E84 communication integrated device and system

Abstract

The utility model provides an E84 communication integrated device and system, and effectively solves the problem that an existing plug-in E84 communication module and an existing built-in E84 communication module cannot meet the communication requirement of a host station. The E84 communication integrated device comprises a management platform, a plurality of main control modules and a plurality of distributed control modules corresponding to the main control modules, the plurality of main control modules are placed on corresponding main machine tables, and the input ends of the main control modules are connected with the output ends of the corresponding distributed control modules respectively; the input ends of the plurality of distributed control modules are respectively connected with the output end of the sensor module of each wafer objective table in the main machine table; and the output ends of the plurality of main control modules are connected with the management platform and the EAP system, so that the communication requirement of the host station is met.

Description

Technical Field

[0001] The present application relates to the field of communication technology, and in particular to an E84 communication integration device and system. Background Art

[0002] With the continuous development of the semiconductor industry, manufacturers are faced with the challenge of improving production efficiency and reducing costs. The overhead crane system is the abbreviation of the overhead crane handling system (OHT), which is an important automatic handling system in semiconductor manufacturing plants. It can improve the overall production efficiency to a great extent by improving material transportation efficiency, reducing labor costs and reducing pollution risks.

[0003] In FAB automated factories, when production equipment is loading and unloading materials on the overhead crane system, in order to ensure that the wafer box FOUP is loaded or unloaded smoothly, it communicates through the SEMI E84 protocol to ensure that the wafer box FOUP is loaded or unloaded smoothly. However, in reality, in order to save costs or not consider docking with the overhead crane system when purchasing equipment, the main machine of the production equipment does not support the E84 communication function. Especially for some old FABs, many equipment are still in the state of manual loading and unloading, which not only affects production efficiency, but also greatly increases labor costs.

[0004] For those host stations that do not support E84 communication and want to connect to the overhead crane system, one solution is to design a safe and reliable external E84 communication module. However, given that there are many host station manufacturers and many types of wafer stages involved in loading and unloading, there are many types of output sensor signals related to the presence or absence of wafer boxes on the wafer stages, such as FOUP sensors, in-position sensors, clamping sensors, and release sensors. These sensor signals participate in SEMI E84 communication, and the external E84 communication module must be compatible with these signals. At the same time, unlike the built-in E84 communication module that can only meet the function of communication interface signal status transmission, the external E84 communication module must be able to realize SECS GEM communication with EAP and realize signal interaction, and also realize functions such as fault alarm. However, the existing external E84 communication module cannot communicate with the EAP system and does not have functions such as fault alarm. Utility Model Content

[0005] In view of this, an embodiment of the present application provides an E84 communication integrated device and system, which effectively solves the problem that both the existing external E84 communication module and the built-in E84 communication module cannot meet the communication requirements of the host station.

[0006] In a first aspect, an embodiment of the present application provides an E84 communication integration device, which is applied to an overhead crane system, wherein the overhead crane system includes multiple host stations and an EAP system; the E84 communication integration device includes a management platform, multiple main control modules, and multiple distributed control modules corresponding to the main control modules, wherein the multiple main control modules are placed on the corresponding host stations, and the input ends of the main control modules are respectively connected to the output ends of the corresponding pairs of distributed control modules; the input ends of the multiple distributed control modules are respectively connected to the output ends of the sensor modules of each wafer stage in the host station; the output ends of the multiple main control modules are connected to the management platform and the EAP system;

[0007] The distributed control module is used to receive and be compatible with sensor signals of various output types of the wafer box on the wafer stage collected by various sensors in the sensor module in the corresponding host station, and output sensor signals of the same output type obtained by converting the sensor signals of the various output types to the corresponding main control modules respectively;

[0008] The main control module is used to send received sensor signals of the same output type to the EAP system and the management platform respectively;

[0009] The management platform is used to monitor the loading and unloading of wafer boxes by the overhead crane system based on sensor signals of the same output type.

[0010] In some embodiments, the distributed control module includes an interactive control universal module; the input end of the interactive control universal module is connected to the output end of the sensor module in the host station, and the output end of the interactive control universal module is connected to the main control module;

[0011] The interactive control universal module is used to control the overhead travelling crane system to load and unload wafer boxes based on sensor signals of various output types, and to generate loading and unloading signals after loading and unloading are completed, and the loading and unloading signals are sent to the main control module;

[0012] The main control module is also used to send the received loading and unloading signals to the management platform.

[0013] In some embodiments, the distributed control module further comprises an alarm unit; the alarm unit is connected to the output end of the interactive control universal module;

[0014] The alarm unit is used to alarm based on the loading and unloading signal output by the interactive control general module.

[0015] In some embodiments, the distributed control module further comprises a reset unit, wherein the reset unit is connected to an input terminal of the interactive control general module;

[0016] The reset unit is used to restart the interactive control universal module to load and unload the wafer box.

[0017] In some embodiments, the distributed control module further includes a receiving unit and a compatible unit; the receiving unit includes a receiving end and an output end; the receiving end of the receiving unit is connected to the output end of the sensor module, the output end of the receiving unit is connected to the input end of the compatible unit, and the output end of the compatible unit is respectively connected to the main control module;

[0018] The receiving unit is used to receive sensor signals of multiple output types output by the sensor module, and output the sensor signals of multiple output types to the compatible unit;

[0019] The compatibility unit is used to be compatible with sensor signals of various output types received by the receiving unit based on a PCB jumper, and output compatible sensor signals of the same output type to the main control module.

[0020] In some embodiments, the compatible unit further includes a signal access unit, an optocoupler isolation switch, and an NPN output unit;

[0021] One end of the signal access unit is connected to the receiving end of the receiving unit, the other end of the signal access unit is connected to one end of the optocoupler isolation switch, the other end of the optocoupler isolation switch is connected to one end of the NPN output unit, and the other end of the NPN output unit is connected to the main control module;

[0022] The signal access unit is used to receive the sensor signals of the multiple output types based on the PCB jumper method;

[0023] The optical coupling isolation switch is used to electrically isolate sensor signals of multiple output types received by the signal access unit;

[0024] The NPN output unit is used to convert the sensor signal that is electrically isolated into an NPN output type, and send the sensor signal of the NPN output type to the main control module.

[0025] In some embodiments, the compatible unit further comprises a signal inversion unit, wherein the signal inversion unit is connected to one end of the NPN output unit, and the other end of the signal inversion unit is connected to the main control module;

[0026] The signal inversion unit is used to invert the sensor signal in NPN form based on the type of PCB jumper.

[0027] In some embodiments, the main control module includes an EAP output unit and a management output unit, the input ends of the EAP output unit and the management output unit are both connected to the output end of the compatible unit, the output end of the EAP output unit is connected to the EAP system, and the output end of the management output unit is connected to the management platform;

[0028] The EAP output unit is used to send sensor signals of the same output type to the EAP system;

[0029] The management output unit is used to send sensor signals of the same output type to the management platform.

[0030] In some embodiments, the management platform further includes storage modules, and the storage modules are respectively connected to output ends of the main control modules;

[0031] The storage module is used to store the sensor signal and the loading and unloading signal output by the control module.

[0032] In a second aspect, an embodiment of the present application further provides an E84 communication integration system, the system comprising any one of the E84 communication integration devices and a communication control platform, the E84 communication integration device being communicatively connected to the communication control platform;

[0033] The communication control platform is used to send communication instructions to the E84 communication integration device;

[0034] The E84 communication integration device is used to receive communication instructions, and respond to the communication instructions to output the sensor signal output by the sensor module of the host station to the EAP system and the management platform.

[0035] The embodiments of the present application have the following beneficial effects:

[0036] An E84 communication integration device according to an embodiment of the present application is applied to an overhead crane system, wherein the overhead crane system includes a plurality of mainframes and an EAP system; the E84 communication integration device includes a management platform, a plurality of main control modules and a plurality of distributed control modules corresponding to the main control modules, wherein the plurality of main control modules are placed on the corresponding mainframes, and the input ends of the main control modules are respectively connected to the output ends of the corresponding pairs of distributed control modules; the input ends of the plurality of distributed control modules are respectively connected to the output ends of the sensor modules of each wafer stage in the mainframes; the output ends of the plurality of main control modules are connected to the management platform and the EAP system; the distributed control modules are used to receive and be compatible with sensor signals of various output types of wafer boxes on the wafer stage collected by various sensors in the sensor modules in the corresponding mainframes, and to convert the sensor signals of the various output types into the same sensor signals. The sensor signals of the same output type are respectively output to the corresponding main control modules; the main control modules are used to send the received sensor signals of the same output type to the EAP system and the management platform respectively; the management platform is used to monitor the loading and unloading of wafer boxes by the overhead crane system based on the sensor signals of the same output type, thereby realizing the compatibility of sensor signals of various sensors in the main machine, and realizing the communication between the main machine and the EAP system, and realizing the distributed control of multiple wafer carriers on the main machine, solving the problem that both the external E84 communication module and the built-in E84 communication module cannot meet the communication requirements of the main machine, ensuring the communication between the main machine and the EAP system and the overhead crane system, and realizing the connection of the overhead crane system to the FAB plant through E84, realizing the intelligent production of the FAB plant, and realizing the alarm when an abnormality occurs when the overhead crane system loads and unloads wafer boxes. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 A schematic diagram of the structure of the E84 communication integrated device provided in an embodiment of the present application is shown;

[0039] Figure 2 A schematic diagram of the structure of a compatible unit provided in an embodiment of the present application is shown;

[0040] Figure 3 A schematic diagram of the structure of the management platform provided in the embodiment of the present application is shown;

[0041] Figure 4A schematic diagram of the structure of the E84 communication integration system provided in an embodiment of the present application is shown.

[0042] Description of main symbols:

[0043] Management platform; 2-main control module; 21-EAP output unit; 22-management output unit;

[0044] 3-distributed control module; 31-interactive control general module; 32-alarm unit; 33-reset unit;

[0045] 34-receiving unit; 35-compatible unit; 351-signal access unit; 352-optical coupler isolation switch;

[0046] 353-NPN output unit; 354-signal inversion unit. DETAILED DESCRIPTION

[0047] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0048] The components of the embodiments of the present application generally described and shown in the drawings herein may be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0049] Hereinafter, the terms "including", "having" and their cognates, which may be used in various embodiments of the present application, are intended only to indicate specific features, numbers, steps, operations, elements, components, or combinations of the foregoing items, and should not be understood as first excluding the existence of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing items or adding the possibility of one or more features, numbers, steps, operations, elements, components, or combinations of the foregoing items.

[0050] Furthermore, the terms “first”, “second”, “third”, etc. are merely used for distinguishing descriptions and are not to be understood as indicating or implying relative importance.

[0051] Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as those generally understood by those skilled in the art to which the various embodiments of the present application belong. The terms (such as those defined in generally used dictionaries) will be interpreted as having the same meanings as the contextual meanings in the relevant technical field and will not be interpreted as having idealized meanings or overly formal meanings unless clearly defined in the various embodiments of the present application.

[0052] At present, there are many types of output sensor signals related to the wafer box FOUP sensor, in-position sensor, clamping sensor and release sensor on the wafer stage. These sensor signals participate in SEMI E84 communication, and the existing external E84 communication module is not compatible with these signals; at the same time, unlike the built-in E84 communication module that can only meet the function of communication interface signal status transmission, the external E84 communication module must be able to realize SECS GEM communication with EAP and realize signal interaction, and realize functions such as fault alarm, but the existing external E84 communication module cannot communicate with the EAP system and does not have functions such as fault alarm.

[0053] Based on this, an E84 communication integration device and system provided by the new embodiment of the present invention realizes the compatibility of sensor signals of various sensors in the main station, realizes communication between the main station and the EAP system, realizes distributed control of multiple wafer carriers on the main station, and realizes the connection of the overhead crane system to the FAB factory through E84, realizes the intelligent production of the FAB factory, and realizes alarm when abnormalities occur when the overhead crane system loads and unloads wafer boxes.

[0054] In order to understand this embodiment, firstly, an E84 communication integration device disclosed in the embodiment of the utility model is introduced in detail.

[0055] Example 1

[0056] Please refer to Figure 1 , is an E84 communication integration device provided in an embodiment of the present application, applied to an overhead crane system, the overhead crane system includes multiple host stations and an EAP system; the E84 communication integration device includes a management platform 1, multiple main control modules 2 and multiple distributed control modules 3 corresponding to the main control modules, the multiple main control modules 2 are placed on the corresponding host stations, the input ends of the main control modules 2 are respectively connected to the output ends of the corresponding pairs of distributed control modules 3; the input ends of the multiple distributed control modules 3 are respectively connected to the output ends of the sensor modules of each wafer stage in the host station; the output ends of the multiple main control modules 2 are connected to the management platform 1 and the EAP system;

[0057] The distributed control module 3 is used to receive and be compatible with sensor signals of various output types of the wafer box on the wafer stage collected by various sensors in the sensor module in the corresponding host station, and output sensor signals of the same output type obtained by converting the sensor signals of the various output types to the corresponding main control module 2 respectively;

[0058] The main control module 2 is used to send received sensor signals of the same output type to the EAP system and the management platform 1 respectively;

[0059] The management platform 1 is used to monitor the loading and unloading of wafer boxes by the overhead crane system based on sensor signals of the same output type.

[0060] The main machine includes multiple wafer stages, each of which is equipped with a sensor module, and the sensor module includes multiple sensors, such as presence or absence sensors, in-position sensors, clamping sensors, and release sensors. The sensor signals output by the sensor module include multiple signals, such as presence or absence signals output by the presence or absence sensor representing whether a wafer box exists, presence signals output by the in-position sensor representing whether there are wafers in the wafer box, clamping signals output by the clamping sensor set for the overhead crane system to clamp the wafer box, and release signals output by the release sensor set for the overhead crane system to release the wafer box. The above presence or absence sensors, in-position sensors, and clamping sensors are commonly used sensors for existing overhead crane systems, and other sensors are also included. The selection of the sensors is a mature existing technology and will not be elaborated here. When each sensor outputs a corresponding signal, due to different output types of the sensors, the output types of the sensor signals are different, including NPN, PNP, and dry contact types.

[0061] The management platform 1, multiple main control modules 2 and multiple distributed control modules 3 corresponding to the main control modules, Figure 1 In the example, a management platform 1 corresponds to two main control modules 2, wherein each main control module 2 corresponds to three distributed control modules 3. All three have data processing and analysis functions, and may be server clusters, servers, computers, or other data processing and analysis equipment with a similar relationship to server clusters, servers, and computers. There is a main control module on each host platform, and corresponding distributed control modules are set according to the number of wafer stages on the host platform. The main control module and the distributed control module form distributed management and distributed control of the host platform and the wafer stage.

[0062] The distributed control module 3 is used to receive and be compatible with sensor signals of various output types of the wafer box on the wafer stage collected by various sensors in the sensor module in the corresponding host station, that is, to convert or make compatible sensor signals of various output types into sensor signals of the same output type, such as making sensor signals with three output types of NPN, PNP and dry contact types compatible into NPN output type, and output the obtained sensor signals of the same output type to the corresponding main control module 2 respectively.

[0063] The main control module 2 is used to send the received sensor signals of the same output type to the EAP system and the management platform 1 respectively, that is, the sensor signals of the unified output type need to be sent to the EAP system and the management platform 1 at the same time, thereby realizing the communication transmission between the host station and the EAP system.

[0064] The management platform 1 is used to monitor the loading and unloading of wafer boxes by the overhead crane system based on sensor signals of the same output type, that is, the management platform 1 must receive sensor signals of the same output type, and based on the sensor signals of the same output type, determine the process of loading and unloading wafer boxes by the overhead crane system, as well as the loading and unloading results, whether there is any loading and unloading failure and issue an alarm, and store the monitored process. At the same time, the EAP system can also store and issue an alarm based on sensor signals of the same output type.

[0065] In combination with the above embodiment, the distributed control module 3 includes an interactive control general module 31; the input end of the interactive control general module 31 is connected to the output end of the sensor module in the host station, and the output end of the interactive control general module 31 is connected to the main control module;

[0066] The interactive control general module 31 is used to control the overhead travelling crane system to load and unload wafer boxes based on sensor signals of various output types, and to generate loading and unloading signals after loading and unloading are completed, and the loading and unloading signals are sent to the main control module 2;

[0067] The main control module 2 is also used to send the received loading and unloading signals to the management platform 1.

[0068] The distributed control module 3 includes a general interactive control module 31, which is used to control the overhead crane system to start loading and unloading the wafer box on the wafer carrier according to the signals output by the presence or absence sensor and the in-position sensor in the sensor signals output by the sensor module of the carrier on the main machine platform; if the signals output by the presence or absence sensor and the in-position sensor both indicate that the wafer box exists and the wafer exists, the jump crane system is controlled to start loading and unloading the wafer box; if the signals output by the presence or absence sensor and the in-position sensor indicate that the wafer box does not exist or the wafer box exists but the wafer does not exist, the overhead crane system is controlled not to load and unload the wafer box, and the loading and unloading process is stopped. After unloading is completed, a loading and unloading signal is generated, and the meaning of the loading and unloading signal can be set. For example, when the loading and unloading signal is a high-low level output type, the loading and unloading signal can be set to be in a high level form, indicating that the overhead crane system loads and unloads the wafer box to the loading port normally, that is, the loading and unloading is successful. If the loading and unloading signal is in a low level form, it means that the overhead crane system loads and unloads the wafer box to the loading port abnormally, that is, the loading and unloading fails, and the loading and unloading signal is compatible and then output to the main control module 2. The output type of the loading and unloading signal can also be other forms, and it is only necessary to show the two results of successful and failed loading and unloading.

[0069] The main control module 2, when receiving the loading and unloading signal, if the loading and unloading signal is compatible, will send the compatible loading and unloading signal to the management platform 1 for storage and alarm prompt, and the overhead crane system needs to be re-debugged to monitor the working progress of the overhead crane system.

[0070] In combination with the above embodiment, the distributed control module 3 further includes an alarm unit 32; the alarm unit 32 is connected to the output end of the interactive control general module 31;

[0071] The alarm unit 32 is used for alarming based on the loading and unloading signal output by the interactive control general module 31.

[0072] The loading and unloading signal output by the interactive control general module 31 indicates the result of the overhead crane system loading and unloading the wafer box. If the loading and unloading signal indicates that the overhead crane system successfully loads and unloads the wafer box, the alarm unit 32 is not started. If the loading and unloading signal indicates that the overhead crane system fails to load and unload the wafer box, the alarm unit 32 is started to alarm. The alarm can be in the form of an audible and visual alarm or other forms that can attract attention. It can also be manually started or automatically pressed by pressing the emergency stop switch emo button, thereby stopping the operation of the overhead crane system to debug the overhead crane system and carry out the next loading and unloading work of the wafer box.

[0073] In combination with the above embodiment, the distributed control module 3 further includes a reset unit 33, and the reset unit 33 is connected to the input end of the interactive control general module 31;

[0074] The reset unit 33 is used to restart the interactive control general module 31 to load and unload the wafer box.

[0075] The reset unit 33 is used to restart the interactive control general module 31 with the reset unit after re-debugging the overhead crane system when the loading and unloading signal output by the interactive control general module 31 indicates that the overhead crane system has failed to load and unload the wafer box, so as to re-control the overhead crane system to load and unload the wafer box. The form of the reset is not specifically limited, and it can be to cancel the emergency stop switch that is pressed, or to reset through the operation interface of the management platform 1, or it can be other reset forms.

[0076] In combination with the above embodiment, the distributed control module 3 further includes a receiving unit 34 and a compatible unit 35; the receiving unit 34 includes a receiving end and an output end; the receiving end of the receiving unit 34 is connected to the output end of the sensor module, the output end of the receiving unit 34 is connected to the input end of the compatible unit 35, and the output end of the compatible unit 35 is respectively connected to the main control module 2;

[0077] The receiving unit 34 is used to receive sensor signals of various output types output by the sensor module, and output the sensor signals of various output types to the compatible unit 35;

[0078] The compatibility unit 35 is used to be compatible with sensor signals of various output types received by the receiving unit based on a PCB jumper, and output compatible sensor signals of the same output type to the main control module 2.

[0079] The receiving unit 34 provided in the distributed control module 3 is used to receive sensor signals of various output types output by the sensor module on the loading platform of the main machine station, and then control the overhead crane system to load and unload the wafer box based on the received sensor signals of various output types, and also output the sensor signals of various output types to the compatible unit 35. The compatible unit 35 is compatible with sensor signals of various output types based on PCB jumpers, so as to identify the signals output by multiple sensors in the sensor module, and read the meanings represented by the sensor signals to control the process of loading and unloading the wafer box by the overhead crane system. For the convenience of output, the compatible unit 35 converts or makes compatible the sensor signals of various output types, and converts or makes compatible the sensor signals of various output types into sensor signals of the same output type, such as being unified into NPN form or dry contact form, and the converted or made compatible sensor signals of the same output type are output to the main control module 2.

[0080] In combination with the above embodiment, the compatible unit 35 further includes a signal access unit 351, an optical coupling isolation switch 352, and an NPN output unit 353;

[0081] One end of the signal access unit 351 is connected to the receiving end of the receiving unit 34, the other end of the signal access unit 351 is connected to one end of the optical coupler isolation switch 352, the other end of the optical coupler isolation switch 352 is connected to one end of the NPN output unit 353, and the other end of the NPN output unit 353 is connected to the main control module 2;

[0082] The signal access unit 351 is used to receive the sensor signals of the multiple output types based on PCB jumper;

[0083] The optical coupling isolation switch 352 is used to electrically isolate sensor signals of various output types received by the signal access unit;

[0084] The NPN output unit 353 is used to convert the sensor signal that is electrically isolated into an NPN output type, and send the sensor signal of the NPN output type to the main control module 2.

[0085] The compatible unit 35 includes a signal access unit 351, an optical coupler isolation switch 352, and an NPN output unit 353. Figure 2 As shown, it is used to convert sensor signals of multiple output types into sensor signals of the same output type. The jumper is a mature technology in the field of PCB board making, and there are multiple jumper methods. The optical coupling isolation switch 352 generally adopts a photoelectric coupler, and other forms of electronic devices that can achieve electrical isolation can also be used. Since the SEMI E84 signals in the EAP system are all NPN output types, an NPN output unit 353 is set to make the sensor signal output to the main control module 2 an NPN normally open signal. By analogy, if the SEMI E84 signals in the EAP system are all PNP output types, a PNP output unit is set in the compatible unit.

[0086] In combination with the above embodiment, the compatible unit 35 further includes a signal inversion unit 354, the signal inversion unit 354 is connected to one end of the NPN output unit 353, and the other end of the signal inversion unit is connected to the main control module 2;

[0087] The signal inversion unit 354 is used to invert the NPN sensor signal based on the type of PCB jumper.

[0088] The signal inversion unit 354 is not a hardware device that must be set up for the compatible unit 35. It is selected based on the jumper and actual conditions. If the sensor signal needs to be inverted, the control signal inversion unit 354 is started to invert the sensor signal. If the sensor signal does not need to be inverted, the signal inversion unit is not started.

[0089] In combination with the above embodiment, the main control module 2 includes an EAP output unit 21 and a management output unit 22, the input ends of the EAP output unit 21 and the management output unit 22 are both connected to the output end of the compatible unit 35, the output end of the EAP output unit 21 is connected to the EAP system, and the output end of the management output unit 22 is connected to the management platform;

[0090] The EAP output unit 21 is used to send sensor signals of the same output type to the EAP system;

[0091] The management output unit 22 is used to send sensor signals of the same output type to the management platform 1 .

[0092] Since the sensor signals of the same output type need to be output to the EAP system and the management platform 1 respectively, an EAP output unit 21 and a management output unit 22 are set in the main control module, such as Figure 3 The main control module shown in the figure copies the sensor signal of the same output type into two copies, one copy is output to the EAP system, and the other copy is output to the management platform 1. When the EAP output unit 21 outputs the sensor signal of the same output type to the EAP system, the SECS GEM communication protocol is adopted, and the management output unit 22 sends the sensor signal of the same output type to the management platform 1, which can adopt SECS GEM, MODBUS, and EtherCat communication protocols, so as to realize transmission to the management platform 1 in various ways.

[0093] In combination with the above embodiment, the management platform 1 further includes a storage module 11, and the storage module is respectively connected to the output end of the control module;

[0094] The storage module 11 is used to store the sensor signals and loading and unloading signals output by the main control module.

[0095] The storage module 11 provided in the management platform 1 is used for receiving, storing and managing the sensor signals and loading and unloading signals of the same output type output by the main control module, and recording the data interaction process between the overhead crane and the overhead crane system when the overhead crane loads and unloads the wafer box based on the loading and unloading signals. The storage method is an existing mature technology, which can be used when the relevant records are needed in the future.

[0096] The management platform 1 can also issue an alarm when the overhead travelling crane system fails to load or unload a wafer box based on the loading and unloading signal.

[0097] Example 2

[0098] The embodiment of the present application also provides an E84 communication integration system, such as Figure 4As shown, the system includes the E84 communication integration device and the communication control platform described in any one of the items, and the E84 communication integration device is communicatively connected with the communication control platform;

[0099] The communication control platform is used to send communication instructions to the E84 communication integration device;

[0100] The E84 communication integration device is used to receive communication instructions, and respond to the communication instructions to output the sensor signal output by the sensor module of the host station to the EAP system and the management platform.

[0101] The communication control platform is used to issue communication instructions when the overhead crane system needs to be used. The communication instructions can be preset stored communication instructions, which are issued when the overhead crane system needs to be used, thereby calling the communication instructions, or the communication instructions can be generated immediately when the overhead crane system needs to be used.

[0102] The E84 communication integrated device is used to receive communication instructions and respond to communication instructions. The E84 communication integrated device is preset with a method for responding to communication instructions, that is, after receiving the response instruction, the sensor module of the host station collects and outputs sensor signals of multiple output types, and then obtains sensor signals of the same output type after compatibility, and outputs the sensor signals of the same output type to the EAP system and the management platform, and controls the overhead crane system to load and unload the wafer box on the wafer stage based on the sensor signal.

[0103] The E84 communication integration device in the E84 communication integration system provided in this embodiment has the same technical features as the E84 communication integration device provided in the above embodiment, so it can also solve the same technical problems and achieve the same technical effects.

[0104] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the utility model, which are used to illustrate the technical solutions of the utility model, rather than to limit them. The protection scope of the utility model is not limited thereto. Although the utility model is described in detail with reference to the above-mentioned embodiments, ordinary technicians in this field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed by the utility model, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the utility model, and should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. An E84 communication integrated device, characterized in that: Applied to an overhead crane system, the overhead crane system includes multiple host platforms and an EAP system; the E84 communication integration device includes a management platform, multiple main control modules and multiple distributed control modules corresponding to the main control modules, the multiple main control modules are placed on the corresponding host platforms, the input ends of the main control modules are respectively connected to the output ends of the corresponding distributed control modules; the input ends of the multiple distributed control modules are respectively connected to the output ends of the sensor modules of each wafer stage in the host platform; the output ends of the multiple main control modules are connected to the management platform and the EAP system; The distributed control module is used to receive and be compatible with sensor signals of various output types of the wafer box on the wafer stage collected by various sensors in the sensor module in the corresponding host station, and output sensor signals of the same output type obtained by converting the sensor signals of the various output types to the corresponding main control modules respectively; The main control module is used to send received sensor signals of the same output type to the EAP system and the management platform respectively; The management platform is used to monitor the loading and unloading of wafer boxes by the overhead crane system based on sensor signals of the same output type.

2. The E84 communication integrated device according to claim 1, characterized in that: The distributed control module includes an interactive control universal module; the input end of the interactive control universal module is connected to the output end of the sensor module in the host station, and the output end of the interactive control universal module is connected to the main control module; The interactive control universal module is used to control the overhead travelling crane system to load and unload wafer boxes based on sensor signals of various output types, and to generate loading and unloading signals after loading and unloading are completed, and the loading and unloading signals are sent to the main control module; The main control module is also used to send the received loading and unloading signals to the management platform.

3. The E84 communication integrated device according to claim 2, characterized in that: The distributed control module also includes an alarm unit; the alarm unit is connected to the output end of the interactive control universal module; The alarm unit is used to alarm based on the loading and unloading signal output by the interactive control general module.

4. The E84 communication integrated device according to claim 2, characterized in that: The distributed control module further comprises a reset unit, and the reset unit is connected to the input end of the interactive control general module; The reset unit is used to restart the interactive control universal module to load and unload the wafer box.

5. The E84 communication integrated device according to claim 1, characterized in that: The distributed control module further includes a receiving unit and a compatible unit; the receiving unit includes a receiving end and an output end; the receiving end of the receiving unit is connected to the output end of the sensor module, the output end of the receiving unit is connected to the input end of the compatible unit, and the output end of the compatible unit is respectively connected to the main control module; The receiving unit is used to receive sensor signals of multiple output types output by the sensor module, and output the sensor signals of multiple output types to the compatible unit; The compatibility unit is used to be compatible with sensor signals of various output types received by the receiving unit based on a PCB jumper, and output compatible sensor signals of the same output type to the main control module.

6. The E84 communication integrated device according to claim 5, characterized in that: The compatible unit also includes a signal access unit, an optocoupler isolation switch, and an NPN output unit; One end of the signal access unit is connected to the receiving end of the receiving unit, the other end of the signal access unit is connected to one end of the optocoupler isolation switch, the other end of the optocoupler isolation switch is connected to one end of the NPN output unit, and the other end of the NPN output unit is connected to the main control module; The signal access unit is used to receive the sensor signals of the multiple output types based on the PCB jumper method; The optical coupling isolation switch is used to electrically isolate sensor signals of multiple output types received by the signal access unit; The NPN output unit is used to convert the sensor signal that is electrically isolated into an NPN output type, and send the sensor signal of the NPN output type to the main control module.

7. The E84 communication integrated device according to claim 5, characterized in that: The compatible unit further comprises a signal inversion unit, wherein the signal inversion unit is connected to one end of the NPN output unit, and the other end of the signal inversion unit is connected to the main control module; The signal inversion unit is used to invert the sensor signal in NPN form based on the type of PCB jumper.

8. The E84 communication integrated device according to claim 1, characterized in that: The main control module includes an EAP output unit and a management output unit, the input ends of the EAP output unit and the management output unit are both connected to the output end of the compatible unit, the output end of the EAP output unit is connected to the EAP system, and the output end of the management output unit is connected to the management platform; The EAP output unit is used to send sensor signals of the same output type to the EAP system; The management output unit is used to send sensor signals of the same output type to the management platform.

9. The E84 communication integrated device according to claim 1, characterized in that: The management platform also includes storage modules, which are respectively connected to the output ends of the main control modules; The storage module is used to store the sensor signals and loading and unloading signals output by the main control module.

10. An E84 communication integration system, characterized in that: The system comprises the E84 communication integration device and the communication control platform as described in any one of claims 1 to 9, wherein the E84 communication integration device is communicatively connected with the communication control platform; The communication control platform is used to send communication instructions to the E84 communication integration device; The E84 communication integration device is used to receive communication instructions, and respond to the communication instructions to output the sensor signal output by the sensor module of the host station to the EAP system and the management platform.

Images