Adjustable cushion block for feeding table of height measurement grinding and polishing all-in-one machine

Abstract

The utility model discloses an adjustable cushion block for a feeding table of a height measurement grinding and polishing all-in-one machine, which comprises a cushion block (2) embedded in a base (1), the upper part of the cushion block (2) extends out of a shell of the base (1), the lower part of the base (1) is provided with an adjusting assembly (3) and a fixing assembly (4), and the output ends of the adjusting assembly (3) and the fixing assembly (4) are in contact with the bottom of the cushion block (2); a lifting shaft (31) is arranged in the middle of the adjusting assembly (3), and a lifting adjusting knob (32) is arranged outside the lifting shaft (31) in a sleeving manner; a supporting column (41) is arranged in the middle of the fixing assembly (4), and the bottom of the supporting column (41) is connected with a fixing rotary knob (42). The silicon rod grinding and polishing device has the advantages that adaptability and precision of silicon rod grinding and polishing machining are improved, machining errors are reduced, operation procedures are simplified, and therefore production efficiency and product quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material processing equipment, in particular to an adjustable cushion block for a loading table of a high-precision grinding and polishing machine. Background Technique

[0002] In the field of semiconductor material processing, especially in the grinding and polishing process of silicon rods, the design of the loading table has an important impact on the efficiency and precision of the entire processing process. Traditional loading tables usually use fixed cushion blocks to support and position the silicon rods to be processed. This design can meet the basic requirements of silicon rod processing to a certain extent, but there are still defects, specifically manifested as follows:

[0003] (1) Limited adaptability: Fixed cushion blocks are difficult to adapt to silicon rods of different sizes and shapes. Especially in mass production, when silicon rods of different specifications need to be frequently replaced, the limitations of fixed cushion blocks will reduce the overall processing efficiency;

[0004] (2) Limited precision: Since fixed cushion blocks cannot be finely adjusted according to the specific conditions of silicon rods, inaccurate positioning may occur during the processing process, thus affecting the processing precision;

[0005] (3) Complicated operation: Each time a silicon rod of a different specification is replaced, the position and attitude of the cushion block need to be manually adjusted, which not only increases the complexity of the operation, but also prolongs the processing time and reduces the production efficiency. Content of the Utility Model

[0006] The purpose of the utility model is to solve the problems of poor adaptability, limited precision, time-consuming and laborious of the existing cushion blocks, and provide an adjustable cushion block for a loading table of a high-precision grinding and polishing machine, improve the adaptability and precision of silicon rod grinding and polishing processing, reduce processing errors, simplify the operation process, and thus improve production efficiency and product quality.

[0007] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0008] An adjustable cushion block for a loading table of a high-precision grinding and polishing machine, including a cushion block embedded in a base, the upper part of the cushion block extends out of the housing of the base, an adjusting component and a fixing component are arranged at the lower part of the base, the adjusting component is arranged directly opposite to the middle part of the cushion block, the fixing component is arranged on both sides of the adjusting component, and the output ends of the adjusting component and the fixing component are in contact with the bottom of the cushion block for adjusting and fixing the cushion block through the adjusting component and the fixing component;

[0009] The middle part of the adjusting assembly is provided with a lifting shaft. The upper part of the lifting shaft contacts the lower surface of the cushion block. A lifting adjustment knob is sleeved outside the lifting shaft, and the two form a rotational guiding fit. The side surface of the lifting adjustment knob protrudes from the side surface of the base, so as to control the lifting of the lifting shaft through the knob, thereby adjusting the height of the cushion block;

[0010] The middle part of the fixing assembly is provided with a support column. The top of the support column contacts the lower surface of the cushion block. The bottom of the support column is connected to a fixing knob. The side surface of the fixing knob protrudes from the side surface of the base, so as to adjust the height difference between the two sides of the cushion block through the knob, thereby adjusting the inclination angle of the cushion block.

[0011] Further, the base is of a rectangular structure and is provided with a cushion block groove inside. The bottom of the cushion block groove is communicated with a group of vertical adjustment cavities. The cushion block is arranged in the cushion block groove, and the adjusting assembly and the fixing assembly are respectively arranged in the corresponding adjustment cavities.

[0012] Further, the adjusting assembly is a screw lifting mechanism, a hydraulic lifting mechanism, a pneumatic or electric adjusting mechanism.

[0013] Further, the fixing knob of the fixing assembly is of a disc-shaped structure. The support column is arranged at the center of the fixing knob, and the support column and the fixing knob are of an integrally formed structure.

[0014] Further, the upper surface of the cushion block is set as a support surface for stably supporting the silicon rod. The support surface is an elastic arc surface and is adapted to the outer surface of the silicon rod.

[0015] Compared with the prior art, the advantages of the technical solution of the present utility model are specifically as follows:

[0016] (1) Due to the support surface design of the cushion block main body and the introduction of the adjustment mechanism, the cushion block of the present utility model can flexibly adapt to silicon rods of different sizes and shapes, thereby improving the adaptability of silicon rod grinding and polishing processing. In practical applications, by adjusting the height of the cushion block, the inclination angle of the silicon rod can be adjusted, and silicon rods within different diameter ranges can be adapted, greatly reducing the equipment adjustment time caused by the replacement of silicon rod specifications;

[0017] (2) The fine adjustment function of the present utility model enables the silicon rod to achieve more accurate positioning and stable support during the processing process, thereby reducing the processing error and improving the processing accuracy. The optimized cushion block design can improve the processing accuracy to ±0.01 mm, meeting the requirements of high-precision processing;

[0018] (3) Compared with the fixed cushion block, the adjustable cushion block of the present utility model simplifies the operation process, reduces the time and complexity of manual adjustment, and the operator can quickly adjust the cushion block, improving the production efficiency;

[0019] (4) The adjustable cushion block of the present utility model improves the processing efficiency and accuracy, reduces the rejection rate and the need for secondary processing, thereby reducing the production cost. At the same time, it reduces the time for equipment adjustment and maintenance, improves the utilization rate of the equipment, and brings significant economic benefits to the enterprise. In addition, it helps to reduce material waste and energy consumption during the processing, which has a positive significance for environmental protection. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a three-dimensional view of the adjustable cushion block for the loading table of the high-precision grinding and polishing integrated machine of the present utility model;

[0021] Figure 2 is a bottom view of the adjustable cushion block for the loading table of the high-precision grinding and polishing integrated machine of the present utility model;

[0022] Figure 3 is Figure 2 the A-A cross-sectional view of DETAILED DESCRIPTION OF THE EMBODIMENTS Embodiment 1

[0023] To make the present utility model more clearly understood, the following further describes an adjustable cushion block for the loading table of a high-precision grinding and polishing integrated machine of the present utility model with reference to the drawings. The specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0024] Refer to Figure 1 for an adjustable cushion block for the loading table of a high-precision grinding and polishing integrated machine:

[0025] Refer to Figure 1 and Figure 3 It includes a cushion block 2 embedded in a base 1. The base 1 is of a rectangular structure and is provided with a cushion block groove 1a therein. The bottom of the cushion block groove 1a is communicated with a group of vertical adjustment cavities 1b;

[0026] The cushion block 2 is embedded in the cushion block groove 1a and its upper part extends out of the housing of the base 1. The upper surface of the cushion block 2 is set as a support surface 2a for stably supporting the silicon rod. The support surface 2a is an elastic arc surface and is adapted to the outer surface of the silicon rod;

[0027] The lower part of the base 1 is provided with an adjustment component 3 and a fixing component 4. The adjustment component 3 and the fixing component 4 are respectively arranged in the corresponding adjustment cavities 1b;

[0028] The adjustment component 3 is arranged opposite to the middle of the cushion block 2. The fixing component 4 is arranged on both sides of the adjustment component 3, and the output ends of the adjustment component 3 and the fixing component 4 are in contact with the bottom of the cushion block 2 for adjusting and fixing the cushion block through the adjustment component and the fixing component;

[0029] In the middle of the adjusting component 3, there is a lifting shaft 31. The upper part of the lifting shaft 31 contacts the lower surface of the cushion block 2. A lifting adjustment knob 32 is sleeved outside the lifting shaft 31, and the two form a rotational guiding fit. The side surface of the lifting adjustment knob 32 protrudes from the side surface of the base 1, so as to control the lifting of the lifting shaft through the knob, thereby adjusting the height of the cushion block;

[0030] In the middle of the fixing component 4, there is a support column 41. The top of the support column 41 contacts the lower surface of the cushion block 2. At the center of the bottom of the support column 41, there is a fixing knob 42, and the two are integrally formed. The side surface of the fixing knob 42 protrudes from the side surface of the base 1, so as to adjust the height difference between the two sides of the cushion block through the knob, thereby adjusting the inclination angle of the cushion block.

[0031] In this embodiment, the cushion block 2 has a plurality of support surfaces 2a in contact with the silicon rod, which are used to stably support the silicon rod. The adjusting component 3 and the fixing component 4 are respectively connected to the cushion block body, and are used to adjust the height and inclination angle of the cushion block 2.

[0032] In this embodiment, the adjusting component 3 adopts a screw lifting mechanism, and the lifting shaft 31 is a screw rod. The height of the cushion block body is adjusted by rotating the screw rod. The support surface 2a of the cushion block 2 is designed in a concave shape to adapt to silicon rods of different diameters.

[0033] During use, according to the size and shape of the silicon rod to be processed, the height and inclination angle of the cushion block 2 are adjusted by rotating the screw rod, so that the silicon rod is stably placed on the support surface, and then the high-precision grinding and polishing machine is started for processing. Embodiment 2

[0034] In this embodiment, the adjusting component 3 adopts a hydraulic adjusting device, and the height and inclination angle of the cushion block are adjusted by controlling the flow rate of the hydraulic oil. Compared with the screw lifting mechanism, the hydraulic adjusting device can achieve faster and more precise adjustment, improving the efficiency and precision of the silicon rod grinding and polishing process. Embodiment 3

[0035] Based on Embodiment 1, this embodiment adds a control system. The control system is a PLC programmable logic controller, which is used to control the operation of the adjusting mechanism. Through the programming of the PLC, automatic adjustment of the cushion block can be achieved, reducing the complexity of manual operation and improving production efficiency.

[0036] When using the adjustable cushion block of the present utility model to assist in the grinding and polishing of silicon rods, the following steps can be followed:

[0037] (1) According to the size and shape of the silicon rod to be processed, adjust the adjusting component 3 and the fixing component 4 through the control system to change the height and inclination angle of the cushion block 2;

[0038] (2) Place the silicon rod on the support surface 2a of the cushion block 2;

[0039] (3) Start the integrated silicon rod grinding and polishing machine for processing.

[0040] In the present utility model, the adjustment precision of the adjustment component is ±0.01 mm.

[0041] The device of the present utility model improves the adaptability and precision of silicon rod grinding and polishing processing, simplifies the operation process, thereby improving production efficiency and product quality. By introducing an adjustable mechanism, the cushion block can flexibly adapt to silicon rods of different sizes and shapes, realize precise positioning and stable support, reduce processing errors, and meet the requirements of high-efficiency and high-precision silicon rod grinding and polishing processing.

[0042] In addition to the above embodiments, the present utility model can also have other implementation manners. All technical solutions formed by equivalent replacement or equivalent transformation fall within the protection scope required by the present utility model.

Claims

1. An adjustable pad for a loading platform of a high-speed grinding and polishing machine, characterized in that: The invention comprises a cushion block (2) embedded in a base (1), the upper part of the cushion block (2) protruding out of a shell of the base (1), and the lower part of the base (1) being provided with an adjusting component (3) and a fixing component (4), the adjusting component (3) being arranged opposite to the middle part of the cushion block (2), the fixing component (4) being arranged on both sides of the adjusting component (3), and the output ends of the adjusting component (3) and the fixing component (4) being in contact with the bottom of the cushion block (2); A lifting shaft (31) is provided in the middle of the adjustment component (3), the upper portion of the lifting shaft (31) contacts the lower surface of the cushion block (2), and a lifting adjustment knob (32) is provided on the outer sleeve of the lifting shaft (31), the two forming a rotation guide fit, and the side surface of the lifting adjustment knob (32) protrudes from the side surface of the base (1); A support column (41) is provided in the middle of the fixing assembly (4), the top of the support column (41) contacts the lower surface of the cushion block (2), the bottom of the support column (41) is connected to the fixing knob (42), and the side surface of the fixing knob (42) protrudes from the side surface of the base (1).

2. The adjustable pad for the loading platform of the high-speed grinding and polishing machine according to claim 1 is characterized in that: The base (1) is a rectangular structure, and is provided with a cushion block groove (1a) therein; the bottom of the cushion block groove (1a) is connected to a group of vertical adjustment cavities (1b); the cushion block (2) is arranged in the cushion block groove (1a); and the adjustment component (3) and the fixing component (4) are respectively arranged in the corresponding adjustment cavities (1b).

3. The adjustable pad for the loading platform of the high-speed grinding and polishing machine according to claim 1 or 2, characterized in that: The adjustment component (3) is a spiral lifting mechanism, a hydraulic lifting mechanism, a pneumatic or electric adjustment mechanism.

4. The adjustable pad for the loading platform of the high-speed grinding and polishing machine according to claim 1 or 2, characterized in that: The fixed knob (42) of the fixed assembly (4) is a disc-shaped structure, the support column (41) is arranged at the center of the fixed knob (42), and the support column (41) and the fixed knob (42) are an integrally formed structure.

5. The adjustable pad for the loading platform of the high-speed grinding and polishing machine according to claim 1 or 2, characterized in that: The upper surface of the cushion block (2) is configured as a support surface (2a) for stably supporting the silicon rod, and the support surface (2a) is an elastic arc-shaped surface and is adapted to the outer surface of the silicon rod.

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