Multi-layer multi-circle coil structure and inductor
By setting an insulating layer and designing a bearing coil in a multi-layer multi-roll coil structure, the problem of insufficient insulation in traditional design is solved, the product's voltage withstand voltage and electromagnetic performance is improved, and the product's miniaturization and manufacturing difficulty are reduced.
Patent Information
- Application Number
- CN202422155070.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-03
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-09-03
AI Technical Summary
In the existing semiconductor manufacturing, there are difficulties in insulation in multi-layer multi-roll coil structures, resulting in short circuits between layers or degradation of electromagnetic properties, affecting process accuracy and yield.
By setting an insulating layer in the coil gap of the multi-layer multi-roll coil structure, combining the design of the bearing coil, the alignment accuracy requirements are reduced, and an efficient insulating structure is formed by combining the welding layer and the insulating layer.
It effectively solves the insulation problem of multi-layer multi-roll coil structure, improves the product's voltage withstand and electromagnetic properties, reduces manufacturing difficulty, and promotes product miniaturization.
Smart Images
Figure CN222995216U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of electronic component manufacturing, in particular to a multi-layer multi-turn coil structure and an inductor. Background Art
[0002] In the semiconductor manufacturing process, coils are key components and are widely used in various process links, such as photolithography, etching, ion implantation, etc. Their performance directly affects the process accuracy and yield rate. The traditional design of semiconductor processing coils is mainly limited to double-layer multi-turn or multi-layer single-turn structures. Multi-layer single-turn structure: This type of design is made by etching multiple layers of conductive film on both sides of the insulating film to form a single-turn double-layer coil. Several single-turn double-layer coils are stacked and welded to form a multi-layer single-turn structure, such as Figure 1 . Double-layer multi-circle structure: such as Figure 2 The multi-layer film is etched into multi-turn coils on both sides of the insulating film, but due to the aspect ratio of etching, the double-layer multi-turn coil cannot be made high enough. Although this design meets the basic process requirements to a certain extent, with the continuous development of semiconductor technology, higher requirements are placed on the accuracy, stability and reliability of the coil.
[0003] Manufacturing multi-layer and multi-turn coils faces severe challenges in terms of insulation. As the number of coil layers increases and the layers need to be closely arranged to achieve efficient electromagnetic conversion, interlayer insulation becomes an insurmountable technical obstacle. The selection of insulating materials, the thickness of the insulating layer, and the optimized design of the interlayer insulation structure are all key factors affecting coil performance. If the insulation is insufficient, it is easy to cause short circuits between layers, causing equipment failures or even safety accidents; if the insulation is too thick, it will affect the electromagnetic performance and heat dissipation efficiency of the coil, reducing the overall process effect.
[0004] Therefore, there is an urgent need for a multi-layer and multi-turn coil structure that can effectively solve the multi-layer and multi-turn insulation problem while ensuring efficient electromagnetic conversion, and improve the accuracy, stability and reliability of the coil to adapt to the rapid development of semiconductor manufacturing technology. Utility Model Content
[0005] In order to solve the above problems, the purpose of the utility model is to provide a multi-layer multi-turn coil structure and inductor, by arranging an insulating layer in the coil gap to prevent short circuit between coils while improving the product's withstand voltage, thereby solving the insulation problem of the multi-layer multi-turn coil structure.
[0006] The utility model is realized by the following technical solutions:
[0007] A multi-layer multi-turn coil structure, comprising at least two sub-coils, a receiving coil arranged between two adjacent sub-coils, a welding layer arranged between the sub-coils and the receiving coil, and an insulating layer arranged in the coil gap of the coil in contact with the welding layer;
[0008] The sub-coil and the receiving coil each include a bottom coil, an insulating film arranged on the bottom coil, and a top coil arranged on the insulating film, wherein the insulating film is provided with a through hole, and the through hole corresponds to the starting end of the top coil and the end of the bottom coil respectively; contacts are arranged in the through hole, so that the bottom coil and the top coil located on both sides of the insulating film are in electrical contact;
[0009] The number of turns of the coils on both sides of the same welding layer is the same and greater than 1.
[0010] Furthermore, the starting ends and the ending ends of the coils on both sides of the welding layer are aligned respectively.
[0011] Furthermore, the line width of the receiving coil is smaller than the line width of the sub-coil.
[0012] An inductor comprises the above-mentioned multi-layer multi-turn coil structure and a magnet wrapping the multi-layer multi-turn coil structure.
[0013] Compared with the prior art, the technical solution of the utility model and its beneficial effects are as follows:
[0014] (1) The utility model sets an insulating layer in the coil gap of the sub-coil, thereby solving the problem of coil gap cavities, thereby meeting the insulation requirements of multi-layer and multi-turn coils. The line width of the receiving coil is smaller than the line width of the sub-coil, thereby reducing the alignment accuracy of the sub-coil and the receiving coil, and reducing the manufacturing difficulty; the height of the receiving coil is smaller than the height of the sub-coil, forming a coil structure with the same number of layers. The height of this structure is lower than the traditional process of connecting several sub-coils by soldering to form a multi-layer coil structure, which is conducive to product miniaturization.
[0015] (2) The number of turns of the opposite surface coils of adjacent sub-coils of the utility model can also be different. It is only necessary that the number of turns of the receiving coil located between the adjacent sub-coils is the same as the number of turns of the side on which the sub-coils are welded. By adopting a thinner and narrower receiving coil to achieve the connection of two sub-coils with different numbers of turns, a diversified design of multi-layer and multi-turn coils can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a cross-sectional view of a multi-layer single-turn coil structure of the prior art provided by the utility model;
[0017] Figure 2 It is a cross-sectional view of a double-layer multi-turn coil structure of the prior art provided by the utility model;
[0018] Figure 3 It is a cross-sectional view of a multi-layer multi-turn coil structure provided by an embodiment of the utility model;
[0019] Figures 4 - 9It is a schematic diagram of the manufacturing steps of the multi-layer multi-turn coil structure provided by the embodiment of the utility model;
[0020] Figure 10 is a cross-sectional view of a six-layer coil provided in an embodiment of the utility model;
[0021] Figures 11 - 15 for Figure 10 Exploded view of each coil.
[0022] Illustration Description:
[0023] Sub-coil-10; bottom coil-11; top coil-12; insulation mold-13; contact-14; receiving coil-20; welding layer-30; insulation layer-40, epoxy type solder paste-41;
[0024] First sub-coil-100; first contact-101; first electrode terminal 130;
[0025] First receiving coil-200; second contact-201;
[0026] Second sub-coil-300; third contact-301;
[0027] The second receiving coil-400; the fourth contact-401;
[0028] The third sub-coil-500; the fifth contact-501; the second electrode terminal-530. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.
[0030] See also Figure 3 A multi-layer multi-turn coil structure includes a sub-coil 10, a receiving coil 20, a welding layer 30 and an insulating layer 40. The sub-coils 10 and the receiving coils 20 are alternately stacked, that is, the receiving coil 20 is placed between two sub-coils 10, and the welding layer 30 is placed between the sub-coil 10 and the receiving coil 20, so that the adjacent sub-coils 10 and the receiving coil 20 are fixedly connected, and an insulating layer is arranged in the coil gap between the sub-coil 10 and the receiving coil 20 to prevent short circuit between the coils and improve the withstand voltage of the product, thereby solving the insulation problem of the multi-layer multi-turn coil structure.
[0031] The structures of the sub-coil 10 and the receiving coil 20 are both double-sided coil structures, specifically, they both include a bottom coil 11, an insulating film 13 disposed on the bottom coil 11, and a top coil 12 disposed on the insulating film 13. The insulating film includes a through hole (not shown), and the through holes correspond to the starting end of the top coil and the end of the bottom coil, respectively, so that the current flow path is the longest and the magnetic flux lines are cancelled due to the existence of redundant coil reverse current. Contacts 14 are provided in the through hole to make electrical contact between the bottom coil 11 and the top coil 12 located on both sides of the insulating film 13. It can be understood that the number of turns of the top coil and the bottom coil of the same sub-coil or the same receiving coil can be the same or different, and the specific coil pattern can be designed as needed.
[0032] The top coil and the bottom coil on both sides of the same welding layer have the same number of turns, that is, the top coil of the contacting sub-coil and the bottom coil of the receiving coil have the same number of turns, and the bottom coil of the contacting sub-coil and the top coil of the receiving coil have the same number of turns, thereby facilitating the welding of the receiving coil and the adjacent sub-coil into one.
[0033] Adjacent sub-coils with the same or different numbers of turns can be connected together through the receiving coil. In this embodiment, the line width of the receiving coil is smaller than the line width of the sub-coil, that is, the line spacing of the receiving coil is larger than the line spacing of the sub-coil, thereby reducing the alignment accuracy of the sub-coil and the receiving coil and reducing the manufacturing difficulty. The coil height of the receiving coil is smaller than the coil height of the sub-coil, forming a coil structure with the same number of layers. The structural height of this embodiment is lower than the traditional process of connecting several sub-coils by soldering to form a multi-layer coil structure, which is conducive to product miniaturization. The starting and ending ends of the coils on both sides of the welding layer are aligned respectively, so that the current flow path is the longest, and the magnetic flux line cancellation caused by the existence of redundant coil reverse current is avoided.
[0034] See also Figures 4 - 9 This embodiment also provides a method for manufacturing a multi-layer multi-turn coil structure. For a clearer illustration, the accompanying drawings show the steps for manufacturing a single coil structure. However, it can be understood that this manufacturing method is a full-plate process, including the following steps:
[0035] S1. Prepare a plurality of first full-page coils and second full-page coils. The first full-page coil includes a plurality of sub-coils arranged in an array, such as Figure 4 The second full-sheet coil includes a plurality of receiving coils arranged in an array, and Figure 5 Each sub-coil and receiving coil is a double-sided coil, and the number of turns of each coil is greater than 1.
[0036] The method for preparing a plurality of first full-page coils or a second full-page coil comprises:
[0037] S11. Lay the first conductive film;
[0038] S12. Etch a number of bottom coil patterns on the first conductive film, where the number of coil turns ≥ 1;
[0039] S13. Lay an insulating film above the first conductive film. Through holes are provided on the insulating film, and the through holes correspond to the ends of the bottom coils one by one;
[0040] S14. Set contacts in the through holes, and the upper end surfaces of the contacts protrude from the upper surface of the insulating film;
[0041] S15. Lay the second conductive film above the insulating film;
[0042] S16. Etch a number of top coil patterns on the second conductive film. The starting ends of the top coils correspond to the through holes one by one, the number of coil turns ≥ 1, and the top coils are in contact with the contacts to form a double-sided multi-turn coil structure, thereby obtaining a whole-board material containing a number of double-sided coils. Each bottom coil pattern in the whole board is the same, and each top coil pattern is the same. The number of turns of the top coil and the bottom coil in the same double-sided multi-turn coil structure can be the same or different.
[0043] Among them, if the coil height of the first whole-board coil is insufficient due to the etching depth-width ratio problem, the first whole-board coil can be electroplated to increase the height of the bottom coil and / or the top coil to the required height.
[0044] S2. Set welding layers on the upper and lower surfaces of the second whole-board coil, such as Figure 6 . Print epoxy-based soldering paste on the coil gaps of the first whole-board coil, such as Figure 7 .
[0045] S3. Alternately overlap the first whole-board coil and the second whole-board coil after being processed in S2 to form a whole-board coil group. The number of turns of the contacting sub-coils and the receiving coils is the same and they are aligned with each other, such as Figure 8 . In S1, the line width of the receiving coil 20 is smaller than the line width of the sub-coil 10, and the line spacing of the receiving coil is larger than the line spacing of the sub-coil, thereby reducing the alignment accuracy between the sub-coil and the receiving coil and lowering the manufacturing difficulty. The coil height of the second whole-board coil is smaller than the coil height of the first whole-board coil, making the height of the new layer formed by welding the sub-coil and the receiving coil smaller than the height of the two-layer coils of the sub-coil, thus facilitating the miniaturization of the product.
[0046] S4. Thermally press the overlapped whole-board coil group to form a multi-layer multi-turn coil group, such as Figure 9 . After heating, the epoxy-based soldering paste can have a wetting soldering effect at high temperature, and at the same time, the resin can be cured at high temperature to form an insulating layer, thus solving the problem of voids in the coil gaps.
[0047] Refer toFigures 10 - 15 Taking the six-layer multi-turn coil structure formed by three sub-coils and two connecting coils as an example, the multi-layer coil structure of the present utility model will be described.
[0048] Figure 11 As shown in the figure, the structure of the first sub-coil 100 is shown. The a-side is viewed from the bottom coil direction, and the b-side is viewed from the top coil direction. The starting end of the bottom coil 110 of the first sub-coil 100 is the first electrode end 130. A through hole is provided in the insulating film corresponding to the end of the bottom coil 110 and a first contact 101 is provided. Current flows in from the first electrode 130, reaches the end of the bottom coil 110 of the first sub-coil 100, and then flows through the first contact 101 to the starting end of the top coil 120 of the first sub-coil 100, and finally flows out from the end of the top coil 120.
[0049] Figure 12 As shown in the figure, the structure of the first connecting coil 200 is shown. The a-side is viewed from the bottom coil direction, and the b-side is viewed from the top coil direction. The bottom coil 210 of the first connecting coil 200 is connected and electrically conducted with the top coil 120 of the first sub-coil 100 through a welding layer, that is, the two form the second layer. The bottom coil 210 and the top coil 120 are aligned end to end, that is, the current flow path length and direction of the bottom coil 210 are the same as those of the top coil 120, avoiding the cancellation of magnetic induction lines caused by the existence of reverse current in redundant coils. Current flows out from the end of the bottom coil 210 of the first connecting coil 200, flows into the top coil 220 of the first connecting coil 200 through the second contact 201, and then reaches the end of the top coil 220.
[0050] Figure 13 As shown in the figure, the structure of the second sub-coil 300 is shown. The a-side is viewed from the bottom coil direction, and the b-side is viewed from the top coil direction. The bottom coil 310 of the second sub-coil 300 is aligned end to end with the top coil 220 of the first connecting coil 200 and is connected and electrically conducted through a welding layer, that is, the current flow path length and direction of the bottom coil 310 are the same as those of the top coil 220. Current flows out from the end of the top coil 310 of the second sub-coil 300, flows into the top coil 320 of the second sub-coil 300 through the third contact 301, and then reaches the end of the top coil 320.
[0051] Figure 14In it, the structure of the second receiving coil 400 is shown. The a side is a top view from the bottom coil direction, and the b side is a top view from the top coil direction. The bottom coil 410 of the second receiving coil 400 and the top coil 320 of the second sub-coil 300 are aligned end to end and connected and electrically conducted through the welding layer. The current flows out from the end of the bottom coil 410 of the second receiving coil 400, flows into the top coil 420 of the second receiving coil 400 through the four contacts 401, and then reaches the end of the top coil 420.
[0052] Figure 15 In it, the structure of the third sub-coil 500 is shown. The a side is a top view from the bottom coil direction, and the b side is a top view from the top coil direction. The bottom coil 510 of the third sub-coil 500 and the top coil 420 of the second receiving coil 400 are aligned end to end and connected and electrically conducted through the welding layer. That is, the current flow path length and direction of the bottom coil 510 of the third sub-coil 500 are the same as those of the top coil 420 of the second receiving coil 400. The current flows out from the end of the top coil 510 of the third receiving coil 500, flows into the top coil 520 of the third sub-coil 500 through the fifth contact 501, and then reaches the end of the top coil 520, that is, flows out from the second electrode terminal 530.
[0053] In this embodiment, the number of turns of the bottom coil and the top coil of adjacent sub-coils is the same. It can be understood that the number of turns of the opposite face coils of adjacent sub-coils can also be different. It is only necessary that the number of turns of the receiving coil located between adjacent sub-coils is the same as the number of turns of the side surface welded to the sub-coil. A thinner and narrower receiving coil is used to connect two sub-coils with different numbers of turns, so as to realize the diversified design of multi-layer and multi-turn coils.
[0054] This embodiment also provides an inductor, including the aforementioned multi-layer and multi-turn coil structure, and further including a magnet covering the multi-layer and multi-turn coil structure.
[0055] The above description shows and describes the preferred embodiments of the present invention. It should be understood that the present invention is not limited to the form disclosed herein, should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be changed within the scope of the present invention concept through the above teachings or the technology or knowledge in related fields. And the changes and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should all be within the protection scope of the appended claims of the present invention.
Claims
1. A multi-layer multi-turn coil structure, characterized in that: The invention comprises at least two sub-coils, a receiving coil arranged between two adjacent sub-coils, a welding layer arranged between the sub-coils and the receiving coil, and an insulating layer arranged in the coil gap of the coil in contact with the welding layer; The sub-coil and the receiving coil each include a bottom coil, an insulating film arranged on the bottom coil, and a top coil arranged on the insulating film, wherein the insulating film is provided with a through hole, and the through hole corresponds to the starting end of the top coil and the end of the bottom coil respectively; contacts are arranged in the through hole, so that the bottom coil and the top coil located on both sides of the insulating film are in electrical contact; The number of turns of the coils on both sides of the same welding layer is the same and greater than 1.
2. A multi-layer multi-turn coil structure according to claim 1, characterized in that: The starting ends and the ending ends of the coils on both sides of the welding layer are aligned respectively.
3. The multi-layer multi-turn coil structure according to claim 1, characterized in that: The line width of the receiving coil is smaller than the line width of the sub-coil.
4. The multi-layer multi-turn coil structure according to claim 1, characterized in that: The coil height of the receiving coil is smaller than the coil height of the sub-coil.
5. The multi-layer multi-turn coil structure according to claim 1, characterized in that: The number of turns of the top coil and the bottom coil of the same sub-coil or the same receiving coil is the same or different.
6. An inductor, characterized in that: It comprises the multi-layer multi-turn coil structure as claimed in any one of claims 1 to 5, and also comprises a magnet covering the multi-layer multi-turn coil structure.