Exhaust cooling device and heating furnace

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and discloses an exhaust cooling device and a heating furnace. The device is installed on a heating furnace and comprises an air exhaust structure, a first exhaust pipe, a second exhaust pipe and a third exhaust pipe. The air exhaust structure is used for generating negative pressure, the first exhaust pipe and the second exhaust pipe are communicated between the air exhaust structure and a loading chamber of the heating furnace, the second exhaust pipe is used for changing the air exhaust cooling efficiency of the exhaust cooling device on the loading chamber, and the third exhaust pipe is communicated between the air exhaust structure and the cleaning cavity. By means of the device, part of heat, capable of being transferred to the loading chamber, in heat dissipated by the furnace tube is reduced, heat received by the loading chamber is reduced, the temperature in the loading chamber can be better controlled in cooperation with air exhausting and cooling of the loading chamber, devices in the loading chamber are prevented from being damaged by high temperature, normal operation and the service life of the heating furnace are guaranteed, and the service life of the heating furnace is prolonged. And the effects of air exhaust cooling and vibration prevention are considered.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an exhaust gas cooling device and a heating furnace. Background Art

[0002] In the existing vertical furnace, during the heat treatment process of wafers in the furnace tube, a large amount of heat diffuses from the furnace tube to the surrounding structures of the furnace tube. Among them, part of the heat diffuses into the loading chamber, resulting in a gradual increase in the temperature in the loading chamber. High temperature is likely to cause damage to the devices in the loading chamber, resulting in device failure, unstable operation, etc., which in turn affects the normal operation and service life of the vertical furnace, increasing production costs and maintenance costs.

[0003] Based on the above, there is an urgent need for an exhaust gas cooling device and a heating furnace to solve the above technical problems. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an exhaust gas cooling device, which can prevent the devices in the loading chamber from being damaged by high temperature and ensure the normal operation and service life of the heating furnace.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The exhaust gas cooling device is installed in the heating furnace and includes an air extraction structure, a first exhaust pipe, a second exhaust pipe, and a third exhaust pipe. Among them, the air extraction structure is used to generate negative pressure. The outlet end of the first exhaust pipe is connected to the air extraction structure, and the inlet end of the first exhaust pipe is connected to the loading chamber of the heating furnace. The outlet end of the second exhaust pipe is connected to the air extraction structure, and the inlet end of the second exhaust pipe is connected to the loading chamber of the heating furnace. The second exhaust pipe is used to change the air extraction and cooling efficiency of the exhaust gas cooling device for the loading chamber. The outlet end of the third exhaust pipe is connected to the air extraction structure, and the inlet end of the third exhaust pipe is connected to the cleaning chamber of the heating furnace.

[0007] The beneficial effect of the exhaust gas cooling device of the utility model is that the part of the heat that can be transferred to the loading chamber in the heat dissipated from the furnace tube is reduced, that is, the heat received by the loading chamber is reduced. Combined with the air extraction and cooling of the loading chamber, it can better control the temperature in the loading chamber, prevent the devices in the loading chamber from being damaged by high temperature, and ensure the normal operation and service life of the heating furnace. At the same time, the exhaust gas cooling device can selectively extract and cool the loading chamber at a small and large air extraction efficiency. The small air extraction efficiency will not form a large airflow and vibration in the loading chamber, thus avoiding damage to the wafers, and also avoiding the generation of particles due to the vibration of some wafers and further scratching other wafers or polluting the entire heat treatment process environment. The large air extraction efficiency can better control the temperature in the loading chamber.

[0008] In some embodiments, at least one of the first exhaust pipe, the second exhaust pipe, and the third exhaust pipe is provided with a switching valve, and the switching valve is used to correspondingly control the on-off of the first exhaust pipe, the second exhaust pipe, or the third exhaust pipe, so as to function as a safety valve and adjust the air extraction efficiency.

[0009] In some embodiments, at least one of the first exhaust pipe, the second exhaust pipe, and the third exhaust pipe is provided with a regulating valve, and the regulating valve is used to correspondingly control the flow rate of the first exhaust pipe, the second exhaust pipe, or the third exhaust pipe, so as to function as a safety valve and adjust the air extraction efficiency.

[0010] In some embodiments, at least one of the first exhaust pipe, the second exhaust pipe, and the third exhaust pipe is connected to a gas detector, and the gas detector is used to correspondingly detect the gas components in the first exhaust pipe, the second exhaust pipe, or the third exhaust pipe. Through the gas detector, it is possible to timely detect whether the gas components in the loading chamber will damage the wafers, or whether the reaction gas leaks, etc.

[0011] In some embodiments, at least one of the first exhaust pipe, the second exhaust pipe, and the third exhaust pipe is connected to a pressure detector, and the pressure detector is used to correspondingly detect the air pressure in the first exhaust pipe, the second exhaust pipe, or the third exhaust pipe. By detecting the air pressure, the direction of the air flow can be reflected, thereby reflecting the risk of contamination of the loading chamber, etc.

[0012] In some embodiments, the exhaust gas cooling device further includes an exhaust gas volume adjustment structure. The exhaust gas volume adjustment structure includes a first opening, a second opening, and a third opening that are connected in communication. The first opening is connected to the intake end of the second exhaust pipe. The opening size of the second opening is smaller than that of the third opening. The second opening and / or the third opening are / is connected to the loading chamber in a switchable manner, so as to facilitate realizing different air extraction and cooling efficiencies for the loading chamber by respectively controlling the second opening and the third opening.

[0013] In some embodiments, the exhaust gas volume adjustment structure has a first state, a second state, a third state, and a fourth state. In the first state, both the second opening and the third opening are isolated from the loading chamber. In the second state, the second opening is connected to the loading chamber, and the third opening is isolated from the loading chamber. In the third state, the third opening is connected to the loading chamber, and the second opening is isolated from the loading chamber. In the fourth state, both the second opening and the third opening are connected to the loading chamber. In the first state, the second state, the third state, and the fourth state, the exhaust gas cooling device has different air extraction and cooling efficiencies for the loading chamber, so as to balance the efficiency of air extraction and cooling and the effect of preventing vibration.

[0014] In some embodiments, the exhaust volume regulating structure includes an air hood, a partition, a first cylinder and a second cylinder. The air hood and the partition define an exhaust cavity. The first opening, the second opening and the third opening are arranged on the air hood and / or the partition and are connected through the exhaust cavity. The output end of the first cylinder is provided with a first seal, and the output end of the second cylinder is provided with a second seal. The first cylinder can move the first seal to block or open the second opening, and the second cylinder can move the second seal to block or open the third opening, so that the exhaust volume regulating structure can switch between the first state, the second state, the third state and the fourth state.

[0015] In some embodiments, the exhaust cooling device includes at least two third exhaust pipes, the water-cooling flange and the furnace mouth of the heating furnace are located in the cleaning chamber, the cleaning chamber has at least two exhaust ports, each exhaust port is connected to a corresponding third exhaust pipe, and the exhaust ports are symmetrically arranged about the axis of the furnace tube of the heating furnace, thereby achieving uniform exhaust and cooling in the cleaning chamber, and can also avoid pollution caused by leakage of reaction gases.

[0016] In some embodiments, the exhaust cooling device also includes an air duct structure, which is arranged in the cabinet of the heating furnace and is connected to the exhaust structure. The air duct structure is provided with an air inlet hole, which is arranged toward the furnace tube to exhaust and cool the outside of the furnace tube and avoid pollution caused by leakage of reaction gas.

[0017] In some embodiments, the air duct structure includes a first air intake plate and a second air intake plate, the first air intake plate has an air intake hole, the second air intake plate is provided with a through hole, the second air intake plate and the first air intake plate are arranged to slide relative to each other, the second air intake plate slides relative to the first air intake plate to adjust the overlapping area of ​​the air intake hole and the through hole, and changes the flow rate entering the air intake hole, so that the flow rate through the air intake hole can be adaptively adjusted according to the temperature range of the outside of the furnace tube, so as to achieve the effect of taking into account both exhaust cooling and preventing vibration interference.

[0018] In some embodiments, the exhaust and cooling device further comprises a fourth exhaust pipe, the outlet end of the fourth exhaust pipe is connected to the exhaust structure, and the inlet end of the fourth exhaust pipe is connected to the wafer box. Through the fourth exhaust pipe, air can be exhausted to control the oxygen content in the wafer box to prevent the wafer from being oxidized and contaminated.

[0019] In some embodiments, the fourth exhaust pipe is also connected to an oxygen analyzer, which is used to detect the oxygen content in the fourth exhaust pipe to reflect the risk of oxidation contamination of the wafer.

[0020] Another object of the utility model is to provide a heating furnace with lower production cost and maintenance cost.

[0021] To achieve this purpose, the utility model adopts the following technical solutions:

[0022] A heating furnace includes a sweeper, a loading chamber, and the above-mentioned exhaust gas cooling device. The exhaust gas cooling device is used to extract air and cool the inside of the sweeper and the loading chamber.

[0023] The beneficial effect of the heating furnace of the present utility model is that the part of the heat that can be transferred to the loading chamber in the heat dissipated from the furnace tube is reduced, that is, the heat received by the loading chamber is reduced. Combined with the air extraction and cooling of the loading chamber, the temperature in the loading chamber can be better controlled, preventing the devices in the loading chamber from being damaged by high temperature, and ensuring the normal operation and service life of the heating furnace. At the same time, the air extraction and cooling of the loading chamber can be selectively carried out at a small and large air extraction efficiency. The small air extraction efficiency will not form a large air flow and vibration in the loading chamber, thus avoiding damage to the wafers. It can also prevent some wafers from vibrating to generate particles and further scratch other wafers or contaminate the entire heat treatment process environment. The large air extraction efficiency can better control the temperature in the loading chamber. Description of the Drawings

[0024] Figure 1 is a perspective view of the heating furnace provided by the present utility model;

[0025] Figure 2 is a perspective view of the heating furnace provided by the present utility model with the upper cabinet body hidden;

[0026] Figure 3 is a perspective view of the heating furnace provided by the present utility model with the upper cabinet body, furnace tube, water-cooled flange, and furnace door hidden;

[0027] Figure 4 is a front view of the structure of the exhaust gas cooling device provided by the present utility model;

[0028] Figure 5 is an assembly drawing of the second exhaust pipe and the exhaust gas volume adjustment structure in the present utility model;

[0029] Figure 6 is a front view structure diagram of the exhaust gas volume adjustment structure in the present utility model;

[0030] Figure 7 is a top view structure diagram of the exhaust gas volume adjustment structure in the present utility model;

[0031] Figure 8 is along Figure 6 the internal structure diagram of the exhaust gas volume adjustment structure at A-A in

[0032] In the figure:

[0033] 101, cabinet body; 102, wafer cassette; 103, furnace tube; 104, sweeper;

[0034] 201. Exhaust structure; 202. First exhaust pipe; 203. Second exhaust pipe; 204. Third exhaust pipe; 205. Fourth exhaust pipe; 206. Air duct structure; 2061. Second intake plate; 20611. Through hole

[0035] 301. Switch valve; 302. Regulating valve; 303. Pressure detector; 304. Gas detector; 305. Oxygen analyzer

[0036] 401. Air guide cover; 4010. Exhaust cavity; 402. Partition; 4021. Second opening; 4022. Third opening; 403. Connecting plate; 404. First cylinder; 405. First seal; 406. Second cylinder; 407. Second seal; 4071. First fixing member; 4072. Sealing ring; 4073. Second fixing member Specific embodiments

[0037] The present utility model will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only parts related to the present utility model are shown in the drawings, rather than all structures

[0038] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations

[0039] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature

[0040] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "right", "left", etc. are based on the orientation or positional relationships shown in the drawings. They are only for the convenience of description and simplifying the operations, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meanings.

[0041] The following will introduce the exhaust gas cooling device and the heating furnace provided by the present utility model according to the attached Figure 1 to the attached Figure 8 For the convenience of description, a vertical furnace is taken as an example to introduce the exhaust gas cooling device. However, the exhaust gas cooling device can also be applicable to other heating furnaces except the vertical furnace. The present utility model does not make specific limitations in this regard.

[0042] In this embodiment, as Figures 1 to 3 shown, the vertical furnace includes a cabinet body 101, furnace tubes 103, a sweeper 104, a wafer cassette 102, a loading chamber, a gas supply device, and an exhaust gas cooling device. Among them, the furnace tubes 103, the sweeper 104, the loading chamber, and the exhaust gas cooling device are all arranged inside the cabinet body 101 and are protected by the cabinet body 101. The wafer cassette 102 is arranged outside the cabinet body 101 and is used to accommodate wafers. The cabinet body 101 is divided into an upper cabinet body and a lower cabinet body. The main part of the exhaust gas cooling device and the furnace tubes 103 is located inside the upper cabinet body, and the loading chamber and the sweeper 104 are located inside the lower cabinet body. The exhaust gas cooling device can pump air and cool the inside of the sweeper 104 and the loading chamber, and the gas supply device can inflate the loading chamber, such as nitrogen, to maintain an appropriate air pressure and a low-oxygen environment inside the loading chamber to prevent the wafers inside the loading chamber from being oxidized and damaged.

[0043] Specifically, a water-cooled flange and a furnace door are arranged at the furnace mouth of the furnace tubes 103. The furnace door is used to seal the furnace mouth, and the water-cooled flange is used to control the temperature at the furnace mouth to protect structures such as the furnace door. The sweeper 104 has a cleaning chamber, and part of the structures of the water-cooled flange and the furnace door are located inside the cleaning chamber. Through the sweeper 104, it can prevent harmful gases from directly escaping between the furnace tubes 103 and the cabinet body 101 after leaking from the furnace mouth and further diffusing out of the cabinet body 101, causing environmental pollution and personal risks. When the furnace door is opened, the furnace mouth can be directly communicated with the loading chamber, so as to transfer wafers between the loading chamber and the furnace tubes 103. Since the furnace tubes 103, the sweeper 104, the wafer cassette 102, the loading chamber, and the gas supply device are all applied in the art, they will not be described in detail in the present utility model.

[0044] As Figure 2 , Figure 3As shown, the exhaust cooling device includes an exhaust structure 201, a first exhaust pipe 202, a second exhaust pipe 203 and a third exhaust pipe 204. The exhaust structure 201 is used to generate negative pressure, and the outlet ends of the first exhaust pipe 202, the second exhaust pipe 203 and the third exhaust pipe 204 are all connected to the exhaust structure 201. Under the action of negative pressure, the gas in the first exhaust pipe 202, the second exhaust pipe 203 and the third exhaust pipe 204 can all flow to the exhaust structure 201. The air inlet end of the first exhaust pipe 202 is connected to the loading chamber of the heating furnace, and the air inlet end of the second exhaust pipe 203 is also connected to the loading chamber of the heating furnace, both of which can achieve exhaust cooling of the loading chamber. The air inlet end of the third exhaust pipe 204 is connected to the cleaning chamber of the cleaner 104, which can not only achieve exhaust cooling, but also suck harmful gases to prevent them from escaping. Preferably, in this embodiment, the exhaust structure 201 is located outside the cabinet 101 to prevent vibration generated by the exhaust structure 201 from affecting the furnace tube 103 or the wafers in the loading chamber.

[0045] It should be noted that the second exhaust pipe 203 is also provided with a switch valve 301, a regulating valve 302 or an exhaust volume regulating structure, which can be used to extract air and cool down or stop extracting air and cooling down independently of the first exhaust pipe 202. In this way, by opening and closing the switch valve 301, or adjusting the regulating valve 302, or adjusting the exhaust volume regulating structure, the exhaust efficiency of the exhaust cooling device for the loading chamber can be changed, for example, a smaller exhaust efficiency and a larger exhaust efficiency are selected according to the temperature, thereby changing the exhaust cooling efficiency of the exhaust cooling device for the loading chamber.

[0046] When using the exhaust cooling device, for example, when the temperature in the loading chamber is slightly higher than the allowed temperature range, the loading chamber can be evacuated and cooled through the first exhaust pipe 202 while the second exhaust pipe 203 is closed, and the sweeper 104 can be evacuated and cooled through the third exhaust pipe 204. At this time, the exhaust efficiency of the first exhaust pipe 202 is low, and no large airflow and vibration will be formed in the loading chamber, thereby avoiding damage to the wafer, and also avoiding the vibration of some wafers to produce particles and further scratch other wafers or pollute the entire heat treatment process environment. In addition, since the heat in the sweeper 104 is constantly transferred with the exhaust, compared with the prior art, when the total amount of heat dissipated by the furnace tube 103 remains unchanged, the temperature of the sweeper 104 can be maintained at a lower level, so that the ability of the sweeper 104 to receive heat is enhanced and the ability to release heat is weakened, thereby reducing the part of the heat dissipated by the furnace tube 103 that can be transferred to the loading chamber, thereby reducing the heat received by the loading chamber, and cooperating with the exhaust cooling of the loading chamber, the temperature in the loading chamber can be better controlled.

[0047] When the temperature in the loading chamber is significantly higher than the allowed temperature range, the second exhaust pipe 203 can be opened, and at the same time, the loading chamber is evacuated and cooled through the first exhaust pipe 202 and the second exhaust pipe 203, and the sweeper 104 is evacuated and cooled through the third exhaust pipe 204. Of course, at this time, the evacuation efficiency of the loading chamber should not be too high, and large airflows and vibrations should also be avoided. At this time, the first exhaust pipe 202, the second exhaust pipe 203, and the third exhaust pipe 204 evacuate and cool simultaneously, which can quickly reduce the temperature in the loading chamber to the allowed temperature range, avoid damage to the devices in the loading chamber, maintain the normal operation of the vertical furnace, and also ensure the production cost and maintenance cost.

[0048] As Figure 2 , Figure 3 shown, the exhaust cooling device includes at least two third exhaust pipes 204. The sweeper 104 has a cleaning chamber, and the water-cooled flange and the furnace mouth of the heating furnace are located in the cleaning chamber. The cleaning chamber has at least two air extraction ports, and each air extraction port is correspondingly connected to a third exhaust pipe 204. The air extraction ports are arranged symmetrically about the axis of the furnace tube 103, so as to achieve uniform evacuation and cooling of the cleaning chamber. Of course, in some other embodiments, more third exhaust pipes 204 can also be provided. As long as the air extraction ports correspondingly connected to the multiple third exhaust pipes 204 are uniformly arranged in the circumferential direction of the cleaning chamber, the effect of uniform evacuation and cooling can also be achieved, which also belongs to the scope protected by the present invention.

[0049] Optionally, as Figure 3 , Figure 4 shown, in this embodiment, a wafer cassette 102 is provided outside the cabinet 101, and the wafer cassette 102 is used to accommodate wafers. The exhaust cooling device further includes a fourth exhaust pipe 205. The outlet end of the fourth exhaust pipe 205 is connected to the evacuation structure 201, and the inlet end of the fourth exhaust pipe 205 is connected to the wafer cassette 102. Through the fourth exhaust pipe 205, the inside of the wafer cassette 102 can be evacuated and deoxygenated, so as to avoid oxidation and contamination of the wafers.

[0050] Preferably, an oxygen analyzer 305 is further connected to the fourth exhaust pipe 205, and the oxygen analyzer 305 is used to detect the oxygen content in the fourth exhaust pipe 205. The wafer cassette 102 is connected to a gas supply device. When the oxygen analyzer 305 detects that the oxygen content in the fourth exhaust pipe 205 is relatively high, it means that the oxygen content in the wafer cassette 102 is also relatively high, resulting in a risk of oxidation and contamination of the wafers. At this time, nitrogen can be filled into the wafer cassette 102 through the gas supply device to protect the wafers.

[0051] As Figure 3 , Figure 4As shown in the figure, the exhaust gas cooling device further includes a duct structure 206, which is arranged in the cabinet body 101 of the heating furnace and is communicated with the air extraction structure 201. The duct structure 206 is provided with air inlet holes, and the air inlet holes are arranged facing the furnace tube 103 to extract air and cool the outer side of the furnace tube 103. When heat escapes from the furnace tube 103 and the temperature in the space between the furnace tube 103 and the cabinet body 101 rises, the duct structure 206 can extract air and cool this part of the space, and can also reduce the heat received by the loading chamber.

[0052] Preferably, as Figure 4 shown in the figure, the duct structure 206 includes a first air inlet plate and a second air inlet plate 2061. The first air inlet plate has air inlet holes, and the second air inlet plate 2061 can be used to control the flow rate through the air inlet holes, so as to change the efficiency of extracting air and cooling the above-mentioned part of the space through the duct structure 206.

[0053] Specifically, the second air inlet plate 2061 is provided with through holes 20611, and the second air inlet plate 2061 is slidably abutted against the first air inlet plate. During the relative sliding process, the center distance between the through holes 20611 and the air inlet holes will change, so that the shielding degree of the second air inlet plate 2061 on the air inlet holes changes. Exemplarily, as Figure 4 shown in the figure, when the second air inlet plate 2061 slides to make the through holes 20611 and the air inlet holes concentric, the air inlet holes can intake air with the maximum flow rate. When the second air inlet plate 2061 slides to increase the center distance between the air inlet holes and the through holes 20611, at least part of the air inlet holes will be blocked by the second air inlet plate 2061, and the air flow can only enter the air inlet holes through the remaining part, so that the actual flow rate of the air inlet holes is less than the above maximum flow rate. As the second air inlet plate 2061 continues to slide, when the air inlet holes are completely blocked by the second air inlet plate 2061, the duct structure 206 stops extracting air and cooling the outer side of the furnace tube 103. In actual use, the flow rate through the air inlet holes can be adaptively adjusted according to the temperature range on the outer side of the furnace tube 103 to achieve the effects of both extracting air and cooling and preventing vibration interference.

[0054] As Figure 4 shown in the figure, in this embodiment, the duct structure 206 is directly communicated with the air extraction structure 201, and the first exhaust pipe 202, the second exhaust pipe 203, the third exhaust pipe 204 and the fourth exhaust pipe 205 are communicated to the duct structure 206. At least one of the first exhaust pipe 202, the second exhaust pipe 203 and the third exhaust pipe 204 is provided with a switching valve 301, and the switching valve 301 is used to correspondingly control the on-off of the first exhaust pipe 202, the second exhaust pipe 203 or the third exhaust pipe 204.

[0055] Specifically, the switching valve 301 installed in the first exhaust pipe 202 can be used as a safety valve. Thus, in an emergency situation, for example, when the air pressure in the loading chamber is lower than the negative pressure generated by the air extraction structure 201, the first exhaust pipe 202 can be cut off emergently to prevent the airflow that may carry impurities from flowing backward into the loading chamber through the first exhaust pipe 202, causing pollution. Similarly, the switching valve 301 installed in the third exhaust pipe 204 can also be used as a safety valve to prevent the airflow in the third exhaust pipe 204 from flowing backward into the loading chamber through the air duct structure 206 and the first exhaust pipe 202 or the second exhaust pipe 203.

[0056] The switching valve 301 installed in the second exhaust pipe 203 can be used both as a safety valve and to adjust the air extraction efficiency of the exhaust cooling device for the loading chamber. For example, when the switching valve 301 is opened, the first exhaust pipe 202 and the second exhaust pipe 203 extract air from the loading chamber simultaneously, achieving air extraction and cooling with a larger air extraction efficiency, rapid cooling, or rapid air exchange to facilitate the entry of personnel. When the switching valve 301 is closed, only the first exhaust pipe 202 extracts air from the loading chamber, achieving air extraction and cooling with a smaller air extraction efficiency, so that the vibration generated during air extraction affects the wafers.

[0057] Furthermore, at least one of the first exhaust pipe 202, the second exhaust pipe 203, and the third exhaust pipe 204 is provided with a regulating valve 302, and the regulating valve 302 is used to correspondingly control the flow rate of the first exhaust pipe 202, the second exhaust pipe 203, or the third exhaust pipe 204. Exemplarily, the regulating valve 302 installed in the first exhaust pipe 202 can be used to adjust the rated flow rate through the first exhaust pipe 202 to avoid the vibration of the wafers in the loading chamber when exhausting only through the first exhaust pipe 202, and also facilitates the selection of the first exhaust pipe 202. The regulating valve 302 installed in the second exhaust pipe 203 can be used to adjust the rated flow rate through the second exhaust pipe 203, facilitating the selection of the second exhaust pipe 203 by designers, and can also be used to adjust the air extraction efficiency of the exhaust cooling device for the loading chamber. The regulating valve 302 installed in the third exhaust pipe 204 can be used to adjust the rated flow rate through the third exhaust pipe 204, facilitating the selection of the third exhaust pipe 204, and also facilitating the achievement of the same rated flow rate for multiple third exhaust pipes 204 when multiple third exhaust pipes 204 are provided, realizing uniform air extraction inside the cleaning chamber.

[0058] It should be noted that for some regulating valves 302 that can limit the minimum flow rate to 0, they can also be regarded as a kind of on-off valve 301. Therefore, taking the second exhaust pipe 203 as an example, either only one regulating valve 302 that can limit the minimum flow rate to 0 can be set, or both the on-off valve 301 and the regulating valve 302 (regardless of whether it can limit the minimum flow rate to 0) can be set at the same time. In this way, the air extraction and cooling efficiency of the loading chamber can be adjusted, and both are within the scope protected by the present utility model.

[0059] Continue to refer to Figure 4 As shown, in this embodiment, at least one of the first exhaust pipe 202, the second exhaust pipe 203, and the third exhaust pipe 204 is connected to a gas detector 304, and the gas detector 304 is used to detect the gas components in the first exhaust pipe 202, the second exhaust pipe 203, or the third exhaust pipe 204 correspondingly. Through the gas detector 304, it is possible to detect in a timely manner whether the reaction gas leaks. When it is detected that there are toxic and harmful reaction gases in the first exhaust pipe 202, it means that the furnace tube 103 or the furnace door leaks air, and timely maintenance is also required. Therefore, preferably, refer to Figure 4 As shown, the first exhaust pipe 202, the second exhaust pipe 203, the third exhaust pipe 204, and the air duct structure 206 are all connected to the gas detector 304.

[0060] Optionally, at least one of the first exhaust pipe 202, the second exhaust pipe 203, and the third exhaust pipe 204 is connected to a pressure detector 303, and the pressure detector 303 is used to detect the air pressure in the first exhaust pipe 202, the second exhaust pipe 203, or the third exhaust pipe 204 correspondingly. By detecting the air pressure, the direction of the air flow can be reflected. Exemplarily, when the air pressure in the first exhaust pipe 202 is higher than the air pressure in the loading chamber, it means that the air flow in the first exhaust pipe 202 flows into the loading chamber, which will easily lead to a pollution risk in the loading chamber. It is necessary to quickly reduce the air pressure in the first exhaust pipe 202 to change the air flow direction, or cut off the air flow in the first exhaust pipe 202, so as to avoid the further expansion of the pollution risk. Therefore, preferably, refer to Figure 4 As shown, the first exhaust pipe 202, the second exhaust pipe 203, the third exhaust pipe 204, and the air duct structure 206 are all connected to the pressure detector 303.

[0061] Furthermore, the air duct structure 206, the pressure detector 303, and the gas detector 304 are all arranged inside the cabinet 101 and are set away from the furnace tube 103 to avoid the devices such as the pressure detector 303 and the gas detector 304 being impacted by the thermal radiation of the furnace tube 103.

[0062] As Figure 5As shown in the figure, in this embodiment, the exhaust gas cooling device further includes an exhaust gas volume adjustment structure, which is installed on the top of the loading chamber and is communicatively connected to the second exhaust pipe 203. Through the exhaust gas volume adjustment structure, the air extraction and cooling efficiency of the exhaust gas cooling device for the loading chamber can also be adjusted.

[0063] Specifically, as Figures 6 to 8 shown, the exhaust gas volume adjustment structure includes a gas guide cover 401 and a partition plate 402. Among them, the gas guide cover 401 and the partition plate 402 are sealingly connected to form an air extraction chamber 4010. The gas guide cover 401 and / or the partition plate 402 are provided with a first opening, a second opening 4021, and a third opening 4022, and the first opening, the second opening 4021, and the third opening 4022 are connected through the air extraction chamber 4010. The first opening is communicatively connected to the intake end of the second exhaust pipe 203, and the opening size of the second opening 4021 is smaller than that of the third opening 4022. The second opening 4021 and the third opening 4022 are connectable to the loading chamber in a switchable manner, so that the loading chamber and the air extraction chamber 4010 have different connection states, and further the loading chamber and the second exhaust pipe 203 have different connection states.

[0064] The exhaust gas volume adjustment structure further includes a first cylinder 404, a first seal 405, a second cylinder 406, and a second seal 407. Among them, the first cylinder 404 is drivingly connected to the first seal 405 and can drive the first seal 405 to move, so as to seal and open the second opening 4021, making the second opening connectable to the loading chamber in a switchable manner. The second cylinder 406 is drivingly connected to the second seal 407 and can drive the second seal 407 to move, so as to seal and open the third opening 4022, making the third opening 4022 connectable to the loading chamber in a switchable manner. When the second opening 4021 and the third opening 4022 are in the open state, the second opening 4021 and the third opening 4022 can communicate with the loading chamber.

[0065] It can be understood that other structures can also be used to control the sealing and opening states of the second opening 4021 and the third opening 4022. For example, the first cylinder 404 can be set as a first electric push rod, and the second cylinder 406 can be set as a second electric push rod.

[0066] The exhaust gas volume adjustment structure has a first state, a second state, and a third state. In the first state, both the second opening 4021 and the third opening 4022 are isolated from the loading chamber, so that the exhaust gas cooling device only evacuates and cools the loading chamber through the first exhaust pipe 202; in the second state, the second opening 4021 is communicated with the loading chamber, and the third opening 4022 is isolated from the loading chamber, so that the exhaust gas cooling device evacuates and cools the loading chamber through the first exhaust pipe 202 and the second exhaust pipe 203; in the third state, the third opening 4022 is communicated with the loading chamber, and the second opening 4021 is isolated from the loading chamber, so that the exhaust gas cooling device evacuates and cools the loading chamber through the first exhaust pipe 202 and the second exhaust pipe 203, and the flow rate in the second exhaust pipe 203 is greater than that in the second state. In the first state, the second state, and the third state, the exhaust gas cooling device has different evacuation and cooling efficiencies for the loading chamber, so as to balance the efficiency of evacuation and cooling and the effect of preventing vibration.

[0067] Optionally, in some embodiments, the exhaust gas volume adjustment structure further has a fourth state. In the fourth state, both the second opening 4021 and the third opening 4022 are communicated with the loading chamber, so that the exhaust gas cooling device evacuates and cools the loading chamber through the first exhaust pipe 202 and the second exhaust pipe 203, and the flow rate in the second exhaust pipe 203 is greater than that in the third state. The fastest evacuation and cooling can be achieved in the fourth state, which can meet some specific situations, such as the ventilation requirement before personnel urgently need to enter the loading chamber, and reduce the ventilation waiting time.

[0068] In this embodiment, as Figure 8As shown in the figure, a connecting plate 403 is provided on the outer side of the air guide cover 401. The connecting plate 403 is used to install the first cylinder 404 and the second cylinder 406. The output shafts of the first cylinder 404 and the second cylinder 406 respectively pass through the connecting plate 403 and the air guide cover 401 and extend into the air extraction cavity 4010, and a first seal 405 and a second seal 407 are correspondingly installed. The first seal 405 and the second seal 407 have the same structure. Exemplarily, taking the second seal 407 as an example, the second seal 407 includes a first fixing member 4071, a sealing ring 4072 and a second fixing member 4073. The first fixing member 4071 is installed on the output shaft and is provided with a sealing groove. The sealing ring 4072 is embedded in the sealing groove. The second fixing member 4073 is fixedly installed on the first fixing member 4071 to further fix the sealing ring 4072. When the second seal 407 and the first seal 405 can abut against the partition plate 402 through the soft sealing ring 4072 to respectively seal the third opening 4022 and the second opening 4021, and can prevent the first fixing member 4071 from directly rubbing and colliding with the partition plate 402, avoiding the generation of debris and particulate matter, which is beneficial to maintaining the cleanliness of the loading chamber. It can be understood that in some other embodiments, the sealing ring 4072 can also be installed at the output ends of the first cylinder 404 and the second cylinder 406 through other installation methods or installation structures, and the sealing ring 4072 can be correspondingly abutted against the second opening 4021 and the third opening 4022 by the first cylinder 404 and the second cylinder 406 respectively to achieve sealing. Therefore, the specific structures of the first seal 405 and the second seal 407 in the present invention are not limited, as long as the sealing effect can be achieved, it belongs to the scope of protection of the present invention.

[0069] Of course, the sizes of the first fixing member 4071, the sealing ring 4072 and the second fixing member 4073 of the first seal 405 are smaller than those of the first fixing member 4071, the sealing ring 4072 and the second fixing member 4073 of the second seal 407 to respectively match and seal the second opening 4021 and the third opening 4022.

[0070] The second opening 4021 and the third opening 4022 are provided on the partition plate 402. When the third opening 4022 needs to be sealed, the output shaft of the second cylinder 406 moves, so that the second seal 407 moves towards the partition plate 402, and the sealing ring 4072 can abut against the peripheral part of the third opening 4022, thereby realizing the sealing of the third opening 4022. The first seal 405 is similar to the second seal 407, and the process of closing the second opening 4021 is also relatively similar, so it will not be repeated in the present invention.

[0071] Optionally, in this embodiment, the intake end of the first exhaust pipe 202 is also fixed to the air guide cover 401 and directly communicates with the loading chamber to achieve fixation and prevent the first exhaust pipe 202 from vibrating.

[0072] The present invention also provides a heating furnace, which includes a sweeper 104, a loading chamber, and the above-mentioned exhaust gas cooling device. The exhaust gas cooling device can extract air and cool the inside of the sweeper 104 and the loading chamber, so that less heat that can be transferred to the loading chamber among the heat dissipated by the furnace tube 103 is reduced, and thus the heat received by the loading chamber is reduced. Coupled with the extraction and cooling of the loading chamber, the temperature inside the loading chamber can be better controlled, preventing the components inside the loading chamber from being damaged by high temperature, and ensuring the normal operation and service life of the heating furnace. At the same time, the loading chamber can be selectively evacuated and cooled with smaller and larger air extraction efficiencies. The smaller air extraction efficiency will not form large airflows and vibrations in the loading chamber, thus avoiding damage to the wafers. It can also prevent some wafers from vibrating to generate particles and further scratch other wafers or contaminate the entire heat treatment process environment. The larger air extraction efficiency can better control the temperature inside the loading chamber.

[0073] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Exhaust gas cooling device, installed in the heating furnace, characterized in that: include: An air pumping structure, wherein the air pumping structure is used to generate negative pressure; a first exhaust pipe, wherein an air outlet end of the first exhaust pipe is connected to the air extraction structure, and an air inlet end of the first exhaust pipe is connected to the loading chamber of the heating furnace; a second exhaust pipe, wherein the air outlet end of the second exhaust pipe is connected to the air extraction structure, the air inlet end of the second exhaust pipe is connected to the loading chamber of the heating furnace, and the second exhaust pipe is used to change the air extraction and cooling efficiency of the exhaust cooling device on the loading chamber; A third exhaust pipe, wherein the air outlet end of the third exhaust pipe is connected to the air extraction structure, and the air inlet end of the third exhaust pipe is connected to the cleaning chamber of the heating furnace.

2. The exhaust gas cooling device according to claim 1, characterized in that: At least one of the first exhaust pipe, the second exhaust pipe and the third exhaust pipe is provided with a switch valve, and the switch valve is used to control the opening and closing of the first exhaust pipe, the second exhaust pipe or the third exhaust pipe accordingly; and / or, At least one of the first exhaust pipe, the second exhaust pipe and the third exhaust pipe is provided with a regulating valve, and the regulating valve is used to correspondingly control the flow of the first exhaust pipe, the second exhaust pipe or the third exhaust pipe; and / or, At least one of the first exhaust pipe, the second exhaust pipe and the third exhaust pipe is connected to a gas detector, and the gas detector is used to detect the gas components in the first exhaust pipe, the second exhaust pipe or the third exhaust pipe respectively; and / or, At least one of the first exhaust pipe, the second exhaust pipe and the third exhaust pipe is connected to a pressure detector, and the pressure detector is used to detect the air pressure in the first exhaust pipe, the second exhaust pipe or the third exhaust pipe accordingly.

3. The exhaust gas cooling device according to claim 1 or 2, characterized in that: The exhaust gas cooling device also includes an exhaust volume regulating structure, which has a first opening, a second opening and a third opening that are connected to each other. The first opening is connected to the intake end of the second exhaust pipe, and the opening size of the second opening is smaller than the opening size of the third opening. The second opening and / or the third opening can be connected to the loading chamber in an on-off manner.

4. The exhaust gas cooling device according to claim 3, characterized in that: The exhaust volume regulating structure has a first state, a second state, a third state and a fourth state. In the first state, the second opening and the third opening are both isolated from the loading chamber. In the second state, the second opening is connected to the loading chamber, and the third opening is isolated from the loading chamber. In the third state, the third opening is connected to the loading chamber, and the second opening is isolated from the loading chamber. In the fourth state, the second opening and the third opening are both connected to the loading chamber. In the first state, the second state, the third state and the fourth state, the exhaust cooling device has different exhaust cooling efficiencies for the loading chamber.

5. The exhaust gas cooling device according to claim 3, characterized in that: The exhaust volume regulating structure comprises an air guide cover, a partition, a first cylinder and a second cylinder, wherein the air guide cover and the partition define an air extraction cavity, the first opening, the second opening and the third opening are arranged on the air guide cover and / or the partition, and are connected through the air extraction cavity, the output end of the first cylinder is provided with a first seal, and the output end of the second cylinder is provided with a second seal, The first cylinder can move the first seal to block or open the second opening, and the second cylinder can move the second seal to block or open the third opening.

6. The exhaust gas cooling device according to claim 1, characterized in that: The exhaust cooling device includes at least two third exhaust pipes, the water-cooling flange and the furnace mouth of the heating furnace are located in the cleaning chamber, the cleaning chamber has at least two exhaust ports, each of the exhaust ports is connected to a corresponding third exhaust pipe, and the exhaust ports are symmetrically arranged about the axis center of the furnace tube of the heating furnace.

7. The exhaust gas cooling device according to claim 1, characterized in that: The exhaust cooling device also includes an air duct structure, which is arranged in the cabinet of the heating furnace and is connected to the exhaust structure. The air duct structure is provided with an air inlet, and the air inlet is arranged toward the furnace tube of the heating furnace to exhaust and cool the outside of the furnace tube.

8. The exhaust gas cooling device according to claim 7, characterized in that: The air duct structure includes a first air intake plate and a second air intake plate, the first air intake plate has an air intake hole, the second air intake plate is provided with a through hole, the second air intake plate is arranged to slide relative to the first air intake plate, and the second air intake plate slides relative to the first air intake plate to adjust the overlapping area of ​​the air intake hole and the through hole, thereby changing the flow rate entering the air intake hole.

9. The exhaust gas cooling device according to claim 1, characterized in that: The exhaust and temperature-reducing device further comprises a fourth exhaust pipe, the outlet end of the fourth exhaust pipe is connected to the air extraction structure, and the inlet end of the fourth exhaust pipe is connected to the wafer box; The fourth exhaust pipe is also connected to an oxygen analyzer, and the oxygen analyzer is used to detect the oxygen content in the fourth exhaust pipe.

10. A heating furnace, characterized in that: It comprises a sweeper, a loading chamber and an exhaust gas cooling device as described in any one of claims 1 to 9, wherein the exhaust gas cooling device is used to extract air and cool the inside of the sweeper and the loading chamber.

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