Quick insertion type suction cup mechanism

Abstract

The utility model discloses a quick insertion type sucker mechanism which comprises a sucker base, an air exhaust cover plate connected with the sucker base and a plurality of suckers arranged on the sucker base, and a first groove and a second groove are formed in the side, close to the sucker base, of the air exhaust cover plate. A first connector and a second connector are arranged on the side, away from the suction cup base, of the air exhaust cover plate, the first groove and the second groove are formed in a spaced mode, and the first groove and the second groove are located in the same horizontal line parallel to the length direction of the air exhaust cover plate. The first connector is communicated with the first groove, and the second connector is communicated with the second groove. According to the quick-insertion type suction cup mechanism, the first groove and the second groove are arranged, equivalently, a vacuum cavity in the air exhaust cover plate is divided into two parts, each groove can be used for controlling vacuum and vacuum breaking of a part of suction cups, the number of the suction cups can be effectively increased through the design, the suction cups do not need to be assembled and disassembled back and forth, and the labor intensity of workers is reduced. And the productivity can be effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer manufacturing, and particularly relates to a quick-insert suction cup mechanism. Background Art

[0002] During the production process of silicon wafers, vacuum suction cups or electrostatic suction cups are usually used for adsorption and fixation to pull them out from the quartz boat. For those using vacuum suction cups for adsorption, the suction cup mechanism includes an air extraction cover plate connected to the suction cup base. A vacuum chamber is provided inside the air extraction cover plate, and a negative pressure device is connected to provide negative pressure for the suction cup so that it can hold the silicon wafer. However, the structure of the vacuum chamber in the existing air extraction cover plate makes it impossible to effectively improve production capacity. For example, for a suction cup mechanism with 60 suction cups, it is necessary to load and unload 120 suction cups in two round trips. Summary of the Utility Model

[0003] In view of this, in order to overcome the defects of the prior art, the purpose of the utility model is to provide an improved quick-insert suction cup mechanism, which can effectively improve production capacity.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quick-insert suction cup mechanism includes a suction cup base, an air extraction cover plate connected to the suction cup base, and a plurality of suction cups arranged on the suction cup base. A first groove and a second groove are formed on one side of the air extraction cover plate close to the suction cup base. A first joint and a second joint are arranged on the side of the air extraction cover plate away from the suction cup base. The first groove and the second groove are arranged at intervals, and the first groove and the second groove are located on the same horizontal line parallel to the length direction of the air extraction cover plate; the first joint is communicated with the first groove, and the second joint is communicated with the second groove. The first groove and the second groove are not communicated with each other.

[0006] By providing the first groove and the second groove, it is equivalent to dividing the vacuum chamber in the air extraction cover plate into two parts. Each groove can be used to control the vacuum and break vacuum of a part of the suction cups. Such a design can effectively increase the number of suction cups, and there is no need to load and unload the suction cups in multiple round trips, which can effectively improve production capacity.

[0007] According to some preferred embodiments of the utility model, the width of the first groove is equal to the width of the second groove, and the depth of the first groove is equal to the depth of the second groove.

[0008] According to some preferred embodiments of the utility model, a third groove is formed on the outer edge of the first groove and the second groove, and the bottom surface of the third groove is located below the plane where the top surfaces of the first groove and the second groove are located.

[0009] According to some preferred implementation aspects of the present utility model, the air extraction cover plate includes a first sealing sheet and a second sealing sheet covering the first groove, the second groove and the third groove, and the first sealing sheet and the second sealing sheet are mutually attached.

[0010] According to some preferred implementation aspects of the present utility model, the second sealing sheet is located between the first sealing sheet and the suction cup base, and one side of the second sealing sheet away from the first sealing sheet is attached to one side of the suction cup base.

[0011] According to some preferred implementation aspects of the present utility model, the length of the first sealing sheet is equal to the length of the second sealing sheet and greater than the sum of the lengths of the first groove and the second groove, and the length of the first sealing sheet is equal to the length of the third groove.

[0012] According to some preferred implementation aspects of the present utility model, a plurality of first through grooves penetrating in the thickness direction are uniformly spaced along the length direction of the first sealing sheet, and a plurality of second through grooves penetrating in the thickness direction are uniformly spaced along the length direction of the second sealing sheet, and the first through grooves and the second through grooves are arranged in one-to-one correspondence.

[0013] According to some preferred implementation aspects of the present utility model, the length of the first through groove is equal to the length of the second through groove, and the length of the first through groove is greater than the widths of the first groove and the second groove and less than the width of the third groove.

[0014] According to some preferred implementation aspects of the present utility model, some of the first through grooves on the first sealing sheet communicate with the first groove, and the remaining first through grooves communicate with the second groove.

[0015] According to some preferred implementation aspects of the present utility model, the material of the first sealing sheet is metal, and the material of the second sealing sheet is rubber. In some embodiments of the present utility model, since the second sealing sheet is made of rubber and the first sealing sheet is used to support the second sealing sheet to prevent the second sealing sheet from shifting during vacuuming; while the second sealing sheet is used for sealing. When the air extraction cover plate and the suction cup base are assembled together, the second sealing sheet contacts both the first sealing sheet and the suction cup base and the two will have a squeezing effect on the second sealing sheet to ensure the effective sealing performance of the second sealing sheet.

[0016] Due to the adoption of the above technical solutions, compared with the prior art, a quick-insert suction cup mechanism of the present utility model divides the vacuum chamber in the air extraction cover plate into two parts by setting the first groove and the second groove. Each groove can be used to control the vacuum and vacuum breaking of a part of the suction cups. Such a design can effectively increase the number of suction cups and does not require multiple back-and-forth loading and unloading of the suction cups, which can effectively improve the production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] To more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the description of the embodiments. Obviously, the attached drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can be obtained based on these drawings.

[0018] Figure 1 Schematic perspective view of the quick-insert suction cup mechanism in the preferred embodiment of the present utility model;

[0019] Figure 2 Schematic perspective view of the air extraction cover plate in the preferred embodiment of the present utility model;

[0020] Figure 3 Schematic cross-sectional view of the air extraction cover plate in the preferred embodiment of the present utility model;

[0021] Figure 4 Schematic perspective view of the air extraction cover plate in the preferred embodiment of the present utility model after omitting the first sealing piece and the second sealing piece;

[0022] Figure 5 Schematic perspective view of the first perspective of the suction cup in the preferred embodiment of the present utility model;

[0023] Figure 6 Schematic perspective view of the second perspective of the suction cup in the preferred embodiment of the present utility model;

[0024] Among them, the reference numerals are:

[0025] Suction cup base - 1, air extraction cover plate - 2, first groove - 21, second groove - 22, third groove - 23, first joint - 24, second joint - 25, first sealing piece - 26, second sealing piece - 27, second through groove - 271, suction cup - 3, notch - 31, flow channel - 32, suction hole - 33, fourth groove - 34, adsorption groove - 35, first convex block - 361, second convex block - 362, protection plate - 4, silicon wafer - 5. Detailed implementation manners

[0026] In order to enable those skilled in the art to better understand the solutions of the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0027] Refer to Figures 1 to 6, A quick - plug suction cup mechanism in this embodiment is used to adsorb and fix the silicon wafer 5 to pull it out from the quartz boat. It includes a suction cup base 1, an air - extraction cover plate 2, a number of suction cups 3 arranged on the suction cup base 1, and guard plates 4 arranged at both ends of the suction cup base 1. All the suction cups 3 are located between the two guard plates 4 to protect the suction cups 3. One side of the suction cup base 1 away from the silicon wafer 5 is connected to the air - extraction cover plate 2. The suction cup base 1 is evenly spaced along its length direction and is provided with a plurality of jacks penetrating its thickness direction for the suction cups 3 to be inserted. Locking grooves are also provided on the outer walls of the other two sides of the suction cup base 1. The two locking grooves are correspondingly arranged, and locking bars for fixing the suction cups 3 are also provided corresponding to the two locking grooves. The locking bars are snap - fitted in the locking grooves. The structure of the suction cup base 1 in this embodiment can refer to the prior application with the application number CN202321677502.9, which will not be elaborated here.

[0028] Further, referring to Figure 4 , on the side of the air - extraction cover plate 2 close to the suction cup base 1, a first groove 21 and a second groove 22 are provided. The first groove 21 and the second groove 22 are spaced apart and not connected; third grooves 23 are also provided on the outer edges of the first groove 21 and the second groove 22. The bottom surface of the third groove 23 is below the plane where the top surfaces of the first groove 21 and the second groove 22 are located. On the side of the air - extraction cover plate 2 away from the suction cup base 1, a first joint 24 and a second joint 25 are provided. The first joint 24 is communicated with the first groove 21, and the second joint 25 is communicated with the second groove 22. Vacuum is introduced into the first groove 21 and the second groove 22 through the first joint 24 and the second joint 25 respectively. Among them, the width of the first groove 21 is equal to the width of the second groove 22, the depth of the first groove 21 is equal to the depth of the second groove 22, and the sum of the lengths of the first groove 21 and the second groove 22 is less than the length of the air - extraction cover plate 2; and the first groove 21 and the second groove 22 are on the same horizontal line parallel to the length direction of the air - extraction cover plate 2.

[0029] Further, as Figure 2 and Figure 3As shown, the air extraction cover plate 2 further includes a first sealing sheet 26 and a second sealing sheet 27 covering the first groove 21, the second groove 22 and the third groove 23. The first sealing sheet 26 and the second sealing sheet 27 are attached to each other. The second sealing sheet 27 is located between the first sealing sheet 26 and the suction cup base 1. The side of the first sealing sheet 26 away from the second sealing sheet 27 is attached to the top surfaces of the first groove 21 and the second groove 22. The side of the second sealing sheet 27 away from the first sealing sheet 26 is attached to one side of the suction cup base 1. In some embodiments of the present invention, the material of the first sealing sheet 26 is metal, and the material of the second sealing sheet 27 is rubber. The first sealing sheet 26 made of metal is used to support the second sealing sheet 27 to prevent the second sealing sheet 27 from shifting during vacuum pumping. The second sealing sheet 27 is used for sealing. When the air extraction cover plate 2 and the suction cup base 1 are assembled together, the second sealing sheet 27 is in contact with both the first sealing sheet 26 and the suction cup base 1, and the two will exert a squeezing effect on the second sealing sheet 27 to ensure the effective sealing of one side of the jack on the suction cup base 1 by the second sealing sheet 27.

[0030] The length of the first sealing sheet 26 is equal to the length of the second sealing sheet 27 and greater than the sum of the lengths of the first groove 21 and the second groove 22. The length of the first sealing sheet 26 is equal to the length of the third groove 23. A plurality of first through grooves penetrating in the thickness direction are evenly spaced along the length direction of the first sealing sheet 26. A plurality of second through grooves 271 penetrating in the thickness direction are evenly spaced along the length direction of the second sealing sheet 27, and the first through grooves and the second through grooves 271 are arranged in one-to-one correspondence. The first through grooves and the second through grooves 271 also correspond to the jacks on the suction cup base 1 in one-to-one correspondence. The length of the first through groove is equal to the length of the second through groove 271. The lengths of the first through groove and the second through groove 271 are both greater than the widths of the first groove 21 and the second groove 22 and less than the width of the third groove 23. When the first sealing sheet 26 and the second sealing sheet 27 cover the first groove 21, the second groove 22 and the third groove 23, some of the first through grooves on the first sealing sheet 26 communicate with the first groove 21, and the remaining first through grooves communicate with the second groove 22, so that the first groove 21 can be used to control the vacuum and vacuum breaking of a part of the suction cups 3, and the second groove 22 can be used for the vacuum and vacuum breaking of the remaining suction cups 3.

[0031] Further, as Figure 5 and Figure 6As shown, one end of each suction cup 3 is inserted into the jack of the suction cup base 1. Two notches 31 corresponding to the cross-sectional shape of the fourth groove 34 on the suction cup base 1 are formed on two side edges of the part of the suction cup 3 inserted into the jack. When the suction cup 3 is inserted into the jack, the notches 31 coincide with the locking grooves, facilitating the mutual cooperation between the suction cup 3 and the chassis base and the fixed clamping of the suction cup 3 by the locking bar. A flow channel 32 is formed on one side surface of the suction cup 3, and one end of the flow channel 32 extends to the edge of the part of the suction cup 3 inserted into the jack to form an opening. An adsorption groove 35 is formed on the other side surface of the suction cup 3. The outer edge of the flow channel 32 is provided with a fourth groove 34, and a cover plate matching its shape is arranged in the fourth groove 34. Rectangular first bumps 361 and second bumps 362 are arranged at intervals in the adsorption groove 35. The first bumps 361 and the second bumps 362 are on the same straight line parallel to the length direction of the suction cup 3, and the first bumps 361 and the second bumps 362 are arranged in parallel. Through the separation of the first bumps 361 and the second bumps 362, the adsorption groove 35 is divided into a "hui"-shaped air path. At least one air suction hole 33 penetrating through its thickness direction is formed at each position on one side of the suction cup 3 close to the first bump 361, on one side close to the second bump 362, and between the first bump 361 and the second bump 362. The air suction holes 33 are all within the range of the adsorption groove 35, and the air suction holes 33 are used to connect the flow channel 32 and the adsorption groove 35.

[0032] In this embodiment, the opening at the edge of the part of the flow channel 32 on one side surface of the suction cup 3 extending to the jack is connected to the air extraction cover plate 2, and the air extraction cover plate 2 is connected to the negative pressure device. By starting the negative pressure device, a negative pressure can be formed in the flow channel 32 and the "hui"-shaped air path connected to the flow channel 32 through the air suction holes 33 for the adsorbed flow channel 32, so as to adsorb the silicon wafer 5.

[0033] For the quick-insert suction cup mechanism of the present utility model, by providing the first groove 21 and the second groove 22, it is equivalent to providing two vacuum chambers. Each groove can be used to control the vacuum and break vacuum of a part of the suction cups 3. Such a design can effectively increase the number of suction cups 3, and there is no need to load and unload the suction cups 3 back and forth for many times, which can effectively improve the production capacity and save operation time.

[0034] The above embodiments are only used to illustrate the technical concept and characteristics of the present utility model, and their purpose is to enable those familiar with this technology to understand the content of the present utility model and implement it accordingly. It should not be used to limit the protection scope of the present utility model. All equivalent changes or modifications made according to the spirit of the present utility model should be covered within the protection scope of the present utility model.

Claims

1. A quick-insert suction cup mechanism, comprising a suction cup base, an air extraction cover connected to the suction cup base, and a plurality of suction cups arranged on the suction cup base, characterized in that: The exhaust cover plate is provided with a first groove and a second groove on a side close to the suction cup base, and the exhaust cover plate is provided with a first joint and a second joint on a side away from the suction cup base. The first groove and the second groove are spaced apart, and the first groove and the second groove are located on the same horizontal line parallel to the length direction of the exhaust cover plate; the first joint is connected to the first groove, and the second joint is connected to the second groove.

2. The quick-insert suction cup mechanism according to claim 1, characterized in that: The width of the first groove is equal to the width of the second groove, and the depth of the first groove is equal to the depth of the second groove.

3. The quick-insert suction cup mechanism according to claim 2, characterized in that: A third groove is formed at outer edges of the first groove and the second groove, and a bottom surface of the third groove is located below the plane where the top surfaces of the first groove and the second groove are located.

4. The quick-insert suction cup mechanism according to claim 3, characterized in that: The air extraction cover plate includes a first sealing sheet and a second sealing sheet which are covered on the first groove, the second groove and the third groove, and the first sealing sheet and the second sealing sheet are in contact with each other.

5. The quick-insert suction cup mechanism according to claim 4, characterized in that: The second sealing sheet is located between the first sealing sheet and the suction cup base, and a side of the second sealing sheet away from the first sealing sheet is in contact with a side of the suction cup base.

6. The quick-insert suction cup mechanism according to claim 4, characterized in that: The length of the first sealing sheet is equal to the length of the second sealing sheet and is greater than the sum of the lengths of the first groove and the second groove. The length of the first sealing sheet is equal to the length of the third groove.

7. The quick-insert suction cup mechanism according to claim 4, characterized in that: The first sealing sheet is provided with a plurality of first through grooves extending through its thickness direction at even intervals along its length direction, and the second sealing sheet is provided with a plurality of second through grooves extending through its thickness direction at even intervals along its length direction, and the first through grooves correspond to the second through grooves in a one-to-one manner.

8. The quick-insert suction cup mechanism according to claim 7, characterized in that: The length of the first through slot is equal to the length of the second through slot. The length of the first through slot is greater than the width of the first groove and the second groove and less than the width of the third groove.

9. The quick-insert suction cup mechanism according to claim 7, characterized in that: Part of the first through groove on the first sealing sheet is communicated with the first groove, and the remaining part of the first through groove is communicated with the second groove.

10. The quick-insert suction cup mechanism according to claim 4, characterized in that: The first sealing sheet is made of metal, and the second sealing sheet is made of rubber.

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