Bearing tool and high-temperature annealing device with same
By designing an adjustable load-bearing tooling, the problem of the inability to adapt to wafers of different sizes in the prior art is solved, and the versatility and efficiency of high-temperature annealing devices are improved.
Patent Information
- Application Number
- CN202421855275.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-01
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-01
AI Technical Summary
The load-bearing tooling of existing high-temperature annealing devices can only be used for single-size silicon carbide substrate sheets, and cannot meet the annealing requirements of seed wafers and etching plates of different sizes.
A versatile load-bearing tool is designed, including a bracket base, guide rod, pad and seal plate. The guide rod can be adjusted to accommodate wafers of different sizes, and the pads form a multi-layer structure to provide horizontal support.
The adaptability of the load-bearing tooling to wafers of different sizes is achieved, the versatility and efficiency of the equipment is improved, and it can be reused multiple times, reducing production costs.
Smart Images
Figure CN223017042U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal material processing, in particular to a carrying tooling and a high-temperature annealing device with the same. Background Art
[0002] High-temperature annealing heat treatment is a common process for reducing the internal stress in silicon carbide crystals. A high-temperature annealing device is required for high-temperature annealing treatment of silicon carbide crystals.
[0003] The carrying tooling in the related art can only adapt to silicon carbide wafers of a single size. For example, the annealing device for six-inch (i.e., 150 mm) silicon carbide wafers cannot be applied to seed wafers with sizes of 153 mm, 155 mm, 157 mm, and 159 mm. It has a single use and cannot meet the annealing requirements of seed wafers of different sizes in production. Summary of the Utility Model
[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a carrying tooling, which is applicable not only to silicon carbide wafers, but also to seed wafers and etched wafers, has strong versatility, a simple structure, and is easy to implement.
[0005] The utility model also provides a high-temperature annealing device with the above carrying tooling.
[0006] The carrying tooling according to the embodiment of the utility model includes: a support base and a sealing plate. The support base and the sealing plate are arranged at intervals in the vertical direction. The support base includes a central seat and a plurality of support rods. The plurality of support rods are evenly spaced in the circumferential direction of the central seat. One end of each support rod is connected to the central seat, and the other end of each support rod extends horizontally outwards; a plurality of guide rods and a plurality of pads. The plurality of guide rods are spaced in the circumferential direction of the support base and are vertically arranged. The plurality of guide rods are connected to the plurality of support rods in one-to-one correspondence. Each guide rod passes through the corresponding plurality of pads. The sealing plate is detachably connected to the top of the guide rod to press the plurality of pads. A placement groove is provided on one side of each pad facing the center of the support base. Each guide rod is adjustable in position along the length direction of the corresponding support rod to adapt to wafers of different sizes.
[0007] According to the carrying tooling of the embodiment of the present utility model, by making the position of the guide rod adjustable along the length direction of the corresponding support rod to adapt to wafers of different sizes, the carrying tooling can be applicable not only to silicon carbide substrate wafers, but also to seed wafers and etched wafers, with strong versatility, simple structure and easy implementation. At the same time, multiple cushion blocks form multiple layers in the up and down direction, and the placement grooves of each layer of cushion blocks provide horizontal support for the corresponding wafers, so that multiple wafers are spaced apart in the up and down direction, which is beneficial to avoiding the problem of wafer stacking. At the same time, the cushion blocks between adjacent layers are closely arranged, with a compact structure and high space utilization rate, and more wafers can be placed. Moreover, the carrying tooling can be reused multiple times, which is beneficial to reducing the use cost.
[0008] In some embodiments of the present utility model, each support rod is provided with a first positioning groove, the first positioning groove extends along the length direction of the support rod and penetrates the support rod in the up and down direction, the guide rod is adapted to pass through the first positioning groove, the carrying tooling further includes an upper nut and a lower nut, the upper nut and the lower nut are adapted to be threadedly connected to the guide rod, the upper nut and the lower nut are located on the upper and lower sides of the support rod to fix the guide rod, and one side of the first positioning groove is provided with a plurality of first scale lines, and the plurality of first scale lines are uniformly arranged along the length direction of the first positioning groove.
[0009] In some embodiments of the present utility model, the other end of each support rod is provided with a sliding groove, the carrying tooling further includes a plurality of extension members, the plurality of extension members are in sliding fit with the plurality of sliding grooves one by one, the position of each extension member along the length direction of the support rod is adjustable, the extension member has a second positioning groove, the second positioning groove extends along the length direction of the support rod and penetrates the extension member in the up and down direction, one side of the second positioning groove is provided with a plurality of second scale lines, and the plurality of second scale lines are uniformly arranged along the length direction of the second positioning groove. The position of each extension member along the length direction of the support rod is adjustable. When the second positioning groove completely extends out of the support rod, the guide rod passes through the second positioning groove, and the upper nut and the lower nut are threadedly connected to the guide rod, and the upper nut and the lower nut are located on the upper and lower sides of the extension member to fix the guide rod.
[0010] In some embodiments of the present utility model, the support rod is provided with a first through hole and a second through hole, the first through hole and the second through hole are arranged at intervals along the length direction of the support rod, the extension member is provided with a first threaded hole and a second threaded hole, the extension member is adjustable along the support rod between a first position and a second position. In the first position, the first threaded hole is oppositely arranged with the first through hole, the first positioning groove and the second positioning groove are directly opposite in the up-down direction, a screw passes through the first through hole and is connected with the first threaded hole, and the guide rod passes through the first positioning groove and the second positioning groove and is connected with the support rod; in the second position, the second threaded hole is oppositely arranged with the first through hole, the screw passes through the first through hole and is connected with the second threaded hole, the first positioning groove and the second positioning groove are arranged at intervals along the length direction of the support rod, and the guide rod passes through the second positioning groove and is connected with the extension member.
[0011] In some embodiments of the present utility model, the sliding groove is provided with two slide rails, the two slide rails extend along the length direction of the support rod, and the extension member is provided with two sliders, and the two sliders are in one-to-one correspondence and cooperation with the two slide rails.
[0012] In some embodiments of the present utility model, the slider and the extension member are an integral part.
[0013] In some embodiments of the present utility model, the sealing plate is provided with a plurality of first positioning holes and a plurality of second positioning holes, the plurality of second positioning holes are arranged around the plurality of first positioning holes, when the extension member is in the first position, the first positioning hole is connected with the upper end of the guide rod; when the extension member is in the second position, the second positioning hole is connected with the upper end of the guide rod.
[0014] In some embodiments of the present utility model, both the first positioning hole and the second positioning hole are formed as oblong.
[0015] In some embodiments of the present utility model, the cross section of the guide rod is triangular, the cushion block is provided with a guide hole adapted to slidably cooperate with the guide rod, and the guide hole penetrates through the cushion block in the thickness direction of the cushion block.
[0016] The high-temperature annealing device according to the embodiment of the present utility model includes: a crucible, the crucible is placed vertically; a loading tooling, the loading tooling is the above-mentioned loading tooling, and the central axis of the loading tooling and the central axis of the crucible are on the same straight line.
[0017] According to the high-temperature annealing device of the embodiment of the present utility model, by providing the above-mentioned loading tooling, the loading tooling is applicable not only to silicon carbide substrate wafers, but also to seed wafers and etched wafers, with strong versatility, simple structure, easy to implement. At the same time, the spacers between adjacent layers are closely arranged, with a compact structure and high space utilization rate, and more wafers can be placed, which is beneficial to saving energy consumption, reducing production costs, and improving production efficiency.
[0018] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Description of the Drawings
[0019] Figure 1 is a top view schematic diagram of a bracket base according to an embodiment of the present utility model, wherein four extension members are all in the first position;
[0020] Figure 2 is Figure 1 an enlarged schematic diagram of part A in
[0021] Figure 3 is a partial cross-sectional schematic diagram of a loading tooling according to an embodiment, wherein four extension members are all in the first position, four spacers are installed on the bottom plate, and the wafer is placed in the placement grooves of the four spacers;
[0022] Figure 4 is Figure 3 a cross-sectional schematic diagram taken along line B-B in
[0023] Figure 5 is Figure 3 an enlarged schematic diagram of part C in
[0024] Figure 6 is a top view schematic diagram of a bracket base according to an embodiment of the present utility model, wherein four extension members are all in the second position;
[0025] Figure 7 is Figure 5 an enlarged schematic diagram of part D in
[0026] Figure 8 is a partial cross-sectional schematic diagram of a loading tooling according to an embodiment, wherein four extension members are all in the second position, four spacers are installed on the bottom plate, and the wafer is placed in the placement grooves of the four spacers;
[0027] Figure 9 is a three-dimensional schematic diagram of a spacer according to an embodiment of the present utility model;
[0028] Figure 10 is a structural schematic diagram of a guide rod according to an embodiment of the present utility model;
[0029] Figure 11 It is a schematic structural diagram of a sealing plate according to an embodiment of the present utility model;
[0030] Figure 12 It is a schematic cross-sectional view of a high-temperature annealing device according to an embodiment of the present utility model.
[0031] Reference numerals:
[0032] High-temperature annealing device 1000;
[0033] Carrying tooling 100;
[0034] Bracket base 10; center seat 11; support rod 12; first positioning groove 13; first scale line 131;
[0035] Chute 14; slide rail 141; first through hole 15; second through hole 16; reinforcing rod 17;
[0036] Sealing plate 20; first positioning hole 21; second positioning hole 22;
[0037] Guide rod 30; threaded section 31; cushion block 40; placement groove 41; guide hole 42;
[0038] Upper nut 51; lower nut 52; screw 53; compression nut 54;
[0039] Extension piece 60; second positioning groove 61; second scale line 611; first threaded hole 62; second threaded hole 63; slider 64;
[0040] Handle 70;
[0041] Wafer 200;
[0042] Crucible 300. Detailed implementation manners
[0043] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model, and should not be construed as a limitation to the present utility model.
[0044] The following disclosure provides many different embodiments or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present utility model provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the applicability of other processes and / or the use of other materials.
[0045] Reference is made below Figures 1 - 12 to describe a carrier tooling 100 and a high-temperature annealing device 1000 according to an embodiment of the present utility model.
[0046] Referring to Figure 12 as shown, the carrier tooling 100 according to an embodiment of the present utility model includes: a support base 10, a sealing plate 20, a plurality of guide rods 30, and a plurality of pads 40.
[0047] Referring to Figures 1 - 3 as shown, the support base 10 and the sealing plate 20 are arranged at intervals in the up-down direction. The support base 10 includes a central seat 11 and a plurality of support rods 12. The plurality of support rods 12 are evenly spaced in the circumferential direction of the central seat 11. One end of each support rod 12 is connected to the central seat 11, and the other end of each support rod 12 extends horizontally outward. For example, as Figure 1 shown, there are four support rods 12, and the four support rods 12 are evenly spaced in the circumferential direction of the central seat 11. The included angle between two adjacent support rods 12 is 90°, and a reinforcing rod 17 is arranged between two adjacent support rods 12.
[0048] Referring to Figures 1 - 3 and Figure 12 as shown, a plurality of guide rods 30 are spaced apart and vertically arranged along the circumference of the support base 10. The plurality of guide rods 30 are connected to the plurality of support rods 12 in a one-to-one correspondence. Each guide rod 30 passes through the corresponding plurality of pads 40. The sealing plate 20 is detachably connected to the top of the guide rod 30 to press the plurality of pads 40. A placement groove 41 is provided on one side of each pad 40 facing the center of the support base 10. Combining Figure 1 and Figure 6 as shown, the position of each guide rod 30 is adjustable along the length direction of the corresponding support rod 12 to adapt to wafers 200 of different sizes. Among them, the wafer 200 can be a silicon carbide substrate wafer, a seed wafer, or an etched wafer.
[0049] For example, in one example, there are four guide rods 30, and multiple cushion blocks 40 are divided into twenty-two layers in the up and down directions, that is, the carrier tool 100 can carry twenty-two silicon carbide substrate wafers at a time. It should be noted that when loading the silicon carbide substrate wafers onto the carrier tool 100, first, the guide rods 30 need to be adjusted to appropriate positions and fixed according to the sizes of different wafers 200, and then multiple layers of cushion blocks 40 are sleeved on the four guide rods 30. The four cushion blocks 40 in each layer form four support points for supporting the wafer 200. After the wafer 200 is placed in the placement grooves 41 of the four cushion blocks 40, when placing the next wafer 200, and so on, until twenty-two wafers 200 are placed. Finally, the sealing plate 20 is installed to press the cushion blocks 40. In the related art, the horizontally placed carrier tool 100 can carry at most fifteen wafers, and the annealing efficiency is low.
[0050] In view of this, for the carrier tool 100 according to the embodiments of the present invention, by making the guide rods 30 adjustable in position along the length direction of the corresponding support rods 12 to adapt to wafers 200 of different sizes, the carrier tool 100 is not only applicable to wafers 200, but also applicable to seed wafers and etched wafers, with strong versatility, simple structure, and easy implementation. At the same time, multiple cushion blocks 40 form multiple layers in the up and down directions, and the placement grooves 41 of each layer of cushion blocks 40 provide horizontal support for the corresponding wafers 200, so that multiple wafers 200 are spaced apart in the up and down directions, which is beneficial to avoiding the problem of wafer stacking. At the same time, the cushion blocks 40 between adjacent layers are closely arranged, with a compact structure and high space utilization rate, and more wafers 200 can be placed. Moreover, the carrier tool 100 can be reused multiple times, which is beneficial to reducing the use cost.
[0051] In some embodiments of the present invention, referring to Figure 3 and Figure 5 as shown, each support rod 12 is provided with a first positioning groove 13. The first positioning groove 13 extends along the length direction of the support rod 12 and penetrates the support rod 12 in the up and down directions. The guide rod 30 is adapted to pass through the first positioning groove 13. The carrier tool 100 further includes an upper nut 51 and a lower nut 52. Among them, both the upper nut 51 and the lower nut 52 can be graphite parts. The upper nut 51 and the lower nut 52 are adapted to be threadedly connected to the guide rod 30. The upper nut 51 and the lower nut 52 are located on the upper and lower sides of the support rod 12 to fix the guide rod 30. For example, referring to Figure 10 , threaded sections 31 are respectively provided at the upper and lower ends of the guide rod 30, and the upper nut 51 and the lower nut 52 are arranged on the threaded section 31 at the lower end. It can be understood that by providing the upper nut 51 and the lower nut 52, it is beneficial to realize reliable fixation of the guide rod 30, and at the same time, it is convenient to realize position adjustment of the guide rod 30, so as to adapt to wafers 200 of different sizes.
[0052] Referring to Figure 1 and Figure 2As shown, on one side of the first positioning groove 13, there are a plurality of first scale lines 131, and the plurality of first scale lines 131 are evenly arranged along the length direction of the first positioning groove 13. For example, the plurality of first scale lines 131 can respectively correspond to wafers 200 of 159 mm, 157 mm, 155 mm, 153 mm, and 150 mm. It can be understood that by setting the plurality of first scale lines 131, it is convenient for technicians to adjust the position of the guide rod 30 according to the size of the wafer 200 to be annealed, which is conducive to improving the installation efficiency.
[0053] In some embodiments of the present invention, referring to Figure 3 and Figure 4 As shown, at the other end of each support rod 12, there is a sliding groove 14. The carrier tooling 100 further includes a plurality of extension members 60. The plurality of extension members 60 are in one-to-one sliding fit with the plurality of sliding grooves 14. Each extension member 60 is adjustable in position along the length direction of the support rod 12. The extension member 60 has a second positioning groove 61. The second positioning groove 61 extends along the length direction of the support rod 12 and penetrates the extension member 60 in the up and down direction. On one side of the second positioning groove 61, there are a plurality of second scale lines 611, and the plurality of second scale lines 611 are evenly arranged along the length direction of the second positioning groove 61. For example, as Figure 6 and Figure 7 shown, the plurality of second scale lines 611 can respectively correspond to wafers 200 of 210 mm, 205 mm, and 200 mm. Each extension member 60 is adjustable in position along the length direction of the support rod 12. When the second positioning groove 61 completely extends out of the support rod 12, the guide rod 30 passes through the second positioning groove 61, and the upper nut 51 and the lower nut 52 are threadedly connected to the guide rod 30. The upper nut 51 and the lower nut 52 are located on the upper and lower sides of the extension member 60 to fix the guide rod 30.
[0054] Specifically, in one example, when converting from six inches (refer to Figure 1 ) to eight inches (refer to Figure 6 ) for use, first take out the guide rod 30, pull out the four extension members 60 from the sliding grooves 14 respectively, place the guide rod 30 at a suitable position in the second positioning groove 61 on the extension block according to the size of the wafer 200, and then fix it with the upper nut 51 and the lower nut 52. Then, place the gaskets and wafers 200 layer by layer according to the number of wafers 200, and finally seal the upper end with the sealing plate 20. Thus, the carrier tooling 100 can be adapted to six-inch wafers and eight-inch wafers, and has stronger versatility.
[0055] In some embodiments of the present invention, in combination with Figure 3 and Figure 8As shown, the support rod 12 is provided with a first through hole 15 and a second through hole 16. The first through hole 15 and the second through hole 16 are arranged at intervals along the length direction of the support rod 12. The extension member 60 is provided with a first threaded hole 62 and a second threaded hole 63. The extension member 60 is adjustable along the support rod 12 between a first position and a second position. In the first position, referring to Figure 3 and Figure 5 As shown, the first threaded hole 62 is disposed opposite to the first through hole 15. The first positioning groove 13 and the second positioning groove 61 are directly opposite in the up-down direction. The screw 53 passes through the first through hole 15 and is connected to the first threaded hole 62. The guide rod 30 passes through the first positioning groove 13 and the second positioning groove 61 and is connected to the support rod 12. In the second position, the second threaded hole 63 is disposed opposite to the first through hole 15. The screw 53 passes through the first through hole 15 and is connected to the second threaded hole 63. The first positioning groove 13 and the second positioning groove 61 are arranged at intervals along the length direction of the support rod 12. The guide rod 30 passes through the second positioning groove 61 and is connected to the extension member 60. Thus, it is convenient to adjust the position of the extension member 60, and reliable positioning of the extension member 60 can be achieved both in the first position and the second position, which is beneficial to ensuring the reliability of the annealing device during operation.
[0056] Optionally, referring to Figure 3 and Figure 8 As shown, both the first positioning groove 13 and the second positioning groove 61 can be formed as stepped holes, that is, the diameters of the upper and lower ends of the two positioning grooves are large, and the diameter of the middle part is small. Thus, both the upper nut 51 and the lower nut 52 can be set with counterbored holes, which is convenient for installation and positioning.
[0057] Optionally, referring to Figure 3 and Figure 8 As shown, both the first through hole 15 and the second through hole 16 are stepped holes, which is convenient for the screw 53 to be set with a counterbored hole, and thus the bottom surface of the support base 10 can be ensured to be flat.
[0058] In some embodiments of the present invention, referring to Figure 3 and Figure 4 As shown, the sliding groove 14 is provided with two sliding rails 141. The two sliding rails 141 extend along the length direction of the support rod 12. The extension member 60 is provided with two sliding blocks 64. The two sliding blocks 64 are in one-to-one correspondence and cooperation with the two sliding rails 141. It can be understood that through the one-to-one correspondence and cooperation between the two sliding blocks 64 and the two sliding rails 141, it is beneficial to ensure the reliability of the sliding of the extension member 60 relative to the support rod 12 between the first position and the second position.
[0059] In some embodiments of the present invention, referring to Figure 4As shown, the slider 64 and the extension piece 60 are an integral part. It can be understood that the structure of the integral part can not only ensure the structural and performance stability of the slider 64 and the extension piece 60, but also facilitate molding, simple manufacturing, and eliminate unnecessary assembly parts and connection processes, greatly improving the assembly efficiency of the slider 64 and the extension piece 60, ensuring the reliability of the connection between the slider 64 and the extension piece 60. Moreover, the overall strength and stability of the integrally formed structure are relatively high, the assembly is more convenient, and the service life is longer.
[0060] In some embodiments of the present utility model, referring to Figure 11 As shown, the sealing plate 20 is provided with a plurality of first positioning holes 21 and a plurality of second positioning holes 22. The plurality of second positioning holes 22 are arranged around the plurality of first positioning holes 21. When the extension piece 60 is in the first position, the first positioning hole 21 is connected to the upper end of the guide rod 30; when the extension piece 60 is in the second position, the second positioning hole 22 is connected to the upper end of the guide rod 30.
[0061] For example, the carrying tooling 100 further includes a compression nut 54. When annealing a wafer 200 with a size of about six inches, first adjust the extension piece 60 to the first position, then install the guide rod 30 into the first positioning groove 13 (at this time, the guide rod 30 passes through the first positioning groove 13 and the second positioning groove 61 at the same time), align with the first scale line 131 and fix the guide rod 30 to a proper position through the upper nut 51 and the lower nut 52. Then, sleeved with multiple layers of cushion blocks 40 on the four guide rods 30, the four cushion blocks 40 of each layer form four support points for supporting the wafer 200. After the wafer 200 is placed in the placement groove 41 of the four cushion blocks 40, then place the wafer 200, and so on until all the wafers 200 to be annealed are placed. Finally, install the sealing plate 20. The guide rod 30 cooperates with the first positioning hole 21, and the compression nut 54 is connected to the upper end of the guide rod 30 to compress the cushion block 40, thus completing the installation;
[0062] When annealing a wafer 200 with a size of about eight inches, first adjust the extension piece 60 to the second position, then install the guide rod 30 into the second positioning groove 61, align with the second scale line 611 and fix the guide rod 30 to a proper position through the upper nut 51 and the lower nut 52. Then, sleeved with multiple layers of cushion blocks 40 on the four guide rods 30, the four cushion blocks 40 of each layer form four support points for supporting the wafer 200. Then place the wafer 200, and so on until all the wafers 200 to be annealed are placed. Finally, install the sealing plate 20. The guide rod 30 cooperates with the second positioning hole 22, and the compression nut 54 is connected to the upper end of the guide rod 30 to compress the cushion block 40, thus completing the installation. In view of this, by providing the first positioning hole 21 and the second positioning hole 22 on the sealing plate 20, the versatility of the sealing plate 20 can be improved, thereby reducing the cost.
[0063] In some embodiments of the present utility model, referring to Figure 11 as shown, both the first positioning hole 21 and the second positioning hole 22 are formed as oblong. It can be understood that by forming both the first positioning hole 21 and the second positioning hole 22 as oblong, it is convenient to realize the fine adjustment of the position of the guide rod 30 relative to the sealing plate 20, the sealing plate 20 has strong versatility, and it is beneficial to reduce costs.
[0064] In some embodiments of the present utility model, referring to Figure 9 and Figure 10 as shown, the cross-section of the guide rod 30 is triangular, the cushion block 40 is provided with a guide hole 42 adapted to slidably cooperate with the guide rod 30, and the guide hole 42 penetrates the cushion block 40 in the thickness direction of the cushion block 40. For example, as Figure 4 and Figure 5 shown, the cross-section of the guide rod 30 is formed as an equilateral triangle, the guide hole 42 is also formed as an equilateral triangle hole, the cushion block 40 slidably cooperates with the guide rod 30 through the guide hole 42, and the inner vertex of the cross-section of the guide rod 30 is directly opposite to the center line of the support base 10. It can be understood that by forming the cross-section of the guide rod 30 as triangular, it is beneficial to prevent the cushion block 40 from rotating around the guide rod 30, thereby facilitating the reliable positioning of the cushion block 40. Of course, the present utility model is not limited thereto, and the cross-section of the guide rod 30 can also be formed as a sector, an ellipse, and a polygon, and the polygon includes but is not limited to a rectangle, a rhombus, a regular pentagon, a regular hexagon, etc.
[0065] Optionally, after assembly, the vertex of the guide hole 42, the center point of the cushion block 40, and the center point of the support base 10 are on the same straight line to ensure that the cushion block 40 points to the center of the support base 10 after being installed on the guide rod 30, thereby facilitating the reliable positioning of the wafer 200.
[0066] In some embodiments of the present utility model, referring to Figure 9 and Figure 12 shown, the depth of the placement groove 41 is h, the thickness of the wafer 200 is t, and h and t satisfy: 0 < h - t ≤ 0.5 mm. In other words, h - t can take any value between 0 and 0.5 mm. For example, h - t can be 0.05 mm, 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, or 0.5 mm. It can be understood that by making h and t satisfy: 0 < h - t ≤ 0.5 mm, it is beneficial to ensure the reliable fixation of the cushion block 40 to the wafer 200, and when transporting the loading tooling 100, it is beneficial to prevent the wafer 200 from falling and reduce potential safety hazards.
[0067] Optionally, the loading tooling 100 further includes: a handle 70, the bottom of the handle 70 is provided with a threaded post, and the sealing plate 20 is provided with a threaded hole adapted to be threadedly engaged with the threaded post. For example, as Figure 12As shown, the threaded hole is provided in the middle of the sealing plate 20. It can be understood that after the wafer 200 is loaded, the operator can transfer the carrier tooling 100 to the crucible 300 through the handle 70, which is convenient to operate, safe and reliable.
[0068] Referring to Figures 1 - 12 As shown, the high-temperature annealing device 1000 according to an embodiment of the present invention includes: a crucible 300 and a carrier tooling 100 according to an embodiment of the present invention. The central axis of the carrier tooling 100 is on the same straight line as the central axis of the crucible 300. Optionally, the crucible 300 can be divided into a first crucible and a second crucible. The size of the first crucible is smaller than that of the second crucible. The carrier tooling 100 with the extension member 60 in the first position is suitable for being placed in the first crucible (referring to Figure 12 as shown), and the carrier tooling 100 with the extension member 60 in the second position is suitable for being placed in the second crucible.
[0069] The high-temperature annealing device 1000 according to an embodiment of the present invention, by providing the above-mentioned carrier tooling 100, can make the carrier tooling 100 not only applicable to the wafer 200, but also applicable to the seed wafer 200 and the etched wafer, with strong versatility, simple structure, easy to implement. At the same time, the spacers 40 between adjacent layers are closely arranged, the structure is compact, the space utilization rate is high, and more wafers 200 can be placed.
[0070] Optionally, referring to Figure 12 as shown, the height of the guide rod 30 is adapted to the net height of the crucible 300. Preferably, the height of the guide rod 30 is 1 cm - 10 cm lower than the net height of the crucible 300. When the spacers 40 are arranged from bottom to top to fill the entire guide rod 30, the internal space of the crucible 300 can be utilized to the maximum extent.
[0071] It can be understood that the carrier tooling 100 and the high-temperature annealing device 1000 of the present invention can be applied not only to six-inch wafers, but also to eight-inch wafers, with a wider application range, high space utilization rate, more wafers 200 can be placed, which is beneficial to saving energy consumption, reducing production costs and improving production efficiency.
[0072] Other components and operations of the high-temperature annealing device 1000 according to an embodiment of the present invention are known to those of ordinary skill in the art and will not be described in detail here.
[0073] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0074] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.
[0075] In the present utility model, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, or a communication connection; it may be directly connected, or indirectly connected through an intermediate medium, and may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0076] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.
[0077] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.
[0078] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present utility model, and the scope of the present utility model is defined by the claims and their equivalents.
Claims
1. A load-bearing tool, characterized in that: include: A support base and a sealing plate, wherein the support base and the sealing plate are arranged at intervals in the up-down direction, the support base comprises a central seat and a plurality of support rods, wherein the plurality of support rods are arranged at intervals evenly in the circumferential direction of the central seat, one end of each support rod is connected to the central seat, and the other end of each support rod extends outward horizontally; A plurality of guide rods and a plurality of pads, wherein the plurality of guide rods are spaced apart and vertically arranged along the circumference of the support base, the plurality of guide rods are connected to the plurality of support rods one by one, each of the guide rods passes through the corresponding plurality of pads, the sealing plate is detachably connected to the top of the guide rods to compress the plurality of pads, a placement groove is provided on the side of each pad toward the center of the support base, and the position of each guide rod along the length direction of the corresponding support rod is adjustable to accommodate wafers of different sizes.
2. The load-bearing tooling according to claim 1, characterized in that: Each of the support rods is provided with a first positioning groove, which extends along the length direction of the support rod and penetrates the support rod in the up and down directions, and the guide rod is suitable for passing through the first positioning groove, and the load-bearing tool also includes an upper nut and a lower nut, and the upper nut and the lower nut are suitable for being threadedly connected with the guide rod, and the upper nut and the lower nut are located on the upper and lower sides of the support rod to fix the guide rod, and a plurality of first scale lines are provided on one side of the first positioning groove, and the plurality of first scale lines are evenly arranged along the length direction of the first positioning groove.
3. The load-bearing tooling according to claim 2, characterized in that: The other end of each support rod is provided with a slide groove, and the bearing tooling also includes multiple extension pieces, and the multiple extension pieces are slidably matched with the multiple slide grooves in a one-to-one manner. The position of each extension piece is adjustable along the length direction of the support rod, and the extension piece has a second positioning groove, which extends along the length direction of the support rod and penetrates the extension piece in the up and down directions. One side of the second positioning groove is provided with multiple second scale lines, and the multiple second scale lines are evenly arranged along the length direction of the second positioning groove. The position of each extension piece is adjustable along the length direction of the support rod. When the second positioning groove is fully extended out of the support rod, the guide rod passes through the second positioning groove, and the upper nut and the lower nut are threadedly connected to the guide rod. The upper nut and the lower nut are located on the upper and lower sides of the extension piece to fix the guide rod.
4. The load-bearing tooling according to claim 3, characterized in that: The support rod is provided with a first through hole and a second through hole, the first through hole and the second through hole are arranged at intervals along the length direction of the support rod, the extension member is provided with a first threaded hole and a second threaded hole, the extension member is adjustable between a first position and a second position along the support rod, in the first position, the first threaded hole is arranged opposite to the first through hole, the first positioning groove and the second positioning groove are directly opposite in the up-down direction, the screw passes through the first through hole and is connected to the first threaded hole, and the guide rod passes through the first positioning groove and the second positioning groove and is connected to the support rod; In the second position, the second threaded hole is arranged opposite to the first through hole, the screw passes through the first through hole and is connected to the second threaded hole, the first positioning groove and the second positioning groove are arranged spaced apart along the length direction of the support rod, and the guide rod passes through the second positioning groove and is connected to the extension piece.
5. The load-bearing tooling according to claim 4, characterized in that: The slide groove is provided with two slide rails, and the two slide rails extend along the length direction of the support rod. The extension piece is provided with two sliders, and the two sliders are matched with the two slide rails in a one-to-one correspondence.
6. The load-bearing tooling according to claim 5, characterized in that: The slider and the extension piece are an integral piece.
7. The load-bearing tooling according to claim 4, characterized in that: The sealing plate is provided with a plurality of first positioning holes and a plurality of second positioning holes, and the plurality of second positioning holes are arranged around the plurality of first positioning holes. When the extension member is in the first position, the first positioning holes are connected to the upper end of the guide rod; when the extension member is in the second position, the second positioning holes are connected to the upper end of the guide rod.
8. The load-bearing tooling according to claim 7, characterized in that: The first positioning hole and the second positioning hole are both formed in an oblong shape.
9. The load-bearing tooling according to any one of claims 1 to 8, characterized in that: The cross section of the guide rod is triangular, and the cushion block is provided with a guide hole suitable for slidingly cooperating with the guide rod, and the guide hole penetrates the cushion block in the thickness direction of the cushion block.
10. A high temperature annealing device, characterized in that: include: A crucible, wherein the crucible is placed vertically; A load-bearing tool, wherein the load-bearing tool is the load-bearing tool according to any one of claims 1 to 9, and the central axis of the load-bearing tool is on the same straight line as the central axis of the crucible.