Vertical heat treatment equipment

Abstract

The utility model provides vertical heat treatment equipment. The vertical heat treatment equipment comprises a vertical furnace body, a temporary storage cooling part and a sectional type feeding and discharging structure, the sectional type feeding and discharging structure is provided with a first-section conveying device and a second-section conveying device. The first-section transmission device is positioned below the vertical furnace body and is used for feeding or discharging the vertical boat into or out of the vertical furnace body; the second section of transmission device is used for driving the vertical boat to transfer between the temporary storage cooling part and the first section of transmission device; the sectional type feeding and discharging structure is arranged in the vertical heat treatment equipment, so that the problem that the stroke is too long when feeding and discharging are directly conducted through a single conveying device is solved, the conveying stroke of each section of conveying device is short, operation can be completed in a short time, the requirement for strength is lowered, deformation is reduced, and the production efficiency is improved. And meanwhile, the utilization rate of equipment space is improved.

Description

Technical Field

[0001] The utility model belongs to the field of solar photovoltaic cell production equipment, and more specifically, it relates to a vertical heat treatment equipment. Background Art

[0002] With the continuous increase in the global demand for renewable energy, the solar photovoltaic industry has developed rapidly. Among them, vertical furnace equipment can realize specific processes such as coating, diffusion, oxidation, and thin film deposition on silicon wafers.

[0003] In the existing vertical furnace, a single transmission device is usually used to directly drive the vertical boat for transmission and hoisting. For example, in the patent document CN114203611 A, a quartz boat picking and placing device is used to drive the quartz boat to transfer between the buffer rack, the reaction chamber, and the boat turning device; specifically, the quartz boat picking and placing device includes a moving track assembly, a manipulator, and a clamping assembly. The clamping assembly is connected to the manipulator, the manipulator is installed on the moving track assembly, and the moving track assembly is used to drive the manipulator to move back and forth along the moving track assembly to realize driving the quartz boat to transfer between the buffer rack, the reaction chamber, and the boat turning device, and the clamping assembly is used to clamp the quartz boat. This method has a long transmission stroke, which causes the device to bear the load for a long time and leads to its deformation. At the same time, the long stroke also puts high requirements on the equipment space, bringing great inconvenience to the operation and maintenance of the staff. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a vertical heat treatment equipment, which realizes segmented loading and unloading. The transmission stroke of each section of the transmission device is short, so that it can complete the operation in a short time, reduce the requirement for strength, reduce deformation, and at the same time is beneficial to improving the utilization rate of the equipment space.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is:

[0006] Provide a vertical heat treatment equipment, which is characterized in that it includes: a vertical furnace body, a temporary storage and cooling part, and a segmented loading and unloading structure; wherein, the segmented loading and unloading structure has a first section transmission device and a second section transmission device;

[0007] The first section transmission device is located below the vertical furnace body and is used to send the vertical boat into or out of the vertical furnace body;

[0008] The second section transmission device is used to drive the vertical boat to transfer between the temporary storage and cooling part and the first section transmission device.

[0009] Furthermore, the first section transmission device includes:

[0010] A first horizontal guide rail, located below the vertical furnace body, with one end of the first horizontal guide rail in the boat transfer area between the first-stage transfer device and the second-stage transfer device;

[0011] A first support member, slidably arranged on the first horizontal guide rail, for supporting the vertical boat;

[0012] A first driving member, for driving the first support member to move on the first horizontal guide rail;

[0013] A jacking and moving member, connected to the first horizontal guide rail, for driving the first horizontal guide rail and the first support member to move in the vertical direction to send the vertical boat into or out of the vertical furnace body.

[0014] Further, the second-stage transfer device includes:

[0015] A first lifting guide rail, located on one side of the vertical furnace body, with one end of the first lifting guide rail in the boat transfer area between the second-stage transfer device and the first-stage transfer device;

[0016] A first manipulator structure, slidably arranged on the first lifting guide rail, the first manipulator structure having a first hanging and picking component and a horizontal moving component, the first hanging and picking component being arranged on the horizontal moving component and used for hanging and picking the vertical boat, and the horizontal moving component being used for driving the first hanging and picking component to move in the horizontal direction to send the vertical boat into or out of the temporary storage and cooling part;

[0017] A second driving member, for driving the first manipulator structure to move on the first lifting guide rail.

[0018] Further, the first-stage transfer device includes:

[0019] A second manipulator structure, having a first-stage transfer component and a second-stage transfer component arranged vertically, the boat transfer path of the first-stage transfer component in the vertical direction at least partially overlapping with the boat transfer path of the second-stage transfer component, and the first-stage transfer component and the second-stage transfer component cooperating to transfer the vertical boat in sections in the vertical direction to send the vertical boat into or out of the vertical furnace body;

[0020] A moving platform, connected to the second-stage transfer component, for driving the second-stage transfer component to move in the horizontal direction to transfer the vertical boat between the second-stage transfer component and the second-stage transfer device.

[0021] Further, the first-stage transfer component includes:

[0022] A second lifting guide rail, arranged below the vertical furnace body and on one side of the second-stage transfer component;

[0023] The lifting support frame is slidably arranged on the second lifting guide rail;

[0024] The second horizontal guide rail is arranged on the lifting support frame;

[0025] The second support member is slidably arranged on the second horizontal guide rail and is used to support the vertical boat;

[0026] The third driving member is used to drive the lifting support frame to move on the second lifting guide rail so as to send the vertical boat into or out of the vertical furnace body;

[0027] The fourth driving member is used to drive the second support member to move on the second horizontal guide rail so as to receive the vertical boat on the second-stage transmission member or transfer the vertical boat to the second-stage transmission member.

[0028] Furthermore, the second-stage transmission member includes:

[0029] The third lifting guide rail is arranged below the vertical furnace body and is lower than the second lifting guide rail in the vertical direction;

[0030] The second hanging and picking member is slidably arranged on the third lifting guide rail and is used to hang and pick the vertical boat;

[0031] The fifth driving member is used to drive the second hanging and picking member to move on the third lifting guide rail.

[0032] Furthermore, the second-stage transmission device includes an in-boat transmission channel and an out-boat transmission channel which are arranged in parallel and have opposite transmission directions, and partial transmission paths of the in-boat transmission channel and the out-boat transmission channel correspond to the temporary storage and cooling part;

[0033] The moving platform is arranged between the in-boat transmission channel and the out-boat transmission channel and is used to drive the second-stage transmission member to move horizontally so as to transfer the vertical boat among the second-stage transmission member, the in-boat transmission channel and the out-boat transmission channel.

[0034] Furthermore, the vertical furnace body includes an outer furnace body, an inner furnace body and a lower furnace door which jointly enclose a heating chamber, and a boat support frame for hanging a plurality of vertical boats is arranged in the heating chamber.

[0035] Furthermore, the vertical furnace body further includes a rotating chuck and a sixth driving member which are respectively arranged on the lower furnace door, and the sixth driving member is connected to the rotating chuck and is used to drive the whole vertical furnace body to rotate so that some hanging positions on the boat support frame correspond to the first-stage transmission device.

[0036] Furthermore, the segmented loading and unloading structure conveys two vertical boats each time.

[0037] Compared with the prior art, the beneficial effects of the vertical heat treatment equipment provided by the present utility model are as follows: By providing a segmented loading and unloading structure in the vertical heat treatment equipment, the problem of the overlong travel of directly using a single transmission device for loading and unloading is avoided. The transmission travel of each section of the transmission device is short, so that the operation can be completed in a short time, the requirement for strength is reduced, deformation is reduced, and at the same time, it is beneficial to improve the utilization rate of the equipment space. Description of the Drawings

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0039] Figure 1 The front view schematic diagram of the vertical heat treatment equipment provided in Embodiment 1 of the present utility model;

[0040] Figure 2 The top view schematic diagram of the vertical heat treatment equipment provided in Embodiment 1 of the present utility model;

[0041] Figure 3 The left view schematic diagram of the vertical heat treatment equipment provided in Embodiment 1 of the present utility model;

[0042] Figure 4 The sectional view schematic diagram of the vertical furnace body provided in Embodiment 1 of the present utility model;

[0043] Figure 5 The top view schematic diagram of the vertical heat treatment equipment provided in Embodiment 2 of the present utility model;

[0044] Figure 6 For Figure 5 The sectional view along the A-A direction in

[0045] Figure 7 The top view schematic diagram of the belt transmission mechanism and the temporary storage and cooling part provided in Embodiment 2 of the present utility model;

[0046] Figure 8 The sectional view schematic diagram of the first section of the transmission device provided in Embodiment 2 of the present utility model;

[0047] Figure 9 The sectional view schematic diagram of the vertical furnace body provided in Embodiment 2 of the present utility model;

[0048] Among them, the main reference signs in the drawings are as follows:

[0049] 1. Vertical furnace body; 2. Temporary storage and cooling part; 3. First-stage transmission device; 4. Second-stage transmission device; 5. Vertical boat; 6. Chip insertion mechanism;

[0050] 11. Outer furnace body; 12. Inner furnace body; 13. Lower furnace door; 14. Rotating chuck; 15. Seventh driving component;

[0051] 31. First horizontal guide rail; 32. First support component;

[0052] 41. First lifting guide rail; 42. First manipulator structure;

[0053] 421. First hanging and picking component; 4211. First hook; 422. Horizontal moving component;

[0054] 35. First-stage transmission component; 36. Second-stage transmission component;

[0055] 351. Second lifting guide rail; 352. Lifting support frame; 353. Second horizontal guide rail; 354. Second support component; 3541. Suspension frame; 3542. Hook;

[0056] 361. Third lifting guide rail; 362. Second hanging and picking component; 3621. Second hook;

[0057] 47. Boat inlet transmission channel; 48. Boat outlet transmission channel;

[0058] 471. Belt transmission mechanism;

[0059] 51. Second boat support frame. Detailed implementation manners

[0060] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0061] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. In the current photovoltaic industry, processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD usually use vertical furnace equipment. The silicon wafers are loaded into a specific carrier (such as a vertical boat) and transferred into the reaction chamber for the process. At this time, specific reaction gases are introduced to achieve specific coating, diffusion, oxidation, and thin film deposition processes on the silicon wafers. In the existing vertical furnace equipment, a single transmission device is usually used to directly drive the vertical boat for transmission and hoisting. This method has a long transmission stroke, causing the device to bear the load for a long time and resulting in deformation. At the same time, the long stroke also places high requirements on the equipment space, bringing great inconvenience to the operation and maintenance of the staff.

[0062] To solve the above problems, the present utility model provides a new type of vertical heat treatment equipment, which realizes segmented loading and unloading. The transmission stroke of each section of the transmission device is shorter, enabling it to complete the operation in a shorter time, reducing the requirements for its strength, reducing deformation, and at the same time facilitating the improvement of the utilization rate of the equipment space.

[0063] Embodiment 1:

[0064] Please refer to Figures 1 to 4 together. The vertical heat treatment equipment provided in this embodiment mainly includes a vertical furnace body 1, a temporary storage and cooling part 2, and a segmented loading and unloading structure. Among them, the segmented loading and unloading structure is used to transfer the vertical boat 5 between the vertical furnace body 1 and the temporary storage and cooling part 2. In addition, this vertical heat treatment equipment also includes electrical components, such as pumps, etc.

[0065] As Figure 3 shown, multiple vertical furnace bodies 1 are arranged at intervals in the upper left part of the whole machine, and the temporary storage and cooling part 2 is arranged on the far right of the whole machine. The temporary storage and cooling part 2 has multiple boat storage positions.

[0066] It should be understood that the number of vertical furnace bodies 1 and the number of boat storage positions in the temporary storage and cooling part 2 can be flexibly set according to actual needs. For example, there are a total of 3 vertical furnace bodies 1 in this vertical heat treatment equipment, and there are a total of 24 boat storage positions in the temporary storage and cooling part 2, and these 24 boat storage positions are divided into two rows, upper and lower.

[0067] It should also be understood that the segmented loading and unloading structure corresponds one-to-one with the vertical furnace body 1. Here, a vertical furnace body 1 and a corresponding segmented loading and unloading structure will be taken as an example for detailed description.

[0068] As Figure 2 、 Figure 3As shown, the segmented loading and unloading structure has a first-stage transmission device 3 and a second-stage transmission device 4. Among them, the first-stage transmission device 3 is located below the vertical furnace body 1 and is used to send the vertical boat 5 into or out of the vertical furnace body 1; the second-stage transmission device 4 is used to drive the vertical boat 5 to transfer between the temporary cooling section 2 and the first-stage transmission device 3.

[0069] It should be understood that the second-stage transmission device 4 and the first-stage transmission device 3 cooperate with each other to achieve the segmented transmission of the vertical boat 5. Hereinafter, the position where the second-stage transmission device 4 and the first-stage transmission device 3 cooperate to transfer the vertical boat 5 will be referred to as the boat transfer area.

[0070] As Figure 3 shown, the first-stage transmission device 3 at least includes a first horizontal guide rail 31, a first support member 32, a first drive member, and a lifting and moving member.

[0071] The first horizontal guide rail 31 is located below the vertical furnace body 1, and one end of the first horizontal guide rail 31 is in the boat transfer area; the first support member 32 is slidably arranged on the first horizontal guide rail 31 and is used to support the vertical boat 5; the first drive member is used to drive the first support member 32 to move on the first horizontal guide rail 31; the lifting and moving member is connected to the first horizontal guide rail 31 and is used to drive the first horizontal guide rail 31 and the first support member 32 thereon to move in the vertical direction to send the vertical boat 5 into or out of the vertical furnace body 1.

[0072] In this first-stage transmission device 3, the first drive member can adopt a motor drive mode or a cylinder drive mode, and it is only necessary to be able to drive the first support member 32 to move left and right along the first horizontal guide rail 31.

[0073] In this first-stage transmission device 3, the lifting and moving member can also adopt a motor drive mode or a cylinder drive mode, and it is only necessary to be able to drive the first horizontal guide rail 31 and the first support member 32 thereon to move up and down in the vertical direction together.

[0074] In this first-stage transmission device 3, the first support member 32 can adopt a support frame or the like, which can reduce the weight while ensuring sufficient bearing capacity. The number of the first support members 32 is preferably two.

[0075] As Figure 3 shown, the second-stage transmission device 4 at least includes a first lifting guide rail 41, a first manipulator structure 42, and a second drive member.

[0076] The first lifting guide rail 41 is located on one side of the vertical furnace body 1, and one end of the first lifting guide rail 41 is in the boat transfer area; the first manipulator structure 42 is slidably arranged on the first lifting guide rail 41; the second drive member is used to drive the first manipulator structure 42 to move on the first lifting guide rail 41.

[0077] In this second-stage transfer device 4, the second driving component can adopt a motor driving mode or a cylinder driving mode, and it is only necessary to be able to drive the first manipulator structure 42 to move up and down along the first lifting guide rail 41.

[0078] In this second-stage transfer device 4, the first manipulator structure 42 has a first hanging component 421 and a horizontal moving component 422. The first hanging component 421 is arranged on the horizontal moving component 422 and is used for hanging the vertical boat 5. The horizontal moving component 422 is used to drive the first hanging component 421 to move in the horizontal direction to send the vertical boat 5 into or out of the temporary cooling part 2.

[0079] In this first manipulator structure 42, the number of the first hanging components 421 is two. The two first hanging components 421 are symmetrically arranged on both sides of the horizontal moving component 422 to realize the transfer of two vertical boats 5 each time. The horizontal moving component 422 can adopt a belt transmission structure. The first hanging component 421 has a first hook 4211 that can be opened and closed to support or disengage from the vertical boat 5. It can be understood that if the first manipulator structure 42 transfers two vertical boats 5 each time, there are two first-stage transfer devices 3, and the two first-stage transfer devices 3 are arranged in parallel and operate synchronously.

[0080] In this embodiment, the cross-sectional profile of the vertical boat 5 can be a square or a rectangle. If the cross-sectional profile of the vertical boat 5 is a rectangle and the placement direction of the vertical boat 5 in the temporary cooling part 2 is inconsistent with its placement direction in the vertical furnace body 1, the segmented loading and unloading structure further includes a boat rotating device for rotating the vertical boat 5 by 90 degrees. After rotating the vertical boat 5 through the boat rotating device, the vertical boat 5 is then transferred to the second-stage transfer device 4 or placed in the temporary cooling part 2 to ensure that the vertical boat 5 smoothly enters the vertical furnace body 1 or the temporary cooling part 2.

[0081] As Figure 4 shown, the vertical furnace body 1 includes an outer furnace body 11, an inner furnace body 12, and a lower furnace door 13 that jointly enclose a heating chamber.

[0082] The upper end of the outer furnace body 11 is closed and the lower end is open. The upper end of the inner furnace body 12 is open and the lower end is closed. The lower furnace door 13 is detachably arranged at the lower end of the outer furnace body 11. Heating sources are provided on the outer furnace body 11 and the inner furnace body 12, and the heating sources can adopt heating wires, infrared lamp tubes, electromagnetic induction heating, etc.

[0083] A first support frame for hanging a plurality of vertical boats 5 is arranged in the heating chamber, and the first support frame is sleeved outside the inner furnace body 12. A plurality of hanging positions are annularly arranged on the first support frame, and each hanging position is connected with a clamping part on a vertical boat 5 in a clamping manner.

[0084] This vertical furnace body 1 further includes a rotating chuck 14 and a sixth driving component. The rotating chuck 14 is arranged on the lower furnace door 13, and the sixth driving component is connected to the rotating chuck 14. The sixth driving component is used to drive the rotating chuck 14 to rotate, so that the entire vertical furnace body 1 rotates, enabling some hanging positions on the first support frame to correspond to the first-stage transmission device 3, facilitating the transfer of the vertical boat 5 between the vertical furnace body 1 and the first-stage transmission device 3, and improving the transmission efficiency. A guide plate can also be arranged on the rotating chuck 14, and the guide plate can make the rotation direction of the turntable chuck more stable and consistent.

[0085] In the vertical heat treatment equipment provided in this embodiment, a segmented loading and unloading structure is provided, which avoids the problem of the too long travel for direct loading and unloading by a single transmission device. The transmission travel of each stage of the transmission device is short, so that the operation can be completed in a short time, reducing the requirement for its strength, reducing deformation, and at the same time being beneficial to improving the utilization rate of the equipment space.

[0086] Embodiment Two:

[0087] Please also refer to Figure 5 , the vertical heat treatment equipment provided in this embodiment mainly includes a vertical furnace body 1, a temporary storage and cooling part 2, and a segmented loading and unloading structure. Among them, the segmented loading and unloading structure is used to transfer the vertical boat 5 between the vertical furnace body 1 and the temporary storage and cooling part 2. In addition, this vertical heat treatment equipment also includes electrical components, such as pumps.

[0088] As Figure 6 shown, multiple vertical furnace bodies 1 are arranged at intervals in the upper right part of the whole machine, and the temporary storage and cooling part 2 is arranged in the lower left part and / or upper left part of the whole machine. The temporary storage and cooling part 2 has multiple boat storage positions.

[0089] It should be understood that the number of vertical furnace bodies 1 and the number of boat storage positions in the temporary storage and cooling part 2 can be flexibly set according to actual needs. By way of example, there are 2 vertical furnace bodies 1 in this vertical heat treatment equipment, and the number of boat storage positions in the temporary storage and cooling part 2 is a multiple of 6.

[0090] It should also be understood that although there are multiple vertical furnace bodies 1, they share a segmented loading and unloading structure.

[0091] As Figure 6 、 Figure 7 shown, the segmented loading and unloading structure has a first-stage transmission device 3 and a second-stage transmission device 4. Among them, the first-stage transmission device 3 is located below the vertical furnace body 1 and is used to send the vertical boat 5 into or out of the vertical furnace body 1; the second-stage transmission device 4 is used to drive the vertical boat 5 to transfer between the temporary storage and cooling part 2 and the first-stage transmission device 3.

[0092] As Figure 8As shown, the first-stage transfer device 3 at least includes a second robotic arm structure and a moving platform.

[0093] The second robotic arm structure has a first-stage transfer member 35 and a second-stage transfer member 36 arranged vertically. The boat transfer path of the first-stage transfer member 35 in the vertical direction at least partially overlaps with the boat transfer path of the second-stage transfer member 36. The first-stage transfer member 35 and the second-stage transfer member 36 cooperate to segmentally transfer the vertical boat 5 in the vertical direction to send the vertical boat 5 into or out of the vertical furnace body 1.

[0094] The moving platform is connected to the second-stage transfer member 36 and is used to drive the second-stage transfer member 36 to move horizontally to transfer the vertical boat 5 between the second-stage transfer member 36 and the second-stage transfer device 4.

[0095] In this embodiment, the entire stroke of the first-stage transfer device 3 is decomposed into multiple short strokes, and at the same time, the overall space design is made more compact, thereby improving the transfer efficiency and the utilization of the equipment space.

[0096] As Figure 8 shown, the number of the first-stage transfer members 35 in the first-stage transfer device 3 is two, and the number of the second-stage transfer members 36 is one. The two first-stage transfer members 35 are symmetrically arranged on both sides of the second-stage transfer member 36 to transfer two vertical boats 5 each time.

[0097] Taking one first-stage transfer member 35 as an example, it at least includes: a second lifting guide rail 351, a lifting support frame 352, a second horizontal guide rail 353, a second support member 354, a third driving member, and a fourth driving member.

[0098] The second lifting guide rail 351 is arranged below the vertical furnace body 1 and on one side of the second-stage transfer member 36; the lifting support frame 352 is slidably arranged on the second lifting guide rail 351; the second horizontal guide rail 353 is arranged on the lifting support frame 352; the second support member 354 is slidably arranged on the second horizontal guide rail 353 to support the vertical boat 5; the third driving member is used to drive the lifting support frame 352 to move on the second lifting guide rail 351 to send the vertical boat 5 into or out of the vertical furnace body 1; the fourth driving member is used to drive the second support member 354 to move on the second horizontal guide rail 353 to receive the vertical boat 5 on the second-stage transfer member 36 or transfer the vertical boat 5 to the second-stage transfer member 36.

[0099] In this first-stage transfer member 35, the third driving member can adopt a motor driving mode or a cylinder driving mode, as long as it can drive the lifting support frame 352 to move up and down along the second lifting guide rail 351.

[0100] In this first-stage transfer component 35, the fourth driving component can adopt a motor driving mode or a cylinder driving mode, and it is only necessary to be able to drive the second supporting component 354 to move left and right along the second horizontal guide rail 353.

[0101] In this first-stage transfer component 35, the second supporting component 354 has a bottom base and a suspension bracket 3541 erected on the bottom base. A plurality of hooks 3542 for jointly suspending a vertical boat 5 are provided on the suspension bracket 3541.

[0102] As Figure 8 shown, the second-stage transfer component 36 at least includes: a third lifting guide rail 361, a second picking component 362, and a fifth driving component.

[0103] The third lifting guide rail 361 is arranged below the vertical furnace body 1 and is lower than the second lifting guide rail 351 in the vertical direction; the second picking component 362 is slidably arranged on the third lifting guide rail 361 and is used for picking up the vertical boat 5; the fifth driving component is used to drive the second picking component 362 to move on the third lifting guide rail 361.

[0104] In this second-stage transfer component 36, the fifth driving component can adopt a linear motor assembly, and the second picking component 362 is installed on the slider in the linear motor assembly.

[0105] In this second-stage transfer component 36, the second picking component 362 includes two symmetrically arranged second hooks 3621. Taking one hook as an example, a clamping groove for cooperating with a clamping part on the vertical boat 5 is provided on the side of the hook, and a supporting extension for supporting the bottom of the vertical boat 5 is provided at the lower end of the hook.

[0106] As Figure 5 、 Figure 7 shown, the second-stage transfer device 4 includes a boat-in transfer channel 47 and a boat-out transfer channel 48 that are arranged side by side and have opposite transfer directions. Part of the transfer paths of the boat-in transfer channel 47 and the boat-out transfer channel 48 correspond to the temporary storage and cooling part 2.

[0107] It should be understood that a belt transmission mechanism 471 is provided in the boat-in transfer channel 47 and the boat-out transfer channel 48 for transporting the vertical boat 5.

[0108] The vertical heat treatment equipment further includes an inserting sheet mechanism 6. The inserting sheet mechanism 6 is arranged at the leftmost side of the whole machine and can directly place the vertical boat 5 after inserting the sheets on the belt transmission mechanism 471 in the boat-in transfer channel 47 and transport it to a designated position through the belt transmission mechanism 471.

[0109] It should also be understood that the mobile platform in the first-stage transfer device 3 is arranged between the boat-in transfer channel 47 and the boat-out transfer channel 48, and is used to drive the second-stage transfer component 36 to move horizontally, so as to transfer the vertical boat 5 between the second-stage transfer component 36, the boat-in transfer channel 47 and the boat-out transfer channel 48. The mobile platform can drive the second-stage transfer component 36 to move by means of a motor or a cylinder.

[0110] To better understand the second-stage transfer device 4 provided in this embodiment, the following further elaborates on it:

[0111] The second-stage transfer device 4 includes a boat-in transfer channel 47 and a boat-out transfer channel 48. The inlet of the boat-in transfer channel 47 and the outlet of the boat-out transfer channel 48 are located on the same side of the whole machine. Although the conveying directions of the boat-in transfer channel 47 and the boat-out transfer channel 48 are opposite, the same-structured belt conveying mechanism 471 is used to convey the vertical boat 5 in both of them.

[0112] Taking the belt conveying mechanism 471 in the boat-in transfer channel 47 as an example for illustration, the belt conveying mechanism 471 includes a first conveyor belt, a second conveyor belt and a third conveyor belt that are connected end to end in sequence. The first conveyor belt corresponds to the temporary storage and cooling part 2, and the second conveyor belt and the third conveyor belt respectively correspond to a vertical furnace body 1. The start or stop of the first conveyor belt, the second conveyor belt and the third conveyor belt can be independently controlled.

[0113] In practical applications, the vertical boats 5 are conveyed in groups, and each group of vertical boats 5 can be composed of 6 vertical boats 5. By synchronously starting the first conveyor belt, the second conveyor belt and the third conveyor belt, a group of vertical boats 5 are first conveyed to the third conveyor belt, the third conveyor belt is stopped, and then a group of vertical boats 5 are conveyed to the second conveyor belt, and the second conveyor belt and the first conveyor belt are stopped. In the subsequent process of feeding 2 vertical boats 5 into the vertical furnace body 1 each time through the first-stage transfer device 3, if the second-stage transfer component 36 has taken away 2 vertical boats 5 this time, the second conveyor belt or the third conveyor belt is controlled to move a preset distance, so that the second-stage transfer component 36 can pick up the vertical boats 5 next time.

[0114] Of course, an additional boat handling device can also be provided to transfer the vertical boats 5 stored in the temporary storage and cooling part 2 to the boat-in transfer channel 47, and to transfer the vertical boats 5 in the boat-out transfer channel 48 to the temporary storage and cooling part 2.

[0115] As Figure 9 shown, the vertical furnace body 1 includes an outer furnace body 11, an inner furnace body 12 and a lower furnace door 13 that jointly enclose a heating chamber.

[0116] The upper end of the outer furnace body 11 is closed and the lower end is open. The upper end of the inner furnace body 12 is open and the lower end is closed. The lower furnace door 13 is detachably arranged at the lower end of the outer furnace body 11. Heating sources are provided on the outer furnace body 11 and the inner furnace body 12, and the heating sources can adopt heating wires, infrared lamp tubes or electromagnetic induction heating, etc.

[0117] A second boat support frame 51 for hanging a plurality of vertical boats 5 is arranged in the heating chamber, and the second boat support frame 51 is sleeved on the outer side of the inner furnace body 12. A plurality of hanging positions are annularly arranged on the second boat support frame 51, and each hanging position is connected with a clamping member on a vertical boat 5 in a clamping manner.

[0118] This vertical furnace body 1 further includes a seventh driving component 15. The seventh driving component 15 is arranged on the lower furnace door 13 and is connected to the second boat support frame 51. The second boat support frame 51 is driven to rotate by the seventh driving component 15 so that the wafers carried by the vertical boats 5 are heated evenly. The seventh driving component 15 also adopts magnetic fluid sealing to drive the second boat support frame 51 and the vertical boats 5 thereon to rotate while ensuring the sealing performance of the vertical furnace body 1.

[0119] In the vertical heat treatment equipment provided in this embodiment, a segmented loading and unloading structure is provided, which avoids the problem of too long travel for direct loading and unloading by a single transmission device, makes the travel of each section of the transmission device shorter, enables the operation to be completed in a shorter time, reduces the requirement for strength, reduces deformation, and is beneficial to improving the utilization rate of the equipment space.

[0120] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A vertical heat treatment equipment, characterized in that: include: A vertical furnace body, a temporary cooling section and a segmented loading and unloading structure; wherein the segmented loading and unloading structure has a first-stage transmission device and a second-stage transmission device; The first section transmission device is located below the vertical furnace body and is used to send the vertical boat into or out of the vertical furnace body; The second-stage transmission device is used to drive the vertical boat to transfer between the temporary storage and cooling section and the first-stage transmission device.

2. The vertical heat treatment equipment according to claim 1, characterized in that: The first transmission device comprises: A first horizontal guide rail, located below the vertical furnace body, one end of the first horizontal guide rail being located in a boat transfer area between the first section transmission device and the second section transmission device; a first supporting member, slidably disposed on the first horizontal guide rail, for supporting the vertical boat; a first driving component, used for driving the first supporting component to move on the first horizontal guide rail; The lifting and moving component is connected to the first horizontal guide rail and is used to drive the first horizontal guide rail and the first supporting component to move in a vertical direction so as to send the vertical boat into or out of the vertical furnace body.

3. The vertical heat treatment equipment according to claim 1 or 2, characterized in that: The second transmission device comprises: A first lifting guide rail, located at one side of the vertical furnace body, one end of the first lifting guide rail being located at a boat transfer area between the second section transmission device and the first section transmission device; a first manipulator structure, slidably disposed on the first lifting guide rail, the first manipulator structure comprising a first hanging component and a horizontal moving component, the first hanging component being disposed on the horizontal moving component and used to hang the vertical boat, the horizontal moving component being used to drive the first hanging component to move in a horizontal direction to send the vertical boat into or out of the temporary storage and cooling portion; The second driving component is used to drive the first manipulator structure to move on the first lifting guide rail.

4. The vertical heat treatment equipment according to claim 1, characterized in that: The first transmission device comprises: The second manipulator structure comprises a first-stage transmission component and a second-stage transmission component arranged vertically, wherein the boat transmission path of the first-stage transmission component along the vertical direction at least partially overlaps with the boat transmission path of the second-stage transmission component, and the first-stage transmission component cooperates with the second-stage transmission component to transport the vertical boat in sections along the vertical direction to send the vertical boat into or out of the vertical furnace body; The mobile platform is connected to the second-stage transmission component and is used to drive the second-stage transmission component to move horizontally so as to transfer the vertical boat between the second-stage transmission component and the second-stage transmission device.

5. The vertical heat treatment equipment according to claim 4, characterized in that: The first-stage transmission component comprises: A second lifting guide rail is arranged below the vertical furnace body and located on one side of the second-stage transmission component; A lifting support frame, slidably arranged on the second lifting guide rail; A second horizontal guide rail, arranged on the lifting support frame; a second supporting member, slidably disposed on the second horizontal guide rail, for supporting the vertical boat; a third driving component, used for driving the lifting support frame to move on the second lifting guide rail to send the vertical boat into or out of the vertical furnace body; The fourth driving component is used to drive the second supporting component to move on the second horizontal guide rail to receive the vertical boat on the second-stage transmission component or transfer the vertical boat to the second-stage transmission component.

6. The vertical heat treatment equipment according to claim 5, characterized in that: The second-stage transmission component comprises: A third lifting guide rail is arranged below the vertical furnace body and is lower than the second lifting guide rail in the vertical direction; A second hanging component, slidably disposed on the third lifting guide rail, and used for hanging the vertical boat; The fifth driving component is used to drive the second hanging component to move on the third lifting guide rail.

7. The vertical heat treatment equipment according to any one of claims 4 to 6, characterized in that: The second section transmission device comprises an inlet transmission channel and an outlet transmission channel which are arranged in parallel with each other and have opposite transmission directions, and part of the transmission paths of the inlet transmission channel and the outlet transmission channel correspond to the temporary storage cooling part; The mobile platform is arranged between the boat inlet transmission channel and the boat outlet transmission channel, and is used to drive the second-stage transmission component to move horizontally to transfer the vertical boat between the second-stage transmission component, the boat inlet transmission channel and the boat outlet transmission channel.

8. The vertical heat treatment equipment according to claim 1, characterized in that: The vertical furnace body comprises an outer furnace body, an inner furnace body and a lower furnace door which together form a heating chamber. A boat support frame for hanging a plurality of vertical boats is arranged in the heating chamber.

9. The vertical heat treatment equipment according to claim 8, characterized in that: The vertical furnace body also includes a rotating chuck and a sixth driving component respectively arranged on the lower furnace door. The sixth driving component is connected to the rotating chuck and is used to drive the vertical furnace body to rotate as a whole so that some of the hanging positions on the boat support frame correspond to the first section transmission device.

10. The vertical heat treatment equipment according to claim 1, characterized in that: The segmented loading and unloading structure conveys two vertical boats each time.

Images