Semi-automatic crystal ingot ultrasonic wafer separator

Abstract

The utility model relates to a semi-automatic crystal ingot ultrasonic wafer separator which comprises a rack, and an ultrasonic separation assembly and an ultrasonic cleaning assembly are sequentially installed on the rack from left to right. A horizontal switching shaft assembly is arranged on the portion, above the ultrasonic separation assembly and the ultrasonic cleaning assembly, of the rack, and an ultrasonic translation shaft assembly is arranged on one side above the horizontal switching shaft assembly. The conveying type adjustable vacuum generator and the soft suction cup are adopted, adsorption in cleaning liquid can be achieved, and the vacuum degree of adsorption is controllable.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal processing, in particular to a semi-automatic ultrasonic wafer slicer for crystal ingots, and specifically to a semi-automatic ultrasonic wafer slicer for six-inch and eight-inch crystal ingots. Background Art

[0002] Today, with the increasing globalization of the market, the ultrasonic cleaning field has developed rapidly with the growth of social and economic activities and the expansion of the industrial production system. Although ultrasonic cleaning sometimes cannot provide the final product, the quality of ultrasonic cleaning determines the performance and quality of the product.

[0003] During the process of separating thin wafers from silicon carbide ingots, ultrasonic cleaning technology needs to be applied. The quality of ultrasonic cleaning affects the quality and effect of wafer slicing. The product cannot directly contact the ultrasonic cleaning machine, and it is best to ensure that the ultrasonic waves can act on the product completely and evenly, making the ultrasonic effect more efficient. At the same time, it is best to collect the product after separation to reduce product damage.

[0004] If the silicon carbide ingot is lifted in the ultrasonic cleaning machine, the area in contact with the lifting fixture will affect the ultrasonic effect. Moreover, if the lifting method is adopted, the product cannot move relative to the fixture in the cleaning liquid, and the uniformity of ultrasonic action is relatively poor. Therefore, currently, the silicon carbide ingot is manually placed into the ultrasonic bath for ultrasonic separation of the product. However, manual operation is prone to damage the product, time-consuming and laborious, and cannot perform batch continuous operation.

[0005] In view of the above defects, the designer actively conducts research and innovation to create a semi-automatic ultrasonic wafer slicer for crystal ingots, making it more valuable in the industry. Summary of the Utility Model

[0006] To solve any of the above technical problems, the purpose of the utility model is to provide a semi-automatic ultrasonic wafer slicer for crystal ingots.

[0007] To achieve the above purpose, the utility model adopts the following technical solutions:

[0008] The semi-automatic ultrasonic wafer slicer for crystal ingots includes a frame, on which an ultrasonic separation component and an ultrasonic cleaning component are sequentially installed from left to right;

[0009] A horizontal switching shaft component is arranged on the frame above the ultrasonic separation component and the ultrasonic cleaning component, and an ultrasonic translation shaft component is arranged on one side above the horizontal switching shaft component;

[0010] The horizontal switching axis assembly includes a horizontal switching bottom plate, on which an ultrasonic separation port and an ultrasonic cleaning port are successively arranged from left to right. The ultrasonic separation port is directly above the ultrasonic separation assembly, and the ultrasonic cleaning port is directly above the ultrasonic cleaning assembly. On the horizontal switching bottom plate above the ultrasonic separation port, a first horizontal switching slide plate is provided. On the horizontal switching bottom plate above the ultrasonic cleaning port, a second horizontal switching slide plate is provided. A synchronous lead screw motor assembly is installed on the horizontal switching bottom plate between the first horizontal switching slide plate and the second horizontal switching slide plate. The synchronous lead screw motor assembly can synchronously drive the first horizontal switching slide plate and the second horizontal switching slide plate on both left and right sides to move in the front-back direction. A regular adsorption assembly is installed on the first horizontal switching slide plate, and an ingot adsorption carrier and a wafer adsorption carrier are installed on the second horizontal switching slide plate.

[0011] The ultrasonic translation axis assembly includes an ultrasonic translation first linear module, an ultrasonic translation second linear module, and a rotary adsorption and grasping assembly. The ultrasonic translation first linear module drives the ultrasonic translation second linear module to move in the left-right direction, and the ultrasonic translation second linear module drives the rotary adsorption and grasping assembly to move in the vertical direction.

[0012] The rotary adsorption and grasping assembly successively includes a rotary adsorption and grasping top plate and a rotary adsorption and grasping bottom plate installed together through a plurality of rotary adsorption columns from top to bottom. A rotary cylinder is installed in the middle of the rotary adsorption and grasping top plate. The driving end at the bottom of the rotary cylinder drives a driving disk located below the rotary adsorption and grasping top plate to rotate. A plurality of arc-shaped cam follower grooves are arranged along the circumferential direction on the driving disk. The cam on the inner top of the driving guide rail is located in the upper cam follower groove. The top of the driving guide rail is connected to the driving slider at the bottom of the rotary adsorption and grasping top plate. The lower guide rail cylinder drives the driving guide rail to move along the radial direction of the rotary adsorption and grasping top plate. A rotary adsorption and grasping jaw is installed at the bottom of the guide rail cylinder, and the rotary adsorption and grasping jaw can extend below the rotary adsorption and grasping bottom plate. A suction cup rod through hole is opened in the middle of the bottom of the rotary adsorption and grasping bottom plate. The bottom of the suction cup rod passes through the suction cup rod through hole and is installed with a rotary adsorption and grasping suction cup. The suction cup rotation motor located on the rotary adsorption and grasping bottom plate drives the lower suction cup rod to rotate.

[0013] As a further improvement of the present utility model, a plurality of jaw notches are evenly arranged along the circumferential direction on the outer side of the rotary adsorption and grasping bottom plate.

[0014] As a further improvement of the present utility model, a lifting motor is installed on the rotary adsorption and grasping bottom plate on one side of the suction cup rotation motor through a lifting motor mounting seat. The driving end at the bottom of the lifting motor drives a lifting connection block to move in the vertical direction through a lifting lead screw assembly. The lifting connection block is connected to a lifting plate on one side, and the suction cup rotation motor is installed on the lifting plate.

[0015] As a further improvement of the present utility model, a guiding side frame is installed on the rotating adsorption and grasping bottom plate on one side of the lifting plate, and a guiding movable frame installed on the lifting plate moves vertically along the guiding side frame through a guiding slide rail assembly.

[0016] As a further improvement of the present utility model, a height measuring assembly is arranged in front of the ultrasonic translation shaft assembly. The height measuring assembly includes a height measuring linear module and a height measuring sensor. The height measuring linear module drives the height measuring sensor to move in the vertical direction through a height measuring driving plate.

[0017] As a further improvement of the present utility model, the regularizing adsorption assembly includes a regularizing rotating motor, a regularizing rotating plate, a regularizing suction cup bottom plate, and a regularizing adsorption carrier table. The regularizing suction cup bottom plate is installed on the lower first horizontal switching slide plate through a plurality of regularizing columns. A regularizing adsorption carrier table is installed in the middle of the regularizing suction cup bottom plate. The driving end at the top of the regularizing rotating motor drives the regularizing rotating plate located below the regularizing suction cup bottom plate to rotate. A plurality of regularizing adjustment holes are evenly arranged along the circumferential direction on the regularizing suction cup bottom plate. Regularizing adjustment columns are arranged in the regularizing adjustment holes. The bottom of the regularizing adjustment column is connected to the lower regularizing rotating plate through a regularizing adjustment connecting rod.

[0018] As a further improvement of the present utility model, an identification sensor is installed on one side of the bottom of the regularizing suction cup bottom plate.

[0019] By means of the above solutions, the present utility model has at least the following advantages:

[0020] The present utility model adopts a conveying type adjustable vacuum generator and a soft type suction cup, which can achieve adsorption in the cleaning liquid, and the magnitude of the adsorption vacuum degree is controllable;

[0021] The soft type suction cup of the present utility model can ensure adsorption in the cleaning liquid and reduce the entry of the cleaning liquid into the pipeline. Through the above advantages, it can completely adsorb the product during the ultrasonic cleaning process in the cleaning liquid, achieving the effect of adsorption in water. At the same time, the vacuum generator can also drain water and adapt to the application in this scenario without being damaged.

[0022] The present utility model uses a method of driving a driving disc to rotate by a rotating cylinder, combined with the follow-up of respective guide rails, and finally adding respective guide rod cylinders on the guide rails to complete the compatibility and collection of six-inch and eight-inch products in a limited space. At the same time, the clamping jaws are coated with silica gel, which greatly reduces the damage to the products.

[0023] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and implement it according to the content of the description, the following takes the preferred embodiments of the present utility model and combines with the attached drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the embodiments. It should be understood that the following attached drawings only show some embodiments of the present utility model, and therefore should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative efforts, other related attached drawings can also be obtained based on these attached drawings.

[0025] Figure 1 is a schematic structural diagram of a semi-automatic ingot ultrasonic slicing machine of the present utility model;

[0026] Figure 2 is Figure 1 a schematic structural diagram of the horizontal switching shaft assembly in

[0027] Figure 3 is Figure 2 a schematic structural diagram of the regular adsorption assembly in

[0028] Figure 4 is Figure 1 a schematic structural diagram of the ultrasonic translation shaft assembly in

[0029] Figure 5 is Figure 4 a schematic structural diagram of the rotary adsorption and grasping assembly in

[0030] Figure 6 is Figure 1 a schematic structural diagram of the height measurement assembly in

[0031] Among them, the meanings of the reference numerals in the drawings are as follows.

[0032] Frame 1, horizontal switching shaft assembly 2, ultrasonic separation assembly 3, ultrasonic cleaning assembly 4, ultrasonic translation shaft assembly 5, height measurement assembly 6;

[0033] Horizontal switching bottom plate 21, ultrasonic separation port 22, ultrasonic cleaning port 23, synchronous lead screw motor assembly 24, first horizontal switching slide plate 25, second horizontal switching slide plate 26, regular adsorption assembly 27, ingot adsorption carrier 28, wafer adsorption carrier 29;

[0034] Regular rotation motor 271, regular rotation plate 272, regular suction cup bottom plate 273, regular adsorption carrier 274, regular column 275, identification sensor 276, regular adjustment hole 277, regular adjustment column 278, regular adjustment connecting rod 279;

[0035] Ultrasonic translation first linear module 51, ultrasonic translation second linear module 52, rotary adsorption and grasping assembly 53;

[0036] Rotary adsorption grasping top plate 5301, rotary cylinder 5302, drive disc 5303, drive guide rail 5304, cam 5305, drive slider 5306, guide rail cylinder 5307, rotary adsorption grasping jaw 5308, lifting motor 5309, lifting motor mounting seat 5310, lifting lead screw assembly 5311, lifting connection block 5312, lifting plate 5313, suction cup rotary motor 5314, guiding side frame 5315, guiding movable frame 5316, rotary adsorption grasping bottom plate 5317, jaw notch 5318, suction cup rod 5319, suction cup rod through hole 5320, rotary adsorption grasping suction cup 5321;

[0037] Height measurement linear module 61, height measurement drive board 62, height measurement sensor 63. Specific implementation mode

[0038] The following combines the drawings and embodiments to further describe in detail the specific implementation mode of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0039] In order to enable those skilled in the art of this technology to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Usually, the components of the embodiments of the present utility model described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the claimed present utility model, but only represents the selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present utility model.

[0040] As Figures 1 to 6 shown, a semi-automatic ingot ultrasonic slicing machine includes a frame 1, on which an ultrasonic separation assembly 3 and an ultrasonic cleaning assembly 4 are sequentially installed from left to right. A horizontal switching shaft assembly 2 is provided on the frame 1 above the ultrasonic separation assembly 3 and the ultrasonic cleaning assembly 4, and an ultrasonic translation shaft assembly 5 is provided on one side above the horizontal switching shaft assembly 2.

[0041] The horizontal switching shaft assembly 2 includes a horizontal switching bottom plate 21. An ultrasonic separation port 22 and an ultrasonic cleaning port 23 are sequentially formed on the horizontal switching bottom plate 21 from left to right. The ultrasonic separation port 22 is directly above the ultrasonic separation assembly 3, and the ultrasonic cleaning port 23 is directly above the ultrasonic cleaning assembly 4. A first horizontal switching slide plate 25 is arranged on the horizontal switching bottom plate 21 above the ultrasonic separation port 22, and a second horizontal switching slide plate 26 is arranged on the horizontal switching bottom plate 21 above the ultrasonic cleaning port 23. A synchronous lead screw motor assembly 24 is installed on the horizontal switching bottom plate 21 between the first horizontal switching slide plate 25 and the second horizontal switching slide plate 26. The synchronous lead screw motor assembly 24 can synchronously drive the first horizontal switching slide plate 25 and the second horizontal switching slide plate 26 on both left and right sides to move in the front-back direction. A regular adsorption assembly 27 is installed on the first horizontal switching slide plate 25, and an ingot adsorption stage 28 and a wafer adsorption stage 29 are installed on the second horizontal switching slide plate 26.

[0042] The regular adsorption assembly 27 includes a regular rotation motor 271, a regular rotation plate 272, a regular suction cup bottom plate 273, and a regular adsorption stage 274. The regular suction cup bottom plate 273 is installed on the lower first horizontal switching slide plate 25 through a plurality of regular columns 275. A regular adsorption stage 274 is installed in the middle of the regular suction cup bottom plate 273. The driving end at the top of the regular rotation motor 271 drives the regular rotation plate 272 located below the regular suction cup bottom plate 273 to rotate. A plurality of regular adjustment holes 277 are evenly formed in the circumferential direction on the regular suction cup bottom plate 273. A regular adjustment column 278 is arranged in the regular adjustment hole 277. The bottom of the regular adjustment column 278 is connected to the lower regular rotation plate 272 through a regular adjustment connecting rod 279.

[0043] An identification sensor 276 is installed on one side of the bottom of the regular suction cup bottom plate 273.

[0044] The ultrasonic translation shaft assembly 5 includes an ultrasonic translation first linear module 51, an ultrasonic translation second linear module 52, and a rotary adsorption and grasping assembly 53. The ultrasonic translation first linear module 51 drives the ultrasonic translation second linear module 52 to move in the left-right direction, and the ultrasonic translation second linear module 52 drives the rotary adsorption and grasping assembly 53 to move in the vertical direction.

[0045] The rotary adsorption and grasping assembly 53 includes, from top to bottom, a rotary adsorption and grasping top plate 5301 and a rotary adsorption and grasping bottom plate 5317 that are installed together through a number of rotary adsorption columns. In the middle of the rotary adsorption and grasping top plate 5301, a rotary cylinder 5302 is installed. The driving end at the bottom of the rotary cylinder 5302 drives a driving disk 5303 located below the rotary adsorption and grasping top plate 5301 to rotate. A number of arc-shaped cam follower grooves are provided on the driving disk 5303 along the circumferential direction. The cam 5305 at the inner top of the driving guide rail 5304 is located in the upper cam follower groove. The top of the driving guide rail 5304 is connected to the driving slider 5306 at the bottom of the rotary adsorption and grasping top plate 5301. The lower guide rail cylinder 5307 drives the driving guide rail 5304 to move along the radial direction of the rotary adsorption and grasping top plate 5301. At the bottom of the guide rail cylinder 5307, a rotary adsorption and grasping jaw 5308 is installed, and the rotary adsorption and grasping jaw 5308 can extend below the rotary adsorption and grasping bottom plate 5317. In the middle of the bottom of the rotary adsorption and grasping bottom plate 5317, a suction cup rod through hole 5320 is provided. The bottom of the suction cup rod 5319 passes through the suction cup rod through hole 5320 and is installed with a rotary adsorption and grasping suction cup 5321. The suction cup rotary motor 5314 located on the rotary adsorption and grasping bottom plate 5317 drives the lower suction cup rod 5319 to rotate.

[0046] On the outer side of the rotary adsorption and grasping bottom plate 5317, a number of jaw notches 5318 are evenly provided along the circumferential direction.

[0047] On the rotary adsorption and grasping bottom plate 5317 on one side of the suction cup rotary motor 5314, a lifting motor 5309 is installed through a lifting motor mounting seat 5310. The driving end at the bottom of the lifting motor 5309 drives a lifting connection block 5312 to move in the vertical direction through a lifting screw rod assembly 5311. The lifting connection block 5312 is connected to a lifting plate 5313 on one side, and the suction cup rotary motor 5314 is installed on the lifting plate 5313.

[0048] On the rotary adsorption and grasping bottom plate 5317 on one side of the lifting plate 5313, a guiding side frame 5315 is installed. The guiding movable frame 5316 installed on the lifting plate 5313 moves along the vertical direction on the guiding side frame 5315 through a guiding slide rail assembly.

[0049] In front of the ultrasonic translation axis assembly 5, a height measuring assembly 6 is provided. The height measuring assembly 6 includes a height measuring linear module 61 and a height measuring sensor 63. The height measuring linear module 61 drives the height measuring sensor 63 to move in the vertical direction through a height measuring driving plate 62.

[0050] The working principle and working process of the present utility model:

[0051] The product is placed on the regular adsorption assembly 27. The recognition sensor 276 is used to judge the size of the product, and it is regularized according to the corresponding position. Then, the synchronous lead screw motor assembly 24 drives the first horizontal switching slide 25 to move to the height measurement position. The height measurement assembly 6 measures the thickness of the product. After the measurement is completed, the synchronous lead screw motor assembly 24 drives the first horizontal switching slide 25 to continue moving to the material change position. The ultrasonic translation first linear module 51 and the ultrasonic translation second linear module 52 also move to the corresponding positions. The rotary cylinder 5302 works and rotates to drive the drive disk 5303 to rotate. During the rotation of the drive disk 5303, the cam 5305 is driven to move through the part processing trajectory. The cam 5305 is fixed on the drive guide rail 5304, so the drive guide rail 5304 moves accordingly, driving the rotary adsorption and grasping jaw 5308 with 18 rubber coatings to move. As for the compatibility of six-inch and eight-inch products, it is completed by the movement of the guide rail cylinder 5307. After the rotary adsorption and grasping jaw 5308 is opened, it descends to the material taking position. After the vacuum rotary adsorption and grasping suction cup 5321 contacts the product, the conveyor type adjustable vacuum generator on the frame 1 or the ultrasonic translation shaft assembly 5 works. After adsorbing the product, the rotary adsorption and grasping jaw 5308 contracts to the position corresponding to the size, and then rises to the safe position. The synchronous lead screw motor assembly 24 drives the first horizontal switching slide 25 to retract. The ultrasonic translation first linear module 51 and the ultrasonic translation second linear module 52 descend to the corresponding height. The ultrasonic separation assembly 3 starts ultrasonic vibration. At the same time, the suction cup rotation motor 5314 drives the suction cup rod 5319 to rotate, so that the rotary adsorption and grasping suction cup 5321 rotates, causing the product to rotate together. After the ultrasonic vibration time reaches the set time, the ultrasonic translation first linear module 51 and the ultrasonic translation second linear module 52 rise to the detection position. The piece separation confirmation photoelectric sensor on the frame 1 is used to judge whether the piece separation is successful. If it fails, continue ultrasonic vibration. If it is successful, move to the cleaning position and clean it in the ultrasonic cleaning assembly 10. Then, the ultrasonic translation first linear module 51 and the ultrasonic translation second linear module 52 move to the safe position. Under the linkage of the above modules, the wafer is unloaded to the wafer adsorption carrier 29, then the ingot is unloaded to the ingot adsorption carrier 28. Finally, the synchronous lead screw motor assembly 24 drives the first horizontal switching slide 25 and the second horizontal switching slide 26 to move to the unloading position, waiting for the product to be taken away.

[0052] The utility model can be compatible with six-inch and eight-inch products, with automatic recognition and judgment. It adopts a conveyor type adjustable vacuum generator and a soft type vacuum suction cup. Moreover, the vacuum generator is made of stainless steel, which can reduce the damage of the cleaning liquid to the vacuum generator, maintain different vacuum degrees in the cleaning liquid, complete the adsorption of the product in the cleaning liquid while adjusting the vacuum degree, and avoid damage to the product caused by excessive vacuum degree. Finally, a rotary lifting mechanism is installed on the device to enhance the uniformity of the ultrasonic effect, and a contraction jaw mechanism is added under the product to facilitate collection and unloading.

[0053] By adopting a conveyor-type adjustable vacuum generator and a flexible suction cup, adsorption in the cleaning liquid can be achieved, and the magnitude of the adsorption vacuum can be controlled;

[0054] The flexible suction cup can ensure adsorption in the cleaning liquid and reduce the entry of the cleaning liquid into the pipeline. Through the above advantages, the product can be completely adsorbed during the ultrasonic cleaning process in the cleaning liquid, achieving the effect of adsorption in water. At the same time, the vacuum generator can also drain water and adapt to the application in this scenario without being damaged.

[0055] By using a method of driving a driving disk to rotate by a rotating cylinder, along with the respective guide rails following, and finally adding the respective guide rod cylinders on the guide rails, the compatibility and collection of 6- and 8-inch products can be completed in a limited space. At the same time, the jaws are coated with silica gel, which greatly reduces damage to the products.

[0056] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "plurality" is two or more.

[0057] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific circumstances.

[0058] The above description is only a preferred embodiment of the present utility model and is not used to limit the present utility model. It should be pointed out that for those of ordinary skill in the art in this technical field, without departing from the technical principle of the present utility model, several improvements and modifications can still be made, and these improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A semi-automatic crystal ingot ultrasonic slicing machine, comprising a frame (1), on which an ultrasonic separation component (3) and an ultrasonic cleaning component (4) are sequentially mounted from left to right; characterized in that: A horizontal switching axis component (2) is arranged on the frame (1) above the ultrasonic separation component (3) and the ultrasonic cleaning component (4), and an ultrasonic translation axis component (5) is arranged on one side above the horizontal switching axis component (2); The horizontal switching shaft assembly (2) comprises a horizontal switching bottom plate (21), on which an ultrasonic separation port (22) and an ultrasonic cleaning port (23) are sequentially provided from left to right, wherein the ultrasonic separation port (22) is located directly above the ultrasonic separation assembly (3), and the ultrasonic cleaning port (23) is located directly above the ultrasonic cleaning assembly (4); a first horizontal switching slide plate (25) is provided on the horizontal switching bottom plate (21) above the ultrasonic separation port (22), and a second horizontal switching slide plate (25) is provided on the horizontal switching bottom plate (21) above the ultrasonic cleaning port (23). A second horizontal switching slide plate (26) is provided, and a synchronous screw motor assembly (24) is installed on the horizontal switching bottom plate (21) between the first horizontal switching slide plate (25) and the second horizontal switching slide plate (26), and the synchronous screw motor assembly (24) can synchronously drive the first horizontal switching slide plate (25) and the second horizontal switching slide plate (26) on the left and right sides to move in the front-back direction; a regular adsorption assembly (27) is installed on the first horizontal switching slide plate (25), and an ingot adsorption carrier (28) and a wafer adsorption carrier (29) are installed on the second horizontal switching slide plate (26); The ultrasonic translation axis assembly (5) comprises an ultrasonic translation first linear module (51), an ultrasonic translation second linear module (52) and a rotary adsorption grabbing assembly (53); the ultrasonic translation first linear module (51) drives the ultrasonic translation second linear module (52) to move in the left-right direction, and the ultrasonic translation second linear module (52) drives the rotary adsorption grabbing assembly (53) to move in the vertical direction; The rotary adsorption grabbing assembly (53) includes, from top to bottom, a rotary adsorption grabbing top plate (5301) and a rotary adsorption grabbing bottom plate (5317) which are installed together through a plurality of rotary adsorption columns. A rotary cylinder (5302) is installed in the middle of the rotary adsorption grabbing top plate (5301). The driving end at the bottom of the rotary cylinder (5302) drives a driving disk (5303) located below the rotary adsorption grabbing top plate (5301) to rotate. A plurality of arc-shaped cam follower grooves are provided on the driving disk (5303) along the circumferential direction. The cam (5305) at the top inner side of the driving guide rail (5304) is located in the cam follower groove above. The top of the driving guide rail (5304) is in contact with the driving slider (5317) at the bottom of the rotary adsorption grabbing top plate (5301). 5306), the guide rail cylinder (5307) below drives the driving guide rail (5304) to move radially along the rotating adsorption grabbing top plate (5301), a rotating adsorption grabbing claw (5308) is installed at the bottom of the guide rail cylinder (5307), and the rotating adsorption grabbing claw (5308) can extend to the bottom of the rotating adsorption grabbing bottom plate (5317), a suction cup rod through hole (5320) is opened in the middle of the bottom of the rotating adsorption grabbing bottom plate (5317), the bottom of the suction cup rod (5319) passes through the suction cup rod through hole (5320) and is installed with a rotating adsorption grabbing suction cup (5321), and the suction cup rotating motor (5314) located on the rotating adsorption grabbing bottom plate (5317) drives the suction cup rod (5319) below to rotate.

2. The semi-automatic ingot ultrasonic slicing machine according to claim 1, characterized in that: A plurality of clamping jaws notches (5318) are evenly arranged along the circumferential direction on the outer side of the rotating adsorption grabbing bottom plate (5317).

3. The semi-automatic ingot ultrasonic slicing machine according to claim 2, characterized in that: A lifting motor (5309) is installed on the rotating adsorption grabbing base plate (5317) on one side of the suction cup rotating motor (5314) via a lifting motor mounting seat (5310); the driving end at the bottom of the lifting motor (5309) drives the lifting connecting block (5312) to move in the vertical direction via a lifting screw rod assembly (5311); the lifting connecting block (5312) is connected to a lifting plate (5313) on one side; and the suction cup rotating motor (5314) is installed on the lifting plate (5313).

4. The semi-automatic ingot ultrasonic slicing machine according to claim 3, characterized in that: A guide side frame (5315) is installed on the rotating adsorption grabbing bottom plate (5317) on one side of the lifting plate (5313), and a guide movable frame (5316) installed on the lifting plate (5313) moves along the vertical direction on the guide side frame (5315) through a guide slide rail assembly.

5. The semi-automatic ingot ultrasonic slicing machine according to claim 1, characterized in that: A height measurement assembly (6) is arranged in front of the ultrasonic translation axis assembly (5), and the height measurement assembly (6) comprises a height measurement linear module (61) and a height measurement sensor (63). The height measurement linear module (61) drives the height measurement sensor (63) to move in a vertical direction via a height measurement driving plate (62).

6. The semi-automatic ingot ultrasonic slicing machine according to claim 1, characterized in that: The regular adsorption assembly (27) comprises a regular rotation motor (271), a regular rotation plate (272), a regular suction cup bottom plate (273) and a regular adsorption platform (274); the regular suction cup bottom plate (273) is mounted on the first horizontal switching slide plate (25) below via a plurality of regular columns (275); a regular adsorption platform (274) is mounted in the middle of the regular suction cup bottom plate (273); the regular rotation motor (271 ) drives the regular rotating plate (272) located below the regular suction cup bottom plate (273) to rotate, and a plurality of regular adjustment holes (277) are evenly opened along the circumferential direction on the regular suction cup bottom plate (273), and a regular adjustment column (278) is arranged in the regular adjustment hole (277), and the bottom of the regular adjustment column (278) is connected to the regular rotating plate (272) below through a regular adjustment connecting rod (279).

7. The semi-automatic ingot ultrasonic slicing machine according to claim 6, characterized in that: An identification sensor (276) is installed on one side of the bottom of the regular suction cup bottom plate (273).

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