Cleaning device

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a cleaning device which is provided with a first direction and comprises a base and a plurality of first air pipe joints. A first cleaning groove is formed in the base in a sunken manner, and the first cleaning groove is used for containing a workpiece and cleaning liquid; the multiple first gas pipe joints are connected to the base and distributed around the first cleaning tank, each first gas pipe joint is provided with a first gas channel, the two ends of each first gas channel are provided with a first gas inlet and a first gas outlet respectively, and the first gas outlets communicate with the first cleaning tank; according to the cleaning device, the first cleaning tank for containing the workpieces and the cleaning liquid is arranged, and the first air pipe joints are arranged around the first cleaning tank, so that the workpieces can be comprehensively cleaned, and the cleaning efficiency and the cleaning quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a cleaning device. Background Art

[0002] In the production and processing technology of semiconductor materials, it is necessary to clean workpieces; most of the existing cleaning devices only spray cleaning liquid on one position of the workpiece through a single nozzle for cleaning, resulting in relatively incomplete cleaning of the workpiece and low cleaning quality. Summary of the Utility Model

[0003] Aiming to solve at least one of the technical problems in the prior art, the utility model provides a cleaning device, which can clean workpieces more comprehensively and improve the cleaning efficiency and quality.

[0004] To achieve the above object, the utility model provides a cleaning device having a first direction. The cleaning device includes a base and a plurality of first air pipe joints; one end of the base in the first direction is recessed to form a first cleaning tank for accommodating workpieces and cleaning liquid; the plurality of first air pipe joints are connected to the base and distributed around the first cleaning tank. The first air pipe joint has a first gas channel, and both ends of the first gas channel have a first air inlet and a first air outlet respectively, and the first air outlet is communicated with the first cleaning tank.

[0005] In some embodiments, it further includes a plurality of limiting members; the first cleaning tank has a reference line parallel to the first direction; the plurality of limiting members are arranged in the first cleaning tank and distributed around the reference line, and a limiting space for accommodating workpieces is defined between the plurality of limiting members.

[0006] In some embodiments, the limiting member includes a connecting column and a limiting column. The first cleaning tank has a first bottom. One end of the connecting column in the first direction is connected to the first bottom, and the limiting column is connected to the end of the connecting column away from the first bottom in the first direction.

[0007] In some embodiments, the radius of the connecting column is greater than the radius of the limiting column.

[0008] In some embodiments, the limiting member further includes a frustum of a cone. The limiting column is fixedly connected to the connecting column through the frustum of a cone. The frustum of a cone has a first end face and a second end face opposite to each other in the first direction. The radius of the first end face is smaller than that of the second end face. The limiting column is fixedly connected to the first end face, and the connecting column is fixedly connected to the second end face.

[0009] In some embodiments, the central axis of the connecting column, the central axis of the limiting column, and the central axis of the cone coincide with each other, the radius of the connecting column is equal to the radius of the second end face, and the radius of the limiting column is equal to the radius of the first end face.

[0010] In some embodiments, an outer side wall of the connecting column is in contact with an outer side wall of the workpiece or an outer side wall of the frustum is in contact with an outer side wall of the workpiece.

[0011] In some embodiments, the first cleaning tank has a circular structure, and an extension direction of the first gas channel intersects with a radial direction of the first cleaning tank.

[0012] In some embodiments, it also includes a plurality of second air pipe joints; the first air outlet is located on the side of the limiting column away from the first groove bottom in the first direction; the first groove bottom is recessed with a second cleaning groove, and the plurality of limiting members are distributed around the second cleaning groove; the plurality of second air pipe joints are connected to the base and distributed around the second cleaning groove, the second air pipe joints have a second gas channel, and the two ends of the second gas channel have a second air inlet and a second air outlet respectively, and the plurality of second air outlets are connected to the second cleaning groove.

[0013] In some embodiments, the second cleaning tank has a circular structure, and an extension direction of the second gas channel intersects with a radial direction of the first cleaning tank.

[0014] Compared with the prior art, a cleaning device provided by an embodiment of the utility model has the following beneficial effects: by setting a first cleaning tank, cleaning liquid and a workpiece can be loaded into the first cleaning tank and the cleaning liquid can immerse the workpiece, so that the cleaning liquid can fully contact the workpiece, and then the gas is introduced into the first cleaning tank through the first air pipe joint. Since a plurality of first air pipe joints are distributed around the first cleaning tank, the plurality of first air pipe joints can respectively introduce gas into the first cleaning tank at a plurality of positions to disturb the cleaning liquid in the first cleaning tank. The disturbing cleaning liquid can enhance the vibration and impact force of the cleaning liquid on the workpiece, so that the cleaning liquid can more quickly and efficiently remove dirt and impurities on the surface of the workpiece, thereby improving the cleaning efficiency. Furthermore, since the workpiece is immersed in the cleaning liquid, the method of introducing the cleaning liquid disturbed by gas through a plurality of positions also enables the cleaning liquid to perform a more comprehensive cleaning of the workpiece, thereby improving the cleaning quality. Therefore, the utility model can more comprehensively clean the workpiece, thereby improving the cleaning efficiency and the cleaning quality, by setting a first cleaning tank for accommodating the workpiece and the cleaning liquid and arranging a plurality of first air pipe joints around the first cleaning tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a cleaning device provided by an embodiment of the utility model;

[0016] Figure 2 It is an effect diagram of a cleaning device provided by an embodiment of the present utility model when a workpiece is installed;

[0017] Figure 3 It is a front view of a cleaning device provided by an embodiment of the present utility model;

[0018] Figure 4 It is a top view of a cleaning device provided by an embodiment of the present utility model;

[0019] Figure 5 It is a cross-sectional view of a first air pipe joint provided by an embodiment of the present utility model;

[0020] Figure 6 It is a front view of a limiting member provided by an embodiment of the present utility model;

[0021] Figure 7 It is a front view of a second air pipe joint provided by an embodiment of the present utility model.

[0022] In the figure, 1 is a base; 11 is a first cleaning tank; 12 is a second cleaning tank; 111 is a first tank bottom;

[0023] 2 is a first air pipe joint; 21 is a first gas passage; 211 is a first air inlet; 212 is a first air outlet;

[0024] 3 is a limiting member; 31 is a connecting column; 32 is a limiting column; 33 is a frustum; 331 is a first end face; 332 is a second end face;

[0025] 4 is a second air pipe joint; 41 is a second gas passage; 411 is a second air inlet; 412 is a second air outlet;

[0026] 5 is a workpiece;

[0027] 30 is a limiting space;

[0028] 110 is a reference line;

[0029] Z is a first direction. Specific embodiments

[0030] The following will further describe in detail the specific embodiments of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0031] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0032] The terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features.

[0033] In the present utility model, unless otherwise clearly defined and limited, the terms such as "installed", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0035] Such as Figure 1-7As shown, a preferred cleaning device according to an embodiment of the present invention has a first direction Z. The cleaning device includes a base and a plurality of first air pipe connectors 2. One end of the base 1 is recessed in the first direction Z to form a first cleaning tank 11 for accommodating a workpiece 5 and a cleaning liquid. The plurality of first air pipe connectors 2 are connected to the base 1 and are distributed around the first cleaning tank 11. The first air pipe connector 2 has a first gas channel 21, and both ends of the first gas channel 21 are respectively provided with a first air inlet 211 and a first air outlet 212, and the first air outlet 212 is communicated with the first cleaning tank 11.

[0036] Based on this technical solution, by providing the first cleaning tank 11, the cleaning liquid and the workpiece 5 can be loaded into the first cleaning tank 11 and the cleaning liquid can submerge the workpiece 5, so that the cleaning liquid can be in full contact with the workpiece 5. Then, gas is introduced into the first cleaning tank 11 through the first air pipe connector 2. Since the plurality of first air pipe connectors 2 are distributed around the first cleaning tank 11, the plurality of first air pipe connectors 2 can introduce gas into the first cleaning tank 11 at multiple positions respectively to disturb the cleaning liquid in the first cleaning tank 11. Disturbing the cleaning liquid can enhance the oscillation and impact force of the cleaning liquid on the workpiece 5, so that the cleaning liquid can remove dirt and impurities on the surface of the workpiece 5 more quickly and efficiently, improving the cleaning efficiency. Also, since the workpiece is immersed in the cleaning liquid, the way of disturbing the cleaning liquid by introducing gas at multiple positions also enables the cleaning liquid to clean the workpiece 5 more comprehensively, improving the cleaning quality. Therefore, by providing the first cleaning tank 11 for accommodating the workpiece and the cleaning liquid and arranging a plurality of first air pipe connectors 2 around the first cleaning tank 11, the present invention can clean the workpiece 5 more comprehensively, improving the cleaning efficiency and cleaning quality.

[0037] Inert gas such as nitrogen can be introduced into the first cleaning tank 11 through the first air pipe connector 2.

[0038] In this embodiment, the first direction Z is the height direction of the cleaning device.

[0039] In this embodiment, the workpiece 5 has a circular structure.

[0040] In this embodiment, the workpiece 5 is a substrate.

[0041] It should be noted that the cleaning device provided by the present invention can also be applied to the cleaning treatment of other semiconductor workpieces such as wafers and chips.

[0042] The workpiece 5 has opposite first and second surfaces in the first direction Z.

[0043] In this embodiment, the first direction Z is the height direction of the cleaning device, the first surface is the upper surface of the workpiece 5, and the second surface is the lower surface of the workpiece 5.

[0044] Refer toFigure 1 - Figure 4 and Figure 6 The cleaning device provided by the embodiment of the present utility model further includes a plurality of limiting members 3; the first cleaning tank 11 has a reference line 110 which is parallel to the first direction Z, and the first cleaning tank 11 has a first bottom 111; the plurality of limiting members 3 are arranged in the first cleaning tank 11 and distributed around the reference line 110, and a limiting space 30 for accommodating the workpiece 5 is defined between the plurality of limiting members 3. Using a plurality of limiting members 3 to define the limiting space 30 can limit the workpiece 5 within a limited area in the first cleaning tank 11, so that when the first air pipe joint 2 introduces gas into the first cleaning tank 11, the workpiece 5 can be prevented from moving too much in the first cleaning tank 11, which helps to improve the cleaning quality of the workpiece 5.

[0045] In this embodiment, the limiting member 3 includes a connecting column 31 and a limiting column 32. One end of the connecting column 31 in the first direction Z is connected to the first bottom 111, and the limiting column 32 is connected to the end of the connecting column 31 away from the first bottom 111 in the first direction Z.

[0046] The radius of the connecting column 31 is greater than the radius of the limiting column 32. Thus, the upper surface of the connecting column 31 can be used as the bearing surface of the workpiece 5.

[0047] In some other embodiments, the radius of the connecting column 31 can also be less than or equal to the radius of the limiting column 32; in this way, the first bottom 111 can be used as the bearing surface of the workpiece 5.

[0048] The limiting member 3 further includes a frustum 33. The limiting column 32 is fixedly connected to the upper end of the connecting column 31 through the frustum 33. The frustum 33 has a first end face 331 and a second end face 332 opposite to each other in the first direction Z. The radius of the first end face 331 is smaller than the radius of the second end face 332. The limiting column 32 is fixedly connected to the first end face 331, and the connecting column 31 is fixedly connected to the second end face 332. Thus, the limiting column 32 is connected to the small end face of the frustum 33, and the connecting column 31 is connected to the large end face of the frustum 33. The side surface of the frustum 33 can be used as the circumferential limiting surface of the workpiece 5 to limit the movement of the workpiece 5 through the outer side wall of the frustum 33, and even the workpiece 5 can be clamped by the outer side walls of a plurality of frustums 33.

[0049] In this embodiment, the central axes of the first connecting column 31, the limiting column 32, and the frustum 33 coincide. The radius of the connecting column 31 is equal to the radius of the second end face 332, and the radius of the limiting column 32 is equal to the radius of the first end face 331. In this way, not only can the limiting column 32 smoothly transition to the connecting column 31 through the frustum 33, but also the side surface of the frustum 33 can be used as the circumferential limiting surface of the workpiece 5. A first limiting region is defined between multiple limiting columns 32, and a second limiting region is defined between multiple frustums 33. The maximum radius of the second limiting region is equal to the radius of the first limiting region. The limiting space 30 includes the first limiting region and the second limiting region. When the radius of the workpiece 5 is equal to the radius of the first limiting region, the workpiece 5 can be installed in the first limiting region to clamp the workpiece 5 through multiple limiting columns 32, achieving the purpose of installing and positioning the workpiece 5 in the first cleaning tank 11. When the radius of the workpiece 5 is less than the radius of the first limiting region and greater than the minimum radius of the second limiting region, the workpiece 5 can be installed in the second limiting region to clamp the workpiece 5 through multiple frustums 33, achieving the purpose of installing and positioning the workpiece 5 in the first cleaning tank 11. Therefore, by adopting the method of making the axes of the three coincide and defining the radii of the three, multiple limiting members 3 can be used for installing and positioning workpieces 5 of various sizes, with a wide range of applications.

[0050] Figure 4 In the figure, the first virtual circle 301 represents the circle formed by the second limiting region at the maximum radius (i.e., the radius of the first limiting region), and the second virtual circle 302 represents the circle formed by the second limiting region at the minimum radius.

[0051] Optionally, the outer sidewall of the connecting column 31 is in contact with the outer sidewall of the workpiece 5 or the outer sidewall of the frustum 33 is in contact with the outer sidewall of the workpiece 5. In this way, the workpiece 5 can be clamped by multiple connecting columns 31 to prevent the workpiece 5 from moving, or the workpiece 5 can be clamped by the outer sidewalls of multiple frustums 33 to prevent the workpiece 5 from moving. And clamping the workpiece 5 by multiple limiting members 3 can suspend and fix the workpiece 5 in the first cleaning tank 11, which helps the cleaning liquid in the cleaning tank to more comprehensively contact the surface of the workpiece 5, reducing cleaning dead corners and helping to further improve the cleaning quality of the workpiece 5.

[0052] In this embodiment, the outer sidewall of the frustum 33 is in contact with the outer sidewall of the workpiece 5, and the workpiece 5 is clamped in the second limiting region by the outer sidewalls of multiple frustums 33.

[0053] Refer to Figure 1 - Figure 5The first cleaning tank 11 is of a circular structure, and the extension direction of the first gas channel 21 intersects with the radial direction of the first cleaning tank 11. By adopting the extension direction of the first gas pipe joint 2 intersecting with the radial direction of the first cleaning tank 11, the first gas outlet 212 can be not directly opposite to the central axis of the first cleaning tank 11, so that the gas blown out of the first gas outlet 212 can blow the cleaning liquid in the first cleaning tank 11 to rotate, which helps the cleaning liquid to clean the workpiece 5 more comprehensively and further improve the cleaning quality.

[0054] It should be noted that the radial direction refers to the direction from the center of a circle to any point on the circumference of the circle.

[0055] In this embodiment, the reference line 110 is the central axis of the first cleaning tank 11 .

[0056] In some other embodiments, the reference line 110 may be any straight line on the first cleaning tank 11 that is parallel to the first direction Z, which is not limited here.

[0057] See also Figure 1 - Figure 3 The first air outlet 212 is located on the side of the limiting column 32 in the first direction Z away from the first groove bottom 111; the first air outlet 212 is located on the side of the limiting column 32 in the first direction Z away from the first groove bottom 111. Since the workpiece 5 is accommodated in the first cleaning tank 11, the gas blown out of the first air outlet 212 can disturb the cleaning liquid above the workpiece 5, so that the cleaning liquid can clean the upper surface of the workpiece 5 more fully and comprehensively.

[0058] See also Figure 1 - Figure 4 ,and Figure 7 The cleaning device provided by the embodiment of the utility model also includes a plurality of second air pipe joints 4; the first groove bottom 111 is recessed with a second cleaning groove 12, and a plurality of stoppers 3 are distributed around the second cleaning groove 12; a plurality of second air pipe joints 4 are connected to the base 1 and are distributed around the second cleaning groove 12, and the second air pipe joints 4 have a second gas channel 41, and the two ends of the gas channel have a second air inlet 411 and a second air outlet 412, respectively, and the plurality of second air outlets 412 are connected to the second cleaning groove 12. By using the second cleaning groove 12 and the plurality of second air pipe joints 4, the gas blown out through the second air outlet 412 can disturb the cleaning liquid under the workpiece 5, so that the cleaning liquid can more fully and comprehensively clean the lower surface of the workpiece 5, and then the mutual cooperation between the first air pipe joint 2 and the second air pipe joint 4 can further improve the cleaning quality of the workpiece 5 by the cleaning liquid.

[0059] The second cleaning tank 12 has a circular structure, and the extending direction of the second gas channel 41 intersects with the radial direction of the first cleaning tank 11. By adopting the intersection of the extending direction of the second gas channel 41 and the radial direction of the second cleaning tank 12, the second air outlet 412 is not directly opposite to the central axis of the second cleaning tank 12, so that the gas blown out from the second air outlet 412 can drive the cleaning liquid in the second cleaning tank 12 to rotate, which helps the cleaning liquid to clean the workpiece 5 more comprehensively and further improves the cleaning quality.

[0060] In this embodiment, the central axis of the second cleaning tank 12 coincides with the central axis of the first cleaning tank 11.

[0061] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and substitutions can be made, and these improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A cleaning device having a first direction (Z), characterized in that: include: A base (1), wherein one end of the base (1) in the first direction (Z) is recessed and provided with a first cleaning groove (11), wherein the first cleaning groove (11) is used to contain a workpiece (5) and a cleaning liquid; a plurality of first air pipe joints (2), the plurality of first air pipe joints (2) being connected to the base (1) and distributed around the first cleaning tank (11), the first air pipe joints (2) having a first air channel (21), the two ends of the first air channel (21) respectively having a first air inlet (211) and a first air outlet (212), the first air outlet (212) being connected to the first cleaning tank (11); The cleaning liquid in the first cleaning tank (11) immerses the workpiece, and the plurality of first gas pipe joints (2) are capable of respectively introducing gas into the first cleaning tank (11) at a plurality of positions to disturb the cleaning liquid in the first cleaning tank (11).

2. The cleaning device according to claim 1, characterized in that: It also includes a plurality of limiting members (3); The first cleaning tank (11) has a reference line (110), and the reference line (110) is parallel to the first direction (Z); The plurality of limit members (3) are arranged in the first cleaning tank (11) and are distributed around the reference line (110), and a limit space (30) for accommodating a workpiece (5) is defined between the plurality of limit members (3).

3. The cleaning device according to claim 2, characterized in that: The limiting member (3) comprises a connecting column (31) and a limiting column (32); the first cleaning tank (11) has a first tank bottom (111); one end of the connecting column (31) in the first direction (Z) is connected to the first tank bottom (111); and the limiting column (32) is connected to one end of the connecting column (31) in the first direction (Z) away from the first tank bottom (111).

4. The cleaning device according to claim 3, characterized in that: The radius of the connecting column (31) is greater than the radius of the limiting column (32).

5. The cleaning device according to claim 4, characterized in that: The limiting member (3) further comprises a truncated cone (33), the limiting column (32) being fixedly connected to the connecting column (31) via the truncated cone (33), the truncated cone (33) having a first end face (331) and a second end face (332) opposite to each other in the first direction (Z), the radius of the first end face (331) being smaller than the radius of the second end face (332), the limiting column (32) being fixedly connected to the first end face (331), and the connecting column (31) being fixedly connected to the second end face (332).

6. The cleaning device according to claim 5, characterized in that: The central axis of the connecting column (31), the central axis of the limiting column (32), and the central axis of the truncated cone (33) coincide with each other; the radius of the connecting column (31) is equal to the radius of the second end surface (332); and the radius of the limiting column (32) is equal to the radius of the first end surface (331).

7. The cleaning device according to claim 6, characterized in that: The outer wall of the connecting column (31) is in contact with the outer wall of the workpiece (5), or the outer wall of the truncated cone (33) is in contact with the outer wall of the workpiece (5).

8. The cleaning device according to any one of claims 2 to 6, characterized in that: The first cleaning tank (11) has a circular structure, and the extension direction of the first gas channel (21) intersects with the radial direction of the first cleaning tank (11).

9. The cleaning device according to any one of claims 3 to 6, characterized in that: Also includes a plurality of second air pipe connectors (4); The first air outlet (212) is located on a side of the limiting column (32) away from the first groove bottom (111) in the first direction (Z); The first tank bottom (111) is recessed to form a second cleaning tank (12), and a plurality of the limiting members (3) are distributed around the second cleaning tank (12); A plurality of second gas pipe joints (4) are connected to the base (1) and are distributed around the second cleaning tank (12); the second gas pipe joints (4) have a second gas channel (41); two ends of the second gas channel (41) respectively have a second gas inlet (411) and a second gas outlet (412); the second gas outlet (412) is connected to the second cleaning tank (12).

10. The cleaning device according to claim 9, characterized in that: The second cleaning tank (12) has a circular structure, and the extension direction of the second gas channel (41) intersects with the radial direction of the first cleaning tank (11).

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