Position correction jig for transmission device
By designing a transmission device position correction fixture with reference objects, the problem of insufficient position correction accuracy of the transmission device caused by the lack of reference objects in semiconductor processing is solved, and higher position accuracy and faster adjustment time are achieved, and processing quality and production efficiency are improved.
Patent Information
- Application Number
- CN202421418104.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-20
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-06-20
AI Technical Summary
In semiconductor processing technology, equipment lacking reference objects (such as cooling chambers) has poor accuracy during the position correction process of the transmission device, resulting in transmission errors and affecting processing quality and yield.
A transmission device position correction fixture is designed, including a correction seat and a plurality of bearing units. Each bearing unit is provided with a bearing surface for carrying the wafer, and a reference object, such as a scale, is provided on the bearing surface to calibrate the position of the wafer, thereby realizing precise position correction of the transmission device.
Through this correction fixture, the time for position adjustment of the transmission device can be greatly reduced, the machine's return line production efficiency can be improved, the position adjustment process can be simplified, the experience threshold can be reduced, and the position accuracy of the transmission device can be improved, and the product scrapping rate can be reduced.
Smart Images
Figure CN222980473U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a position correction fixture for a transfer device. Background Art
[0002] In semiconductor processing technology, it is usually necessary to use a transfer device to transfer components. For example, in the wafer heating process, it is necessary to transfer the wafer to the heating chamber by a robotic arm; in the wafer cooling process, it is necessary to transfer the wafer to the cooling chamber.
[0003] The position accuracy of the robotic arm directly affects the transfer accuracy of the device, and the transfer accuracy often affects the processing technology of the components, thereby affecting the processing quality and the processing yield. Therefore, it is necessary to regularly correct the position of the transfer device.
[0004] For some process equipment, there are pins (PINs) inside that carry components, and these pins can be used as references for the position correction of the transfer device. However, for some process equipment (such as a cooling chamber), there are no pins or other similar references inside. During the position correction process of the transfer device for such equipment, the transfer device mainly transfers a dummy wafer to a rough position, then visually observes the position of the dummy wafer in the chamber, and then adjusts the position of the transfer device based on experience to achieve the position correction of the transfer device. This correction method has poor accuracy and insufficient accuracy.
[0005] Therefore, the utility model provides a position correction fixture for a transfer device, which can be used as a reference for the transfer device for position correction. Summary of the Utility Model
[0006] The purpose of the utility model is to provide a position correction fixture for a transfer device. A carrying unit is arranged on the fixture, and a reference object is arranged on the carrying unit for calibrating the position of the components on the transfer device, thereby realizing the position correction of the transfer device.
[0007] The utility model provides a position correction fixture for a transfer device, including: a correction base and a plurality of carrying units;
[0008] Each of the carrying units is arranged on the correction base. The carrying unit has a carrying surface for carrying a wafer, and a reference object is arranged on the carrying surface.
[0009] Optionally, the reference object is a scale arranged on the carrying surface.
[0010] Optionally, a storage groove is arranged on the correction base. The carrying unit is movably arranged on the correction base. When the carrying unit moves relative to the correction base, it at least has a storage state and a carrying state;
[0011] When the carrying unit is in the storage state, the carrying unit is located in the storage groove; when the carrying unit is in the carrying state, the carrying surface of the carrying unit is located outside the storage groove.
[0012] Optionally, when each of the carrying units is in the carrying state, the carrying surfaces of the carrying units are coplanar.
[0013] Optionally, one end of the carrying unit is rotatably installed in the storage groove, and when the carrying unit rotates relative to the storage groove, the storage state and the carrying state are formed.
[0014] Optionally, the carrying unit includes a first carrying member and a second carrying member connected to each other, the carrying surface is arranged on the second carrying member, and when the carrying unit is in the carrying state, the first carrying member and the second carrying member are arranged at an angle.
[0015] Optionally, the transmission device position correction jig further includes a first locking member and a second locking member. The first locking member is arranged on the carrying unit, and the second locking member is arranged in the storage groove. When the carrying unit is in the storage state, the first locking member and the second locking member are connected to lock the carrying unit.
[0016] Optionally, both the first locking member and the second locking member are magnetic members.
[0017] Optionally, the second carrying member is rotatably arranged on the first carrying member, and the first carrying member is movably arranged on the correction base.
[0018] Optionally, the transmission device position correction jig further includes a stopper, the stopper is arranged in the storage groove, and when the carrying unit is in the storage state, the first carrying member and / or the second carrying member is supported by the stopper.
[0019] In summary, the transmission device position correction jig includes: a correction base and a plurality of carrying units; each of the carrying units is arranged on the correction base, the carrying unit has a carrying surface for carrying a wafer, and a reference object is arranged on the carrying surface.
[0020] With such a configuration, the above-mentioned transmission device position correction jig can be flexibly placed on the machine tool equipment, and a scheme for quantitatively adjusting the position of the transmission device can be provided on the machine tool equipment without a reference object, making the transmission position of the transmission device more standard, enabling the machine tool equipment to be suitable for the transmission of more products, and reducing the scrap rate of products in production.
[0021] The above-mentioned transmission device position correction jig can greatly reduce the position adjustment time of the transmission device, which is beneficial to making the machine return to production faster, and simplifies the position adjustment process, effectively reducing the experience threshold for adjusting the transmission device. Brief Description of the Drawings
[0022] Figure 1 FIG. is a schematic structural diagram of a transmission device position correction jig according to an embodiment of the present invention;
[0023] Figure 2 FIG. is a schematic structural diagram of a carrier unit according to an embodiment of the present invention;
[0024] Figure 3 FIG. is a schematic structural diagram of a carrier unit according to another embodiment of the present invention.
[0025] Among them, in the drawings:
[0026] 10 - calibration base; 11 - storage groove;
[0027] 20 - carrier unit; 201 - carrier surface; 202 - first carrier member; 203 - second carrier member; 204 - first rotating shaft; 205 - second rotating shaft; 206 - first connection hole; 207 - second connection hole; 208 - slot; 209 - plug;
[0028] 21 - first carrier unit; 22 - second carrier unit; 23 - third carrier unit; 24 - fourth carrier unit;
[0029] 30 - first locking member;
[0030] 40 - second locking member;
[0031] 50 - stop block. Detailed Embodiment
[0032] The following further details the transmission device position correction jig proposed by the present invention in conjunction with the drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise scales, only for the purpose of facilitating and clearly assisting in explaining the embodiments of the present invention.
[0033] As used in the present utility model, the singular forms "a", "an" and "the" include plural objects. The term "or" is generally used in the sense of including "and / or". The term "several" is generally used in the sense of including "at least one". The term "at least two" or "multiple" is generally used in the sense of including "two or more". In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features. In addition, as used in the present utility model, "mounted", "connected", "coupled", an element "disposed" on another element should be understood in a broad sense, generally only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate element, and cannot be construed as indicating or implying the spatial position relationship between the two elements, that is, an element can be in any position such as inside, outside, above, below or on one side of another element, unless otherwise explicitly stated in the content. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as shown in the figures, and the upward or upward direction faces the top of the corresponding figure, and the downward or downward direction faces the bottom of the corresponding figure.
[0034] In this embodiment, taking the cooling chamber of some semiconductor devices as an example, the use process of the transmission device position correction jig is described.
[0035] Generally, the pins of the cooling chamber are on the lid. Opening the lid will result in no reference object in the cooling chamber, and the position of the transmission device can only be adjusted visually and by experience. Due to the inaccuracy of visual inspection and the narrow operation space, it is substantially difficult to determine the accuracy of the horizontal position of the transmission device. Moreover, there is generally a transmission error of 1-2 mm in the transmission of the transmission device. Under the superposition effect, the position deviation of the wafers transmitted by the transmission device will be relatively large, which easily causes the wafers to slip and break, thus damaging the machine environment and the sealing performance of the cooling chamber.
[0036] Please refer to Figure 1 As shown, this embodiment provides a transmission device position correction jig, including: a correction base 10 and four bearing units 20;
[0037] Among them, the correction base 10 is disc-shaped and made of aluminum alloy, and the bearing unit 20 is disposed at an axial end of the correction base 10.
[0038] The carrying unit 20 has a carrying surface 201 for carrying a wafer, and a reference object is disposed on the carrying surface 201 .
[0039] like Figure 1 As shown, the bearing unit 20 stands upright along the axial direction of the calibration seat 10, and the bearing surface 201 is perpendicular to the axial direction of the bearing unit 20. In actual use, the calibration seat 10 is horizontally placed at the transmission target position and positioned, and the axial direction of the bearing unit 20 extends vertically, and the bearing surface 201 is horizontal.
[0040] In this embodiment, the preferred reference object is a scale set on the carrying surface 201. The four carrying units 20 are used to carry the wafers transmitted by the transmission device, and the scale is used to calibrate the position of the wafer, thereby correcting the position of the transmission device. The scale unit can be determined based on the actual transmission accuracy requirements of the transmission device. Generally, the scale unit should be less than 1mm. For example, the scale unit is set to 0.5mm. By verifying the setting of the scale unit, it is conducive to more accurate realization of the position adjustment of the transmission device.
[0041] In other alternative embodiments, the reference object may be a color mark painted on the carrying surface 201 or a protrusion or groove structure provided on the carrying surface 201. For example, a protrusion structure is provided on the carrying surface 201, and the position of the wafer is calibrated by comparing the protrusion structure with the edge position of the wafer, and then used to calibrate the position of the transmission device.
[0042] like Figure 1 As shown, in this embodiment, the four bearing units 20 are respectively the first bearing unit 21, the second bearing unit 22, the third bearing unit 23 and the fourth bearing unit 24. The first bearing unit 21 and the second bearing unit 22 are grouped together, and the third bearing unit 23 and the fourth bearing unit 24 are grouped together. Therefore, each bearing unit is divided into two groups, and the two groups of bearing units are evenly arranged on the correction seat 10 around the first reference line. The first reference line passes through the correction seat 10. The first reference line here is a virtual line drawn to more clearly describe the bearing unit 20. The distance between each bearing unit 20 can be set based on the size of the components to be carried.
[0043] In this embodiment, since the calibration seat 10 is disc-shaped, the central axis of the calibration seat 10 is preferably collinear with the first reference line, that is, the first reference line is actually the central axis of the calibration seat 10. At this time, each group of bearing units is evenly distributed along the circumference of the calibration seat 10, which can form a better reference effect for the transmission device.
[0044] In this embodiment, two sets of four bearing units 20 are provided. In other alternative embodiments, two, three or more bearing units 20 may be provided. At the same time, based on their bearing and calibration requirements, the bearing units 20 can be grouped flexibly, for example, divided into three groups or more groups.
[0045] In this embodiment, the calibration base 10 is adapted to the shape of the wafer and is set to be disc-shaped. In other embodiments, the calibration base 10 may be square or other shapes. At this time, the first reference line may coincide with the geometric center of the calibration base 10, or the position of the first reference line can be determined flexibly based on the usage requirements.
[0046] In this embodiment, the two sets of bearing units are symmetrically distributed centered on the central axis of the calibration base 10. In other alternative embodiments, when the number of groups of bearing units is odd, each group of bearing units can be rotationally symmetrically distributed around the central axis of the calibration base 10. This distribution method is more suitable for the position calibration of a transmission device for transmitting circular components. Based on the different shapes of the transmitted components, each bearing unit can also flexibly adjust its distribution form.
[0047] Please continue to refer to Figure 1 and Figure 2 As shown in, a receiving groove 11 is provided on the calibration base 10, and the bearing unit 20 is movably arranged on the calibration base 10. When the bearing unit 20 moves relative to the calibration base 10, it at least has a receiving state and a bearing state;
[0048] When the bearing unit 20 is in the receiving state, the bearing unit 20 is located in the receiving groove 11;
[0049] When the bearing unit 20 is in the bearing state, the bearing surface 201 of the bearing unit 20 is located outside the receiving groove 11. Figure 1 The attitude of the bearing unit 20 in corresponds to the bearing state. When each bearing unit 20 is in the bearing state, the bearing surfaces 201 of each bearing unit 20 are coplanar, so that the transmitted wafer can be horizontally placed on the four bearing surfaces 201, and the position of the wafer is calibrated by the scales on the four bearing surfaces 201.
[0050] Please refer to Figure 1 As shown in, in this embodiment, the receiving groove 11 is opened at the edge of the calibration base 10, and the receiving groove 11 penetrates through the outer peripheral surface and the axial two end surfaces of the calibration base 10.
[0051] As Figure 2 shown, the bearing unit 20 includes a connected first bearing member 202 and a second bearing member 203. One end of the first bearing member 202 ( Figure 2The lower end of the first carrier 202 is rotatably mounted in the receiving groove 11 through the first rotating shaft 204, and the other end of the first carrier 202 ( Figure 2 The upper end of the first carrier 202) is rotatably connected to one end of the second carrier 203 through the second rotating shaft 205. Therefore, the carrying unit 20 rotates relative to the calibration base 10, and the second carrier 203 can rotate relative to the first carrier 202. One side wall of the second carrier 203 serves as the carrying surface 201.
[0052] Figure 2 In the figure, the second carrier 203 rotates with the first carrier 202 to the outside of the receiving groove 11, forming a carrying state. At this time, the first carrier 202 is in an upright state, and the second carrier 203 abuts against the upper end surface of the first carrier 202 and is in a horizontal state. The two are perpendicular to each other. At this time, the carrying surface 201 faces upward and is horizontal.
[0053] Please continue to refer to Figure 2 As shown in the figure, the thickness of the second carrier 203 is less than the thickness of the first carrier 202. When the second carrier 203 rotates counterclockwise relative to the first carrier 202 to an upright state, the first carrier 202 and the second carrier 203 form a stepped straight arm structure at this time. Subsequently, the first carrier 202 rotates clockwise relative to the receiving groove 11 so that the first carrier 202 and the second carrier 203 rotate into the receiving groove 11 to form a receiving state.
[0054] To ensure the attitude stability of the carrying unit 20 in the receiving state, a first locking member 30 and a second locking member 40 are added in this embodiment. At the same time, in order to adapt to the stepped straight arm structure of the first carrier 202 and the second carrier 203, a stopper 50 is also added.
[0055] Please continue to refer to Figure 2As shown in the figure, the stopper 50 is arranged on one side of the storage groove 11 close to the center of the calibration seat 10. The shape of the stopper 50 is adapted to the notch position of the above-mentioned stepped straight arm structure, that is, the thickness of the stopper 50 plus the thickness of the second carrier 203 is the same as the thickness of the first carrier 202, and the length of the second carrier 203 is the same as the length of the stopper 50. When the stepped straight arm structure formed by the first carrier 202 and the second carrier 203 rotates into the storage groove 11, the second carrier 203 is supported on the upper surface of the stopper 50, and the stopper 50 just conforms to and supplements the notch position of the above-mentioned stepped straight arm structure. At this time, the bearing unit 20 and the stopper 50 fill the storage groove 11. Of course, in other alternative embodiments, based on the different connection methods of the first carrier 202 and the second carrier 203, when the bearing unit 20 is in the storage state, it is also possible that the first carrier 202 is supported on the stopper 50 or both the first carrier 202 and the second carrier 203 are supported on the stopper 50. Through the arrangement of the stopper 50, it is beneficial to position and support the bearing unit 20 when it is in the storage state.
[0056] Please continue to refer to Figure 2 As shown in the figure, in this embodiment, both the first locking member 30 and the second locking member 40 are magnetic, and the two are of opposite polarities. The first locking member 30 is arranged at the upper end of the first carrier 202, and the second locking member 40 is arranged at one end of the stopper 50 away from the center of the calibration seat 10. When the bearing unit 20 is in the storage state, the first locking member 30 and the second locking member 40 come into contact with each other and adsorb, and at this time the first carrier 202 is adsorbed and fixed to lock the bearing unit 20 in the storage groove 11.
[0057] In other alternative embodiments, the stopper 50 may not be arranged in the storage groove 11. At this time, the first locking member 30 may be arranged at one end of the second carrier 203 away from the first carrier 202, and the second locking member 40 may be directly arranged on a side wall of the storage groove 11 close to the center of the calibration seat 10. When the bearing unit 20 is in the storage state, the second carrier 203 is adsorbed and fixed.
[0058] In this embodiment, the first locking member 30 and the second locking member 40 use magnetic attraction to lock the bearing unit 20 when it is in the storage state. In other alternative embodiments, the first locking member 30 and the second locking member 40 can also be set as snap-fit members or other known locking structures.
[0059] In addition, to ensure the stability of the posture of the bearing unit 20 when it is in the bearing state, a posture maintaining structure can also be added, for example, in Figure 2A limiting stop block is arranged on the outer side of the storage groove 11 of the first carrier 202. Through the limiting stop block, the maximum angle of rotation of the first carrier 202 out of the storage groove 11 is in an upright state. To further ensure the stability of the posture of the carrying unit 20 when it is in the carrying state, a magnetic attraction structure can also be arranged on the side of the limiting stop block and the first carrier 202, so that when the carrying unit 20 is in the carrying state, the first carrier 202 and the limiting stop block are magnetically attracted to each other.
[0060] Figure 2 In [reference], the first carrier 202 and the second carrier 203 are cooperated in a rotational connection manner. As Figure 3 shown, in another alternative embodiment, the first carrier 202 and the second carrier 203 can be connected by a bolt connection method. Two first connection holes 206 are opened at the upper end of the first carrier 202, and two second connection holes 207 are opened on the second carrier 203. The first carrier 202 and the second carrier 203 are firmly connected by screws passing through the first connection holes 206 and the second connection holes 207. After the first carrier 202 and the second carrier 203 are connected, the two still remain perpendicular, and at this time their connection state corresponds to the posture of the carrying unit 20 when it is in the carrying state.
[0061] Please continue to refer to Figure 3 shown, a rectangular parallelepiped-shaped slot 208 is also opened at the upper end of the first carrier 202, and a plug 209 adapted to fit the slot 208 is arranged at the end of the second carrier 203. When the carrying unit 20 is to be converted into the folded state, the screw connection relationship between the first carrier 202 and the second carrier 203 is released, and the plug 209 is inserted into the slot 208. At this time, the first carrier 202 and the second carrier 203 still maintain a stepped straight arm structure. When the first carrier 202 rotates into the storage groove 11, a storage state similar to that in the Figure 2 corresponding embodiment is formed.
[0062] Figure 2 and Figure 3 In [references], when the carrying unit 20 is in the carrying state, the first carrier 202 and the second carrier 203 remain perpendicular. In other alternative embodiments, when the carrying unit 20 is in the carrying state, the first carrier 202 and the second carrier 203 can also be acute angles or obtuse angles with each other.
[0063] Figure 2 and Figure 3 In [references], the carrying unit 20 is a split structure composed of the first carrier 202 and the second carrier 203. In other alternative embodiments, the first carrier 202 and the second carrier 203 can also be set as an integral structure.
[0064] Figure 2 and Figure 3 In Figure 3 , the carrying unit 20 realizes the switching between the carrying state and the storage state by rotating. In other alternative embodiments, the carrying unit 20 is linearly movable on the calibration base 10, and at this time, the carrying unit 20 realizes the switching between the carrying state and the storage state by linear movement. The movement state of the carrying unit 20 relative to the calibration base 10 can be flexibly adjusted according to actual usage requirements.
[0065] In addition, in order to further improve the compatibility of the above-mentioned calibration fixture, the carrying unit 20 can also move horizontally relative to the calibration base 10 to adjust the distance between the carrying units 20, so as to be compatible with the transmission of components of different specifications and sizes and the calibration of the corresponding transmission devices.
[0066] The above-mentioned transmission device position calibration fixture can be flexibly placed on the machine tool equipment, and provides a solution for quantitatively adjusting the position of the transmission device on the machine tool equipment without a reference object, making the transmission position of the transmission device more standard, enabling the machine tool equipment to be suitable for the transmission of more products, and reducing the scrap rate of products in production.
[0067] The above-mentioned transmission device position calibration fixture can greatly reduce the position adjustment time of the transmission device, which is beneficial to making the machine tool return to production faster, and simplifies the position adjustment process, effectively reducing the experience threshold for adjusting the transmission device.
[0068] The above-mentioned transmission device position calibration fixture, its carrying unit 20 has a folding function. During use, the carrying unit 20 rotates outside the storage groove 11. When not in use, the carrying unit 20 rotates into the storage groove 11 to be stored and protected, which can improve the damage or deterioration of the position accuracy caused by long-term exposure, and helps to improve the service life of the carrying unit 20.
[0069] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other.
[0070] The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention in any way. Any changes and modifications made by those of ordinary skill in the art of the present invention according to the above disclosure shall fall within the protection scope of the claims.
Claims
1. A transmission device position correction fixture, characterized in that: include: Correction seat and multiple carrying units; Each of the carrying units is arranged on the calibration seat, and the carrying unit has a carrying surface for carrying a wafer, and a reference object is arranged on the carrying surface.
2. The transmission device position correction jig according to claim 1, characterized in that: The reference object is a scale arranged on the carrying surface.
3. The transmission device position correction jig according to claim 1, characterized in that: The correction seat is provided with a receiving groove, the carrying unit is movably arranged on the correction seat, and when the carrying unit moves relative to the correction seat, it has at least a receiving state and a carrying state; When the carrying unit is in the storage state, the carrying unit is located in the storage groove; when the carrying unit is in the carrying state, the carrying surface of the carrying unit is located outside the storage groove.
4. The transmission device position correction jig according to claim 3, characterized in that: When the carrying units are in a carrying state, the carrying surfaces of the carrying units are coplanar.
5. The transmission device position correction jig according to claim 3, characterized in that: One end of the carrying unit is rotatably installed in the receiving groove, and the carrying unit forms the receiving state and the carrying state when rotating relative to the receiving groove.
6. The transmission device position correction jig according to claim 3, characterized in that: The bearing unit comprises a first bearing member and a second bearing member connected to each other, the bearing surface is arranged on the second bearing member, and when the bearing unit is in a bearing state, the first bearing member and the second bearing member are arranged at an angle.
7. The transmission device position correction jig according to claim 3, characterized in that: The transmission device position correction fixture also includes a first locking member and a second locking member, wherein the first locking member is arranged on the carrying unit, and the second locking member is arranged on the receiving groove, and when the carrying unit is in the receiving state, the first locking member and the second locking member are connected to lock the carrying unit.
8. The transmission device position correction jig according to claim 7, characterized in that: The first locking member and the second locking member are both magnetic members.
9. The transmission device position correction jig according to claim 6, characterized in that: The second bearing member is rotatably disposed on the first bearing member, and the first bearing member is movably disposed on the correction seat.
10. The transmission device position correction jig according to claim 6, characterized in that: The transmission device position correction fixture further includes a stopper, which is disposed in the receiving groove. When the bearing unit is in the receiving state, the first bearing member and / or the second bearing member are supported on the stopper.