Electrode introduction assembly and vacuum coating equipment

Abstract

The utility model discloses an electrode leading-in assembly and vacuum coating equipment, and relates to the technical field of vacuum coating equipment, the electrode leading-in assembly comprises a mounting seat, a plurality of electrodes and a plurality of insulating sleeves, the plurality of electrodes are arranged on the mounting seat in a penetrating manner, one end of each electrode forms a wiring end, the wiring end is used for connecting a power line, and the insulating sleeves are arranged on the mounting seat. The plurality of insulation sleeves are respectively sleeved on the outer sides of the plurality of electrodes, and the wiring terminals are arranged in the insulation sleeves. According to the electrode introduction assembly and the vacuum coating equipment disclosed by the utility model, the generation of electric arcs can be reduced, and further the safety performance of the vacuum coating equipment can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to an electrode introduction component and vacuum coating equipment. Background Art

[0002] The vacuum coating equipment is a device that vacuum coats materials through magnetron sputtering, ion etching, electron beam evaporation and other technologies. The vacuum coating equipment is provided with an electrode introduction assembly, which includes a mounting seat and a plurality of conductive electrodes, and the plurality of electrodes are inserted into the mounting seat. After the mounting seat is installed in the vacuum coating equipment, one end of the electrode extends into the vacuum chamber of the vacuum coating equipment and is connected to the components in the vacuum chamber, and the other end of the electrode is located outside the vacuum chamber and is connected to an external power line.

[0003] The existing electrode introduction assembly has the following disadvantages: since the spacing between adjacent electrodes is very close, when the electrode is energized, an arc is easily generated at the connection point between the electrode and the power line, which can easily cause a short circuit and damage the equipment, resulting in poor safety. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes an electrode introduction component, which can reduce the generation of arcs and thus effectively improve the safety performance of vacuum coating equipment.

[0005] The utility model also provides a vacuum coating device with the electrode introduction component.

[0006] The electrode introduction assembly according to the first aspect of the utility model is applied to vacuum coating equipment, which includes a mounting seat, multiple electrodes and multiple insulating sleeves. The multiple electrodes are inserted into the mounting seat, and one end of the electrode forms a wiring terminal, which is used to connect a power line. The multiple insulating sleeves are respectively sleeved on the outside of the multiple electrodes, and the wiring terminal is located inside the insulating sleeves.

[0007] The electrode introduction assembly according to the embodiment of the utility model has at least the following beneficial effects:

[0008] After the mounting base is installed on the vacuum coating equipment, the terminal of the electrode is located outside the vacuum chamber of the vacuum coating equipment, and the terminal is used to connect to an external power line. The end of the electrode away from the terminal extends into the vacuum chamber to be connected to the working part in the vacuum chamber. According to the electrode introduction assembly of the embodiment of the utility model, since an insulating sleeve is provided on the outside of each electrode, and the terminal of the electrode is located in the insulating sleeve, the insulating sleeve can separate the terminal of each electrode from the connection position of the power line, which greatly increases the electrical gap, thereby reducing the generation of arcs and effectively improving the safety performance of the vacuum coating equipment.

[0009] According to some embodiments of the utility model, the electrode introduction assembly further includes a protective sleeve, one end of which is connected to the mounting seat, and all the insulating sleeves are located inside the protective sleeve.

[0010] According to some embodiments of the utility model, the electrode introduction assembly further comprises a cover body, the cover body being connected to an end of the protective sleeve away from the mounting seat to cover the protective sleeve, and the cover body being provided with a clearance hole for the power cord to pass through.

[0011] According to some embodiments of the present invention, the cover body and the mounting seat respectively abut against two axial ends of the insulating sleeve.

[0012] According to some embodiments of the utility model, the mounting seat includes a flange and an insulating column, the flange is sleeved on the outer side of the insulating column, and the plurality of electrodes are inserted through the insulating column.

[0013] According to some embodiments of the utility model, the flange is provided with an annular groove surrounding the insulating column, the protective sleeve abuts against the bottom surface of the annular groove and is connected to the flange via fasteners, and the inner wall of the protective sleeve is fitted to the outer wall of the insulating column.

[0014] According to some embodiments of the utility model, the side wall of the annular groove is provided with an annular depression surrounding the protective sleeve, and the electrode introduction assembly also includes a seal, and the seal includes a center ring and a sealing ring, the center ring abuts the side wall of the annular groove, and the sealing ring is sleeved on the outside of the center ring and located inside the annular depression.

[0015] According to some embodiments of the present invention, the insulating sleeve and / or the insulating column are made of ceramic.

[0016] According to some embodiments of the present invention, the wiring terminal is located in the middle of the insulating sleeve in the length direction.

[0017] The vacuum coating equipment according to the second embodiment of the utility model includes the electrode introduction assembly described in the first embodiment.

[0018] The vacuum coating device according to the embodiment of the utility model has at least the following beneficial effects:

[0019] Using the electrode introduction assembly of the first embodiment of the utility model, after the mounting seat is installed on the vacuum coating equipment, the electrode terminal is located outside the vacuum chamber of the vacuum coating equipment, the terminal is used to connect to the external power line, and the end of the electrode away from the terminal extends into the vacuum chamber to be used to connect to the working parts in the vacuum chamber. According to the electrode introduction assembly of the embodiment of the utility model, since the outer side of each electrode is provided with an insulating sleeve, and the electrode terminal is located in the insulating sleeve, the insulating sleeve can separate the terminal of each electrode from the connection position of the power line, which greatly increases the electrical gap, thereby reducing the generation of arcs and effectively improving the safety performance of the vacuum coating equipment.

[0020] Additional aspects and advantages of the present invention will be partially given in the following description, and some of the additional aspects and advantages will become apparent from the following description, or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0022] Figure 1 This is a schematic diagram of the overall structure of the electrode introduction assembly of the utility model;

[0023] Figure 2 for Figure 1 Explosion diagram of

[0024] Figure 3 for Figure 1 A cross-sectional view of

[0025] Figure 4 for Figure 3 Schematic diagram with seal installed.

[0026] Figure Number:

[0027] Mounting seat 100; flange 101; insulating column 102; annular groove 103; annular sink 104;

[0028] Electrode 200; Terminal 201; Power line 202;

[0029] Insulation sleeve 300;

[0030] Protective sleeve 400; first annular flange 401; second annular flange 402;

[0031] Cover body 500; clearance hole 501;

[0032] Sealing element 600 ; center ring 601 ; sealing ring 602 . DETAILED DESCRIPTION

[0033] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0034] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] In the description of the present utility model, "a plurality" refers to two or more than two. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0036] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0037] The vacuum coating equipment is a device that vacuum coats materials through magnetron sputtering, ion etching, electron beam evaporation and other technologies. The vacuum coating equipment is provided with an electrode introduction assembly, which is used to introduce the current from the atmosphere side into the working parts in the vacuum chamber of the vacuum coating equipment. The electrode introduction assembly includes a mounting seat and a plurality of conductive electrodes. The mounting seat is generally a flange, and the plurality of electrodes are inserted into the mounting seat. After the mounting seat is installed on the vacuum coating equipment, one end of the electrode extends into the vacuum chamber of the vacuum coating equipment and is connected to the parts in the vacuum chamber, and the other end of the electrode is located outside the vacuum chamber and is connected to an external power line. The power line introduces the current of the power supply through the electrode into the working parts in the vacuum chamber, such as the electric heating wire.

[0038] The existing electrode introduction assembly has the following disadvantages: since the spacing between adjacent electrodes is very close, resulting in a very small electrical gap, when the electrodes are energized, arcs are easily generated between the connection points of each electrode and the power line, which can easily cause a short circuit and damage the equipment, resulting in poor safety.

[0039] To this end, the utility model proposes an electrode introduction component and a vacuum coating device, which can effectively solve the above problems.

[0040] Reference below Figures 1 to 4An electrode introduction assembly and a vacuum coating device according to an embodiment of the utility model are described.

[0041] The electrode introduction assembly according to the first embodiment of the utility model is applied to vacuum coating equipment, such as Figures 1 to 4 As shown, the vacuum coating device includes a mounting seat 100 , a plurality of electrodes 200 and a plurality of insulating sleeves 300 .

[0042] Among them, the mounting base 100 can be set as a flange structure to facilitate connection with the casing of the vacuum coating equipment. The mounting base 100 is provided with multiple through holes for the electrodes 200 to pass through. For example, when there are 6 electrodes 200, the mounting base 100 can be correspondingly provided with 6 through holes.

[0043] The number of electrodes 200 can be 5, 6, 7 or other suitable numbers, for example, 6 electrodes 200 are made of conductive materials such as brass to be able to conduct electricity. Multiple electrodes 200 are inserted into the mounting base 100, and one end of the electrode 200 forms a terminal 201. When the mounting base 100 is installed on the vacuum coating equipment, the terminal 201 can be located outside the vacuum chamber of the vacuum coating equipment. The terminal 201 is used to connect the power cord 202. For example, the terminal 201 and the power cord 202 can be welded.

[0044] The number of insulating sleeves 300 can be the same as the number of electrodes 200 and correspond one to one. For example, when there are 6 electrodes 200, 6 insulating sleeves 300 can be provided accordingly. The insulating sleeves 300 are made of electrically insulating material, for example, they can be made of ceramics. Multiple insulating sleeves 300 are respectively sleeved on the outside of multiple electrodes 200, and the terminal 201 is located in the insulating sleeve 300. In this way, the connection position of the terminal 201 and the power cord 202 is also located in the insulating sleeve 300, so that the insulating sleeve 300 can separate the connection positions of the terminal 201 of the multiple electrodes 200 from the power cord 202.

[0045] In the present invention, after the mounting base 100 is installed on the vacuum coating equipment, the terminal 201 of the electrode 200 is located outside the vacuum chamber of the vacuum coating equipment, and the terminal 201 is used to connect with the external power line 202. The end of the electrode 200 away from the terminal 201 extends into the vacuum chamber to be connected with the working parts in the vacuum chamber. According to the electrode introduction assembly of the embodiment of the present invention, since the outer side of each electrode 200 is provided with an insulating sleeve 300, and the terminal 201 of the electrode 200 is located in the insulating sleeve 300, the insulating sleeve 300 can separate the connection position of the terminal 201 of each electrode 200 from the power line 202, which greatly increases the electrical gap, thereby reducing the generation of arcs and effectively improving the safety performance of the vacuum coating equipment. In addition, the insulating sleeve 300 can prevent the connection position between the terminal 201 of each electrode 200 and the power line 202 from being exposed, thereby not only reducing the rust and corrosion of the connection position between the terminal 201 of the electrode 200 and the power line 202, but also extending the service life and making it neater and more beautiful.

[0046] refer to Figures 1 to 4 As shown, in some embodiments of the present invention, the electrode introduction assembly further includes a protective sleeve 400, one end of which is connected to the mounting seat 100, and all the insulating sleeves 300 are located in the protective sleeve 400. For example, a first annular flange 401 may be provided at one end of the protective sleeve 400 close to the mounting seat 100, and the first annular flange 401 may extend along the circumference of the protective sleeve 400, and a plurality of fasteners may be provided between the first annular flange 401 and the mounting seat 100.

[0047] In this embodiment, the protective cover 400 is provided to protect all the insulating covers 300 and the electrodes 200, reduce the damage to the insulating covers 300 and the electrodes 200, and extend the service life of the insulating covers 300 and the electrodes 200. Secondly, the protective cover 400 can be made of an electrically insulating material, which can further reduce leakage and short circuit, and improve safety. In addition, the insulating cover 300 is not exposed to the outside, and is also more neat and beautiful.

[0048] refer to Figures 1 to 4As shown, in some embodiments of the present invention, the electrode introduction assembly further includes a cover body 500, which is connected to the end of the protective sleeve 400 away from the mounting seat 100 to cover the protective sleeve 400, and the cover body 500 is provided with a clearance hole 501 for the power cord 202 to pass through. For example, the end of the protective sleeve 400 away from the mounting seat 100 may be provided with a second annular flange 402, the second annular flange 402 may extend along the circumference of the protective sleeve 400, and a plurality of fasteners may be provided between the second annular flange 402 and the cover body 500. The number of the clearance holes 501 on the cover body 500 may be the same as the number of the electrodes 200 and correspond one to one, and the power cord 202 is passed through the corresponding clearance holes 501.

[0049] In this embodiment, the cover 500 is provided to further protect all the insulating sleeves 300 and the electrodes 200, further reduce the damage to the insulating sleeves 300 and the electrodes 200, and extend the service life of the insulating sleeves 300 and the electrodes 200. Secondly, it can also reduce the entry of external rainwater and dust into the protective sleeve 400. In addition, the cover 500 can also be made of an electrically insulating material, which can further reduce leakage and short circuit, and improve safety.

[0050] refer to Figure 3 and Figure 4 As shown, in some embodiments of the present invention, the cover 500 and the mounting seat 100 respectively abut against the two ends of the axial direction of the insulating sleeve 300. Such a configuration can prevent the insulating sleeve 300 from moving randomly along its own axial direction, thereby making the insulating sleeve 300 have a better protective effect on the connection position between the terminal 201 of the electrode 200 and the power line 202.

[0051] refer to Figures 2 to 4 As shown, in some embodiments of the present invention, the mounting base 100 includes a flange 101 and an insulating column 102, the flange 101 is sleeved on the outside of the insulating column 102, and a plurality of electrodes 200 are inserted through the insulating column 102. For example, the flange 101 may be a KF flange, the flange 101 is used to connect with the flange structure on the casing of the vacuum coating equipment, the flange 101 is provided with a sleeve hole and sleeved on the outside of the insulating column 102 through the sleeve hole, the insulating column 102 may be connected to the flange 101 by bonding, welding, threading or other suitable methods, the insulating column 102 is made of an electrical insulating material, the insulating column 102 is provided with a plurality of through holes, and the electrodes 200 are inserted through the corresponding through holes.

[0052] In this embodiment, the mounting base 100 includes a flange 101 and an insulating column 102. The flange 101 is convenient for connection with the housing of the vacuum coating equipment, and the insulating column 102 is convenient for the electrode 200 to be inserted and has electrical insulation, which can reduce leakage and short circuit phenomena and improve safety.

[0053] refer to Figures 1 to 4As shown, in some embodiments of the present invention, the flange 101 is provided with an annular groove 103 surrounding the insulating column 102, the protective sleeve 400 abuts against the bottom surface of the annular groove 103, and is connected to the flange 101 by fasteners, and the inner side wall of the protective sleeve 400 fits the outer side wall of the insulating column 102. For example, the end of the protective sleeve 400 close to the mounting seat 100 may be provided with a first annular flange 401, the first annular flange 401 may extend along the circumference of the protective sleeve 400, the first annular flange 401 abuts against the bottom surface of the annular groove 103, and is connected to the flange 101 by fasteners, the outer side wall of the first annular flange 401 may fit with the side wall of the annular groove 103, and the inner side wall of the protective sleeve 400 fits with the outer side wall of the insulating column 102. In this embodiment, such a configuration not only makes the connection of the protective sleeve 400 more stable, but also makes the sealing better, reducing the leakage of the vacuum chamber of the vacuum coating equipment.

[0054] refer to Figures 1 to 4 As shown, in some embodiments of the present invention, the side wall of the annular groove 103 is provided with an annular depression 104 surrounding the protective sleeve 400, and the electrode introduction assembly further includes a seal 600, and the seal 600 includes a center ring 601 and a sealing ring 602, the center ring 601 abuts against the side wall of the annular groove 103, and the sealing ring 602 is sleeved on the outside of the center ring 601 and located in the annular depression 104. For example, an axial end of the outer wall of the center ring 601 can abut against the side wall of the annular groove 103, and an annular limiting portion can be provided at the middle position of the outer wall of the center ring 601, and the annular limiting portion can be located in the annular depression 104, and the outer wall of the annular limiting portion can be provided with an annular recess, and the sealing ring 602 is sleeved on the outside of the annular limiting portion and partially embedded in the annular recess.

[0055] In this embodiment, a sealing ring 602 is arranged in the annular sink 104, so that when the flange 101 is connected to other flange structures on the vacuum coating equipment, a sealing effect can be achieved to reduce air leakage in the vacuum chamber of the vacuum coating equipment. A center ring 601 is arranged, the center ring 601 abuts against the side wall of the annular groove 103, and the sealing ring 602 is sleeved on the outside of the center ring 601, so that the sealing ring 602 can be positioned to prevent the sealing ring 602 from moving at will, thereby achieving a better sealing effect.

[0056] In some embodiments of the present invention, the insulating sleeve 300 is made of ceramic. The insulating sleeve 300 is made of ceramic, which not only has good electrical insulation effect, but also has good fireproof, moisture-proof and corrosion-proof effects. In addition, it has high structural strength, good anti-aging performance and long service life.

[0057] It should be noted that the insulating column 102 may also be made of ceramics. In addition, the insulating sleeve 300 and the insulating column 102 may also be made of other electrically insulating materials, such as electrically insulating rubber, which will not be described in detail here.

[0058] refer to Figure 3 and Figure 4 As shown, in some embodiments of the present invention, the terminal 201 is located in the middle of the length direction of the insulating sleeve 300. In this way, the connection position of the terminal 201 of the electrode 200 and the power line 202 is approximately in the middle of the length direction of the insulating sleeve 300, thereby further improving the separation effect of the insulating sleeve 300 and further increasing the electrical gap, thereby further reducing the generation of arcs and further improving the safety performance of the vacuum coating equipment.

[0059] refer to Figure 3 and Figure 4 As shown, in some embodiments of the present invention, there is a gap between the insulating sleeve 300 and the electrode 200, and there is a gap between the insulating sleeve 300 and the power line 202. Such a configuration is not only convenient for installing the insulating sleeve 300, but also convenient for removing the insulating sleeve 300 when the insulating sleeve 300, the electrode 200, or the power line 202 needs to be repaired or replaced.

[0060] The vacuum coating device according to the second embodiment of the utility model comprises the electrode introduction assembly of the first embodiment. The vacuum coating device may be provided with a housing, and the mounting seat 100 of the electrode introduction assembly of the first embodiment may be mounted on the housing. In some embodiments of the utility model, the vacuum coating device may be a magnetron sputtering coating device, an ion etching coating device, an electron beam evaporation coating device or other suitable vacuum coating devices.

[0061] According to the vacuum coating equipment of the embodiment of the utility model, by adopting the electrode introduction assembly of the embodiment of the first aspect of the utility model, after the mounting seat 100 is installed on the vacuum coating equipment, the terminal 201 of the electrode 200 is located outside the vacuum chamber of the vacuum coating equipment, and the terminal 201 is used to connect with the external power line 202, and the end of the electrode 200 away from the terminal 201 extends into the vacuum chamber to be used for connecting with the working parts in the vacuum chamber. According to the electrode introduction assembly of the embodiment of the utility model, since the outer side of each electrode 200 is provided with an insulating sleeve 300, and the terminal 201 of the electrode 200 is located in the insulating sleeve 300, the insulating sleeve 300 can separate the connection position of the terminal 201 of each electrode 200 from the power line 202, which greatly increases the electrical gap, thereby reducing the generation of arcs, and effectively improving the safety performance of the vacuum coating equipment.

[0062] It should be noted that since the vacuum coating equipment can adopt all the technical solutions of the electrode introduction assembly of the above-mentioned first aspect embodiment, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned first aspect embodiment, and these additional beneficial effects will not be repeated here.

[0063] It is understandable that other structures and operations of the vacuum coating equipment according to the embodiment of the utility model are known to ordinary technicians in the field and will not be described in detail here.

[0064] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. An electrode introduction component, applied to vacuum coating equipment, characterized in that: include: Mounting seat; A plurality of electrodes are provided through the mounting seat, one end of each electrode forms a wiring terminal, and the wiring terminal is used to connect a power line; A plurality of insulating sleeves are respectively sleeved on the outer sides of the plurality of electrodes, and the wiring terminals are located inside the insulating sleeves.

2. The electrode introduction assembly according to claim 1, characterized in that: The electrode introduction assembly also includes: A protective sleeve, one end of which is connected to the mounting seat, and all the insulating sleeves are located inside the protective sleeve.

3. The electrode introduction assembly according to claim 2, characterized in that: The electrode introduction assembly also includes: The cover body is connected to one end of the protective sleeve away from the mounting seat to cover the protective sleeve. The cover body is provided with a clearance hole for the power line to pass through.

4. The electrode introduction assembly according to claim 3, characterized in that: The cover body and the mounting seat respectively abut against two axial ends of the insulating sleeve.

5. The electrode introduction assembly according to any one of claims 2 to 4, characterized in that: The mounting seat comprises a flange and an insulating column, the flange is sleeved on the outer side of the insulating column, and the plurality of electrodes are penetrated through the insulating column.

6. The electrode introduction assembly according to claim 5, characterized in that: The flange is provided with an annular groove surrounding the insulating column, the protective sleeve abuts against the bottom surface of the annular groove and is connected to the flange via fasteners, and the inner wall of the protective sleeve is fitted to the outer wall of the insulating column.

7. The electrode introduction assembly according to claim 6, characterized in that: The side wall of the annular groove is provided with an annular sink surrounding the protective sleeve, and the electrode introduction assembly further includes: The sealing member comprises a center ring and a sealing ring, wherein the center ring abuts against the side wall of the annular groove, and the sealing ring is sleeved on the outer side of the center ring and located in the annular sink.

8. The electrode introduction assembly according to claim 5, characterized in that: The insulating sleeve and / or the insulating column are made of ceramic.

9. The electrode introduction assembly according to any one of claims 1 to 4, characterized in that: The wiring terminal is located in the middle of the insulating sleeve in the length direction.

10. A vacuum coating device, characterized in that: The invention comprises the electrode introduction assembly according to any one of claims 1 to 9.

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