Wafer storage device

Abstract

The utility model discloses a wafer storage device, and relates to the technical field of wafer storage, the wafer storage device comprises a storage device body, four drawing grooves are symmetrically and fixedly connected in the storage device body, the interiors of two corresponding drawing grooves in the horizontal direction are respectively and slidably connected with a placing piece, and the placing pieces are arranged on the storage device body. And holding handles are symmetrically and fixedly connected to the bottom ends of the placing pieces, the holding handles are used for facilitating a user to hold and take the placing pieces, and a sealing piece is rotationally connected to an outer opening of the storage device body. The wafer storage device has the main advantage that a worker does not make direct contact with wafers in the storage process through the drawing groove, the placing piece and the holding handle. By preventing a worker from directly contacting the wafer, the risk caused by artificial pollution can be reduced. And workers do not directly contact the wafer, so that the risk of damage caused by accidental collision or friction can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer storage, and particularly relates to a storage device for wafers. Background Art

[0002] Wafers are important materials in semiconductor manufacturing and are used to manufacture integrated circuit chips. In the semiconductor manufacturing process, wafers play a key role. The storage of wafers usually involves the preservation, management, tracking, and recording of wafers to ensure the smooth progress of the production process.

[0003] In the existing process of storing wafers, they are generally stored in a sterile and dust-free enclosed space. When manually placing them into the space before storage, workers may have direct contact with the wafers, resulting in contamination of the wafers.

[0004] In the above solution, the problem that workers may have direct contact with the wafers occurs. By fixedly connecting a handle to the bottom end of the storage box, the problem of workers having direct contact with the wafers can be solved.

[0005] However, in the process of storing wafers, after the wafers are placed, if the whole batch of wafers needs to be transported, due to the fixation of the device, it cannot be quickly transported, which will lead to the stagnation or delay of the production line, thus affecting production efficiency and output. Moreover, if a single wafer needs to be taken out, manual handling may cause contamination of the wafer, greatly increasing the damage rate of the wafer. Summary of the Utility Model

[0006] The purpose of the utility model is to solve the deficiencies existing in the prior art, and a storage device for wafers is proposed. The technical problem it solves is that in the existing storage device, workers may have direct contact with the wafers during the storage process.

[0007] To achieve the above purpose, the utility model adopts the following technical scheme:

[0008] A storage device for wafers includes a storage device body. Four sliding slots are symmetrically and fixedly connected inside the storage device body. Two sliding slots corresponding to the horizontal direction are both slidably connected with placing members. The bottom ends of the placing members are symmetrically and fixedly connected with end placing handles, and the end placing handles are used to facilitate the user to pick up the placing members. A closing member is rotatably connected to the opening of the storage device body. Thus, it can prevent workers from having excessive contact with the wafers during the storage of wafers.

[0009] As a further improvement of the present utility model, a heat dissipation port is provided on one side of the storage device body away from the closing member, a pushing member is fixedly connected to one side of the storage device body away from the closing member, and universal wheels that can be fixed are fixedly connected to the four corners of the bottom end of the storage device body. Thereby, it is convenient to transport the wafers.

[0010] As a further improvement of the present utility model, wafer bodies are placed at the openings at the top ends of the placing members.

[0011] As a further improvement of the present utility model, a sliding groove is provided inside the closing member, a sliding block is slidably connected inside the sliding groove, one end of the sliding block away from the closing member is fixedly connected to a connecting rod, and the bottom end of the connecting rod is rotatably connected to a rotating tube. Thereby, the up-and-down movement of the grasping mechanism can be controlled.

[0012] As a further improvement of the present utility model, an elastic structure is fixedly connected inside the rotating tube, a hand-held rod is fixedly connected to one side of the elastic structure away from the rotating tube, and a grasping mechanism is fixedly connected to one end of the hand-held rod away from the rotating tube. Thereby, a single wafer can be clamped.

[0013] As a further improvement of the present utility model, a constant temperature control mechanism is provided inside the storage device body. Thereby, the temperature of the wafer storage environment can be controlled.

[0014] As a further improvement of the present utility model, soft pads are provided at the openings inside the placing members. Thereby, the wafers can be prevented from being scratched.

[0015] As a further improvement of the present utility model, the elastic structure adopts an elastic cord, and the grasping mechanism adopts a grasping clip. The elastic cord can change direction better compared with other elastic structures, and the grasping clip is simpler and easier to operate compared with other grasping mechanisms.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] 1. Through the pull-out groove, the placing member and the end placing handle, a worker holds the end placing handle and aligns the convex part on the side of the placing member with the pull-out groove and pushes it in, so that the worker does not have direct contact with the wafers during the storage process. Since wafers have very high requirements for cleanliness during the manufacturing process, even a tiny contamination may have a serious impact on the wafer quality. By avoiding direct contact between workers and wafers, the risk introduced by human contamination can be reduced. Moreover, wafers are very fragile, and even a tiny scratch or damage will affect the function of the wafers. Workers not having direct contact with the wafers can reduce the risk of damage caused by accidental collisions or friction. Some chemicals or processed wafers are also harmful to the human body. By avoiding direct contact between workers and wafers, potential health risks can be reduced and the safety of the working environment can be improved.

[0018] 2. Through the pusher, the fixable universal wheels, and the heat dissipation port, when it is necessary to transfer the entire wafer, the user drags the pusher, and the storage device body is driven by the fixable universal wheels to move, thus achieving the effect of transfer. Compared with directly carrying the wafer, the use of fixable universal wheels reduces the chance of direct contact with the wafer, reduces the risks of contamination and damage, and minimizes the possibility of electrostatic discharge. Moreover, more wafers can be transported at one time, improving the transfer efficiency, reducing the number of round trips, and saving time and labor. When transfer is not required, the pusher can be made to contact the wall, so that there is a certain distance between the heat dissipation port and the wall, which facilitates the heat dissipation of the constant temperature control mechanism inside the storage device body. Better heat dissipation capacity helps to maintain a constant temperature, reduce temperature fluctuations, and a stable temperature environment can prevent the wafer from generating stress due to thermal expansion or contraction. Moreover, the efficient heat dissipation design can reduce the load on the refrigeration system and lower energy consumption. The energy-saving effect can reduce operating costs and meet environmental protection requirements.

[0019] 3. Through the rotating tube, the hand-held rod, the grasping mechanism, and the elastic structure, when it is necessary to take out a single wafer, the wafer is clamped and handled by the grasping mechanism, thus preventing the worker from directly contacting the wafer. The grease, sweat, and particles on the human skin may contaminate the wafer surface. Avoiding direct contact can maintain the cleanliness of the wafer. Moreover, it reduces the differences in manual operations, improves the consistency and repeatability of the production process, and helps to standardize the production process. Some wafer manufacturing processes may involve harmful substances, and avoiding direct contact can also protect workers from potential health risks. Description of the Drawings

[0020] Figure 1 It is a schematic structural diagram of the present utility model.

[0021] Figure 2 It is a schematic structural diagram of another angle of the present utility model.

[0022] Figure 3 It is a schematic structural diagram of the storage device body and the draw-out slot in the present utility model.

[0023] Figure 4 It is a schematic structural diagram of the placing member and the end placing handle in the present utility model.

[0024] Figure 5 It is a schematic structural diagram of the rotating tube, the hand-held rod, and the grasping mechanism in the present utility model.

[0025] Figure 6 It is a front view sectional structural diagram of the rotating tube in the present utility model.

[0026] In the figure: 101 is the storage device body; 102 is the closure; 103 is the pusher; 104 is the fixed universal wheel; 105 is the draw groove; 106 is the heat dissipation port; 107 is the sliding groove; 108 is the placement member; 109 is the end placement handle; 201 is the sliding block; 202 is the connecting rod; 203 is the rotating tube; 204 is the hand-held rod; 205 is the grasping mechanism; 206 is the elastic structure; 300 is the wafer body. Detailed implementation manners

[0027] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe the detailed implementation manners of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein. Those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific implementations disclosed below.

[0028] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right", and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation manners.

[0029] As shown in the figure, a storage device for wafers includes a storage device body 101, a draw groove 105, a placement member 108, an end placement handle 109, and a wafer body 300.

[0030] When a user needs to store a wafer, the user first opens the closure 102, and then holds the end placement handle 109 fixedly connected to the bottom end of the placement member 108. The user aligns the protrusions on both sides of the placement member 108 with the draw groove 105, and then pushes the placement member 108 together with the wafer body 300 into the storage device body 101, so that the worker does not have direct contact with the wafer during the storage process. Since the wafer has very high requirements for cleanliness during the manufacturing process, even a tiny contamination may have a serious impact on the wafer quality. By avoiding direct contact between the worker and the wafer, the risk introduced by human contamination can be reduced.

[0031] When the wafer needs to be transported, after lifting the fixing part of the fixed universal wheel 104 to cancel the fixation, the wafer body 300 inside the storage device body 101 can be quickly transported by the push of the pusher 103. Compared with directly handling the wafer, the fixed universal wheel 104 reduces the chance of directly contacting the wafer, reduces the risks of contamination and damage, and minimizes the possibility of electrostatic discharge. Moreover, more wafers can be transported at one time, improving the transportation efficiency, reducing the number of round trips, and saving time and labor.

[0032] Furthermore, when not in transportation, push the storage device body 101 so that the pusher 103 fits against the wall. At this time, there will be a certain distance between the heat dissipation port 106 on the side of the storage device body 101 and the wall, thus achieving the effect of facilitating the heat dissipation of the constant temperature control mechanism inside the storage device body 101 through the heat dissipation port 106. Better heat dissipation capacity helps maintain a constant temperature, reduces temperature fluctuations, and a stable temperature environment can prevent the wafer from generating stress due to thermal expansion or contraction. Moreover, the efficient heat dissipation design can reduce the load of the refrigeration system and lower energy consumption.

[0033] Furthermore, when a wafer needs to be taken separately, first rotate the rotating tube 203, so that both the handheld rod 204 and the grasping mechanism 205 are taken out. Then, move the rotating tube 203 up and down to move the grasping mechanism 205 to a suitable horizontal position. Then, pull the handheld rod 204 to make the elastic structure 206 on the side of the handheld rod 204 undergo elastic deformation. Then, hold the handheld rod 204 and insert the grasping mechanism 205 into the storage device body 101 to clamp the wafer body 300, thus preventing the worker from directly contacting the wafer. The grease, sweat, and particles on the human skin may contaminate the wafer surface, and avoiding direct contact can maintain the cleanliness of the wafer.

[0034] The advantages of the present utility model are as follows: 1) It can prevent the worker from directly contacting the wafer during the storage process, and by avoiding direct contact between the worker and the wafer, the risk introduced by human contamination can be reduced. 2) It can transport more wafers at one time, improving the transportation efficiency, reducing the number of round trips, and saving time and labor. 3) It is convenient for the constant temperature control mechanism to dissipate heat. Better heat dissipation capacity helps maintain a constant temperature, reduces temperature fluctuations, and a stable temperature environment can prevent the wafer from generating stress due to thermal expansion or contraction. 4) It prevents the worker from directly contacting the wafer. The grease, sweat, and particles on the human skin may contaminate the wafer surface, thereby maintaining the cleanliness of the wafer.

[0035] The above are only the preferred specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution and the inventive concept of the present utility model, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present utility model.

Claims

1. A wafer storage device, comprising a storage device body (101), characterized in that: The storage device body (101) is symmetrically and fixedly connected with four drawer slots (105) inside, and two drawer slots (105) corresponding to each other in the horizontal direction are slidably connected with display pieces (108) inside, and the bottom ends of the display pieces (108) are symmetrically and fixedly connected with end placement handles (109), and the end placement handles (109) are used to facilitate users to take out the display pieces (108), and the external opening of the storage device body (101) is rotatably connected with a closing piece (102), and a pushing piece (103) is fixedly connected to the side of the storage device body (101) away from the closing piece (102), and the four corners of the bottom end of the storage device body (101) are fixedly connected with fixed handles (109). A fixed universal wheel (104), a sliding groove (107) is provided inside the closing member (102), a sliding block (201) is slidably connected inside the sliding groove (107), one end of the sliding block (201) away from the closing member (102) is fixedly connected to a connecting rod (202), the bottom end of the connecting rod (202) is rotatably connected to a rotating tube (203), an elastic structure (206) is fixedly connected inside the rotating tube (203), a hand-held rod (204) is fixedly connected to a side of the elastic structure (206) away from the rotating tube (203), and one end of the hand-held rod (204) away from the rotating tube (203) is fixedly connected to a grabbing mechanism (205).

2. The wafer storage device according to claim 1, characterized in that: A heat dissipation opening (106) is provided on a side of the storage device body (101) away from the sealing member (102).

3. The wafer storage device according to claim 1, characterized in that: A wafer body (300) is placed at the top opening of the display piece (108).

4. The wafer storage device according to claim 1, characterized in that: A constant temperature control mechanism is arranged inside the storage device body (101).

5. The wafer storage device according to claim 1, characterized in that: The internal openings of the display pieces (108) are all provided with soft cushions.

6. The wafer storage device according to claim 5, characterized in that: The elastic structure (206) adopts an elastic rope, and the grabbing mechanism (205) adopts a grabbing clamp.

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