Adjustable detection camera for silicon wafer subfissure detection device

Abstract

The utility model discloses an adjustable detection camera for a silicon wafer subfissure detection device, and relates to the technical field of detection cameras, the adjustable detection camera comprises a housing, the inner wall of the housing is fixedly connected with a light-transmitting plate, the inner wall of the housing is fixedly connected with a light source, the upper surface of the light-transmitting plate is provided with a camera body, the side surface of the housing is provided with a sleeve plate, and the sleeve plate is fixedly connected with the light source. An extension plate is slidably connected to the inner wall of the sleeve plate, an adjusting screw rod is inserted into the inner wall of the extension plate in a threaded mode, a mounting plate is rotatably connected to the end, close to the camera body, of the adjusting screw rod, the mounting plate is slidably connected with the camera body, and an arc-shaped plate is fixedly connected to the side face of the sleeve plate. According to the adjustable detection camera for the silicon wafer subfissure detection device, the problems that the position of the detection camera needs to be adjusted in the process of installing the detection camera, and the position of the detection camera is adjusted more complexly in the process of installing the detection camera in the prior art are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection cameras, in particular to an adjustable detection camera for a silicon chip hidden crack detection device. Background Art

[0002] Silicon wafers refer to silicon slices with high purity and perfect crystal shape made using silicon single crystals or silicon multi-crystals. They have the characteristics of stable crystal structure and high dimensional accuracy and can be used to manufacture integrated circuits, solar cells, telescopes, lasers and other devices. In order to ensure the quality and performance of devices produced using silicon wafers, it is often necessary to detect silicon wafer hidden cracks to avoid using silicon wafers with hidden crack problems to produce products as much as possible.

[0003] Prior art includes a utility model with publication number CN215640935U, which discloses a device for detecting hidden cracks in silicon wafers, including a base and a visual inspection camera; a detection port is provided on the top of the base, a slot for horizontal insertion of the silicon wafer is provided on the inner wall of the detection port, a lighting lamp is installed under the slot, and jet mechanisms are provided on both sides of the base; after the silicon wafer is inserted into the detection port, the jet mechanism can be used to spray high-pressure steam onto the surface of the silicon wafer, which can, on the one hand, remove impurities on the surface of the silicon wafer and avoid misjudgment caused by impurities, and on the other hand, white lines will appear at the hidden cracks of the silicon wafer when encountering steam, which is convenient for the visual inspection camera to take pictures and detect; the lighting lamp under the silicon wafer can make the white lines at the hidden cracks appear more clearly, thereby improving the reliability of detection.

[0004] The above-mentioned and existing related technologies often have the following defects: when using a detection camera to detect hidden cracks in silicon wafers, the detection camera must first be installed above a platform for detecting hidden cracks in silicon wafers. During the installation of the detection camera, the position of the detection camera often needs to be adjusted. In the prior art, during the installation of the detection camera, the position adjustment of the detection camera is often complicated.

[0005] To this end, we propose an adjustable detection camera for a silicon wafer hidden crack detection device. Utility Model Content

[0006] The utility model aims to provide an adjustable detection camera for a silicon wafer crack detection device to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an adjustable detection camera for a silicon wafer hidden crack detection device, comprising a shell, a light-transmitting plate fixedly connected to the inner wall of the shell, a light source fixedly connected to the inner wall of the shell, a camera body mounted on the upper surface of the light-transmitting plate, a sleeve plate mounted on the side of the shell, an extension plate slidably connected to the inner wall of the sleeve plate, and an adjusting screw threadedly inserted into the inner wall of the extension plate.

[0008] The effects achieved by the above components are as follows: By setting the sleeve plate and the extension plate, the positions of the adjusting screw and the mounting plate can be adjusted, thereby the position of the camera body can be adjusted. By setting the adjusting screw, the camera body can be adjusted to be closer to or farther from the extension plate.

[0009] Preferably, one end of the adjusting screw close to the camera body is rotatably connected to a mounting plate, the mounting plate is slidably connected to the camera body, an arc-shaped plate is fixedly connected to the side surface of the sleeve plate, and a fixing screw is threadedly inserted into the inner wall of the arc-shaped plate.

[0010] The effects achieved by the above components are as follows: By adjusting the position of the adjusting screw, the positions of the mounting plate and the camera body can be adjusted. By setting the arc-shaped plate and the fixing screw, the position of the sleeve plate can be restricted.

[0011] Preferably, a bent rod is fixedly connected to the lower surface of the mounting plate, the bent rod is slidably connected to the inner wall of the extension plate, and a limiting screw is threadedly inserted into the inner wall of the sleeve plate.

[0012] The effects achieved by the above components are as follows: By setting the bent rod, the mounting plate can be prevented from rotating when adjusting the position of the mounting plate. By setting the limiting screw, the extension plate can be controlled to slide on the inner wall of the sleeve plate, so that after the position adjustment of the extension plate is completed, the position of the extension plate can be restricted.

[0013] Preferably, a sliding groove is formed in the side surface of the housing, a slider is slidably connected to the surface of the sliding groove on the housing, and the slider is fixedly connected to the sleeve plate.

[0014] The effects achieved by the above components are as follows: By setting the slider, the sleeve plate can be connected to the housing, and the slider slidably connected to the surface of the sliding groove on the housing can move, thereby ensuring that the sleeve plate can move.

[0015] Preferably, a fixing plate is fixedly connected to the inner wall of the mounting plate, and a moving screw is threadedly inserted into the inner wall of the fixing plate.

[0016] The effects achieved by the above components are as follows: By setting the fixing plate, the moving screw can be connected to the mounting plate, and the moving screw threadedly inserted into the inner wall of the fixing plate can rotate.

[0017] Preferably, one end of the moving screw close to the camera body is fixedly connected to a connecting plate, and a cushion plate is adhesively connected to one side of the connecting plate close to the camera body.

[0018] The effects achieved by the above components are as follows: The positions of the connecting plate and the cushion plate can be adjusted by the moving screw. By the connecting plate and the cushion plate, while restricting the position of the camera body, damage to the camera body can be avoided as much as possible when fixing the camera body.

[0019] Preferably, an inclined block is fixedly connected to the inner wall of the housing, and the side of the inclined block close to the light source is an inclined surface.

[0020] The effect achieved by the above components is that by setting the inclined block, after the inclined block receives the light from the light source, the light can be reflected out as much as possible.

[0021] Preferably, a frustum is fixedly connected to the inner wall of the housing, and the side of the frustum close to the inclined block is a circular arc surface.

[0022] The effect achieved by the above components is that the circular arc surface of the frustum can scatter the light as much as possible after the inclined block reflects the light onto the frustum.

[0023] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0024] In the present utility model, by setting the mounting plate, fixing plate, moving screw, connecting plate and cushion plate, the installation and disassembly of the camera body can be facilitated; by setting the sleeve plate, extension plate, adjusting screw and slider, the position of the camera body can be conveniently adjusted; by setting the arc plate and fixing screw, the position of the sleeve plate can be conveniently restricted.

[0025] In the present utility model, by setting the inclined block and the frustum, the situation of the light source blocking the light can be avoided as much as possible, so that the irradiation effect of the light on the light-transmitting plate and the silicon wafer can be ensured as much as possible, and the accuracy of the judgment of the hidden crack situation can be ensured as much as possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0027] Figure 2 is a schematic diagram of the structure of the present utility model from another angle;

[0028] Figure 3 is a schematic cross-sectional view of the housing of the present utility model;

[0029] Figure 4 is the present utility model Figure 1 of the partial structure schematic diagram;

[0030] Figure 5 is the present utility model Figure 2 of the partial structure schematic diagram.

[0031] In the figure: 1 - housing; 2 - light-transmitting plate; 3 - camera body; 4 - light source; 5 - inclined block; 6 - frustum; 7 - sleeve plate; 8 - extension plate; 9 - slider; 10 - limiting screw; 11 - adjusting screw; 12 - bent rod; 13 - mounting plate; 14 - fixing plate; 15 - moving screw; 16 - connecting plate; 17 - cushion plate; 18 - arc plate; 19 - fixing screw. Specific embodiments

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0033] Please refer to Figures 1-5 , the present utility model provides a technical solution: an adjustable detection camera for a silicon wafer crack detection device, including a housing 1, a light-transmitting plate 2 is fixedly connected to the inner wall of the housing 1, a light source 4 is fixedly connected to the inner wall of the housing 1, a camera body 3 is installed on the upper surface of the light-transmitting plate 2, a sleeve plate 7 is installed on the side surface of the housing 1, an extension plate 8 is slidably connected to the inner wall of the sleeve plate 7, and an adjustment screw 11 is threadedly inserted into the inner wall of the extension plate 8. By providing the sleeve plate 7 and the extension plate 8, the positions of the adjustment screw 11 and the mounting plate 13 can be adjusted, so that the position of the camera body 3 can be adjusted. By providing the adjustment screw 11, the camera body 3 can be adjusted to be closer to or farther from the extension plate 8.

[0034] The following specifically describes its overall specific settings and functions.

[0035] As Figures 1-5 shown, one end of the adjustment screw 11 close to the camera body 3 is rotatably connected to a mounting plate 13, the mounting plate 13 is slidably connected to the camera body 3, an arc plate 18 is fixedly connected to the side surface of the sleeve plate 7, and a fixing screw 19 is threadedly inserted into the inner wall of the arc plate 18. By adjusting the position of the adjustment screw 11, the positions of the mounting plate 13 and the camera body 3 can be adjusted. By providing the arc plate 18 and the fixing screw 19, the position of the sleeve plate 7 can be restricted. A bent rod 12 is fixedly connected to the lower surface of the mounting plate 13, and the bent rod 12 is slidably connected to the inner wall of the extension plate 8. A limit screw 10 is threadedly inserted into the inner wall of the sleeve plate 7. By providing the bent rod 12, the mounting plate 13 can be prevented from rotating when adjusting the position of the mounting plate 13. By providing the limit screw 10, the extension plate 8 can be controlled to slide inside the sleeve plate 7, so that after the position adjustment of the extension plate 8 is completed, the position of the extension plate 8 can be restricted. A chute is provided on the side surface of the housing 1, and a slider 9 is slidably connected to the surface of the chute on the housing 1. The slider 9 is fixedly connected to the sleeve plate 7. By providing the slider 9, the sleeve plate 7 can be connected to the housing 1, and the slider 9 slidably connected to the surface of the chute on the housing 1 can move, thus ensuring that the sleeve plate 7 can move.

[0036] The inner wall of the mounting plate 13 is fixedly connected with a fixing plate 14, and a moving screw rod 15 is threadedly inserted into the inner wall of the fixing plate 14. By providing the fixing plate 14, the moving screw rod 15 can be connected to the mounting plate 13, and the moving screw rod 15 threadedly inserted into the inner wall of the fixing plate 14 can rotate. One end of the moving screw rod 15 close to the camera body 3 is fixedly connected with a connecting plate 16, and a cushion plate 17 is adhesively bonded to one side of the connecting plate 16 close to the camera body 3. The position of the connecting plate 16 and the cushion plate 17 can be adjusted by the moving screw rod 15. By means of the connecting plate 16 and the cushion plate 17, while restricting the position of the camera body 3, damage to the camera body 3 can be avoided as much as possible when the camera body 3 is fixed. An inclined block 5 is fixedly connected to the inner wall of the housing 1, and the side of the inclined block 5 close to the light source 4 is an inclined surface. By providing the inclined block 5, after receiving the light from the light source 4, the inclined block 5 can reflect the light as much as possible. An arc-shaped platform 6 is fixedly connected to the inner wall of the housing 1, and the side of the arc-shaped platform 6 close to the inclined block 5 is an arc surface. The arc surface of the arc-shaped platform 6 can scatter the light as much as possible after the inclined block 5 reflects the light onto the arc-shaped platform 6.

[0037] Working principle: Before performing hidden crack detection on the silicon wafer, first move the camera body 3 close to the mounting plate 13, then rotate the moving screw 15 to make it rotate on the inner wall of the fixing plate 14, thereby controlling the connecting plate 16 and the pad 17 to move close to the camera body 3, limit the position of the camera body 3, and complete the installation of the camera body 3, then control the adjusting screw 11 to rotate, at this time the adjusting screw 11 drives the mounting plate 13 and the camera body 3 to move, and at the same time, under the limiting effect of the bending rod 12, it can prevent the mounting plate 13 from driving the camera body 3 to rotate, adjust the position of the camera body 3, and then rotate the limiting screw 10 to make it rotate on the inner wall of the sleeve plate 7, thereby fixing the position of the extension plate 8, move the sleeve plate 7, and drive the slider 9 to slide on the surface of the slide groove on the outer shell 1, thereby completing the adjustment of the position of the sleeve plate 7, rotate the fixing screw 19 to make it rotate on the inner wall of the arc plate 18, so that the fixing screw 19 presses against the outer shell 1, and fixes the position of the sleeve plate 7. The light source 4 is fixed, and then connected to the external power supply, and the light source 4 is started, so that the light is reflected by the inclined block 5 and the arc platform 6 to irradiate the light-transmitting plate 2, and the silicon wafer is moved close to the light-transmitting plate 2 on the shell 1 to complete the installation of the silicon wafer. At this time, under the irradiation of the light-transmitting plate 2, the light-transmitting photos of the silicon wafer taken by the camera body 3 are used to judge the hidden cracks of the silicon wafer. By setting the mounting plate 13, the fixing plate 14, the moving screw 15, the connecting plate 16 and the pad 17, the camera body 3 can be easily installed and disassembled. By setting the sleeve plate 7 and the extension plate 8 as well as the adjusting screw 11 and the slider 9, the position of the camera body 3 can be easily adjusted. By setting the arc plate 18 and the fixing screw 19, the position of the sleeve plate 7 can be conveniently restricted. By setting the inclined block 5 and the arc platform 6, the light blocking of the light source 4 can be avoided as much as possible, so that the irradiation effect of the light on the light-transmitting plate 2 and the silicon wafer can be guaranteed as much as possible, and the accuracy of the judgment of the hidden crack situation can be guaranteed as much as possible.

[0038] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An adjustable detection camera for a silicon wafer crack detection device, comprising a housing (1), characterized in that: The inner wall of the housing (1) is fixedly connected to a light-transmitting plate (2), the inner wall of the housing (1) is fixedly connected to a light source (4), the upper surface of the light-transmitting plate (2) is mounted with a camera body (3), a sleeve plate (7) is mounted on the side of the housing (1), an extension plate (8) is slidably connected to the inner wall of the sleeve plate (7), and an adjusting screw (11) is threadedly inserted into the inner wall of the extension plate (8).

2. The adjustable detection camera for a silicon wafer crack detection device according to claim 1, characterized in that: One end of the adjusting screw (11) close to the camera body (3) is rotatably connected to a mounting plate (13), the mounting plate (13) is slidably connected to the camera body (3), a side surface of the sleeve plate (7) is fixedly connected to an arc plate (18), and a fixing screw (19) is threadedly inserted into the inner wall of the arc plate (18).

3. The adjustable detection camera for a silicon wafer crack detection device according to claim 2, characterized in that: A bent rod (12) is fixedly connected to the lower surface of the mounting plate (13), and the bent rod (12) is slidably connected to the inner wall of the extension plate (8). A limiting screw (10) is threadedly inserted into the inner wall of the sleeve plate (7).

4. The adjustable detection camera for a silicon wafer crack detection device according to claim 1, characterized in that: A sliding groove is provided on the side of the outer shell (1), and a sliding block (9) is slidably connected to the surface of the sliding groove on the outer shell (1), and the sliding block (9) is fixedly connected to the sleeve plate (7).

5. The adjustable detection camera for a silicon wafer crack detection device according to claim 2, characterized in that: A fixing plate (14) is fixedly connected to the inner wall of the mounting plate (13), and a moving screw rod (15) is threadedly inserted into the inner wall of the fixing plate (14).

6. The adjustable detection camera for a silicon wafer crack detection device according to claim 5, characterized in that: One end of the movable screw rod (15) close to the camera body (3) is fixedly connected to a connecting plate (16), and one side of the connecting plate (16) close to the camera body (3) is glued to a pad (17).

7. The adjustable detection camera for a silicon wafer crack detection device according to claim 1, characterized in that: An inclined block (5) is fixedly connected to the inner wall of the housing (1); a side of the inclined block (5) close to the light source (4) is an inclined surface.

8. The adjustable detection camera for a silicon wafer crack detection device according to claim 7, characterized in that: An arc platform (6) is fixedly connected to the inner wall of the housing (1), and a side of the arc platform (6) close to the inclined block (5) is an arc surface.

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