Semiconductor production equipment with guiding and conveying functions

Abstract

The utility model discloses semiconductor production equipment with a guiding and conveying function, which comprises a support clamping frame, transmission guide rollers are rotatably clamped at two ends of the inner end surface of the support clamping frame, and a servo motor is arranged on the side end surface of the support clamping frame and right opposite to the transmission guide rollers. According to the utility model, welding wires are guided to be conveyed for semiconductor accessories, the L-shaped guide chute not only can be used for quickly and accurately feeding the accommodating box body through the limiting clamping shaft, but also can be used for conveniently and stably guiding the accommodating box body, and meanwhile, the positioning insertion shaft and the positioning insertion groove are limited, and the alignment clamping groove and the alignment insertion plate are limited, so that the positioning accuracy is greatly improved through a dual limiting structure. The conveying displacement stability of the containing box bodies on the upper portion of the synchronous conveying belt can be guaranteed, relative sliding and collision caused by synchronous displacement of the multiple containing box bodies are prevented, and the safety performance of the conveyed semiconductor accessories is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor conveying equipment, in particular to a semiconductor production equipment with a guiding and conveying function. Background Technique

[0002] Semiconductor guiding and conveying equipment is an indispensable part of the semiconductor manufacturing process. Their performance and precision directly affect the quality and performance of semiconductor products. Semiconductor guiding and conveying equipment is mainly used to accurately convey and position semiconductor materials or other key components in the manufacturing process.

[0003] For example, the utility model patent with the publication number of CN210984710U, a semiconductor material guiding device and a conveying device, the conveying device includes a bracket structure, a driving device, a synchronous belt, a plurality of boxes capable of placing semiconductor materials and a guiding device; the guiding device includes two sets of guiding structures; the two sets of guiding structures are symmetrically arranged, and the guiding structure includes a guiding rod and a plurality of positioning structures; the positioning structure includes a fixed seat and a positioning plate, the fixed seat is connected with the positioning plate, one end of the positioning plate is provided with a groove capable of cooperating with the guiding rod, and a through groove is arranged on the positioning plate, one end of the through groove is communicated with the groove, and the through groove is arranged in the middle of the positioning plate. The semiconductor material guiding device and the conveying device described in the utility model solve the technical problem that due to the lack of the guiding function of the semiconductor material box body in the traditional conveying mode of the semiconductor material box body, the semiconductor material box body will deviate during the transportation process, and further cause damage to the semiconductor material box body.

[0004] Although the above equipment can guide the semiconductor conveying box through the positioning rod, its stability in positioning and limiting the semiconductor guiding box along the conveying direction is insufficient. At the same time, when multiple groups of semiconductor guiding boxes are synchronously conveyed, they are prone to collide with each other front and back. Therefore, there is an urgent need for a semiconductor production equipment with a guiding and conveying function to solve the above existing problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a semiconductor production equipment with a guiding and conveying function to solve the problems put forward in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: a semiconductor production equipment with a guiding and conveying function, including a support bracket, both ends of the inner end face of the support bracket are rotationally clamped with transmission guide rollers, and a servo motor is arranged on the side end face of the support bracket opposite to the transmission guide rollers.

[0007] Limit sliding plates, there are two groups of limit sliding plates in total, both groups of limit sliding plates are fixedly arranged on the upper end face of the support bracket, and a guiding chute arranged in an L shape is opened on the inner end face of the limit sliding plate.

[0008] A conveying device, wherein the conveying device is slidably connected to the inner end surface of the supporting bracket through two sets of transmission guide rollers;

[0009] A material guiding device is fixedly connected to the upper end surface of the conveying device at equal intervals.

[0010] Preferably, the material guiding device comprises a containing box body, a positioning slot is provided at the center of the lower end surface of the containing box body, and three groups of positioning plug shafts are equidistantly arranged on the inner end surface of the positioning slot, and limiting slot shafts are symmetrically arranged on the side end surface of the containing box body.

[0011] Preferably, the conveying device comprises a synchronous conveyor belt, the outer end surface of the synchronous conveyor belt is equidistantly provided with alignment plug plates, and the upper end surface of the alignment plug plates is equidistantly provided with three groups of positioning slots extending through the interior of the synchronous conveyor belt.

[0012] Preferably, the alignment plug plate is meshedly connected with the two groups of the transmission guide rollers, the diameter of the limit card shaft is equal to the width of the guide slide groove, and the containing box is adapted to the guide slide groove through the limit card shaft and then slidably connected to the inner end surface of the limiting slide plate. The sliding limit of the guide slide groove and the limit card shaft can effectively improve the stability of the subsequent displacement of the containing box on the upper part of the supporting bracket.

[0013] Preferably, a support plate is provided at the center of the upper end surface of the support bracket, and the support plate is slidably and closely connected to the bottom of the synchronous conveyor belt. The support plate can stably support the bottom of the synchronous conveyor belt, thereby improving the stability of the subsequent displacement of the semiconductor accessories carried by the containing box.

[0014] Preferably, the containing box is adapted to the alignment card slot and the alignment plug plate, and the positioning plug shaft is adapted to the positioning slot, and then slidably connected to the upper end surface of the synchronous conveyor belt. The double limiting operation can effectively improve the stability of the subsequent containing box when it is aligned and connected to the upper part of the synchronous conveyor belt, and also improves the stability of the subsequent containing box during displacement.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0016] 1. The utility model guides and conveys welding wire to semiconductor accessories. The L-shaped guide slide groove can not only quickly and accurately load the containing box through the limiting clamp shaft, but also facilitate the stable material guidance of the containing box. At the same time, the limiting of the positioning shaft and the positioning slot and the limiting of the alignment clamp slot and the alignment plug plate, the double limiting structure, can ensure the stability of the conveying displacement of the containing box on the upper part of the synchronous conveyor belt, prevent relative sliding and collision of multiple groups of containing boxes during synchronous displacement, and effectively improve the safety performance of the conveyed semiconductor accessories. Brief Description of the Drawings

[0017] Figure 1 It is an exploded view of the main body of the present utility model;

[0018] Figure 2 It is a schematic structural view of the main body of the present utility model;

[0019] Figure 3 It is a schematic structural view of the material guiding device of the present utility model;

[0020] Figure 4 It is a schematic structural view of the conveying device of the present utility model.

[0021] In the figures: 1 - limiting slide plate, 2 - guiding chute, 3 - material guiding device, 4 - conveying device, 5 - driving guide roller, 6 - supporting bracket, 7 - servo motor, 31 - receiving box body, 32 - limiting clamping shaft, 33 - alignment slot, 34 - positioning insertion shaft, 41 - positioning slot, 42 - alignment insertion plate, 43 - synchronous conveyor belt. Detailed Description of the Preferred Embodiment

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figures 1-4 , an embodiment provided by the present utility model: a semiconductor production device with a guiding and conveying function, including a supporting bracket 6. At both ends of the inner end surface of the supporting bracket 6, driving guide rollers 5 are rotatably clamped, and a servo motor 7 is arranged at the side end surface of the supporting bracket 6 opposite to the driving guide rollers 5.

[0024] Limiting slide plates 1, there are two groups of limiting slide plates 1 in total. Both groups of limiting slide plates 1 are fixedly arranged on the upper end surface of the supporting bracket 6. An L-shaped guiding chute 2 is formed on the inner end surface of the limiting slide plate 1.

[0025] Conveying device 4, the conveying device 4 is slidably connected to the inner end surface of the supporting bracket 6 through two groups of driving guide rollers 5.

[0026] Material guiding device 3, the material guiding device 3 is fixedly clamped at equal intervals on the upper end surface of the conveying device 4.

[0027] The material guiding device 3 comprises a containing box 31 , a positioning slot 33 is provided at the center of the lower end surface of the containing box 31 , and three groups of positioning plug shafts 34 are equidistantly arranged on the inner end surface of the positioning slot 33 , and a limiting slot shaft 32 is symmetrically arranged on the side end surface of the containing box 31 .

[0028] The conveying device 4 includes a synchronous conveyor belt 43 , the outer end surface of which is equidistantly provided with alignment plug plates 42 , and three groups of positioning slots 41 are equidistantly provided on the upper end surface of the alignment plug plates 42 and extending through the interior of the synchronous conveyor belt 43 .

[0029] The alignment plug plate 42 is meshedly connected with the two sets of transmission guide rollers 5, the diameter of the limit card shaft 32 is equal to the width of the guide slide groove 2, and the containing box 31 is adapted to the guide slide groove 2 through the limit card shaft 32 and then slidably connected to the inner end surface of the limiting slide plate 1. The sliding limit of the guide slide groove 2 and the limit card shaft 32 can effectively improve the stability of the subsequent displacement of the containing box 31 on the upper part of the supporting bracket 6.

[0030] A support plate is provided at the center of the upper end surface of the support bracket 6, and the support plate is slidably connected to the bottom of the synchronous conveyor belt 43. The support plate can stably support the bottom of the synchronous conveyor belt 43, thereby improving the stability of the subsequent displacement of the semiconductor accessories carried by the containing box 31.

[0031] The containing box 31 is adapted to the alignment slot 33 and the alignment plug plate 42, and the positioning plug shaft 34 is adapted to the positioning slot 41, and then slidably connected to the upper end surface of the synchronous conveyor belt 43. The double limiting operation can effectively improve the stability of the subsequent alignment and connection of the containing box 31 to the upper part of the synchronous conveyor belt 43, and also improve the stability of the subsequent displacement of the containing box 31.

[0032] Working principle: During use, if it is necessary to load semiconductor accessories, the user can limit multiple groups of semiconductor accessories to the inside of the receiving box 31 through the external loading module, and then position them to the opening of the guide slot 2 through the external guide module. At this time, the limiting card shaft 32 on the side of the receiving box 31 can be positioned inside the guide slot 2. When the receiving box 31 is positioned to the bottom of the guide slot 2, the positioning card slot 33 can be positioned and docked with the positioning plug plate 42, and at the same time, the three groups of positioning plug shafts 34 can be directly positioned and plugged into the fixed position. After the insertion is completed inside the positioning slot 41, the positioning and alignment operation of the containing box 31 is completed. When the semiconductor accessories are loaded, the servo motor 7 can synchronously drive the synchronous conveyor belt 43 to move on the upper part of the supporting bracket 6 through two sets of transmission guide rollers 5. At this time, the guiding of the guide groove 2 and the containing box 31, the alignment of the positioning plug shaft 34 and the positioning slot 41, and the limitation of the alignment plug plate 42 and the alignment card slot 33, the triple locking and limiting structure, can effectively improve the stability of the guiding displacement of the containing box 31 on the upper part of the synchronous conveyor belt 43.

[0033] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor production device with a guiding and conveying function, comprising a support bracket (6), wherein both ends of the inner end surface of the support bracket (6) are rotatably connected to transmission guide rollers (5), and a servo motor (7) is arranged at the side end surface of the support bracket (6) directly opposite to the transmission guide roller (5), characterized in that: A limiting slide plate (1), wherein two groups of the limiting slide plates (1) are provided, and both groups of the limiting slide plates (1) are fixedly arranged on the upper end surface of the supporting bracket (6), and an L-shaped guide groove (2) is provided on the inner end surface of the limiting slide plate (1); A conveying device (4), wherein the conveying device (4) is slidably connected to the inner end surface of the supporting bracket (6) via two sets of transmission guide rollers (5); A material guiding device (3), wherein the material guiding device (3) is fixedly clamped on the upper end surface of the conveying device (4) at equal intervals.

2. The semiconductor production equipment with guided conveying function according to claim 1, characterized in that: The material guiding device (3) comprises a containing box (31), a positioning slot (33) is provided at the center of the lower end surface of the containing box (31), three groups of positioning insert shafts (34) are equidistantly arranged on the inner end surface of the positioning slot (33), and a limiting locking shaft (32) is symmetrically arranged on the side end surface of the containing box (31).

3. The semiconductor production equipment with guided conveying function according to claim 2, characterized in that: The conveying device (4) comprises a synchronous conveyor belt (43), the outer end surface of the synchronous conveyor belt (43) is provided with aligning plug plates (42) at equal intervals, and three groups of positioning slots (41) are provided at equal intervals on the upper end surface of the aligning plug plates (42) and extend through the interior of the synchronous conveyor belt (43).

4. The semiconductor production equipment with guided conveying function according to claim 3, characterized in that: The alignment plug plate (42) is meshedly connected with the two groups of transmission guide rollers (5), the diameter of the limit clamping shaft (32) is equal to the width of the guide slide groove (2), and the containing box (31) is adapted to the guide slide groove (2) through the limit clamping shaft (32) and is then slidably connected to the inner end surface of the limit slide plate (1).

5. The semiconductor production equipment with guided conveying function according to claim 3, characterized in that: A support plate is provided at the center of the upper end surface of the support bracket (6), and the support plate is slidably connected to the bottom of the synchronous conveyor belt (43).

6. The semiconductor production equipment with guided conveying function according to claim 3, characterized in that: The containing box (31) is adapted to the alignment plug plate (42) through the alignment slot (33), and the positioning plug shaft (34) is adapted to the positioning slot (41), and then slidably engaged with the upper end surface of the synchronous conveyor belt (43).

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