Combined gas spraying equipment

Abstract

The utility model relates to the technical field of gas spraying equipment, in particular to combined gas spraying equipment, and aims to solve the problem that the operation cost of an enterprise is increased due to regular maintenance and replacement of a gas spraying head. The combined gas spraying equipment comprises an upper connecting ring and a lower connecting ring which are provided with external threads, the upper ends of the connecting rings are communicated with a gas transmission module, and the lower ends of the connecting rings are communicated with a vacuum reaction chamber; the dispersing net is arranged at the lower end of the connecting ring, and a plurality of air outlets are uniformly formed in the surface.

Description

Technical Field

[0001] The utility model relates to the technical field of testing equipment, in particular to a combined gas spraying device. Background Art

[0002] In the field of semiconductor manufacturing equipment, a gas showerhead is a key piece of equipment, mainly used to evenly spray various precursor gases into the reaction chamber for processes such as chemical vapor deposition, etching, and cleaning. In these processes, the design and performance of the gas showerhead have an important impact on the final manufacturing results.

[0003] Existing gas showerheads usually consist of multiple small holes. By adjusting parameters such as the size, distribution, shape, and spraying angle of the holes, the spraying effect of the gas can be controlled. Although existing gas showerheads meet the requirements of semiconductor manufacturing to a certain extent, there are still some problems. First, due to the complex structure of the gas showerhead, the manufacturing cost is relatively high, generally ranging from several hundred thousand to more than a million. Since the gas showerhead will be corroded and worn during use, it needs to be maintained and replaced regularly, increasing the operating cost of the enterprise. Summary of the Invention

[0004] In view of this, the purpose of the utility model is to provide a combined gas spraying device to solve the problem that the regular maintenance and replacement of the gas showerhead increase the operating cost of the enterprise.

[0005] Based on the above purpose, the utility model provides a combined gas spraying device, including a connecting ring with external threads on both the upper and lower ends. The upper end is connected to the gas transmission module, and the lower end is connected to the vacuum reaction chamber; a dispersion net is arranged at the lower end of the connecting ring, and a number of air outlet holes are evenly arranged on the surface.

[0006] As a further improvement of the present application, the air outlet holes are round holes with a diameter of 0.5 mm.

[0007] As a further improvement of the present application, the distance between adjacent air outlet holes is 1 mm.

[0008] As a further improvement of the present application, the side view of the dispersion net is an inverted isosceles trapezoid, and air outlet holes are evenly arranged on its surface.

[0009] As a further improvement of the present application, the dispersion net is made of stainless steel material.

[0010] As a further improvement of the present application, an annular groove is arranged on the upper surface of the connecting ring, and a sealing ring is arranged in the annular groove. One end of the gas transmission module connected to the connecting ring has an internal thread and also has a stepped inner ring inside. The stepped inner ring contacts the end face of the connecting ring and cooperates with the sealing ring for sealing.

[0011] Advantages of the present utility model: By replacing the connecting ring and the dispersion net instead of the overall replacement in the prior art, the huge cost caused by regular maintenance and replacement of the entire gas spray head is effectively reduced.

[0012] By setting the air outlet holes as round holes with a diameter of 0.5 mm, evenly distributed with a spacing of 1 mm, it is ensured that the gas can be evenly sprayed into the chamber, improving the quality and uniformity of the thin film. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only those of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 Structural schematic diagram of a combined gas spray device according to an embodiment of the present utility model;

[0015] Figure 2 Side view structural schematic diagram of the combination of the connecting ring and the dispersion net of a combined gas spray device according to an embodiment of the present utility model;

[0016] Figure 3 Top view structural schematic diagram of the combination of the connecting ring and the dispersion net of a combined gas spray device according to an embodiment of the present utility model;

[0017] Figure 4 Structural schematic diagram of the connection between the gas transmission module and the connecting ring of a combined gas spray device according to an embodiment of the present utility model.

[0018] The labels in the figure are:

[0019] 1, connecting ring; 11, annular groove; 12, sealing ring; 2, dispersion net; 3, gas transmission module; 31, stepped inner ring; 4, vacuum reaction chamber; 5, air outlet hole. Detailed Embodiments

[0020] To make the purpose, technical solutions and advantages of the present utility model clearer, the following further details the present utility model in conjunction with specific embodiments.

[0021] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in this utility model should have the ordinary meanings understood by those with general skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. Words such as "connected" or "linked" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to represent relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0022] As Figure 1 shown, a combined gas spraying device includes a connecting ring 1, both the upper and lower parts of which are provided with external threads. The upper end is communicated with the gas transmission module 3, and the lower end is communicated with the vacuum reaction chamber 4; a dispersion net 2 is arranged at the lower end of the connecting ring 1, and a plurality of air holes 5 are evenly arranged on the surface.

[0023] By replacing the connecting ring and the dispersion net instead of the whole replacement in the prior art, the huge cost caused by regular maintenance and replacement of the whole gas spray head is effectively reduced.

[0024] The air hole 5 is a round hole with a diameter of 0.5 mm. The distance between adjacent air holes is 1 mm. By setting the air holes as round holes with a diameter of 0.5 mm, evenly distributed and with a distance of 1 mm, it is ensured that the gas can be evenly sprayed into the vacuum reaction chamber 4, improving the quality and uniformity of the thin film.

[0025] In order to spray more evenly into the vacuum reaction chamber 4, the side view of the dispersion net 2 is an inverted isosceles trapezoid, and air holes 5 are evenly arranged on its surface. In this way, the dispersion net 2 will partially penetrate into the vacuum reaction chamber 4 and discharge gas evenly inside it.

[0026] In order to reduce costs, ensure corrosion resistance and easy cleaning, the dispersion net 2 is made of stainless steel material.

[0027] In order to ensure sealing, an annular groove 11 is provided on the upper surface of the connecting ring 1, a sealing ring 12 is arranged in the annular groove 11, an internal thread is provided at one end of the gas transmission module 3 connected to the connecting ring 1, and a stepped inner ring 31 is further arranged inside, and the stepped inner ring 31 contacts the end surface of the connecting ring 1 and cooperates with the sealing ring 12 for sealing.

[0028] Those of ordinary skill in the art should understand that the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the present invention as described above, which are not provided in detail for the sake of brevity.

[0029] The present invention is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A combined gas spraying device, characterized in that: include A connecting ring (1), both upper and lower of which are provided with external threads, the upper end of which is connected to the gas transmission module (3) and the lower end of which is connected to the vacuum reaction chamber (4); The dispersion net (2) is arranged at the lower end of the connecting ring (1) and has a plurality of air outlet holes (5) evenly arranged on its surface.

2. The combined gas spraying equipment according to claim 1, characterized in that: The air outlet hole (5) is a circular hole with a diameter of 0.5 mm.

3. The combined gas spraying equipment according to claim 2, characterized in that: The distance between adjacent air outlet holes is 1 mm.

4. The combined gas spraying equipment according to any one of claims 1 to 3, characterized in that: The side view of the dispersion net (2) is an inverted isosceles trapezoid, and the surface of the dispersion net (2) is evenly provided with air outlet holes (5).

5. The combined gas spraying equipment according to claim 1, characterized in that: The dispersion net (2) is made of stainless steel.

6. The combined gas spraying equipment according to claim 1, characterized in that: The upper surface of the connecting ring (1) is provided with an annular groove (11), and a sealing ring (12) is provided inside the annular groove (11). One end of the gas transmission module (3) connected to the connecting ring (1) is provided with an internal thread, and a stepped inner ring (31) is also provided inside. The stepped inner ring (31) contacts the end surface of the connecting ring (1) and cooperates with the sealing ring (12) to seal.

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