Cavity structure of glass substrate etching machine

Abstract

The glass substrate etching machine chamber structure provided by the utility model comprises the PC chamber body, the window structures and the sensor assemblies, the window structures are uniformly arranged on the PC chamber body, the sensor assemblies are arranged in the window structures, the window structures can prevent external light from influencing the sensor assemblies and the etching machine, and the etching efficiency is improved. According to the cavity structure of the glass substrate etching machine, the sensor assembly can detect the state of the glass substrate in the PC cavity body in time, the broken glass substrate can be recognized in time, and therefore continuous breaking is avoided, the carrying state of the glass substrate in the PC cavity can be monitored, the working efficiency is improved, and the working efficiency is improved. Whether the glass substrate in the PC cavity is broken or not can be found in time, continuous breaking can be avoided, and the production cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the field of glass substrate production. Specifically, the utility model relates to a chamber structure of a glass substrate etching machine. Background Art

[0002] With the rapid development of the chip industry, it is very important to confirm the state of the glass substrate during handling in vacuum equipment. If a fragment occurs and is not detected in time, it will cause multiple glass substrates to fragment, resulting in an increase in production costs. In a G3.5 dry etching machine, only the loadlock2 chamber monitors the state of the glass substrate. When the glass enters the loadlock1 chamber and then enters the PC chamber, there is no monitoring of the state of the glass substrate during the process of returning along the original path after the process in the PC chamber is completed. If a fragment occurs during this process, an alarm will only be triggered when it is transported to the loadlock1 chamber. The machine will continue to transport substrates inward during this process, which will cause the remaining substrates to collide with the fragments, resulting in an increase in production costs.

[0003] To solve the above problems, Patent Document CN202626022U discloses a physical tempering furnace for glass substrates, and its structure includes: a glass heating chamber, a cooling chamber, and a drying chamber arranged in sequence from the inlet to the outlet, and a glass conveying mechanism arranged in the furnace. The key lies in that: the cooling chamber includes a rapid cooling area, a slow cooling area, and a spray cooling area formed by means of two partition plates and respectively provided with cooling mechanisms, but it cannot solve the above problems. Summary of the Utility Model

[0004] The utility model is made to solve the above problems, and its purpose is to provide a chamber structure of a glass substrate etching machine that can monitor the handling state of the glass substrate in the PC chamber, can timely detect whether the glass substrate in the PC chamber is fragmented, and can reduce production costs. To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0005] The utility model provides a chamber structure of a glass substrate etching machine, which has the following characteristics: it includes a PC chamber body, a window structure, and a sensor assembly. The window structure is uniformly arranged on the PC chamber body, and the sensor assembly is arranged in the window structure.

[0006] In the chamber structure of the glass substrate etching machine provided by the utility model, it may also have the following characteristics: the window structure includes a first square frame, a quartz plate, a second square frame, and a light-shielding cover. The second square frame is provided with a groove adapted to the quartz plate, and the quartz plate is embedded in the groove. The first square frame is arranged on the side of the quartz plate away from the second square frame, and the light-shielding cover is arranged on the second square frame.

[0007] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: a screen window frame is provided on the side of the second square frame away from the light-shielding cover, and the first square frame and the quartz plate are arranged between the screen window frame and the second square frame.

[0008] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: a first threaded hole is provided on the second square frame, a second threaded hole adapted to the first threaded hole is provided on the screen window frame, the window structure further includes a connecting rod, one end of the connecting rod is provided with a screw rod, and the screw rod is adapted to the first threaded hole and the second threaded hole, and the screw rod is inserted into the first threaded hole and the second threaded hole.

[0009] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: a third threaded hole is provided at the end of the connecting rod away from the second square frame, a through hole adapted to the third threaded hole is provided on the light-shielding cover, a screw is inserted into the through hole, and the screw is screwed into the third threaded hole.

[0010] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: a mounting hole is provided on the light-shielding cover, and the sensor assembly is arranged on the light-shielding cover.

[0011] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: the sensor assembly includes a transmitting light source and an optical sensor.

[0012] In the chamber structure of the glass substrate etching machine provided by the present utility model, it may further have the following feature: the window structures are respectively arranged on both sides of the PC chamber body, and the transmitting light source and the optical sensor are respectively arranged in the window structures on both sides of the PC chamber body.

[0013] The technical effect of the present utility model is that the chamber structure of the glass substrate etching machine provided by the present utility model includes a PC chamber body, a window structure and a sensor assembly. The window structures are uniformly arranged on the PC chamber body, and the sensor assembly is arranged in the window structure. The window structure can prevent external light from affecting the sensor assembly and the etching machine. The sensor assembly can timely detect the state of the glass substrate in the PC chamber body, and can timely identify the glass substrate with broken pieces, thereby avoiding continuous broken pieces.

[0014] Therefore, the chamber structure of the glass substrate etching machine provided by the present utility model can monitor the handling state of the glass substrate in the PC chamber, can timely detect whether the glass substrate in the PC chamber is broken, can avoid continuous broken pieces, and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] This specification includes the following drawings, and the shown contents are respectively:

[0016] Figure 1 It is a schematic structural diagram of the chamber structure of a glass substrate etching machine in an embodiment of the present utility model;

[0017] Figure 2 It is a schematic structural diagram of the window structure in an embodiment of the present utility model Figure 1 ;

[0018] Figure 3 It is a schematic structural diagram of the window structure in an embodiment of the present utility model Figure 2 .

[0019] The markings in the figure are: 10 - PC chamber body, 11 - window mounting hole, 20 - window structure, 21 - first square frame, 22 - quartz plate, 23 - second square frame, 231 - groove, 232 - first threaded hole, 24 - light shield, 241 - through hole, 242 - mounting hole, 25 - screen window frame, 251 - second threaded hole, 26 - connecting rod, 261 - screw rod, 262 - third threaded hole, 27 - screw, 30 - sensor assembly. Specific embodiments

[0020] Next, with reference to the accompanying drawings, through the description of the embodiments, the specific embodiments of the present invention will be further described in detail. The purpose is to help those skilled in the art have a more complete, accurate and in - depth understanding of the inventive concept and technical solution of the present invention, and to facilitate its implementation.

[0021] Figure 1 It is a schematic structural diagram of the chamber structure of a glass substrate etching machine in an embodiment of the present utility model;

[0022] As Figure 1 shown, the chamber structure of the glass substrate etching machine provided by the present utility model includes a PC chamber body 10, a window structure 20 and a sensor assembly 30. The window structure 20 is uniformly arranged on the PC chamber body 10, and the sensor assembly 30 is arranged in the window structure 20. The window structure 20 can prevent external light from affecting the sensor assembly 30 and the etching machine. The sensor assembly 30 can timely detect the state of the glass substrate in the PC chamber body 10, and can timely identify the broken glass substrate, thereby avoiding continuous breakage.

[0023] The PC chamber body 10 is in a cuboid shape, with a glass substrate inlet and a glass substrate outlet respectively provided on the front and rear sides, and window mounting holes 11 are provided on both the left and right sides. The window mounting holes 11 are uniformly distributed on both the left and right sides of the PC chamber body 10. The four window mounting holes 11 are grouped in pairs, and the two window mounting holes 11 in each group are respectively arranged on the left and right sides of the PC chamber body 10 and are in the same position.

[0024] Figure 2 It is a schematic structural diagram of the window structure in an embodiment of the present utility modelFigure 1 ; Figure 3 is a schematic diagram of the window structure in the embodiment of the present utility model Figure 2 .

[0025] As Figure 2 and Figure 3 shown, the window structure 20 is arranged in the window mounting hole 11. The window structure 20 includes a first square frame 21, a quartz plate 22, a second square frame 23 and a light-shielding cover 24. A groove 231 adapted to the quartz plate 22 is provided on the second square frame 23. The quartz plate 22 is embedded in the groove 231 and clamped in the groove 231. The first square frame 21 is arranged on the side of the quartz plate 22 away from the second square frame 23, and the light-shielding cover 24 is arranged on the second square frame 23. The shape and size of the second square frame 23 are adapted to the shape and size of the window mounting hole 11, so that the second square frame 23 is installed in the window mounting hole 11. A sealant is also provided between the second square frame 23 and the window mounting hole 11 to prevent the window structure 20 from affecting the airtightness in the PC chamber body 10 and ensure the normal operation of the other devices in the PC chamber body 10.

[0026] A window screen frame 25 is provided on the side of the second square frame 23 away from the light-shielding cover 24. The first square frame 21 and the quartz plate 22 are arranged between the window screen frame 25 and the second square frame 23, so as to press the first square frame 21 and the quartz plate 22 in the groove 231 and prevent the quartz plate 22 from loosening and interfering with the operation of the sensor assembly 30.

[0027] A first threaded hole 232 is provided on the second square frame 23, and a second threaded hole 251 adapted to the first threaded hole 232 is provided on the window screen frame 25. The window structure 20 further includes a connecting rod 26. One end of the connecting rod 26 is provided with a screw rod 261. The screw rod 261 is adapted to the first threaded hole 232 and the second threaded hole 251. The screw rod 261 is inserted into the first threaded hole 232 and the second threaded hole 251 to connect the second square frame 23 and the window screen frame 25, tighten the first square frame 21 and the quartz plate 22, and prevent the quartz plate 22 from loosening.

[0028] A third threaded hole 262 is provided at the end of the connecting rod 26 away from the second square frame 23, and a through hole 241 adapted to the third threaded hole 262 is provided on the light-shielding cover 24. The length of the connecting rod 26 is adapted to the length of the light-shielding cover 24 in the direction perpendicular to the second square frame 23. A screw 27 is inserted into the through hole 241. The screw 27 passes through the through hole 241 and is screwed into the third threaded hole 262, so as to install the light-shielding cover 24 on the second square frame 23 through the connecting rod 26. The light-shielding cover 24 can prevent external light from affecting the sensor assembly 30 and the inside of the etching machine.

[0029] The light shield 24 is provided with mounting holes 242, and the sensor assembly 30 is mounted on the light shield 24 through the mounting holes 242. The sensor assembly 30 includes an emission light source and an optical sensor. The two emission light sources are respectively arranged in two window structures 20 on one side of the PC chamber body 10, and the two optical sensors are respectively arranged in two window structures 20 on the other side of the PC chamber body. The detection light source emitted by the emission light source sequentially passes through the quartz plate 22 and the glass substrate, and finally reaches the optical sensor. If the glass substrate is broken, the optical sensor cannot receive the detection light source emitted by the emission light source, and then the optical sensor emits an alarm signal, which can timely detect whether the glass substrate is broken and avoid the occurrence of continuous breakage.

[0030] Functions and effects of the embodiment

[0031] The chamber structure of the glass substrate etching machine provided by the present invention includes a PC chamber body 10, window structures 20 and a sensor assembly 30. The window structures 20 are uniformly arranged on the PC chamber body 10, and the sensor assembly 30 is arranged in the window structures 20. The window structures 20 can prevent external light from affecting the sensor assembly 30 and the etching machine. The sensor assembly 30 can timely detect the state of the glass substrate in the PC chamber body 10, and can timely identify the broken glass substrate, thereby avoiding continuous breakage. The chamber structure of the glass substrate etching machine provided by the present invention can monitor the handling state of the glass substrate in the PC chamber, can timely detect whether the glass substrate in the PC chamber is broken, can avoid continuous breakage, and reduce production costs.

[0032] The present invention has been described exemplarily in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above methods. As long as various non-substantive improvements are made by adopting the method concept and technical solution of the present invention; or without improvement, the above concept and technical solution of the present invention are directly applied to other occasions, they are all within the protection scope of the present invention.

Claims

1. A glass substrate etching machine chamber structure, characterized in that: The invention comprises a PC chamber body (10), a window structure (20) and a sensor assembly (30), wherein the window structure (20) is evenly arranged on the PC chamber body (10), and the sensor assembly (30) is arranged in the window structure (20). The window structure (20) comprises a first square frame (21), a quartz plate (22), a second square frame (23) and a light shield (24); the second square frame (23) is provided with a groove (231) adapted to the quartz plate (22); the quartz plate (22) is embedded in the groove (231); the first square frame (21) is arranged on a side of the quartz plate (22) away from the second square frame (23); and the light shield (24) is arranged on the second square frame (23).

2. The glass substrate etching machine chamber structure according to claim 1, characterized in that: A screen frame (25) is provided on a side of the second frame (23) away from the light shield (24), and the first frame (21) and the quartz plate (22) are arranged between the screen frame (25) and the second frame (23).

3. The glass substrate etching machine chamber structure according to claim 2, characterized in that: The second square frame (23) is provided with a first threaded hole (232), and the screen window frame (25) is provided with a second threaded hole (251) matched with the first threaded hole (232). The window structure (20) further includes a connecting rod (26), and one end of the connecting rod (26) is provided with a screw rod (261), and the screw rod (261) is matched with the first threaded hole (232) and the second threaded hole (251), and the screw rod (261) is inserted into the first threaded hole (232) and the second threaded hole (251).

4. The glass substrate etching machine chamber structure according to claim 3, characterized in that: A third threaded hole (262) is provided at one end of the connecting rod (26) away from the second square frame (23); a through hole (241) matching the third threaded hole (262) is provided on the light shield (24); a screw (27) is passed through the through hole (241); and the screw (27) is screwed into the third threaded hole (262).

5. The glass substrate etching machine chamber structure according to claim 4, characterized in that: The light shield (24) is provided with a mounting hole (242), and the sensor assembly (30) is arranged on the light shield (24).

6. The glass substrate etching machine chamber structure according to claim 5, characterized in that: The sensor assembly (30) includes an emitting light source and an optical sensor.

7. The glass substrate etching machine chamber structure according to claim 6, characterized in that: The window structures (20) are respectively arranged on both sides of the PC chamber body (10), and the emitting light sources and the optical sensors are respectively arranged in the window structures (20) on both sides of the PC chamber body (10).

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