Positioning sensing horizontal device and conveying mechanism

Abstract

The utility model relates to the technical field of semiconductor automation, and provides a positioning induction horizontal device which comprises a horizontal leveling bottom plate capable of placing a jig, a pressing induction piece capable of being pressed down by the jig and an inductor capable of being touched by the pressed pressing induction piece, the pressing induction piece is installed on the horizontal leveling bottom plate, and the inductor is installed on the horizontal leveling bottom plate. One end of the horizontal leveling bottom plate is in contact with the jig, the other end of the horizontal leveling bottom plate is in contact with the inductors, the two pressing induction pieces and the two inductors are arranged in a one-to-one correspondence mode, the ends, in contact with the jig, of the pressing induction pieces are located on the same horizontal plane, and the two inductors are located on the same horizontal plane. The utility model further provides a conveying mechanism which comprises a rail conveying device and the positioning induction horizontal device, and the positioning induction horizontal device is installed on the rail conveying device. The levelness detection device is simple in structure, low in cost and high in efficiency, and the levelness of the jig is judged in the mode that a mechanical structure is matched with the inductor.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor automation, and particularly to a positioning and sensing leveling device. Background Art

[0002] When the existing fixture is sent to the next process, it needs to be leveled to ensure that the fixture can stably enter the next process. However, most of the existing leveling detection devices are relatively complex. For example, the visual detection method is adopted, and then parsing, calculation, and judgment are carried out, resulting in a high cost. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a positioning and sensing leveling device, which can at least solve some defects in the prior art.

[0004] To achieve the above purpose, an embodiment of the utility model provides the following technical solution: A positioning and sensing leveling device includes a horizontal leveling bottom plate on which the fixture can be placed, a pressing and sensing member that can be pressed down by the fixture, and a sensor that can be touched by the pressed-down pressing and sensing member. The pressing and sensing member is installed on the horizontal leveling bottom plate, one end of the horizontal leveling bottom plate is in contact with the fixture, and the other end is in contact with the sensor. Both the pressing and sensing member and the sensor have two and are arranged in one-to-one correspondence. One end of each pressing and sensing member in contact with the fixture is on the same horizontal plane, and the two sensors are on the same horizontal plane.

[0005] Further, a return spring is sleeved on the pressing and sensing member.

[0006] Further, the horizontal leveling bottom plate has a through hole for the pressing and sensing member to pass through, and the pressing and sensing member is arranged vertically.

[0007] Further, a positioning rod that can be inserted into the positioning hole of the fixture is provided on the horizontal leveling bottom plate.

[0008] Further, it further includes a bracket for supporting the horizontal leveling bottom plate, and the sensor is installed on the bracket.

[0009] Further, it further includes a lifting structure for lifting the horizontal leveling bottom plate, and the lifting structure is installed on the bracket.

[0010] Further, it further includes a first guide rail assembly for the bracket to move.

[0011] Another technical solution provided by an embodiment of the utility model: A transportation mechanism includes a track transmission device and the above-mentioned positioning and sensing leveling device, and the positioning and sensing leveling device is installed on the track transmission device.

[0012] Further, the track transmission device includes a guide rail frame and a transmission belt provided on the guide rail frame, and the horizontal leveling bottom plate is provided at the guide rail frame.

[0013] Further, the track transmission device further includes a second guide rail assembly for driving the guide rail frame to move.

[0014] Compared with the prior art, the beneficial effects of the present utility model are: simple structure, using a mechanical structure in cooperation with an inductor to judge the levelness of the jig, low cost and high efficiency. Description of the Drawings

[0015] Figure 1 is a schematic diagram of a positioning induction level device provided by an embodiment of the present utility model;

[0016] Figure 2 is a schematic diagram of a track transmission device provided by an embodiment of the present utility model;

[0017] Figure 3 is a schematic diagram of a transportation mechanism provided by an embodiment of the present utility model;

[0018] In the reference numerals: 10 - positioning induction level device; 100 - horizontal leveling bottom plate; 101 - pressing inductor; 102 - first photoelectric sensor; 103 - return spring; 104 - positioning rod; 105 - bracket; 106 - cylinder; 107 - first guide rail assembly; 1070 - first slider; 1071 - first track; 11 - track transmission device; 110 - guide rail frame; 111 - transmission belt; 112 - first motor; 113 - second motor; 114 - spline; 115 - lead screw; 116 - second guide rail assembly; 1160 - second slider; 1161 - second track; 117 - second photoelectric sensor. Detailed Embodiments

[0019] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0020] Please refer to Figure 1, an embodiment of the present utility model provides a positioning and sensing level device, which includes a horizontal leveling bottom plate 100 for placing a jig, a pressing and sensing member 101 that can be pressed down by the jig, and a sensor that can be touched by the pressed-down pressing and sensing member 101. The pressing and sensing member 101 is installed on the horizontal leveling bottom plate 100, one end of the horizontal leveling bottom plate 100 is in contact with the jig, and the other end is in contact with the sensor. There are two pressing and sensing members 101 and two sensors, which are arranged in one-to-one correspondence. One end of each pressing and sensing member 101 in contact with the jig is on the same horizontal plane, and the two sensors are on the same horizontal plane. In this embodiment, when the jig is placed on the horizontal leveling bottom plate 100, the jig will press down the pressing and sensing member 101, and the pressing and sensing member 101 will touch the sensor. At this time, only two sensors on the same horizontal plane need to be designed, and it is ensured that the two pressing and sensing members 101 can move synchronously, then it can be easily determined whether the jig is horizontal. Specifically, when the two sensors send signals simultaneously, it is determined that the jig is horizontal. When the signals sent by the two sensors are not synchronous and there is a sequence, it is determined that the jig is not horizontal, and at this time, the next operation cannot be carried out. At this time, after the staff receives the signal, they can adjust the horizontal leveling bottom plate 100 accordingly to make the horizontal leveling bottom plate 100 horizontal with the jig. After debugging the level, there is no need to level it again later. The sensor can use an inexpensive photoelectric sensor, and for the sake of distinction, it is defined as the first photoelectric sensor 102. The first photoelectric sensor 102 can use a groove-type photoelectric sensor. In this way, the horizontal judgment of the jig can be realized through this simple mechanical structure, saving the device cost and improving the judgment efficiency at the same time, and the judgment yield is higher.

[0021] As an optimized solution of the embodiment of the present utility model, please refer to Figure 1 , a return spring 103 is sleeved on the pressing and sensing member 101. In this embodiment, the return spring 103 is designed so that after the jig leaves the horizontal leveling bottom plate 100, the pressing and sensing member 101 can be reset, which is convenient for cooperating with subsequent jigs.

[0022] As an optimized solution of the embodiment of the present utility model, please refer to Figure 1 , the horizontal leveling bottom plate 100 has a through hole for the pressing and sensing member 101 to pass through, and the pressing and sensing member 101 is arranged vertically. In this embodiment, the pressing and sensing member 101 passes through the horizontal leveling bottom plate 100 to touch the first photoelectric sensor 102 below the pressing and sensing member 101.

[0023] As an optimized solution of the embodiment of the present utility model, please refer to Figure 1The horizontal leveling base plate 100 is provided with a positioning rod 104 that can be inserted into the positioning hole of the fixture. In this embodiment, the positioning rod 104 is designed on the horizontal leveling base plate 100 and can be inserted into the positioning hole of the fixture to fix the fixture. The positioning rod 104 can be a positioning pin.

[0024] As an optimization solution of the embodiment of the utility model, please refer to Figure 1 , the device also includes a bracket 105 for supporting the horizontal leveling base plate 100, and the sensor is installed on the bracket 105. It also includes a lifting structure for lifting the horizontal leveling base plate 100, and the lifting structure is installed on the bracket 105. In this embodiment, the horizontal leveling base plate 100 is arranged on the bracket 105, and the lifting of the horizontal leveling base plate 100 is driven by the lifting structure, so that the positioning rod 104 can be inserted into the positioning hole of the fixture. The lifting structure can adopt a cylinder 106 or other linear drive structure, or a screw rod 115 for transmission. A slider guide is provided on the bracket 105 for guiding the horizontal leveling base plate 100.

[0025] As an optimization solution of the embodiment of the utility model, please refer to Figure 1 The device further includes a first guide rail assembly 107 for moving the bracket 105. In this embodiment, the first guide rail assembly 107 is designed to allow the bracket 105 to move along the extension direction of the first guide rail assembly 107. Preferably, the first guide rail assembly 107 includes a first slider 1070 and a first track 1071, wherein the bracket 105 is disposed on the first slider 1070, and the first slider 1070 moves on the first track 1071. The bracket 105 can move together with the guide rail frame 110 of the track transmission device 11.

[0026] See also Figure 1 , Figure 2 and Figure 3 The embodiment of the utility model provides a transport mechanism, including a track transmission device 11 and the above-mentioned positioning sensing level device 10, wherein the positioning sensing level device 10 is installed on the track transmission device 11. In this embodiment, the track transmission device 11 can be used to transfer the fixture to the next station after judging the level.

[0027] As an optimization solution of the embodiment of the utility model, please refer to Figure 1 , Figure 2 and Figure 3, the rail transmission device 11 includes a guide rail frame 110 and a transmission belt 111 provided on the guide rail frame 110, and the horizontal leveling bottom plate 100 is provided at the guide rail frame 110. In this embodiment, there are two guide rail frames 110, which are arranged in parallel at intervals, and the jig is docked with the rail frame in the previous process. The horizontal leveling bottom plate 100 is arranged between the two rail frames. When the transmission belt 111 on the guide rail frame 110 sends the jig above the horizontal leveling bottom plate 100, the air cylinder 106 drives the horizontal leveling bottom plate 100 to rise so that the positioning rod 104 is inserted into the positioning hole of the jig, and the jig is fixed. The pressing induction member 101 will be pressed down to touch the first photoelectric sensor 102, so as to judge whether the jig and the horizontal leveling bottom plate 100 are level. Preferably, the transmission belt 111 includes a pulley assembly, which is driven to rotate by the first motor 112, and the spline 114 is used to realize the synchronous rotation of the transmission belts 111 on the two guide rail frames 110.

[0028] As an optimized solution of the embodiment of the present invention, please refer to Figure 1 , Figure 2 and Figure 3 , a second photoelectric sensor 117 is provided on the guide rail frame 110, which can judge whether the jig is transported in place, and after it is in place, the first motor 112 can be controlled to stop working.

[0029] As an optimized solution of the embodiment of the present invention, please refer to Figure 1 , Figure 2 and Figure 3 , the rail transmission device 11 further includes a second rail assembly 116 for driving the guide rail frame 110 to move. In this embodiment, by designing the second rail assembly 116, the guide rail frame 110 can be driven to move, so as to drive the positioning and sensing level device 10 to move. Preferably, the second rail assembly 116 includes a second motor 113, a lead screw 115, a second slider 1160, and a second rail 1161. The second motor 113 drives the lead screw 115 to rotate to realize the transmission of the lead screw 115 and drive the guide rail frame 110 to move. The guide rail frame 110 is installed on the second slider 1160, and the second slider 1160 slides on the second rail 1161, and the second rail 1161 plays a guiding role. The second rail 1161 is arranged in parallel with the first rail 1071.

[0030] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A positioning sensing level device, characterized in that: It includes a horizontal leveling base plate on which a jig can be placed, a pressing sensing part that can be pressed down by the jig, and a sensor that can be touched by the pressed pressing sensing part. The pressing sensing part is installed on the horizontal leveling base plate, and one end of the horizontal leveling base plate contacts the jig, and the other end contacts the sensor. The pressing sensing part and the sensor each have two and are arranged in one-to-one correspondence. One end of each pressing sensing part that contacts the jig is located on the same horizontal plane, and the two sensors are located on the same horizontal plane.

2. The positioning sensing level device according to claim 1, characterized in that: A return spring is sleeved on the compression sensing component.

3. The positioning sensing level device according to claim 1, characterized in that: The horizontal leveling bottom plate is provided with a through hole for the pressing sensing member to pass through, and the pressing sensing member is arranged vertically.

4. The positioning sensing level device according to claim 1, characterized in that: The horizontal leveling bottom plate is provided with a positioning rod which can be inserted into the positioning hole of the jig.

5. The positioning sensing level device according to claim 1, characterized in that: It also includes a bracket for supporting the horizontal leveling base plate, and the sensor is installed on the bracket.

6. The positioning sensing level device according to claim 5, characterized in that: It also includes a lifting structure for lifting the horizontal leveling base plate, and the lifting structure is installed on the bracket.

7. The positioning sensing level device according to claim 5, characterized in that: Also included is a first guide rail assembly for the bracket to move.

8. A transport mechanism, characterized in that: It comprises a track transmission device and a positioning sensing horizontal device as described in any one of claims 1 to 7, wherein the positioning sensing horizontal device is installed on the track transmission device.

9. The transport mechanism according to claim 8, characterized in that: The track transmission device comprises a guide rail frame and a transmission belt arranged on the guide rail frame, and the horizontal leveling base plate is arranged on the guide rail frame.

10. The transport mechanism according to claim 9, characterized in that: The track transmission device also includes a second guide rail assembly that drives the guide rail frame to move.

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