in that: The screw rod (306) is rotatably connected to the upper support plate (303) and the lower support plate (302) respectively.

4. The vacuum packaging film leakage detection device according to claim 2, characterized in that: Two guide shafts (307) are vertically arranged between the upper support plate (303) and the lower support plate (302), and the two guide shafts (307) and the screw rod (306) are parallel to each other; the pre-pressing plate (305) is slidably connected to the two guide shafts (307) respectively; the guide shaft (307) is used to provide the pre-pressing plate (305) with smooth linear motion in the vertical direction.

5. The vacuum packaging film leakage detection device according to claim 1, characterized in that: There are four guide pressure rods (308), the top of each guide pressure rod (308) is fixedly connected to the bottom of the pre-pressing plate (305), and the bottom of each guide pressure rod (308) is connected to its own circular pressure head (309).

6. A vacuum packaging film leakage detection device according to claim 5, characterized in that: The circular pressure head (309) is made of rubber material. During detection, the circular pressure head (309) acts on the top of the box-shaped product with vacuum packaging film.

7. The vacuum packaging film leakage detection device according to claim 1, characterized in that: The distance measuring sensor (407) is installed on the bottom of the pre-pressing plate (305) through a mounting frame (406).

8. The vacuum packaging film leakage detection device according to claim 1, characterized in that: The top of the inverted U-shaped bracket (402) is connected to the piston rod end of the linear cylinder (401), and the top and bottom ends of the inverted U-shaped bracket (402) are fixedly connected to the top of the floating plate (403).

9. The vacuum packaging film leakage detection device according to claim 5, characterized in that: The floating plate (403) is provided with a plurality of through holes for the guide pressure rods (308) to pass through, and the number of the through holes is equal to the number of the guide pressure rods (308) and the positions are corresponding; the floating plate (403) is slidably connected to the guide pressure rods (308) through the through holes.

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