Electric diaphragm
By designing an electric diaphragm and using electric cylinders to drive the blade movement, the problem of low adjustment efficiency of existing rectangular diaphragm is solved, and efficient and precise adjustment of the shape and size of the laser slit is achieved.
Patent Information
- Application Number
- CN202421803396.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-29
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-07-29
AI Technical Summary
The adjustment efficiency of existing rectangular apertures is low and requires frequent manual operation, resulting in a reduced dimming efficiency.
An electric diaphragm is designed to drive the blade movement through the electric cylinder to achieve accurate adjustment of the shape and size of the laser slit.
The laser adjustment efficiency is improved, and the displacement of the blade is controlled by the electric cylinder, which achieves high-precision adjustment.
Smart Images
Figure CN222944753U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of laser processing, in particular to an electric aperture. Background Art
[0002] The slit diaphragm usually consists of a narrow slit hole, which can control the width and shape of the light passing through. The electric diaphragm uses an electric device to accurately adjust the size of the slit hole. It has the advantages of easy operation, high adjustment accuracy, and fast response speed. Its main application areas include spectral analysis, optical experiments, laser technology, etc.
[0003] At present, most of the apertures used in the market are circular. As the demand in the semiconductor field continues to increase, the process becomes more and more complicated. The process of rectangular apertures is relatively simple, so the demand for rectangular apertures is becoming greater and greater. The rectangular apertures in the prior art are manually adjusted for aperture size, which requires frequent operation by process personnel, and greatly reduces the dimming efficiency. Utility Model Content
[0004] In order to overcome the deficiencies of the prior art, the utility model provides an electric aperture, which drives a blade to move through an electric cylinder, thereby improving the adjustment efficiency of the laser and having high adjustment accuracy.
[0005] The technical solution adopted by the utility model to solve its technical problems is:
[0006] An electric diaphragm comprises an adjustment seat, wherein the adjustment seat is provided with a through hole, wherein a sliding cavity connected to the through hole is provided inside the adjustment seat, wherein the sliding cavity is coaxially arranged with the through hole, wherein two first blade mounting plates are slidably connected to the bottom of the sliding cavity, wherein a first blade is respectively provided on the two first blade mounting plates, and the two first blades are located in the same plane and are arranged in parallel; wherein two second blade mounting plates are slidably connected to the top of the sliding cavity, wherein a second blade is respectively provided on the two second blade mounting plates, and the two second blades are located in the same plane and are arranged in parallel, and the first blade is perpendicular to the second blade; wherein electric driving components for driving the movement thereof are respectively provided on the two first blade mounting plates and the two second blade mounting plates, wherein the moving directions of the first blade and the second blade are perpendicular, and the first blade and the second blade both pass through the through hole when moving.
[0007] As a further improvement of the above technical solution, the through hole and the sliding cavity are both rectangular in shape.
[0008] As a further improvement of the above technical solution, the electric drive component includes an electric cylinder, which is installed on the outside of the adjustment seat. The adjustment seat is provided with an avoidance hole for the piston rod of the electric cylinder to avoid when moving, and the avoidance hole is connected to the sliding cavity.
[0009] As a further improvement of the above technical solution, the electric cylinder is installed on the outer wall of the adjustment seat through an electric cylinder base.
[0010] As a further improvement of the above technical solution, the adjustment seat includes an upper sealing plate and a lower sealing plate, and the upper sealing plate and the lower sealing plate are respectively provided with a first through hole and a second through hole, the first through hole and the second through hole are coaxially arranged and penetrate to form the through hole, and the upper sealing plate and the lower sealing plate are respectively provided with a first groove and a second groove, the first groove and the second groove are coaxially arranged and form the sliding cavity.
[0011] As a further improvement of the above technical solution, the two first blade mounting plates are slidably connected in the first groove, and the first blade is installed at the bottom of the first blade mounting plate; the two second blade mounting plates are slidably connected in the second groove, and the second blade is installed at the top of the second blade mounting plate.
[0012] As a further improvement of the above technical solution, the bottom surface of the first blade is in sliding contact with the top surface of the second blade.
[0013] As a further improvement of the above technical solution, a first slider is provided on each of the two first blade mounting plates, and the two first sliders are staggeredly arranged at the ends of the two first blade mounting plates, the first slider is connected to the piston rod of the electric cylinder, and first slide grooves are provided at the bottom of two opposite sides of the first groove, and the two first sliders are slidably connected in the two first slide grooves respectively;
[0014] A second slider is provided on each of the two second blade mounting plates, and the two second sliders are staggered at the ends of the two second blade mounting plates, the second slider is connected to the piston rod of the electric cylinder, and second slide grooves are provided at the bottom of two opposite sides of the second groove, and the two second sliders are respectively slidably connected in the two second slide grooves.
[0015] As a further improvement of the above technical solution, an indicator component is provided on the adjustment seat, and the indicator component is used to display the moving positions of the first blade and the second blade.
[0016] As a further improvement of the above technical solution, the indicating component includes a scale plate, a pointer and an opening, the opening includes a first opening and a second opening arranged on the adjusting seat, the scale plate includes a first scale plate and a second scale plate arranged on the outside of the adjusting seat, the pointer includes two first pointers respectively vertically connected to the two first blades and two second pointers respectively vertically connected to the two second blades, the first scale plate is located above or below the first opening, the second scale plate is located above or below the second opening, the two first pointers are located in the first opening and the ends of the first pointers are arranged opposite to the scales on the first scale plate, and the two second pointers are located in the second opening and the ends of the second pointers are arranged opposite to the scales on the second scale plate.
[0017] The beneficial effects of the utility model are as follows: a first laser passage opening can be formed between two parallel first blades, and a second laser passage opening can be formed between two parallel second blades. Since the first blade is perpendicular to the second blade, the first laser passage opening and the second laser passage opening form a rectangular laser slit, and then the two first blades and the two second blades are driven to move respectively by an electric drive component, so as to adjust the shape and size of the laser slit. Compared with manual adjustment, the adjustment efficiency of the laser is greatly improved, and the displacement of the first blade and the second blade is controlled by the electric cylinder, so the adjustment accuracy is high. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments.
[0019] Figure 1 It is a top view of an electric diaphragm of the utility model;
[0020] Figure 2 It is an axonometric diagram of an electric aperture of the utility model;
[0021] Figure 3 It is a side view of an electric aperture of the utility model;
[0022] Figure 4 This is an axonometric diagram of the utility model after the upper sealing plate of an electric aperture is hidden;
[0023] Figure 5 This is a structural disassembly diagram of an electric diaphragm of the utility model;
[0024] Figure 6 The utility model is a structural schematic diagram of a lower sealing plate in an electric aperture.
[0025] Figure numerals: 1. adjustment seat; 11. upper sealing plate; 111. first through hole; 12. lower sealing plate; 121. second through hole; 122. second groove; 123. second slide groove; 2. through hole; 3. first blade; 31. first blade mounting plate; 32. first slider; 4. second blade; 41. second blade mounting plate; 42. second slider; 5. first indication component; 51. first scale plate; 52. first pointer; 6. second indication component; 61. second scale plate; 62. second pointer; 63. second opening; 7. electric drive component; 71. first electric cylinder; 72. second electric cylinder; 73. third electric cylinder; 74. fourth electric cylinder; 75. electric cylinder base. DETAILED DESCRIPTION
[0026] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the utility model, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that according to the specific implementation situation, a better connection structure can be formed by adding or reducing connection accessories. For example, fixed connection / fixed installation can be selected according to the needs of screw connection, bolt connection, pin connection, key connection, bonding, mortise and tenon connection, welding, riveting and other methods. For example, detachable connection can be selected according to the needs of screw connection, bolt connection, threaded connection, snap connection, mortise and tenon connection, Velcro connection and other methods. The various technical features in the creation of the utility model can be combined interactively without conflicting with each other.
[0027] Reference Figure 1-Figure 5The embodiment provided by the utility model is an electric diaphragm, comprising an adjustment seat 1, a through hole 2 is provided on the adjustment seat 1, a sliding cavity connected to the through hole 2 is provided inside the adjustment seat 1, the sliding cavity is coaxially arranged with the through hole 2, two first blade mounting plates 31 are slidably connected to the bottom of the sliding cavity, a first blade 3 is provided on each of the two first blade mounting plates 31, and the two first blades 3 are located in the same plane and are arranged in parallel; two second blade mounting plates 41 are slidably connected to the top of the sliding cavity, a second blade 4 is provided on each of the two second blade mounting plates 41, and the two second blades 4 are located in the same plane and are arranged in parallel, the first blade 3 is perpendicular to the second blade 4, and an electric driving member 7 for driving the movement thereof is respectively provided on the two first blade mounting plates 31 and the two second blade mounting plates 41, the moving directions of the first blade 3 and the second blade 4 are perpendicular, and the first blade 3 and the second blade 4 both pass through the through hole 2 when moving, and the moving directions of the first blade 3 and the second blade 4 are perpendicular to the axis of the through hole 2.
[0028] In this embodiment, a first laser passage opening can be formed between the two parallel first blades 3, and a second laser passage opening can be formed between the two parallel second blades 4. Since the first blade 3 is perpendicular to the second blade 4, the first laser passage opening and the second laser passage opening form a rectangular laser slit, and then the two first blades 3 and the two second blades 4 are driven to move respectively by the electric drive member 7, so as to adjust the shape and size of the laser slit. Compared with manual adjustment, the adjustment efficiency of the laser is greatly improved, and the displacement of the first blade 3 and the second blade 4 is controlled by the electric cylinder, and the adjustment accuracy is high.
[0029] In a specific embodiment, refer to Figure 4 The sliding cavity is in a rectangular shape, so that the first blade mounting plate 31 and the second blade mounting plate 41 can slide stably in the sliding cavity. At the same time, the through hole 2 is also in a rectangular shape. Since the first blade 3 and the second blade 4 pass through the through hole 2 when moving, that is, the laser slit formed between the first blade 3 and the second blade 4 is located in the through hole 2, the maximum adjustable size of the laser slit is the size of the through hole 2.
[0030] In a specific embodiment, the electric drive member 7 includes an electric cylinder, which is mounted on the outer wall of the adjustment seat 1 through an electric cylinder base 75. The adjustment seat 1 is provided with an avoidance hole, which is connected to the sliding cavity. The avoidance hole is used to avoid the piston rod when the piston rod of the electric cylinder moves. The electric cylinder is used as the electric drive member 7, which is easy to control and has high displacement accuracy. In this embodiment, the electric cylinders are respectively marked as the first electric cylinder 71, the second electric cylinder 72, the third electric cylinder 73 and the fourth electric cylinder 74. The piston rods of the first electric cylinder 71 and the second electric cylinder 72 are respectively connected to the two first blade mounting plates 31, and the piston rods of the third electric cylinder 73 and the fourth electric cylinder 74 are respectively connected to the two second blade mounting plates 41.
[0031] In a specific embodiment, refer to Figure 4-Figure 6 The adjustment seat 1 includes an upper sealing plate 11 and a lower sealing plate 12, and the upper sealing plate 11 and the lower sealing plate 12 are respectively provided with a first through hole 111 and a second through hole 121, and the first through hole 111 and the second through hole 121 are coaxially arranged to form the through hole 2, and the upper sealing plate 11 and the lower sealing plate 12 are respectively provided with a first groove and a second groove 122, and the first groove and the second groove 122 are coaxially arranged to form the sliding cavity.
[0032] Furthermore, the two first blade mounting plates 31 are slidably connected in the first groove, and the first blade 3 is installed at the bottom of the first blade mounting plate 31; the two second blade mounting plates 41 are slidably connected in the second groove 122, and the second blade 4 is installed at the top of the second blade mounting plate 41, so that the bottom surface of the first blade 3 and the top surface of the second blade 4 are in sliding contact, preventing the laser from passing through the gap between the first blade 3 and the second blade 4 and affecting the transmission of the laser.
[0033] In the above embodiment, a first slider 32 is provided on each of the two first blade mounting plates 31, and the two first sliders 32 are staggered at the ends of the two first blade mounting plates 31, the two first sliders 32 are connected to the piston rods of the first electric cylinder 71 and the second electric cylinder 72, and first slide grooves are provided at the bottom of the two opposite sides of the first groove, and the two first sliders 32 are respectively slidably connected in the two first slide grooves, and the first slide groove limits the movement of the first slider 32, thereby further improving the stability of the first blade mounting plate 31 during movement.
[0034] Similarly, a second slider 42 is provided on each of the two second blade mounting plates 41, and the two second sliders 42 are staggered at the ends of the two second blade mounting plates 41, that is, one of the second sliders 42 is provided at the end on the left side of one second blade mounting plate 41, and the other second slider 42 is provided at the end on the right side of the other second blade mounting plate 41. The two second sliders 42 are respectively connected to the piston rods of the third electric cylinder 73 and the fourth electric cylinder 74, and second slide grooves 123 are provided at the bottom of the two opposite sides of the second groove 122. The two second sliders 42 are respectively slidably connected in the two second slide grooves 123, and the first slide groove limits the movement of the first slider 32, thereby further improving the stability of the first blade mounting plate 31 during movement.
[0035] In this embodiment, refer to Figure 1-Figure 6 , the adjustment seat 1 is provided with an indication component, and the indication component is used to display the moving positions of the first blade 3 and the second blade 4. Specifically, there are two indication components, namely a first indication component 5 and a second indication component 6, the first indication component 5 includes a first scale plate 51, a first pointer 52 and a first opening, and the second indication component 6 includes a second scale plate 61, a second pointer 62 and a second opening 63. The first opening and the second opening 63 are both provided on the adjustment seat 1, and the first opening and the second opening 63 are located on the adjacent two sides of the adjustment seat 1, the first scale plate 51 and the second scale plate 61 are respectively provided on the adjacent two sides of the adjustment seat 1, and the first scale plate 51 is located below the first opening, and the second scale plate 61 is located above the second opening 63.
[0036] There are two first pointers 52, and the two first pointers 52 are respectively vertically connected to the two first blades 3. The two first pointers 52 are located in the first opening and the ends of the first pointers 52 are arranged opposite to the scales on the first scale plate 51. When the two first blades 3 move, the two first pointers 52 move synchronously therewith. The scales on the first scale plate 51 corresponding to the two first pointers 52 are the distance between the two first blades 3, that is, the width of the first laser pass opening.
[0037] Similarly, there are two second pointers 62, and the two second pointers 62 are respectively vertically connected to the two second blades 4, the two second pointers 62 are located in the second opening 63, and the ends of the second pointers 62 are arranged opposite to the scales on the second scale plate 61. When the two second blades 4 move, the two second pointers 62 move synchronously therewith, and the scales on the second scale plate 61 corresponding to the two second pointers 62 are the distance between the two second blades 4, that is, the width of the second laser pass opening.
[0038] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.
Claims
1. An electric diaphragm, comprising an adjustment seat, wherein the adjustment seat is provided with a through hole, characterized in that: The adjusting seat is provided with a sliding cavity in communication with the through hole, and the sliding cavity is coaxially arranged with the through hole; The bottom of the sliding cavity is slidably connected to two first blade mounting plates, and the two first blade mounting plates are respectively provided with a first blade, and the two first blades are located in the same plane and are arranged in parallel; The top of the sliding cavity is slidably connected to two second blade mounting plates, each of the two second blade mounting plates has a second blade, and the two second blades are located in the same plane and are arranged in parallel, and the first blade is perpendicular to the second blade; The two first blade mounting plates and the two second blade mounting plates are respectively provided with electric driving members for driving them to move. The moving directions of the first blade and the second blade are perpendicular, and the first blade and the second blade both pass through the through hole when moving.
2. The electric diaphragm according to claim 1, characterized in that: The through hole and the sliding cavity are both rectangular in shape.
3. An electric diaphragm according to claim 1 or 2, characterized in that: The electric drive member comprises an electric cylinder, which is mounted on the outer side of the adjustment seat. The adjustment seat is provided with an escape hole for the piston rod of the electric cylinder to escape when moving, and the escape hole is communicated with the sliding cavity.
4. The electric diaphragm according to claim 3, characterized in that: The electric cylinder is installed on the outer wall of the adjustment seat through an electric cylinder base.
5. The electric diaphragm according to claim 3, characterized in that: The adjustment seat includes an upper sealing plate and a lower sealing plate, and the upper sealing plate and the lower sealing plate are respectively provided with a first through hole and a second through hole, the first through hole and the second through hole are coaxially arranged and penetrate to form the through hole, and the upper sealing plate and the lower sealing plate are respectively provided with a first groove and a second groove, the first groove and the second groove are coaxially arranged and form the sliding cavity.
6. The electric diaphragm according to claim 5, characterized in that: The two first blade mounting plates are slidably connected in the first groove, and the first blade is mounted on the bottom of the first blade mounting plate; the two second blade mounting plates are slidably connected in the second groove, and the second blade is mounted on the top of the second blade mounting plate.
7. The electric diaphragm according to claim 6, characterized in that: The bottom surface of the first blade is in sliding contact with the top surface of the second blade.
8. The electric diaphragm according to claim 6, characterized in that: A first slider is disposed on each of the two first blade mounting plates, and the two first sliders are staggeredly disposed at the ends of the two first blade mounting plates, the first slider is connected to the piston rod of the electric cylinder, and first slide grooves are disposed at the bottom of two opposite sides of the first groove, and the two first sliders are slidably connected in the two first slide grooves respectively; A second slider is provided on each of the two second blade mounting plates, and the two second sliders are staggered at the ends of the two second blade mounting plates, the second slider is connected to the piston rod of the electric cylinder, and second slide grooves are provided at the bottom of two opposite sides of the second groove, and the two second sliders are respectively slidably connected in the two second slide grooves.
9. The electric diaphragm according to claim 1, characterized in that: The adjusting seat is provided with an indicating component, and the indicating component is used to display the moving positions of the first blade and the second blade.
10. The electric aperture according to claim 9, characterized in that: The indicating assembly includes a scale plate, a pointer and an opening, the opening includes a first opening and a second opening arranged on the adjusting seat, the scale plate includes a first scale plate and a second scale plate arranged outside the adjusting seat, the pointer includes two first pointers respectively vertically connected to the two first blades and two second pointers respectively vertically connected to the two second blades, the first scale plate is located above or below the first opening, the second scale plate is located above or below the second opening, the two first pointers are located in the first opening and the ends of the first pointers are arranged opposite to the scales on the first scale plate, the two second pointers are located in the second opening and the ends of the second pointers are arranged opposite to the scales on the second scale plate.