Sheet metal part wafer carrying mechanical arm

Abstract

The utility model discloses a sheet metal wafer carrying mechanical arm which comprises a machine body, the top end of the machine body is rotatably connected with a mechanical arm, the top end of the mechanical arm is fixedly connected with supporting blocks which are symmetrically arranged, the two supporting blocks are fixedly provided with a first electric telescopic rod together, and the interior of the mechanical arm is slidably connected with a telescopic arm. A linkage block is fixedly connected to the top end of the telescopic arm, a mounting block is fixedly connected to one side of the telescopic arm, a second electric telescopic rod is rotationally connected to the mounting block, a mounting plate is fixedly connected to the top end of the second electric telescopic rod, and a transmission rack is fixedly connected to the top end of the mounting plate; the wafer turnover mechanism has the advantages that the fork hand is not affected by the position of a mechanical arm when needing to be turned over, the fork hand can freely drive a wafer to complete the turnover action, and the original use limitation of the wafer turnover mechanism is relieved.

Description

Technical Field

[0001] The utility model relates to the technical field of sheet metal part wafer handling, in particular to a sheet metal part wafer handling robot arm. Background Technique

[0002] In the field of semiconductor manufacturing, during the semiconductor processing, the wafers need to be grasped and conveyed multiple times, and this process is usually completed by a wafer transfer robot. In the prior art, the wafer transfer robot generally includes a robot body, a driving motor, multiple articulated arms and an execution end. Among them, the multiple articulated arms are rotatably connected end to end, and the execution end is installed on the end articulated arm. The execution end is generally a wafer picking fork, and suction cups for fixing wafers are provided on the wafer picking fork.

[0003] During the wafer adsorption and handling process, sometimes the wafer flipping action is involved. In the prior art, when the robot arm is not raised to a relatively high position in the vertical stroke and the robot arm is in the retracted state, due to the distance between the robot arms and joint interference, the wafer adsorbed on the fork cannot be flipped, which limits the handling of the wafers to a certain extent. Content of the Utility Model

[0004] The purpose of the utility model is to provide a sheet metal part wafer handling robot arm to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A sheet metal part wafer handling robot arm, including a body, a robot arm is rotatably connected to the top of the body, symmetrically arranged support blocks are fixedly connected to the top of the robot arm, a first electric telescopic rod is fixedly installed on the two support blocks together, a telescopic arm is slidably connected inside the robot arm, a linkage block is fixedly connected to the top of the telescopic arm, a mounting block is fixedly connected to one side of the telescopic arm, a second electric telescopic rod is rotatably connected to the mounting block, a mounting plate is fixedly connected to the top of the second electric telescopic rod, a transmission rack is fixedly connected to the top of the mounting plate, a top block is fixedly connected to the top of the output end of the second electric telescopic rod, a rotating rod is rotatably connected to one side of the top block, a fork is fixedly connected to one side of the rotating rod, and a driven gear is fixedly connected to the rotating rod.

[0006] Preferably, one side of the linkage block corresponds to the output end of the first electric telescopic rod, and one side of the linkage block is fixedly connected to one side of the output end of the first electric telescopic rod.

[0007] Preferably, the specific shape of the fork is V-shaped.

[0008] Preferably, the output end of the second electric telescopic rod passes through the mounting plate and is fixedly connected to the top block.

[0009] Preferably, a driven gear is fixedly connected to the rotating rod at a position corresponding to the transmission rack, and the driven gear is meshed with the transmission rack.

[0010] Compared with the prior art, the beneficial effects of the present utility model are as follows: An installation plate, a first electric telescopic rod, a second electric telescopic rod, a transmission rack, a driven gear, etc. are provided. When it is necessary to reverse the fork during the handling process, the second electric telescopic rod rotatably connected to the robotic arm can be started. The second electric telescopic rod will drive the fork to move upward, so that the distance between the fork and the robotic arm is adjusted. During the upward movement of the fork, the cooperation of each component will cause the fork to perform a flipping action. At this time, the fork drives the wafer to complete the flipping. The present utility model can make the fork no longer affected by the position of the robotic arm when flipping is required, enabling the fork to freely drive the wafer to complete the flipping action and eliminating its original use limitations. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is the front view structural schematic diagram of the present utility model;

[0012] Figure 2 is the top view structural schematic diagram of the present utility model;

[0013] Figure 3 is the specific structural schematic diagram on the installation plate of the present utility model;

[0014] Figure 4 is the specific structural schematic diagram on the second electric telescopic rod of the present utility model.

[0015] In the figure: 1, body; 2, robotic arm; 3, support block; 4, first electric telescopic rod; 5, telescopic arm; 6, linkage block; 7, mounting block; 8, second electric telescopic rod; 9, installation plate; 10, transmission rack; 11, top block; 12, rotating rod; 13, fork; 14, driven gear. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0017] Please refer to Figures 1-4, the present utility model provides a technical solution: a sheet metal part wafer handling robotic arm, including a body 1, a robotic arm 2 is rotatably connected to the top of the body 1, symmetrically arranged support blocks 3 are fixedly connected to the top of the robotic arm 2, a first electric telescopic rod 4 is fixedly installed on the two support blocks 3 together, a telescopic arm 5 is slidably connected inside the robotic arm 2, a linkage block 6 is fixedly connected to the top of the telescopic arm 5, a mounting block 7 is fixedly connected to one side of the telescopic arm 5, a second electric telescopic rod 8 is rotatably connected to the mounting block 7, a mounting plate 9 is fixedly connected to the top of the second electric telescopic rod 8, a transmission rack 10 is fixedly connected to the top of the mounting plate 9, a top block 11 is fixedly connected to the top of the output end of the second electric telescopic rod 8, a rotating rod 12 is rotatably connected to one side of the top block 11, a fork 13 is fixedly connected to one side of the rotating rod 12, and a driven gear 14 is fixedly connected to the rotating rod 12.

[0018] One side of the linkage block 6 corresponds to the output end of the first electric telescopic rod 4, and one side of the linkage block 6 is fixedly connected to one side of the output end of the first electric telescopic rod 4. The output end of the first electric telescopic rod 4 is convenient to drive the telescopic arm 5 to move back and forth through the linkage block 6. The specific shape of the fork 13 is V-shaped. The fork 13 is convenient for adsorbing and fixing the sheet metal part wafer. The output end of the second electric telescopic rod 8 passes through the mounting plate 9 and is fixedly connected to the top block 11. The second electric telescopic rod 8 is convenient to drive the top block 11 to move up and down. A driven gear 14 is fixedly connected to the rotating rod 12 at a position corresponding to the transmission rack 10, and the driven gear 14 is meshed with the transmission rack 10. When the driven gear 14 moves, it is convenient to rotate drivenly through the transmission rack 10.

[0019] Specifically, when using the utility model, the machine body 1 can drive the robotic arm 2 to rotate. Then, the machine body 1 can drive the second electric telescopic rod 8 to rotate. The second electric telescopic rod 8 will drive the top block 11 and the fork 13 to rotate towards the wafer to be adsorbed. Then, the fork 13 can adsorb and fix the corresponding wafer. When it is necessary to adjust the length of the robotic arm 2, the first electric telescopic rod 4 can be started. The output end of the first electric telescopic rod 4 extends out and drives the linkage block 6 and the telescopic arm 5 to move outward. The telescopic arm 5 that extends outwards will drive the mounting block 7, the second electric telescopic rod 8, the top block 11 and the fork 13 to move together. Then, the telescopic arm 5 can be adjusted to the specified position and the first electric telescopic rod 4 can be turned off. At this time, the overall length of the robotic arm 2 is adjusted. When it is necessary to rotate the fork 13 and the wafer, the second electric telescopic rod 8 can be started. The output end of the second electric telescopic rod 8 extends upwards and drives the top block 11, the rotating rod 12, the driven gear 14 and the fork 13 to move upwards together. The position of the mounting plate 9 and the transmission rack 10 remains unchanged. When the rotating rod 12 is driven by the top block 11 to move upwards for a certain distance, at this time, the distance between the fork 13 and the robotic arm 2 becomes larger. At this time, when the fork 13 rotates, it will not touch the robotic arm 2. At this time, the driven gear 14 will be connected to the transmission rack 10. At this time, the continuously moving driven gear 14 will rotate due to the transmission rack 10. The rotating driven gear 14 will drive the rotating rod 12 and the fork 13 to rotate together. The fork 13 will drive the adsorbed wafer to rotate together, which can make the fork 13 no longer affected by the position of the robotic arm 2 when it needs to be flipped, so that the fork 13 can freely drive the wafer to complete the flipping action and relieve its original use limitations.

[0020] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sheet metal wafer handling robot arm, characterized in that: The invention comprises a machine body (1), the top of the machine body (1) is rotatably connected to a mechanical arm (2), the top of the mechanical arm (2) is fixedly connected to a symmetrically arranged support block (3), a first electric telescopic rod (4) is fixedly mounted on two of the support blocks (3), a telescopic arm (5) is slidably connected inside the mechanical arm (2), the top of the telescopic arm (5) is fixedly connected to a linkage block (6), one side of the telescopic arm (5) is fixedly connected to a mounting block (7), a second electric telescopic rod (8) is rotatably connected to the mounting block (7), the top of the second electric telescopic rod (8) is fixedly connected to a mounting plate (9), the top of the mounting plate (9) is fixedly connected to a transmission rack (10), the top of the output end of the second electric telescopic rod (8) is fixedly connected to a top block (11), one side of the top block (11) is rotatably connected to a rotating rod (12), one side of the rotating rod (12) is fixedly connected to a fork hand (13), and the rotating rod (12) is fixedly connected to a driven gear (14).

2. A sheet metal wafer handling robot arm according to claim 1, characterized in that: One side of the linkage block (6) corresponds to the output end of the first electric telescopic rod (4), and one side of the linkage block (6) is fixedly connected to one side of the output end of the first electric telescopic rod (4).

3. The sheet metal wafer handling robot arm according to claim 1, characterized in that: The specific shape of the fork hand (13) is a V-shape.

4. The sheet metal wafer handling robot arm according to claim 1, characterized in that: The output end of the second electric telescopic rod (8) passes through the mounting plate (9) and is fixedly connected to the top block (11).

5. The sheet metal wafer handling robot arm according to claim 1, characterized in that: A driven gear (14) is fixedly connected to the rotating rod (12) at a position corresponding to the transmission rack (10), and the driven gear (14) is meshingly connected to the transmission rack (10).

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