Heating structure for reaction cavity

Abstract

The utility model discloses a heating structure for a reaction cavity, which comprises a reaction cavity body and a heating pipe, and is characterized in that the heating pipe is spiral, the spiral heating pipe is formed by repeatedly bending the heating pipe in a spiral manner for a plurality of times, the spiral heating pipe is bent to form a regular spiral shape, and the spiral heating pipe is arranged in the reaction cavity body. The spiral heating pipe integrally forms a cylinder matched with the interior of the reaction cavity body, the heating pipe is mounted in the reaction cavity body, and two end parts of the heating pipe extend upwards and are arranged outside the reaction cavity body. According to the utility model, the heating pipe is arranged to be in the spiral shape matched with the internal structure of the reaction cavity, so that the distribution area of the heating pipe in the reaction cavity is increased, and the heating pipe can uniformly heat the interior of the reaction cavity; and meanwhile, the cylindrical interior of the heating pipe is of a hollow structure, so that the heating pipe does not influence the operation of the stirring device when being mounted in the reaction cavity, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and particularly relates to a heating structure for a reaction chamber. Background Art

[0002] A reaction chamber is a device that provides a space for substances to react, and it is a cylindrical device. Some substances need heat to enhance the reaction during the reaction process, and the heat inside the reaction chamber will be consumed during the reaction process. After the heat is gradually consumed, the reaction between substances will slow down or stop, thereby affecting the reaction efficiency and reaction quality between substances.

[0003] In the existing technology, heating devices are added inside the device, including electric heating or boiler heating. Electric heating is charged itself, and boiler heating has fire. Both are not safe during the reaction process and consume a large amount of energy. On the other hand, due to the cylindrical shape of the outer part of the reaction chamber, because there are reaction substances and stirring devices and other structures that keep moving inside, it is not convenient to install the heating device, and the fixed installation of the heating device in a certain part will cause the problem of uneven heating.

[0004] The information disclosed in this background art section is only intended to enhance the overall understanding of the present utility model and should not be regarded as an admission or any form of implication that this information constitutes the prior art already known to those of ordinary skill in the art. Summary of the Utility Model

[0005] The purpose of the present utility model is to provide a heating structure for a reaction chamber, which can solve the problems that the heating device inside the reaction chamber is not convenient to install and the heating is uneven after installation.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the present utility model is as follows:

[0007] A heating structure for a reaction chamber, comprising a reaction chamber body and a heating pipe. The shape of the heating pipe is set as a spiral shape, and the spiral heating pipe is formed by repeatedly bending the heating pipe through several spirals. The spiral heating pipe is bent into a regular spiral shape, and the overall shape of the spiral heating pipe forms a cylindrical shape that matches the inside of the reaction chamber body. The spiral-shaped heating pipe that matches the internal structure of the reaction chamber body is installed inside the reaction chamber body, and both ends of the heating pipe extend upward and are placed outside the reaction chamber body. By setting the heating pipe as a spiral shape that matches the internal structure of the reaction chamber body, firstly, the spiral structure greatly increases the heating area of the heating pipe. At the same time, when the heating pipe is installed inside the reaction chamber body, the spiral heating pipe makes the distribution area of the heating pipe inside the reaction chamber body larger, so that the area of the reaction chamber body heated simultaneously when the heating pipe heats is larger, and further makes the heat distribution uniform when the heating pipe heats the reaction chamber body. And the spiral heating pipe makes the middle of the heating pipe a hollow structure. Therefore, when the heating pipe is installed inside the reaction chamber body, components such as stirring inside the reaction chamber body can be installed through the hollow position of the heating pipe, so that the installation of the heating pipe inside the reaction chamber body will not affect the installation of the internal components of the reaction chamber body. A plurality of connecting mechanisms are arranged between the heating pipe and the inner side wall of the reaction chamber body, and the plurality of connecting mechanisms are evenly arranged along the inner side surface of the reaction chamber body. The plurality of connecting mechanisms make the installation of the heating pipe inside the reaction chamber body stable, and at the same time prevent risks such as high-temperature tipping of the heating pipe after heating.

[0008] In one or more embodiments of the present invention, the connecting mechanism includes a fixing block, a limiting upper block, a limiting lower block, and a limiting groove.

[0009] In one or more embodiments of the present invention, the fixing block is fixedly connected to the inner side wall of the reaction chamber body, and a limiting groove is opened on the upper side wall of the fixing block.

[0010] In one or more embodiments of the present invention, one end of the heating pipe is set as a steam inlet, and the other end of the heating pipe is set as a steam outlet.

[0011] In one or more embodiments of the present invention, the limiting upper block is installed on the heating pipe in a fixedly connected manner, and a limiting lower block is fixedly connected to the lower side wall of the limiting upper block.

[0012] In one or more embodiments of the present utility model, the shape of the lower limiting block matches that of the upper limiting block, and the lower limiting block is installed in the limiting groove in a plug-in manner. Through the cooperation of the lower limiting block and the limiting groove, the fixed block and the upper limiting block can be installed together, and the cooperation of the lower limiting block and the limiting groove makes the installation of the fixed block and the upper limiting block stable when they are installed together, so that the heating tube is stable when installed in the reaction chamber body. At the same time, the disassembly and assembly between the lower limiting block and the limiting groove are convenient, which makes the disassembly and assembly between the heating tube and the reaction chamber body convenient, and makes the maintenance and replacement of the heating tube convenient.

[0013] In one or more embodiments of the present utility model, a layer of anti-corrosion layer is provided on the outer surfaces of both the heating tube and the connecting mechanism. Since the reaction substances inside the reaction chamber body are corrosive, by providing the anti-corrosion layer, it is avoided that the heating tube and the connecting mechanism are not corroded by the reaction substances when used in the reaction chamber body.

[0014] In one or more embodiments of the present utility model, the outer diameter of the heating tube is 2 - 3 cm, and the thickness of the anti-corrosion layer provided on the outer surface of the heating tube is 1.5 - 2.5 mm.

[0015] In one or more embodiments of the present utility model, the ratio of the height of the heating tube to the height of the reaction chamber body is 2:3.

[0016] Compared with the prior art, by setting the heating tube as a spiral shape that matches the internal structure of the reaction chamber, the present utility model increases the distribution area of the heating tube in the reaction chamber, making the heating of the inside of the reaction chamber by the heating tube uniform; at the same time, the inside of the cylindrical heating tube is set as a hollow structure, so that the operation of the stirring device is not affected when the heating tube is installed in the reaction chamber, improving the practicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 Schematic diagram of a heating spiral tube without an anti-corrosion layer in a spiral tube of a heating tube for a reaction cavity body of the present utility model;

[0019] Figure 2 Schematic diagram of a connecting mechanism without an anti-corrosion layer in a heating structure for a reaction chamber of the present utility model;

[0020] Figure 3Schematic diagram of a connecting mechanism with an anti-corrosion layer for a reaction chamber, which is provided with a spiral tube according to the present utility model;

[0021] Figure 4 Cross-sectional view of a heating tube in a heating structure for a reaction chamber according to the present utility model.

[0022] Main reference numerals description:

[0023] 1 - Reaction chamber body, 2 - Heating tube, 3 - Steam inlet, 4 - Steam outlet, 5 - Connecting mechanism, 51 - Fixed block, 52 - Upper limit block, 53 - Lower limit block, 54 - Limit groove, 6 - Anti-corrosion layer. Specific implementation manners

[0024] In order to enable those skilled in the art to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0025] As Figures 1 to 3 shown, a heating structure for a reaction chamber in an embodiment of the present utility model can solve the problems that the internal heating device of the reaction chamber is not easy to install and the heating is uneven after installation.

[0026] As Figures 1 to 4As shown in the figure, the heating structure includes a reaction chamber body 1 and a heating tube 2. The shape of the heating tube 2 is set as a spiral shape. The spiral heating tube 2 is formed by repeatedly bending the heating tube several times in a spiral manner. The spiral heating tube 2 is bent into a regular spiral shape. The overall shape of the spiral heating tube 2 forms a cylindrical shape that matches the inside of the reaction chamber body 1. The spiral heating tube 2 that matches the internal structure of the reaction chamber body 1 is installed inside the reaction chamber body 1. The two ends of the heating tube 2 extend upward and are placed outside the reaction chamber body 1. Setting the heating tube 2 as a spiral shape that matches the internal structure of the reaction chamber body 1, firstly, the spiral structure greatly increases the heating area of the heating tube 2. At the same time, when the heating tube 2 is installed inside the reaction chamber body 1, the spiral heating tube 2 makes the heating tube 2 have a larger distribution area inside the reaction chamber body 1, so that when the heating tube 2 heats, the area inside the reaction chamber body 1 that is heated simultaneously is larger, and thus the heat distribution is uniform when the heating tube 2 heats the inside of the reaction chamber body 1. And the spiral heating tube 2 makes the middle of the heating tube 2 a hollow structure. Therefore, when the heating tube 2 is installed inside the reaction chamber body 1, components such as stirring inside the reaction chamber body 1 can be installed through the hollow position of the heating tube 2, so that the installation of the heating tube 2 inside the reaction chamber body 1 will not affect the installation of the internal components of the reaction chamber body 1.

[0027] Furthermore, a plurality of connecting mechanisms 5 are provided between the heating tube 2 and the inner side wall of the reaction chamber body 1. The plurality of connecting mechanisms 5 are evenly arranged along the inner side surface of the reaction chamber body 1. The plurality of connecting mechanisms 5 make the heating tube 2 stably installed inside the reaction chamber body 1, and at the same time prevent risks such as high-temperature tipping of the heating tube 2 from occurring when it is heated.

[0028] As Figure 1 shown in the figure, one end of the heating tube 2 is set as a steam inlet 3, and the other end of the heating tube 2 is set as a steam outlet 4. Steam is introduced into the heating tube 2 through the steam inlet 3 so as to heat the heating tube 2 by steam. After the steam is heated in the heating tube 2, it will be discharged through the steam outlet 4.

[0029] Specifically, the connecting mechanism 5 includes a fixing block 51, a limiting upper block 52, a limiting lower block 53, and a limiting groove 54.

[0030] As Figure 2 and Figure 3 shown in the figure, the fixing block 51 is fixedly connected to the inner side wall of the reaction chamber body 1, and a limiting groove 54 is opened on the upper side wall of the fixing block 51.

[0031] As Figure 2 and Figure 3 shown in the figure, the limiting upper block 52 is installed on the heating tube 2 in a fixedly connected manner, and a limiting lower block 53 is fixedly connected to the lower side wall of the limiting upper block 52.

[0032] AsFigure 2 and Figure 3 As shown in Figure 3 , the shape of the lower limiting block 53 matches that of the upper limiting block 52, and the lower limiting block 53 is installed in the limiting groove 54 in a plug-in manner. Through the cooperation of the lower limiting block 53 and the limiting groove 54, the fixing block 51 and the upper limiting block 52 can be installed together, and the cooperation of the lower limiting block 53 and the limiting groove 54 makes the fixing block 51 and the upper limiting block 52 stable when installed together, so that the heating tube 2 is stable when installed in the reaction chamber body 1. At the same time, it is convenient to disassemble and assemble between the lower limiting block 53 and the limiting groove 54, so that it is convenient to disassemble and assemble between the heating tube 2 and the reaction chamber body 1, making the maintenance and replacement of the heating tube 2 convenient.

[0033] As Figure 3 shown in Figure 3 , a corrosion prevention layer 6 is provided on the outer surfaces of both the heating tube 2 and the connecting mechanism 5. Since the reaction substances inside the reaction chamber body 1 are corrosive, by providing the corrosion prevention layer 6, the heating tube 2 and the connecting mechanism 5 are prevented from being corroded by the reaction substances when used in the reaction chamber body 1.

[0034] Preferably, the outer diameter of the heating tube 2 is 2 - 3 cm, and the thickness of the corrosion prevention layer 6 provided on the outer surface of the heating tube 2 is 1.5 - 2.5 mm.

[0035] Preferably, the ratio of the height of the heating tube 2 to the height of the reaction chamber body 1 is 2:3.

[0036] Principle of use: When the heating tube 2 needs to be installed, insert the heating tube 2 from above the reaction chamber body 1, and each lower limiting block 53 moves down corresponding to a fixing block 51 until the lower limiting block 53 is inserted into the corresponding limiting groove 54 to complete the installation of the heating tube 2. When in use, hot steam surges in from the steam inlet 3 of the heating tube 2, and the hot steam moves inside the heating tube 2. During the conveying and moving process, heat exchange occurs with the substances outside the heating tube 2 to heat the reacting substances, and the steam that has become cold after heat exchange is discharged from the steam outlet 4 of the heating tube 2; when the heating tube 2 needs to be cleaned, repaired, or replaced, the cooled heating tube 2 can be directly lifted out from the reaction chamber body 1.

[0037] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above - mentioned exemplary embodiments, and without departing from the spirit or basic characteristics of the present utility model, the present utility model can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non - restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be encompassed within the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0038] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A heating structure for a reaction chamber, comprising a reaction chamber body and a heating tube, characterized in that: The shape of the heating tube is set to be spiral, and the spiral heating tube is formed by repeatedly bending the heating tube in a spiral several times, and the spiral heating tube is bent to form a regular spiral shape, and the spiral heating tube is formed as a whole into a cylindrical shape that matches the interior of the reaction chamber body. The heating tube is installed in the reaction chamber body, and the two ends of the heating tube extend upward and are placed outside the reaction chamber body. A plurality of connecting mechanisms are arranged between the heating tube and the inner side wall of the reaction chamber body, and the plurality of connecting mechanisms are evenly arranged along the inner side surface of the reaction chamber body.

2. A heating structure for a reaction chamber according to claim 1, characterized in that: The connecting mechanism comprises a fixing block, an upper limiting block, a lower limiting block and a limiting groove.

3. A heating structure for a reaction chamber according to claim 2, characterized in that: The fixing block is fixedly connected to the inner side wall of the reaction chamber body, and a limiting groove is arranged on the upper side wall of the fixing block.

4. A heating structure for a reaction chamber according to claim 3, characterized in that: The upper limiting block is installed on the heating tube in a fixed connection manner, and the lower side wall of the upper limiting block is fixedly connected with a lower limiting block.

5. A heating structure for a reaction chamber according to claim 4, characterized in that: The shape of the limiting lower block matches that of the limiting upper block, and the limiting lower block is installed in the limiting groove in a plug-in manner.

6. A heating structure for a reaction chamber according to claim 1, characterized in that: One end of the heating tube is arranged as a steam inlet, and the other end of the heating tube is arranged as a steam outlet.

7. A heating structure for a reaction chamber according to claim 1, characterized in that: The outer surfaces of the heating pipe and the connecting mechanism are both provided with an anti-corrosion layer.

8. A heating structure for a reaction chamber according to claim 7, characterized in that: The outer diameter of the heating tube is 2 to 3 cm, and the thickness of the anti-corrosion layer arranged on the outer surface of the heating tube is 1.5 to 2.5 mm.

9. The heating structure for a reaction chamber according to claim 1, characterized in that: The ratio of the height of the heating tube to the height of the reaction chamber body is 2:3.

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