Diamond wire cooling liquid purification system

Abstract

The utility model belongs to the technical field of diamond wire cooling liquid purification, and particularly discloses a diamond wire cooling liquid purification system. The purification system comprises a filter pressing unit, an ion exchange unit, a feeding unit, a circulating unit and a flushing unit, the filter pressing unit comprises two paths of compressed air sources and one path of filter pressing clear liquid source, the filter pressing clear liquid source is mixed with the compressed air sources after reacting through the ion exchange unit and then flows into a diamond wire slicing workshop after being flushed through the flushing unit, the feeding unit comprises a ceramic membrane feeding pump, and the ceramic membrane feeding pump provides reaction raw materials for the diamond wire cooling liquid purification system. And the circulating unit inputs the filtered concentrated cooling liquid into the ion exchange unit. In the practical application, the maintenance time of equipment can be greatly prolonged, the cooling effect of the purified diamond wire cooling liquid is good, the agglomeration phenomenon of silicon powder contained in the cooling liquid is reduced, and the slicing yield is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of diamond wire coolant purification, and specifically discloses a diamond wire coolant purification system. Background Art

[0002] When slicing silicon wafers, coolant is needed to cool the silicon wafer slicer to prevent problems such as high silicon wafer breakage rate and low yield rate due to abnormal slicer temperature during the cutting process. Excessive impurities in the coolant will increase the cutting cost. The pH value and conductivity of the coolant directly affect the slicing yield. If the coolant is not filtered thoroughly, the silicon powder contained in the coolant will agglomerate, further affecting the silicon wafer yield.

[0003] Patent number CN217967735U is a diamond wire sawing silicon wafer coolant recovery system, which filters the coolant through a V-shaped filter screen, but cannot ensure that the pH value and conductivity of the coolant are within the standard range, and will also affect the slice yield due to unqualified pH value and conductivity. Therefore, it is urgent for those skilled in the art to solve the above technical problems. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a diamond wire coolant purification system in view of the deficiencies of the above-mentioned prior art. The diamond wire coolant purification system can extend the service life of the purification system, improve the quality of the coolant, thereby reducing the short wire rate of the slicer and improving the slice yield.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A diamond wire coolant purification system, used for purifying diamond wire coolant, characterized in that: the purification system comprises a filter press unit, an ion exchange unit, a feeding unit, a circulation unit and a flushing unit; the filter press unit comprises a first compressed air source, a second compressed air source and a filter press clear liquid source, the filter press clear liquid source is mixed with the first compressed air source after reaction in the ion exchange unit, and then flows into the diamond wire slicing workshop after flushing in the flushing unit, the feeding unit comprises a ceramic membrane feeding pump, the ceramic membrane feeding pump provides reaction raw materials for the diamond wire coolant purification system, and the circulation unit inputs the filtered concentrated coolant into the ion exchange unit;

[0007] The ion exchange unit comprises an ion exchange resin tank, which is provided with a plurality of interfaces. The ion exchange resin tank is connected to the filter press clear liquid source and the circulation unit, and the ion exchange resin tank is also externally connected to a PH detector, a conductivity detector, a thermometer and a liquid level gauge; the circulation unit comprises a ceramic membrane circulation pump and a membrane filter; the ceramic membrane circulation pump has three branches, the first branch is connected to the ion exchange resin tank; the second branch is connected to the first membrane filter and the second membrane filter, and finally connected to the ceramic membrane recoil tank of the flushing unit; the third branch is connected to the ion exchange resin tank after merging with the first branch; the first branch is bypassed by two ceramic membranes; the second branch is bypassed by a thermometer and a pressure gauge, a ceramic membrane is provided in a pipeline between the first membrane filter and the second membrane filter, a pressure transmission meter and a pressure display meter are bypassed, and the first branch is connected through a pipeline, and the second membrane filter is connected to the clear liquid tank through a sight glass, a solenoid valve, a manual valve and a ceramic membrane; the third branch is bypassed by a pressure transmission meter and a pressure display meter connected to the solenoid valve, a manual valve, and the second branch and the first branch are merged to connect the ion exchange resin tank.

[0008] The three branches of the ceramic membrane circulation pump adopt different circulation directions and connection methods, which can realize multiple diversion circulation of wastewater and improve the treatment efficiency; multiple membrane filtration treatments of wastewater by the first membrane filter and the second membrane filter can more thoroughly remove solid particles and impurities in the wastewater, making the purification effect better; through the connection of the ceramic membrane recoil tank and the clear liquid tank of the flushing unit, the ceramic membrane can be automatically cleaned and flushed, extending the service life of the ceramic membrane; the attached thermometer, pressure gauge, pressure transfer gauge and pressure display gauge and other equipment can monitor the system's pressure, temperature and other parameters in real time to ensure the safe and stable operation of the system; through solenoid valves, manual valves and other equipment, flexible control of system circulation, cleaning and other functions can be achieved, improving the system's operational convenience and flexibility.

[0009] Furthermore, the liquid outlet of the ion exchange resin tank is connected to the ceramic membrane feed pump via a ceramic membrane; and is also connected to a drainage ditch, and a ceramic membrane is arranged between the drainage ditch and the ion exchange resin tank.

[0010] By equipping with equipment such as pH detectors, conductivity detectors and thermometers, the pH value, conductivity and temperature of the treated water can be monitored in real time, which is conducive to controlling the ion exchange process and improving the treatment effect; timely monitoring and adjustment of the liquid level can ensure the stable operation of the ion exchange and prevent the resin column from being overloaded or intermittent. This helps to ensure the long-term stability of the ion exchange equipment; these devices can record relevant data in the ion exchange process, such as temperature changes, pH value and conductivity changes, etc., which helps to evaluate and adjust the treatment effect to ensure the effect of ion exchange treatment; the temperature of the ion exchange equipment can be monitored by a thermometer to avoid safety hazards caused by excessively high or low temperatures, thereby providing safety protection for the equipment.

[0011] Ceramic membranes can be used for solid-liquid separation, which helps to separate solid particles from liquid in the ion exchange resin tank, thereby improving the effect of wastewater treatment; the outlet of the ceramic membrane feed pump connected to the wastewater can be sent to the ceramic membrane for further purification treatment to ensure that the treated water quality is purer; the ceramic membrane is set between the drainage ditch and the ion exchange resin tank, which can isolate the remaining solid particles, thereby reducing the discharge of solid particles in the wastewater, which is beneficial to environmental protection and water resource recycling; the ceramic membrane can be used as a filter medium to prevent the solid particles in the ion exchange resin tank from clogging or damaging the ceramic membrane feed pump. This helps to improve the stability and service life of the equipment.

[0012] Furthermore, the ceramic membrane feed pump is driven by a variable frequency motor and is connected to the circulation unit; a pressure transmission meter and a pressure display meter are connected to the pipeline between the ceramic membrane feed pump and the circulation unit.

[0013] The use of variable frequency motor drive can adjust the speed of the pump according to actual needs to achieve energy saving. At the same time, the variable frequency motor can make the pump run more smoothly, reduce the impact on the equipment and pipelines caused by sudden start and stop, and extend the service life of the equipment; the variable frequency motor can adjust the output flow and pressure of the pump in real time according to different requirements to achieve flexible control. The circulation unit combined with the variable frequency motor can adjust the circulation speed of the system as needed, which improves the flexibility and treatment effect of the treatment; the pressure transfer meter connected to the pipeline can transfer the current pressure in the pipeline to the system, and the pressure display meter can monitor the pressure inside the system in real time, which is convenient for real-time grasp of the working status of the system; through real-time monitoring and adjustment, the feed can be controlled according to the pressure condition to maintain the stable operation of the system. This helps to improve the processing efficiency and the working efficiency of the pump.

[0014] Furthermore, the flushing unit includes the ceramic membrane recoil tank, which is connected to the second membrane filter and is also connected to two drainage ditches and a second compressed air source; a needle valve is arranged between the drainage ditch and the ceramic membrane recoil tank; the second compressed air source injects compressed air into the ceramic membrane recoil tank through the needle valve, and the ceramic membrane recoil tank discharges excess liquid into the drainage ditch.

[0015] By means of the ceramic membrane recoil tank and the injection of compressed air source, the ceramic membrane can be automatically backwashed to remove impurities and pollutants on the membrane surface, ensuring the filtering effect and service life of the ceramic membrane; by connecting two drainage trenches, the excess liquid after backwashing can be effectively discharged to keep the system clean; by setting a needle valve, the drainage can be controlled and drained in time to ensure the flushing effect and save water resources; with the help of automatic flushing and drainage control, it helps to maintain the stable operation of the system and improve the reliability and stability of the system.

[0016] Furthermore, the clear liquid tank is connected to a pH detector, a conductivity detector, a thermometer and a liquid level meter; the outlet of the clear liquid tank is connected to the drainage ditch via a ceramic membrane, and the coolant is supplied to the diamond wire slicing workshop.

[0017] By connecting the pH detector, conductivity detector, thermometer and liquid level meter, the pH value, conductivity, temperature and liquid level in the clear liquid tank can be monitored in real time to ensure the stability and safety of the liquid quality in the clear liquid tank. According to the monitoring results, the pH value and conductivity of the clear liquid can be adjusted in time to keep the quality of the clear liquid in line with the process requirements; the outlet of the clear liquid tank is connected to the drainage ditch through a ceramic membrane to effectively discharge the cleaned liquid to ensure the cleanliness of the workshop environment; the cleaning liquid in the clear liquid tank is supplied to the diamond wire slicing workshop to provide the required coolant for the production line.

[0018] Furthermore, the first membrane filter and the second membrane filter are connected to the trench via ceramic membranes respectively.

[0019] By connecting the ditch, the wastewater filtered by the first membrane filter and the second membrane filter can be effectively discharged and treated to avoid pollution to the environment; after the wastewater is treated by the membrane filter, excess impurities and pollutants can be removed, reducing the burden on subsequent treatment facilities, saving water resources and treatment costs; discharging the treated wastewater into the ditch can effectively comply with environmental protection laws and standards and ensure that the wastewater discharge in the production process meets the standards.

[0020] The utility model has the following beneficial effects:

[0021] 1. The utility model sets an ion exchange resin tank to control the conductivity of the coolant to meet the coolant standard of the corresponding silicon wafer, thereby extending the service life of the equipment and reducing the production cost. The circulation unit ensures full utilization of materials without causing cost waste;

[0022] 2. Filtering the coolant through ceramic membrane and membrane filter ensures that the silicon powder content in the coolant is within the standard range, and the silicon powder will not agglomerate during recycling. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the utility model system.

[0024] Among them are: 1-filter press unit; 11-filter press clear liquid source; 121-first compressed air source; 122-second compressed air source; 2-ion exchange resin tank; 31-ceramic membrane feed pump; 32-ceramic membrane filter; 4-circulation unit; 41-ceramic membrane circulation pump; 421-first membrane filter; 422-second membrane filter; 5-ceramic membrane recoil tank; 6-clear liquid tank. DETAILED DESCRIPTION

[0025] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific preferred embodiments.

[0026] In the description of the present invention, it should be understood that the terms "left side", "right side", "upper part", "lower part", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. "First", "second", etc. do not indicate the importance of the components, and therefore cannot be understood as a limitation on the present invention. The specific dimensions used in this embodiment are only for illustrating the technical solution, and do not limit the scope of protection of the present invention.

[0027] like Figure 1As shown, a diamond wire coolant purification system mainly includes a filter press clear liquid 1 for providing clear liquid for the diamond wire coolant purification system as a whole. The filter press clear liquid source 1 inputs the clear liquid into the entire diamond wire coolant purification system. The clear liquid flows into the ion exchange resin tank 2 through a pipeline, and various parameters in the ion exchange resin tank 2 are monitored by a pH detector, a conductivity detector, a thermometer and a liquid level meter connected in parallel. The outlet of the ion exchange resin tank 2 is connected to a ceramic membrane feed pump 31, and the coolant pump is pumped into the pipeline system through the ceramic membrane filter 31, and then the reaction raw materials are input into the circulation unit through the ceramic membrane circulation pump 41; in the circulation unit, the filtrate is input into the ceramic membrane recoil tank 5 and the clear liquid tank 6 through the first membrane filter 421 and the second membrane filter 422, and it is best to supply the standard coolant to the slicing workshop; the circulation unit 4 includes a ceramic membrane circulation pump 41, a first membrane filter 421 and a second membrane filter 422; the ceramic membrane circulation pump 41 has three branches, and the first branch is connected to the ion exchange resin tank 2; The second branch connects the first membrane filter 421 and the second membrane filter 422, and finally connects to the ceramic membrane recoil tank 5 of the flushing unit; the third branch is connected to the ion exchange resin tank 2 after merging with the first branch; the first branch is bypassed by two ceramic membranes; the second branch is bypassed by a thermometer and a pressure gauge, and the pipeline between the first membrane filter 421 and the second membrane filter 422 is provided with a ceramic membrane, and is bypassed by a pressure transfer gauge and a pressure display gauge, which are connected to the first branch through a pipeline, and the second membrane filter 422 is connected to the clear liquid tank 6 through a sight glass, a solenoid valve, a manual valve and a ceramic membrane; the third branch is bypassed by a pressure transfer gauge and a pressure display gauge, which connect the solenoid valve, the manual valve and the second pipeline and the first pipeline to merge and connect to the ion exchange resin tank 2; the air source pressure of the first compressed air source 121 is set to 0.1-0.2MPa and the air source pressure of the second compressed air source 122 is 0.6-0.7MPa, and the staff can observe whether the filtering condition in the pipeline after the second membrane filter 422 is good through a sight glass.

[0028] When in use, after the coolant containing silicon powder passes through the filter press unit 1 of the system, the silicon powder is filtered and retained by the ceramic membrane, and the filtrate enters the ion exchange resin tank 2, which contains desalination resin. The ceramic membrane feed pump 31 delivers the coolant containing resin to the ceramic membrane, and the first membrane filter 421 and the second membrane filter 422 collect the clear liquid into the clear liquid tank 6 for use, and the concentrated liquid filtered by the first membrane filter 421 and the second membrane filter 422 flows back to the ion exchange resin tank 2; through the reflux stirring of the ceramic membrane circulation pump 41, the resin can be fully mixed with the cooling liquid to be desalted, so as to exert the desalination effect of the resin; when the resin needs to be regenerated, it is delivered to the ion exchange resin tank 2 by the ceramic membrane circulation pump 41, and regenerated in the ion exchange resin tank 2. After the regenerated resin is rinsed to the pH and conductivity, it is continuously pumped into the diamond wire coolant purification system for filtration and supplied to the slicing workshop after passing the filtration.

[0029] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. A diamond wire coolant purification system, used for purifying diamond wire coolant, characterized by: The purification system includes a filter press unit, an ion exchange unit, a feed unit, a circulation unit and a flushing unit; the filter press unit includes a first compressed air source, a second compressed air source and a filter press clear liquid source, the filter press clear liquid source is mixed with the first compressed air source after reaction in the ion exchange unit, and then flows into the diamond wire slicing workshop after flushing in the flushing unit, the feed unit includes a ceramic membrane feed pump, and the ceramic membrane feed pump provides reaction raw materials for the diamond wire coolant purification system, and the circulation unit inputs the filtered concentrated coolant into the ion exchange unit; The ion exchange unit comprises an ion exchange resin tank, which is provided with a plurality of interfaces. The ion exchange resin tank is connected to the filter press clear liquid source and the circulation unit, and the ion exchange resin tank is also externally connected to a PH detector, a conductivity detector, a thermometer and a liquid level gauge; the circulation unit comprises a ceramic membrane circulation pump and a membrane filter; the ceramic membrane circulation pump has three branches, the first branch is connected to the ion exchange resin tank; the second branch is connected to the first membrane filter and the second membrane filter, and finally connected to the ceramic membrane recoil tank of the flushing unit; the third branch is connected to the ion exchange resin tank after merging with the first branch; the first branch is bypassed by two ceramic membranes; the second branch is bypassed by a thermometer and a pressure gauge, a ceramic membrane is provided in a pipeline between the first membrane filter and the second membrane filter, a pressure transmission meter and a pressure display meter are bypassed, and the first branch is connected through a pipeline, and the second membrane filter is connected to the clear liquid tank through a sight glass, a solenoid valve, a manual valve and a ceramic membrane; the third branch is bypassed by a pressure transmission meter and a pressure display meter connected to the solenoid valve, a manual valve, and the second branch and the first branch are merged to connect the ion exchange resin tank.

2. A diamond wire coolant purification system according to claim 1, characterized in that: The liquid outlet of the ion exchange resin tank is connected to the ceramic membrane feed pump via a ceramic membrane; and is also connected to a drainage ditch, and a ceramic membrane is arranged between the drainage ditch and the ion exchange resin tank.

3. A diamond wire coolant purification system according to claim 1, characterized in that: The ceramic membrane feed pump is driven by a variable frequency motor and is connected to the circulation unit; a pressure transmission meter and a pressure display meter are connected to the pipeline between the ceramic membrane feed pump and the circulation unit.

4. A diamond wire coolant purification system according to claim 1, characterized in that: The flushing unit includes the ceramic membrane recoil tank, which is connected to the second membrane filter and is also connected to two drainage ditches and a second compressed air source. A needle valve is provided between the drainage ditch and the ceramic membrane recoil tank. The second compressed air source injects compressed air into the ceramic membrane recoil tank through the needle valve, and the ceramic membrane recoil tank discharges excess liquid into the drainage ditch.

5. A diamond wire coolant purification system according to claim 2, characterized in that: The clear liquid tank is connected to a pH detector, a conductivity detector, a thermometer and a liquid level meter; the outlet of the clear liquid tank is connected to the drainage ditch through a ceramic membrane, and the coolant is supplied to the diamond wire slicing workshop.

6. A diamond wire coolant purification system according to claim 1, characterized in that: The first membrane filter and the second membrane filter are connected to the trench via ceramic membranes respectively.

Images