Flattening device and vacuum drying equipment

Abstract

The utility model relates to a flattening device and vacuum drying equipment, the flattening device is arranged in a vacuum cavity and is used for fixing a substrate to be subjected to vacuum heating and drying, the flattening device comprises a driving assembly, a crimping assembly and an elastic assembly, the driving assembly is used for driving the crimping assembly to act, and the elastic assembly is used for driving the crimping assembly to act. The pressing assembly is arranged on the base plate, so that the pressing assembly can be pressed on the peripheral edge of the base plate, and the driving assembly is connected with the pressing assembly through the elastic assembly; the crimping assembly comprises a connecting frame and a pressing plate, the pressing plate is connected to the connecting frame, the movable output end of the driving assembly is connected to the connecting frame, and the projection of the pressing plate in the height direction is overlapped with the substrate. According to the base plate baking device, the base plate can be flattened and positioned in the base plate baking process, so that the base plate is effectively prevented from being heated in the vacuum cavity to deform, the base plate is prevented from warping, the base plate is effectively protected, the base plate in high-temperature drying is flattened and fixed, and the drying and crystallizing quality of the base plate is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum drying, in particular to a flattening device and a vacuum drying equipment. Background Art

[0002] Vacuum drying equipment is widely used in industries such as semiconductors, liquid crystal displays, and batteries. The vacuum drying equipment utilizes the evaporation effect under low-pressure conditions to create a high-vacuum environment in the evaporation chamber, enabling the evaporation of moisture and other liquids in the object, thereby achieving the purpose of rapid drying and crystallization. Specifically, the coated substrate needs to be transferred into the vacuum chamber for drying, so that the solvent in the slurry volatilizes and rapid crystallization is achieved. During the drying process, the gas in the vacuum chamber is extracted through the air extraction port of the vacuum chamber, causing the air pressure in the vacuum chamber to drop and achieving rapid crystallization.

[0003] The disadvantage of the prior art is that when the substrate is heated and dried in the vacuum chamber, the edge of the substrate will be warped and deformed under the influence of high temperature, thus affecting the drying and crystallization quality of the substrate. Therefore, it is necessary to design a flattening device to flatten and fix the substrate during high-temperature drying. Summary of the Utility Model

[0004] Therefore, the technical problem to be solved by the present utility model is to overcome the deficiencies in the prior art and provide a flattening device and a vacuum drying equipment, which can press and position the edge of the substrate during the heating and drying process of the substrate, thereby effectively avoiding the deformation of the substrate caused by heat in the vacuum chamber, flattening and fixing the substrate during high-temperature drying, and ensuring the drying and crystallization quality of the substrate.

[0005] To solve the above technical problem, the present utility model provides a flattening device, which is arranged in the vacuum chamber and is used to fix the substrate to be vacuum-heated and dried. The flattening device includes,

[0006] a driving component, a pressing component, and an elastic component. The driving component is used to drive the pressing component to act, so that the pressing component can press on the four peripheral edges of the substrate. The driving component and the pressing component are connected by the elastic component.

[0007] In an embodiment of the present utility model, the pressing component includes a connecting frame and a pressing plate. The pressing plate is connected to the connecting frame, and the movable output end of the driving component is connected to the connecting frame.

[0008] In an embodiment of the present utility model, the projection of the connecting frame in the height direction is located outside the periphery of the substrate. There are multiple pressing plates, and the pressing plates are connected to the connecting frame at intervals and extend towards the direction where the substrate is located.

[0009] In an embodiment of the present utility model, the connection frame includes a fixing plate and a connecting rod. The connecting rod extends along the edge of the substrate. There are multiple connecting rods, and two adjacent connecting rods are connected by the fixing plate. The pressing plate is installed on the connecting rod.

[0010] In an embodiment of the present utility model, a convex block is provided on the side of the pressing plate in contact with the substrate.

[0011] In an embodiment of the present utility model, the driving assembly includes a driving member, a driving connecting rod, and a connecting piece. One end of the driving connecting rod is connected to the driving member, and the other end of the driving connecting rod is connected to the connecting piece. The driving connecting rod extends into the vacuum chamber, and the driving connecting rod is fixedly connected to the crimping assembly through the connecting piece.

[0012] In an embodiment of the present utility model, the elastic assembly includes a first connecting portion, an elastic buffer member, and a second connecting portion. The elastic buffer member is connected to the driving assembly. One end of the elastic buffer member is connected to the first connecting portion, and the other end of the elastic buffer member is connected to the second connecting portion. The first connecting portion is fixedly connected to the inner wall of the vacuum chamber, and the second connecting portion is connected to the driving assembly.

[0013] In an embodiment of the present utility model, the size of the first connecting portion is larger than that of the second connecting portion. The first connecting portion is provided with a first mounting hole, and the second connecting portion is provided with a second mounting hole. The first mounting hole and the second mounting hole are misaligned.

[0014] In an embodiment of the present utility model, a first sealing ring is provided between the first connecting portion and the driving connecting rod; a second sealing ring is provided between the second connecting portion and the connecting piece.

[0015] The present utility model also provides a vacuum drying device, including the flattening device as described above.

[0016] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0017] The flattening device described in the present utility model is provided with a driving component, a pressing component, and an elastic component. Among them, the pressing component can be in movable contact with the substrate inside the vacuum chamber. The driving component is used to provide the driving force for pressing down, and then the pressure is applied to the substrate through the pressing component. In this way, the flattening device can flatten and position the substrate during the baking process of the substrate, effectively avoiding the deformation of the substrate due to heat in the vacuum chamber, avoiding warping at the edges of the substrate, flattening and fixing the substrate during high-temperature drying, and ensuring the drying and crystallization quality of the substrate. In addition, the elastic component can play a certain buffering and protective role for the substrate, thereby avoiding damage to the substrate caused by excessive pressure, effectively protecting the substrate, and improving the qualified rate of the product. Description of the Drawings

[0018] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to specific embodiments of the present utility model in conjunction with the drawings, where:

[0019] Figure 1 is the overall structural schematic diagram of the flattening device in the preferred embodiment of the present utility model in cooperation with the vacuum chamber.

[0020] Figure 2 is the overall structural schematic diagram of the flattening device in the preferred embodiment of the present utility model.

[0021] Figure 3 is the partial structural schematic diagram of the driving component and the elastic component in the preferred embodiment of the present utility model.

[0022] Figure 4 is the cross-sectional structural schematic diagram of the driving component and the elastic component in the preferred embodiment of the present utility model.

[0023] Explanation of the reference numerals in the drawings: 1. Vacuum chamber; 10. Mounting seat; 2. Substrate; 3. Driving component; 30. Driving member; 31. Driving connecting rod; 32. Connecting piece; 40. Connecting frame; 401. Fixed plate; 402. Connecting rod; 41. Pressing plate; 50. First connecting part; 501. First mounting hole; 502. First sealing ring; 51. Elastic buffer; 52. Second connecting part; 521. Second mounting hole; 522. Second sealing ring. Detailed Embodiments

[0024] The following further illustrates the present utility model in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the examples given are not intended to limit the present utility model.

[0025] Embodiment 1

[0026] Refer to Figure 1As shown in the figure, the present utility model discloses a flattening device, which is arranged in a vacuum chamber 1 and is used to fix a substrate 2 to be dried by vacuum heating.

[0027] The flattening device includes a driving component 3, a pressing component and an elastic component. The driving component 3 is used to drive the pressing component to act, so that the pressing component can be pressed against the four peripheral edges of the substrate 2, thereby being able to flatten the four peripheral edges of the substrate 2, and effectively avoiding the deformation of the four peripheral edges of the substrate 2 during the vacuum heating and drying process.

[0028] The driving component is connected to the pressing component through the elastic component. In this way, during the process of flattening the substrate 2 by the pressing component, the elastic component can play a certain buffering and protecting role for the substrate 2, thereby avoiding damage to the substrate 2 caused by excessive pressure.

[0029] It can be seen from this that the flattening device to be protected by the present utility model is provided with a driving component, a pressing component and an elastic component. Among them, the pressing component can be in active contact with the substrate inside the vacuum chamber, and the driving component is used to provide the driving force for pressing down, and then the pressure is applied to the substrate through the pressing component. In this way, the flattening device can flatten and position the substrate during the baking process of the substrate, thereby effectively avoiding the deformation of the substrate due to heat in the vacuum chamber, avoiding warping of the substrate, flattening and fixing the substrate during high-temperature drying, and ensuring the drying and crystallization quality of the substrate. In addition, the elastic component can play a certain buffering and protecting role for the substrate, thereby avoiding damage to the substrate caused by excessive pressure, effectively protecting the substrate, and improving the qualified rate of products.

[0030] According to Figure 2 As shown in the figure, the flattening device further includes a pressing component. The pressing component is connected to the active output end of the driving component 3. The pressing component includes a connecting frame 40 and a pressing plate 41. The pressing plate 41 is installed on the connecting frame 40 through bolts. The active output end of the driving component 3 is connected to the connecting frame 40. The pressing plate 41 moves to be pressed against the substrate 2 under the drive of the connecting frame 40, and applies a force to the surface of the substrate 2 to flatten the four peripheral edges of the substrate 2.

[0031] Specifically, as shown in combination with Figure 2 the figure, the projection of the connecting frame 40 in the height direction is located outside the substrate 2. The pressing plate 41 is assembled on the connecting frame 40, and the pressing plate 41 extends towards the direction where the substrate 2 is located. At least part of the projection of the pressing plate 41 in the height direction overlaps with the substrate 2.

[0032] Preferably, a plurality of the pressing plates 41 are provided, and the plurality of the pressing plates 41 are evenly spaced. In this way, the plurality of the pressing plates 41 can cooperate with the connecting frame 40 and contact the four sides of the substrate 2, so as to press down the substrate 2 in the circumferential direction, ensuring the balance and comprehensiveness of the downward pressing force acting on the substrate 2, and effectively avoiding warping of the four sides of the substrate 2 during baking.

[0033] Of course, in some other embodiments, for the convenience of processing and manufacturing and to improve the integrity and consistency of the structure, only one pressing plate 41 may be provided and it is integrally formed. The shape of the pressing plate 41 is similar to that of the substrate 2, and its size is smaller than that of the substrate 2. The projection of the pressing plate 41 in the height direction overlaps with the substrate 2, so that the pressing plate 41 can also be press-connected to the four peripheral edges of the substrate 2.

[0034] According to Figure 2 As shown, in terms of details, the connecting frame 40 includes a fixing plate 401 and a connecting rod 402. The connecting rod 402 extends along the edge of the substrate 2, and two adjacent connecting rods 402 are connected by the fixing plate 401. A plurality of the pressing plates 41 are installed on the connecting rod 402. The projection of the substrate 2 in the height direction is located within the area surrounded by the connecting rod 402.

[0035] Specifically, 4 fixing plates 401 are provided and are respectively located at the four corners of the substrate 2. 4 connecting rods 402 are provided, and both ends of the connecting rod 402 are fixedly installed on two adjacent fixing plates 401.

[0036] Furthermore, in order to facilitate the contact between the pressing plate 41 and the substrate 2 during flattening and to facilitate the transmission of the acting force, a convex block 410 is further provided on the side of the pressing plate 41 in contact with the substrate 2.

[0037] Combined with Figure 1 As shown, an installation seat 10 for installing the driving assembly 3 is provided on the outer surface of the vacuum cavity 1, and the driving assembly 3 is assembled on the installation seat 10.

[0038] Even further, according to Figure 3 and Figure 4 As shown, the driving assembly 3 includes a driving member 30, a driving connecting rod 31 and a connecting piece 32. One end of the driving connecting rod 31 is connected to the output end of the driving member 30, a connecting piece 32 is provided at the other end of the driving connecting rod 31, the driving connecting rod 31 extends into the vacuum cavity 1, and the driving connecting rod 31 is fixedly connected to the pressing assembly 3 through the connecting piece 32.

[0039] Specifically, the connecting piece 32 is connected to the connecting frame 40 by bolts. In terms of details, the connecting piece 32 is fixedly connected to the fixing plate 401.

[0040] Specifically, the driving member 30 includes, but is not limited to, a driving cylinder, and the movable output end of the driving cylinder moves in the height direction.

[0041] Preferably, there are 4 sets of the driving assemblies 3, and the 4 sets of driving assemblies are respectively located at both ends of the substrate 2 along the diagonal direction. And during operation, in order to ensure that the downward pressure can be applied to the substrate 2 synchronously, the 4 sets of driving assemblies 3 need to operate synchronously.

[0042] Combined Figure 3 and Figure 4 seen, the flattening device further includes an elastic component. The elastic component includes a first connecting portion 50, an elastic buffer 51, and a second connecting portion 52. The elastic buffer 51 is sleeved on the driving connecting rod 31. One end of the elastic buffer 51 is connected to the first connecting portion 50, and the other end of the elastic buffer 51 is connected to the second connecting portion 52. The first connecting portion 50 is fixedly connected to the inner wall of the vacuum cavity 1, and the second connecting portion 52 is connected to the driving assembly 3. Specifically, the second connecting portion 52 is connected to the connecting piece 32 by bolts.

[0043] It should be noted that the elastic buffer 51 can play an elastic supporting role between the first connecting portion 50 and the second connecting portion 52 during the process of flattening the substrate 2, and can play a certain buffering role when the second connecting portion 52 moves up and down along with the driving connecting rod 31. The material of the substrate 2 is usually glass, so as to avoid excessive pressure of the pressing assembly 3 on the substrate 2 and avoid damaging the substrate 2.

[0044] The elastic buffer 51 includes, but is not limited to, a spring.

[0045] Specifically, referring to Figure 3 seen, the size of the first connecting portion 50 is larger than that of the second connecting portion 52. The first connecting portion 50 is provided with a first mounting hole 501, and the second connecting portion 52 is provided with a second mounting hole 521. It should be noted that the first mounting hole 501 and the second mounting hole 502 are misaligned with each other.

[0046] According to Figure 3As shown, in order to improve the sealing effect between the vacuum chamber 1 and the outside world and prevent the vacuum degree from being reduced due to poor sealing performance when the driving assembly 3 is working, a first sealing ring 502 is provided between the first connecting portion 50 and the driving connecting rod 31. A second sealing ring 522 is provided between the second connecting portion 52 and the connecting piece 32.

[0047] Since the first sealing ring 502 and the second sealing ring 522 are vulnerable parts and need to be replaced frequently, with such a setting, it is convenient for the operator to disassemble and install the first connecting portion 50, avoiding interference during screw fixing or disassembly, thus facilitating the disassembly and assembly operations, shortening the replacement and installation time of the operator, and further improving the assembly efficiency.

[0048] In this embodiment, both the first connecting portion 50 and the second connecting portion 52 are connecting flanges, and the connecting piece 32 is a gasket matching the connecting flange.

[0049] Embodiment Two

[0050] The present utility model also discloses a vacuum drying device, including the flattening device as described in Embodiment One.

[0051] It can be known therefrom that the vacuum drying device adopting the flattening device can press the periphery of the substrate during the baking operation, thus effectively avoiding the deformation of the substrate due to heat in the vacuum chamber, flattening and fixing the substrate during high-temperature drying, and ensuring the drying and crystallization quality of the substrate.

[0052] In the description of the embodiments of the present utility model, it should also be noted that unless otherwise clearly defined and limited, if the terms "set" and "connect" are used, they should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0053] In the description of the present utility model, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more, unless otherwise clearly and specifically defined.

[0054] In the present utility model, unless otherwise clearly defined and limited, terms such as "installation", "connection", "attachment", "fixation", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium; it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0055] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of the present utility model.

Claims

1. Flattening device, characterized in that: The flattening device is arranged in the vacuum chamber and is used to fix the substrate to be vacuum heated and dried. The flattening device comprises: A driving component, a crimping component and an elastic component, wherein the driving component is used to drive the crimping component to move so that the crimping component can be pressed onto the four edges of the substrate, and the driving component and the crimping component are connected via the elastic component.

2. The flattening device according to claim 1, characterized in that: The crimping assembly comprises a connecting frame and a pressing plate, wherein the pressing plate is connected to the connecting frame, and the movable output end of the driving assembly is connected to the connecting frame.

3. The flattening device according to claim 2, characterized in that: The projection of the connection frame in the height direction is located at the periphery of the base plate, and the pressing plate extends in the direction where the base plate is located.

4. The flattening device according to claim 2 or 3, characterized in that: The connecting frame comprises a fixing plate and a connecting rod, a plurality of the connecting rods are provided, two adjacent connecting rods are connected via the fixing plate, and the pressing plate is mounted on the connecting rod.

5. The flattening device according to claim 2 or 3, characterized in that: A convex block is arranged on one side of the pressing plate contacting the substrate.

6. The flattening device according to claim 1, characterized in that: The driving assembly includes a driving member, a driving connecting rod and a connecting plate, one end of the driving connecting rod is connected to the driving member, the other end of the driving connecting rod is connected to the connecting plate, the driving connecting rod extends into the interior of the vacuum chamber, and the driving connecting rod is fixedly connected to the crimping assembly through the connecting plate.

7. The flattening device according to claim 6, characterized in that: The elastic component includes a first connecting part, an elastic buffer and a second connecting part, the elastic buffer is connected to the driving component, one end of the elastic buffer is connected to the first connecting part, and the other end of the elastic buffer is connected to the second connecting part, the first connecting part is fixedly connected to the inner wall of the vacuum chamber, and the second connecting part is connected to the driving component.

8. The flattening device according to claim 7, characterized in that: The size of the first connection part is greater than that of the second connection part. The first connection part is provided with a first mounting hole, the second connection part is provided with a second mounting hole, and the first mounting hole is offset from the second mounting hole.

9. The flattening device according to claim 7, characterized in that: A first sealing ring is provided between the first connecting portion and the driving connecting rod; and a second sealing ring is provided between the second connecting portion and the connecting sheet.

10. Vacuum drying equipment, characterized in that: It comprises a flattening device as claimed in any one of claims 1 to 9.

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