Anti-blocking line source evaporation crucible

Abstract

According to the anti-blocking line source evaporation crucible, during evaporation, an anti-blocking heating assembly can be arranged on the peripheral side of a nozzle, so that a spiral electric heating wire in a heat preservation cover of the anti-blocking heating assembly can heat the nozzle, and then the temperature of the inner side of the nozzle can be increased; a heating source of the evaporation equipment heats the bottom of the crucible body, so that an evaporation material in an inner cavity of the crucible body is heated at high temperature to be converted into gaseous molecules and overflows through a nozzle of the crucible cover, and the nozzle is heated by a spiral electric heating wire and reflects and preserves heat of heating heat by a heat preservation cover, so that the temperature of the peripheral side of the nozzle is ensured to be in a high state; the temperature loss of the side wall of the nozzle is avoided, so that the evaporation material can be prevented from being condensed and accumulated on the inner side wall of the nozzle due to lower temperature of the nozzle, and the evaporation speed of the evaporation material and the quality of a thin film formed by evaporation are ensured.

Description

Technical Field

[0001] This application relates to the technical field of wire source crucibles, and specifically relates to an anti-blocking wire source evaporation crucible. Background Art

[0002] OLED (organic light-emitting diode) devices are widely used in modern display and lighting technologies. The uniformity and quality of the thin film during its manufacturing process directly affect the performance and lifespan of the device. Currently, the vacuum evaporation method is one of the main processes for preparing OLED thin films. During the vacuum evaporation process, the wire source crucible, as the evaporation source of the evaporation equipment, plays a crucial role. The material to be evaporated is placed in the crucible of the vacuum evaporation source device. By heating the crucible, the material changes from a solid state to gaseous atoms, atomic groups, or molecules, which diffuse upward through the nozzle opening on the upper cover of the crucible and finally condense on the substrate surface to form a uniform thin film, thereby realizing the light-emitting function of the OLED device.

[0003] In the evaporation process of OLEDs, the heating component heats the bottom of the evaporation source (i.e., the crucible body) to promote the sublimation of the internal evaporation material and release it through the nozzle provided at the top of the crucible body. However, due to the large distance between the nozzle and the bottom of the crucible body, a large amount of heat is lost to the external environment during the process of heat transfer from the bottom to the nozzle. This heat loss causes the temperature of the nozzle to decrease, making it easy for the evaporation material to condense and accumulate on the inner side wall of the nozzle. This condensation phenomenon not only affects the evaporation rate of the evaporation material, thereby having an adverse impact on the quality of the thin film formed by evaporation, but more seriously, the condensed evaporation material may block the nozzle, interfering with the normal operation of the evaporation equipment and increasing the maintenance cost and difficulty of the equipment. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the purpose of this application is to provide an anti-blocking wire source evaporation crucible to solve the problems raised in the above background art.

[0005] According to one aspect of the present application, an anti-clogging wire source evaporation crucible includes a crucible body, a wire source crucible cover, a nozzle, and an anti-clogging heating component. A wire source crucible cover is provided at the top of the crucible body. A plurality of nozzles are provided along the length direction of the wire source crucible cover. An anti-clogging heating component is provided above the wire source crucible cover. Electric push rods vertically arranged are installed on both sides of the anti-clogging heating component. The electric push rods can drive the anti-clogging heating component to move to the periphery of the nozzle. The anti-clogging heating component includes a spiral electric heating wire, a protective shell, and a heat insulation cover. Both ends of the protective shell are fixedly connected to the extending ends of the electric push rods respectively. A plurality of connection holes penetrating the upper and lower surfaces are formed along the length direction of the protective shell. The arrangement positions of the plurality of connection holes correspond to the arrangement positions of the plurality of nozzles one by one, and the inner diameter size of the connection holes is adapted to the outer diameter size of the nozzles. Heat insulation covers are fixedly provided corresponding to each connection hole position inside the protective shell. A jack is formed through the top of each heat insulation cover. The diameter size of the jack is consistent with the diameter size of the connection hole and the two are correspondingly communicated. A spiral electric heating wire is arranged inside each heat insulation cover. When the electric push rods drive the anti-clogging heating component to move to the periphery of the nozzle, the connection holes and the jacks are both installed on the outer side wall of the nozzle, and the spiral electric heating wire is sleeved on the outer periphery of the nozzle.

[0006] Preferably, the protective shell is a strip-shaped hollow square shell structure, and the connection holes penetrate the upper and lower panels of the protective shell.

[0007] Preferably, the heat insulation cover is a frustum-shaped shell structure. The bottom of the heat insulation cover is an open end and its top is a closed end. The closed end and the open end of the heat insulation cover are respectively fixedly connected to the inner upper and lower surfaces of the protective shell, and the jack communicating with the connection hole is formed through the closed end surface of the heat insulation cover.

[0008] Preferably, the spiral electric heating wires in every two adjacent heat insulation covers are electrically connected.

[0009] Preferably, the material of the heat insulation cover is selected as ceramic material.

[0010] Preferably, a plurality of heat transfer rods are fixedly arranged equidistantly along the circumferential direction on the inner side wall of each nozzle, and the heat transfer rods can extend into the evaporation material in the inner cavity of the crucible body.

[0011] Preferably, the material of the heat transfer rod is selected as graphite material.

[0012] The advantages of the present application compared with the prior art are as follows: For an anti-clogging wire source evaporation crucible of the present application, during evaporation coating, the anti-clogging heating component can be arranged on the outer peripheral side of the nozzle, so that the spiral electric heating wire in the thermal insulation cover of the anti-clogging heating component can heat the nozzle, thereby increasing the temperature inside the nozzle. During the evaporation coating process, the heating source of the evaporation coating equipment heats the bottom of the crucible body, causing the evaporation material in its inner cavity to be heated to a high temperature and turn into gaseous molecules, which then overflow through the nozzle of the crucible cover. The nozzle is heated by the spiral electric heating wire and the heat generated is reflected and insulated by the thermal insulation cover, so that the temperature around the nozzle is maintained at a relatively high level, avoiding heat loss from the side wall of the nozzle. Therefore, it can prevent the evaporation material from condensing and accumulating on the inner side wall of the nozzle due to the low temperature of the nozzle, thus ensuring the evaporation rate of the evaporation material and the quality of the thin film formed by evaporation coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 FIG. is a perspective view of an anti-clogging wire source evaporation crucible according to an embodiment of the present application.

[0014] Figure 2 FIG. is a main sectional view of an anti-clogging wire source evaporation crucible according to an embodiment of the present application.

[0015] Figure 3 is Figure 2 a schematic enlarged view of the structure of part A in FIG.

[0016] Figure 4 FIG. is a side sectional view of an anti-clogging wire source evaporation crucible according to an embodiment of the present application.

[0017] Figure 5 FIG. is a schematic structural view of an anti-clogging heating component of an anti-clogging wire source evaporation crucible according to an embodiment of the present application.

[0018] Reference numerals: 1, crucible body; 2, wire source crucible cover; 3, nozzle; 4, anti-clogging heating component; 41, spiral electric heating wire; 42, protective shell; 43, thermal insulation cover; 44, connection hole; 45, jack; 5, electric push rod; 6, heat transfer rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] In order to make the content of the present application easier to be clearly understood, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be noted that the terms "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the directions in the Figure 2 drawings, and the terms "inner" and "outer" respectively refer to the directions towards or away from the geometric center of a specific component.

[0020] Such as Figures 1 to 5As shown in the figure, an anti-blocking wire source evaporation crucible includes a crucible body 1, a wire source crucible cover 2, nozzles 3, and an anti-blocking heating component 4. A wire source crucible cover 2 is arranged on the top of the crucible body 1. A plurality of nozzles 3 are arranged along the length direction of the wire source crucible cover 2. An anti-blocking heating component 4 is arranged above the wire source crucible cover 2. Electric push rods 5 arranged vertically are installed on both sides of the anti-blocking heating component 4. The electric push rods 5 are installed in the evaporation equipment. The electric push rods 5 are explosion-proof and high-temperature-resistant electric push rods 5 to ensure that they can work normally during the evaporation process. The electric push rods 5 can drive the anti-blocking heating component 4 to move to the periphery of the nozzles 3. And when installing the wire source evaporation crucible before evaporation, the electric push rods 5 can lift the anti-blocking heating component 4 to a height that does not interfere with the wire source evaporation crucible. The anti-blocking heating component 4 includes a spiral electric heating wire 41, a protective shell 42, and a heat insulation cover 43. The protective shell 42 is a strip-shaped hollow square shell structure. The two ends of the protective shell 42 are respectively fixedly connected to the extending ends of the electric push rods 5. A plurality of connection holes 44 penetrating the upper and lower surfaces are arranged along the length direction of the protective shell 42. The connection holes 44 penetrate the upper and lower panels of the protective shell 42. The arrangement positions of the plurality of connection holes 44 correspond to the arrangement positions of the plurality of nozzles 3 one by one, and the inner diameter size of the connection holes 44 is adapted to the outer diameter size of the nozzles 3. Heat insulation covers 43 are fixedly arranged corresponding to each connection hole 44 position in the protective shell 42. The heat insulation covers 43 are frustum-shaped shell structures. The bottom of the heat insulation cover 43 is an open end and its top is a closed end. The closed end and the open end of the heat insulation cover 43 are respectively fixedly connected to the inner upper and lower surfaces of the protective shell 42. And a jack 45 communicating with the connection hole 44 is penetrated and opened on the closed end surface of the heat insulation cover 43. The diameter size of the jack 45 is consistent with the diameter size of the connection hole 44. A spiral electric heating wire 41 is arranged in each heat insulation cover 43. The spiral electric heating wires 41 in every two adjacent heat insulation covers 43 are electrically connected, and the spiral electric heating wires 41 at the outermost two ends are externally connected to a power supply. In addition, the heat insulation cover 43 is made of ceramic material. The ceramic material has good heat insulation performance, so that the heat generated by the spiral electric heating wire 41 can be better kept in the heat insulation cover 43. In addition, a plurality of heat transfer rods 6 are fixedly arranged equidistantly along the circumferential direction on the inner side wall of each nozzle 3. And the heat transfer rods 6 can extend into the evaporation material in the inner cavity of the crucible body 1. The heat transfer rods 6 are made of graphite material. The graphite material has extremely high thermal conductivity and high temperature resistance. Furthermore, it can ensure that the heat transfer rods 6 have a good heat conduction rate, so that the heat transfer rods 6 can conduct the heat in the inner cavity of the crucible body 1 to the inner side wall of the nozzle 3, thereby increasing the temperature inside the nozzle 3.

[0021] Working principle: When installing the wire source evaporation crucible before evaporation coating, the electric push rod 5 can lift the anti-blocking heating component 4 to a height that does not interfere with the wire source evaporation crucible. After the crucible is installed, the electric push rod 5 drives the anti-blocking heating component 4 to move to the periphery of the nozzle 3, so that the connection hole 44 of the protective shell 42 and the insertion hole 45 of the thermal insulation cover 43 are installed on the outer side wall of the nozzle 3. At this time, the spiral electric heating wire 41 is sleeved on the outer periphery of the nozzle 3, and then the evaporation coating work is carried out. During the evaporation coating process, the spiral electric heating wire 41 in the thermal insulation cover 43 can heat the nozzle 3, thereby increasing the temperature inside the nozzle 3. Furthermore, the heating source of the evaporation coating equipment heats the bottom of the crucible body 1, so that the evaporation material in its inner cavity is heated to a high temperature and transformed into gaseous molecules and overflows through the crucible cover nozzle 3. The nozzle 3 is heated by the spiral electric heating wire 41 and the heat generated is reflected and insulated by the thermal insulation cover 43, so that the temperature on its periphery is kept at a relatively high state. And the heat transfer rod 6 can conduct the heat in the inner cavity of the crucible body 1 to the inner side wall of the nozzle 3, further increasing the temperature inside the nozzle 3 and avoiding the loss of the temperature on the side wall of the nozzle 3. Thus, it can be avoided that the evaporation material condenses and accumulates on the inner side wall of the nozzle 3 due to the low temperature of the nozzle 3, thereby ensuring the evaporation speed of the evaporation material and the quality of the thin film formed by the evaporation coating.

[0022] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, and are not intended to limit them. Although the embodiments of the present application have been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that without departing from the spirit and scope defined by the claims of the present application, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features.

Claims

1. A blocking-proof line source evaporation crucible, comprising a crucible body (1), a line source crucible cover (2), a nozzle (3) and a blocking-proof heating assembly (4), wherein the top of the crucible body (1) is provided with a line source crucible cover (2), and a plurality of nozzles (3) are provided on the line source crucible cover (2) along its length direction, characterized in that: An anti-blocking heating component (4) is arranged above the line source crucible cover (2), and vertically arranged electric push rods (5) are installed on both sides of the anti-blocking heating component (4), and the electric push rods (5) can drive the anti-blocking heating component (4) to move to the side of the nozzle (3). The anti-blocking heating component (4) includes a spiral heating wire (41), a protective shell (42) and a heat insulation cover (43), and the two ends of the protective shell (42) are respectively fixedly connected to the protruding ends of the electric push rod (5), and the protective shell (42) is provided with a plurality of connecting holes (44) penetrating the upper and lower sides along its length direction, and the setting positions of the plurality of connecting holes (44) correspond to the setting positions of the plurality of nozzles (3), and the inner diameter size of the connecting hole (44) is In order to match the outer diameter of the nozzle (3), a heat insulation cover (43) is fixedly provided in the protective shell (42) at the position of each connecting hole (44), and a plug hole (45) is provided through the top of each heat insulation cover (43). The diameter of the plug hole (45) is consistent with the diameter of the connecting hole (44) and the two are connected to each other. A spiral heating wire (41) is provided in each heat insulation cover (43). When the electric push rod (5) drives the anti-blocking heating component (4) to move to the peripheral side of the nozzle (3), the connecting hole (44) and the plug hole (45) are both installed on the outer wall of the nozzle (3), and the spiral heating wire (41) is sleeved on the peripheral side of the nozzle (3).

2. The anti-blocking line source evaporation crucible according to claim 1, characterized in that: The protective shell (42) is a strip-shaped hollow square shell structure, and the connecting hole (44) passes through the upper and lower panels of the protective shell (42).

3. The anti-blocking line source evaporation crucible according to claim 2, characterized in that: The heat insulation cover (43) is a truncated cone-shaped shell structure, the bottom of the heat insulation cover (43) is an open end and the top is a closed end, the closed end and the open end of the heat insulation cover (43) are respectively fixedly connected to the upper and lower surfaces inside the protective shell (42), and the plug hole (45) connected to the connecting hole (44) is penetrated through the closed end surface of the heat insulation cover (43).

4. The anti-blocking line source evaporation crucible according to claim 3, characterized in that: The spiral heating wires (41) in each two adjacent heat insulation covers (43) are electrically connected.

5. The anti-blocking line source evaporation crucible according to claim 3, characterized in that: The material of the heat insulation cover (43) is ceramic material.

6. The anti-blocking line source evaporation crucible according to claim 1, characterized in that: A plurality of heat transfer rods (6) are fixedly arranged on the inner side wall of each nozzle (3) at equal intervals along the circumference thereof, and the heat transfer rods (6) are capable of extending into the vapor deposition material in the inner cavity of the crucible body (1).

7. The anti-blocking line source evaporation crucible according to claim 6, characterized in that: The material of the heat transfer rod (6) is graphite.

Images