Automatic sampling equipment
By designing automated sampling equipment, using rotating cap devices, rotating bases and chemical liquid outlet pipeline mobile devices, the problem of time-consuming and easy contamination in semiconductor production is solved, achieving more efficient and accurate sampling, and improving production quality and production capacity.
Patent Information
- Application Number
- CN202421214357.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-04-02
- Filing Date
- 2024-05-30
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-05-30
AI Technical Summary
The sampling process of chemical liquid test items in existing semiconductor production is time-consuming and easy to be contaminated, affecting production quality and production capacity.
An automated sampling device is designed, including a sampling bottle and an automated sampling module, and the rotating cap device, a rotating base and a chemical liquid outlet pipe moving device are used to realize the automated sampling and cleaning of chemical liquids.
It improves the efficiency and accuracy of chemical liquid sampling, reduces the risk of artificial and environmental pollution, and improves the quality and production capacity of semiconductor production.
Smart Images
Figure CN222964928U_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an automated sampling device, and more particularly to an automated chemical liquid sampling device. Background Art
[0002] In recent years, due to the booming demand for materials in computers and their peripheral products in the domestic and foreign semiconductor markets, the semiconductor industry has been continuously expanding, bringing a large amount of foreign exchange income to the country.
[0003] The manufacturing process of semiconductor components is very complex, and the technologies involved almost cover all the most important and key technologies and new types in the modern scientific development of mankind. Therefore, the production of semiconductor components is not only a high-tech industry but also an industry that requires a large amount of capital to maintain development.
[0004] However, due to the increasingly complex design of semiconductor components, the manufacturing technology of semiconductor components has become more and more precise and complex, and the potential occupational hazards and property losses have also become more and more complex. For example, the chemical liquids commonly used in process units such as epitaxy, diffusion, ion implantation, chemical vapor deposition, etching, and lithography in semiconductor processes.
[0005] In semiconductor factories, chemical liquids are stored in chemical storage containers and connected to the supply lines in the factory when in use. In the current semiconductor production system, more than 30 kinds of chemical liquids may be supplied to the production line at the same time. In order to ensure the quality and yield of component production, various chemical liquids must be detected regularly and at fixed times.
[0006] However, the sampling process of test samples is not only time-consuming but also may be contaminated during the sampling process. How to improve the accuracy and efficiency of sampling to improve the quality and production capacity of semiconductor production is the direction actively pursued by relevant personnel in this field. Summary of the Utility Model
[0007] The summary of the utility model aims to provide a simplified abstract of the present disclosure so that readers can have a basic understanding of the present disclosure. This summary is not a complete overview of the present disclosure, and its purpose is not to point out the important / critical components of the present embodiments or to define the scope of the present utility model.
[0008] An object of the present utility model is to provide an automated sampling device that can conveniently sample chemical liquids to improve the quality and production capacity of semiconductor production.
[0009] To achieve the above object, one technical aspect of the present invention relates to an automated sampling device including a sampling bottle and an automated sampling module. The sampling bottle includes a bottle cap and a bottle body. The automated sampling module is used to hold the sampling bottle for sampling chemical liquids. Among them, the automated sampling module includes a sampling bottle fixing seat and a cap screwing device. The sampling bottle fixing seat is used to hold the bottle body of the sampling bottle, and the cap screwing device is arranged above the sampling bottle fixing seat to open or close the bottle cap of the sampling bottle.
[0010] In some embodiments, the automated sampling module further includes a rotating base connected to the sampling bottle fixing seat for rotating the sampling bottle.
[0011] In some embodiments, the automated sampling module further includes a vertical moving device connected to the cap screwing device for moving the cap screwing device up and down.
[0012] In some embodiments, the automated sampling module further includes a chemical liquid outlet pipeline moving device arranged between the sampling bottle fixing seat and the cap screwing device for injecting chemical liquids into the sampling bottle.
[0013] In some embodiments, the chemical liquid outlet pipeline moving device includes an outlet pipeline fixer for fixing a plurality of chemical liquid outlet pipelines.
[0014] In some embodiments, the chemical liquid outlet pipeline moving device further includes a horizontal mover connected to the outlet pipeline fixer for moving the chemical liquid outlet pipeline to align with the sampling bottle.
[0015] In some embodiments, the chemical liquid outlet pipeline includes a first chemical liquid outlet pipeline and a second chemical liquid outlet pipeline. The second chemical liquid outlet pipeline is arranged in parallel with the first chemical liquid outlet pipeline to supply different chemical liquids respectively.
[0016] In some embodiments, the first chemical liquid outlet pipeline is used to supply a hydrofluoric acid (HF) solution, a nitric acid solution, a phosphoric acid solution, an acetic acid solution, a hydrogen peroxide solution or a sulfuric acid solution, and the second chemical liquid outlet pipeline is used to supply deionized water (DI water).
[0017] In some embodiments, the automated sampling device further includes a housing for supporting and protecting the automated sampling module and the sampling bottle.
[0018] In some embodiments, the automated sampling device further includes a water leakage tray and a drain port. The water leakage tray is installed inside the housing, and the drain port is disposed below the water leakage tray to drain the chemical liquid and deionized water passing through the water leakage tray out of the automated sampling device.
[0019] In some embodiments, the automated sampling module further includes a pulley drive system connected to the cap screwing device to rotate the cap screwing device, thereby opening or closing the cap of the sampling bottle.
[0020] According to another embodiment of the present invention, an automated sampling method is disclosed, which includes the following steps. First, a sampling bottle is fixed by using a sampling bottle fixing seat. Then, a plurality of chemical liquid outlet pipe moving devices are used to move the chemical liquid outlet pipes to align with the sampling bottle and fill a chemical liquid into the sampling bottle. Then, the outer shell of the sampling bottle is cleaned by using a cleaning liquid in the chemical liquid outlet pipe.
[0021] In some embodiments, the automated sampling method further includes using a cap screwing device to open the cap of the sampling bottle.
[0022] In some embodiments, the automated sampling method further includes cleaning the internal accommodation space of the sampling bottle.
[0023] In some embodiments, cleaning the internal accommodation space of the sampling bottle includes filling a chemical liquid, closing the cap, and shaking the sampling bottle by using a rotating base.
[0024] In some embodiments, filling the chemical liquid includes filling the chemical liquid to 30% of the capacity of the sampling bottle.
[0025] In some embodiments, shaking the sampling bottle by using the rotating base includes shaking the sampling bottle by using the rotating base for about 30 seconds.
[0026] In some embodiments, cleaning the internal accommodation space of the sampling bottle further includes opening the cap of the sampling bottle and rotating the sampling bottle to pour out the chemical liquid in the sampling bottle.
[0027] In some embodiments, the automated sampling method further includes repeating the cleaning of the internal accommodation space of the sampling bottle at least three times.
[0028] In some embodiments, cleaning the outer shell of the sampling bottle by using the cleaning liquid in the chemical liquid outlet pipe means cleaning the outer shell of the sampling bottle by using deionized water.
[0029] In some embodiments, before cleaning the outer shell of the sampling bottle by using the cleaning liquid in the chemical liquid outlet pipe, it further includes filling the chemical liquid to 80% of the capacity of the sampling bottle, and then closing the cap.
[0030] Therefore, the automated sampling device can safely and conveniently obtain samples of chemical liquids used in semiconductor production lines, not only reducing the probability of human or environmental pollution, but also improving the extraction efficiency and accuracy of samples, enhancing the yield and production of semiconductor processes, and thus increasing the revenue and profit of semiconductor production. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] To make the above and other objects, features, advantages and embodiments of the present invention more apparent and understandable, the description of the accompanying drawings is as follows:
[0032] Figure 1 It is a schematic diagram of an automated sampling device according to an embodiment of the present invention;
[0033] Figure 2 It is a partially enlarged schematic diagram of an automated sampling device according to an embodiment of the present invention;
[0034] Figure 3 It is a schematic flow diagram of an automated sampling method using an automated sampling device according to another embodiment of the present invention.
[0035]
SYMBOL DESCRIPTION
[0036] 100: Automated sampling device
[0037] 110: Housing
[0038] 112: Opening
[0039] 120: Automated sampling module
[0040] 130: Leakage tray
[0041] 140: Sampling bottle
[0042] 142: Bottle cap
[0043] 144: Bottle body
[0044] 150: Drain outlet
[0045] 210: Sampling bottle fixing seat
[0046] 220: Rotating base
[0047] 230: Chemical liquid outlet pipeline moving device
[0048] 232: Horizontal mover
[0049] 234: Outlet pipeline fixer
[0050] 240: Chemical liquid outlet pipeline
[0051] 241: First chemical liquid outlet pipeline
[0052] 242: Second chemical liquid outlet pipeline
[0053] 250: Cap screwing device
[0054] 255: Pulley drive system
[0055] 260: Vertical moving device
[0056] 300: Automated sampling method
[0057] 310, 320, 330, 332, 334, 336, 338, 340, 350, 360, 370: Steps Detailed implementation manners
[0058] The following are detailed descriptions with reference to embodiments and the accompanying drawings. However, the provided embodiments are not intended to limit the scope covered by the present disclosure, and the description of the structure and operation is not intended to limit the execution order. Any structure formed by recombining components and generating a device with equivalent functions is within the scope covered by the present disclosure. In addition, the drawings are for illustrative purposes only and are not drawn to the original scale. For ease of understanding, the same or similar components will be denoted by the same reference numerals in the following description.
[0059] In addition, the terms used throughout the specification and the claims, unless otherwise specifically noted, generally have their ordinary meanings as used in this field, in the context of the present disclosure, and in the specific context. Certain terms used to describe the present disclosure will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art regarding the description of the present disclosure.
[0060] In the embodiments and the claims, unless otherwise specifically defined in the context, "a" and "the" can generally refer to a single or multiple. The numbers used in the steps are only used to label the steps for ease of explanation and do not limit the order and implementation manners before and after.
[0061] Secondly, the terms such as "comprising", "including", "having", "containing", etc. used in this article are all open-ended terms, meaning including but not limited to.
[0062] Figure 1 It is a schematic diagram of an automated sampling device illustrated according to an embodiment of the present invention, and Figure 2 is its partial enlarged schematic diagram. In addition, Figure 3 is a schematic flow diagram of an automated sampling method using this automated sampling device.
[0063] Refer to simultaneously Figure 1 and Figure 2, as shown in the figure, the automated sampling device 100 includes a sampling bottle 140 and an automated sampling module 120. Among them, the sampling bottle 140 includes a bottle cap 142 and a bottle body 144, and the automated sampling module 120 is used to hold the sampling bottle 140 to perform sampling of a chemical liquid.
[0064] In some embodiments, the automated sampling module 120 includes a sampling bottle fixing base 210, a rotating base 220, a chemical liquid outlet pipe moving device 230, and a cap screwing device 250.
[0065] The sampling bottle fixing base 210 is used to hold the bottle body 144 part of the sampling bottle 140, and the cap screwing device 250 is arranged above the sampling bottle fixing base 210 to open or close the bottle cap 142 of the sampling bottle 140.
[0066] In addition, the rotating base 220 is connected to the sampling bottle fixing base 210 to rotate the sampling bottle 140, for example, rotate a predetermined angle clockwise or counterclockwise, such as 10 degrees, 20 degrees, 30 degrees, 45 degrees, 90 degrees, 120 degrees, 150 degrees, 180 degrees, and / or 360 degrees, all of which do not deviate from the spirit and protection scope of the present invention.
[0067] In addition, the chemical liquid outlet pipe moving device 230 is preferably arranged between the sampling bottle fixing base 210 and the cap screwing device 250 to facilitate injecting the chemical liquid into the sampling bottle 140.
[0068] In addition, in some embodiments, the automated sampling module 120 further includes a vertical moving device 260 connected to the cap screwing device 250 to move the cap screwing device 250 up and down. Therefore, when the bottle cap 142 of the sampling bottle 140 is to be opened, the vertical moving device 260 drives the cap screwing device 250 downward to couple with the bottle cap 142, and then rotates the bottle cap 142 to open the bottle cap 142 of the sampling bottle 140. When the bottle cap 142 of the sampling bottle 140 is to be closed, the cap screwing device 250 and the bottle cap 142 held in the cap screwing device 250 are driven downward by the vertical moving device 260, then the bottle cap 142 is rotated to fix the bottle cap 142 on the sampling bottle 140, and then the vertical moving device 260 drives the cap screwing device 250 upward to separate the cap screwing device 250 from the bottle cap 142.
[0069] In some embodiments, the automated sampling module 120 further includes a pulley drive system 255 connected to the capping device 250 to rotate the capping device 250 for opening or closing the bottle cap 142 of the sampling bottle 140. However, the present invention is not limited thereto. The capping device 250 can also be directly or indirectly driven by a DC motor, an AC motor, a servo motor, a stepper motor, or directly or indirectly driven by other driving devices, all of which do not depart from the spirit and scope of protection of the present invention.
[0070] In some embodiments, the chemical liquid outlet pipe moving device 230 includes a horizontal mover 232 and an outlet pipe holder 234. The outlet pipe holder 234 is used to fix a plurality of chemical liquid outlet pipes 240, such as the first chemical liquid outlet pipe 241 and / or the second chemical liquid outlet pipe 242 in the drawings, or a plurality of chemical liquid outlet pipes, all of which do not depart from the spirit and scope of protection of the present invention. The first chemical liquid outlet pipe 241, the second chemical liquid outlet pipe 242, and other chemical liquid outlet pipes are preferably arranged in parallel to supply different chemical liquids respectively. However, the present invention is not limited thereto.
[0071] In some embodiments, the first chemical liquid outlet pipe 241 is used to supply a hydrofluoric acid (HF) solution, a nitric acid solution, a phosphoric acid solution, an acetic acid solution, a hydrogen peroxide solution, and / or a sulfuric acid solution, etc. However, the present invention is not limited thereto. In addition, the second chemical liquid outlet pipe 242 is preferably used to supply deionized water (DI water) as a cleaning liquid.
[0072] The horizontal mover 232 is connected to the outlet pipe holder 234, which can provide horizontal movement for the outlet pipe holder 234 and the chemical liquid outlet pipes 240 to align the chemical liquid outlet pipes 240 with the mouth of the sampling bottle 140, and then inject the chemical liquid into the sampling bottle 140.
[0073] In some embodiments, the automated sampling device 100 further includes a housing 110, a water leakage tray 130, and a drain port 150. The housing 110 has an opening 112, and the automated sampling module 120 is disposed in the opening 112. Through the opening 112, the user can take out or put in the sampling bottle 140. The housing 110 is used to support and protect the automated sampling module 120 and the sampling bottle 140, and can also increase the safety during sampling. However, the present invention is not limited thereto.
[0074] In addition, the drain pan 130 is installed inside the housing 110 , and the drain port 150 is disposed below the drain pan 130 to discharge the hydrofluoric acid solution and chemical liquids such as deionized water passing through the drain pan 130 out of the automated sampling device 100 through the drain port 150 .
[0075] According to another embodiment of the present invention, an automated sampling method 300 is provided, which includes the following steps. Figures 1 to 3 As shown in the figure, in step 310, a sampling bottle 140 is fixed, for example, by using Figure 1 and Figure 2 The sampling bottle fixing seat 210 fixes the sampling bottle 140.
[0076] Next, in step 320 , the bottle cap 142 of the sampling bottle 140 is opened using a capping device 250 .
[0077] Then, step 330 is performed to clean the internal storage space of the sampling bottle 140 to avoid contamination of the internal storage space of the sampling bottle 140 and improve the accuracy of the detection data. In some embodiments, step 330 of cleaning the internal storage space of the sampling bottle 140 may further include the following steps. Step 332, filling the chemical liquid, for example, using the chemical liquid outlet pipeline moving device 230 to move the chemical liquid outlet pipeline 240 so that the chemical liquid outlet pipeline 240 is aligned with the bottle mouth of the sampling bottle 140, and then a chemical liquid is injected into the sampling bottle 140. For example, in the step of cleaning the sampling bottle 140, the chemical liquid is filled to about 30% of the capacity of the sampling bottle 140, so as to use this chemical liquid to clean the internal storage space of the sampling bottle 140.
[0078] In some embodiments, step 330 of cleaning the internal accommodation space of the sampling bottle 140 may further include the following steps: step 334, closing the bottle cap 142 and step 336, shaking the sampling bottle 140 using the rotating base 220. In some embodiments, step 336, the sampling bottle 140 is shaken using the rotating base 220 for about 10 to 30 seconds or more, and the sampling bottle 140 is repeatedly rotated at 10 degrees, 30 degrees, 45 degrees, 60 degrees, 90 degrees, 180 degrees and / or 360 degrees to clean the internal accommodation space of the sampling bottle 140 using the chemical liquid.
[0079] In some embodiments, step 330, cleaning the internal accommodating space of the sampling bottle 140, further includes step 338, opening the bottle cap 142 of the sampling bottle 140, and then step 340, rotating the sampling bottle 140 to pour out the chemical liquid in the sampling bottle 140, and the chemical liquid can pass through the opening on the drain tray 130 and discharge the automated sampling device 100 through the drain port 150.
[0080] In some embodiments, in step 330, the inner accommodation space of the sampling bottle 140 is cleaned, preferably more than twice, more preferably more than three times.
[0081] After cleaning the inner accommodation space of the sampling bottle 140, in step 350, the chemical liquid outlet pipe moving device 230 is used again to move the plurality of chemical liquid outlet pipes 240 to align with the sampling bottle 140 and fill the sampling bottle 140 with chemical liquid for sampling of the chemical liquid. Preferably, it is filled to 80% of the capacity of the sampling bottle 140. However, the present invention is not limited thereto, and an appropriate volume of chemical liquid can be injected according to the sampling requirements, and all of them do not depart from the spirit and protection scope of the present invention.
[0082] Then, in step 360, the bottle cap 142 is closed. Next, in step 370, the outer shell of the sampling bottle 140 is cleaned. Preferably, deionized water provided by the second chemical liquid outlet pipe 242 is used as the cleaning liquid to clean the outer shell of the sampling bottle 140, thereby avoiding contamination of the outer shell of the sampling bottle 140. However, the present invention is not limited thereto.
[0083] In summary, the automatic sampling device can safely and conveniently obtain samples of chemical liquids used in semiconductor production lines, not only reducing the probability of human or environmental pollution, but also improving the extraction efficiency and accuracy of samples, improving the yield and production of semiconductor processes, and thus increasing the revenue and profit of semiconductor production.
[0084] Although the present invention has been disclosed as above in the form of embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to that defined by the appended claims.
Claims
1. An automated sampling device, characterized in that: Include: Sampling bottle, including bottle cap and bottle body; and The automatic sampling module is used to clamp the sampling bottle to sample the chemical liquid, wherein the automatic sampling module comprises: A sampling bottle fixing seat, used for clamping the bottle body of the sampling bottle; and The capping device is arranged above the sampling bottle fixing seat and is used for opening or closing the bottle cap of the sampling bottle.
2. The automated sampling device according to claim 1, characterized in that: The automated sampling module further comprises: The rotating base is connected to the sampling bottle fixing base and is used for rotating the sampling bottle.
3. The automated sampling device according to claim 1, characterized in that: The automated sampling module further comprises: The vertical moving device is connected to the capping device and is used for moving the capping device up and down.
4. The automated sampling device according to claim 1, characterized in that: The automated sampling module further comprises: The chemical liquid outlet pipeline moving device is arranged between the sampling bottle fixing seat and the capping device, and is used for injecting the chemical liquid into the sampling bottle.
5. The automated sampling device according to claim 4, characterized in that: The chemical liquid outlet pipeline moving device comprises: The outlet pipe holder is used to fix multiple chemical liquid outlet pipes.
6. The automated sampling device according to claim 5, characterized in that: The chemical liquid outlet pipeline moving device further comprises: The horizontal mover is connected to the outlet pipe fixture and is used for moving the chemical liquid outlet pipes to align with the sampling bottle.
7. The automated sampling device according to claim 6, characterized in that: The chemical liquid outlet pipes include: a first chemical liquid outlet pipeline; and The second chemical liquid outlet pipeline is arranged in parallel with the first chemical liquid outlet pipeline to supply different chemical liquids respectively.
8. The automated sampling device according to claim 7, characterized in that: The first chemical liquid outlet pipeline is used to supply hydrofluoric acid (HF) solution, nitric acid solution, phosphoric acid solution, acetic acid solution, hydrogen peroxide solution or sulfuric acid solution, and the second chemical liquid outlet pipeline is used to supply deionized water (DI water).
9. The automated sampling device according to claim 8, characterized in that: Also includes: A housing, used to support and protect the automated sampling module and the sampling bottle; A water leakage tray is installed inside the housing; and The drain port is arranged below the drain pan to discharge the chemical liquid and the deionized water passing through the drain pan out of the automatic sampling device.
10. The automated sampling device according to claim 1, characterized in that: The automated sampling module further comprises: The belt pulley transmission system is connected to the capping device to rotate the capping device to open or close the bottle cap of the sampling bottle.