Novel silicon carbide heating equipment

Abstract

Novel silicon carbide heating equipment comprises a bottom plate, upper supporting frames, a vibration motor, an electric heating mechanism, two sets of electric drum type conveying mechanisms, an electric linear sliding table and an air cooling mechanism, and the lower ends of the two sets of upper supporting frames are installed at the two ends of the bottom plate respectively; the lower ends of the two sets of upper supporting frames and the two sets of electric linear sliding tables are installed together, and electric heating mechanisms are installed at the lower ends of sliding blocks of the two sets of electric linear sliding tables. The electric heating mechanism comprises a housing, a lower heating shell, an electric push rod, a linear bearing and an electric heating pipe, a mounting shell is mounted at the lower end of the lower heating shell, the vibration motor is mounted in the mounting shell, and the mounting shell is mounted between the two electric drum-type conveying mechanisms; the air cooling mechanism is installed on one side of the bottom plate. According to the utility model, production in a semi-assembly line mode can be realized, and convenience is brought to workers; the bonding reaction between carbon powder and silicon powder can be improved, forced air cooling can be carried out on the box body, and the working efficiency and the product quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of heating equipment, in particular to a novel silicon carbide heating equipment. Background Art

[0002] In the production process of silicon carbide micropowder, a heating process is involved. The heating effect is mainly reflected in promoting the reaction between carbon powder and silicon powder. By external heating, the continuous progress of the reaction between silicon and carbon is ensured, so as to synthesize high-quality silicon carbide powder. This heating process not only helps to improve the purity of silicon carbide powder, but also directly affects the crystallization quality and electrical properties of single crystals when growing semi-insulating silicon carbide single crystals by the sublimation method. In addition, the heating effect also helps to improve the purity of silicon carbide powder, which is crucial for applications in high-tech fields such as the semiconductor industry. The above method is not only applicable to laboratories and small-scale production, but also suitable for production in places with special requirements for product quality. In summary, the heating effect plays a key role in the production process of silicon carbide micropowder. It not only promotes the reaction of raw materials, but also directly affects the quality and application fields of the final products.

[0003] In the prior art, especially for manufacturers with small production scales, affected by funds or other factors, an electric heating furnace is generally used for heating and synthesizing silicon carbide micropowder. In specific applications, the staff opens the furnace door, puts the heating metal box containing the silicon carbide micropowder raw materials into the electric heating furnace, and then the electric heating tubes of the electric heating furnace generate heat to heat and synthesize the raw materials. In the above operation process, the staff needs to manually open and close the furnace door. Especially when the temperature of the box body (the production box body of silicon carbide micropowder) is relatively high after heating, it will cause inconvenience to the operation of the staff. Moreover, in the above heating mode, a continuous-flow production method cannot be achieved, and the box body filled with silicon carbide micropowder raw materials is cooled naturally after heating, and the waiting cooling time is relatively long, so it is not conducive to improving work efficiency. Finally, during the heating process of the silicon carbide micropowder raw materials in the box body, they are always in a static state, which is not conducive to improving the combination reaction between carbon powder and silicon powder, and will correspondingly have a certain impact on the quality of the produced finished products to some extent (there is also the disadvantage that the heating time is prolonged, resulting in relatively low production efficiency). Content of the Utility Model

[0004] In order to overcome the drawbacks of existing silicon carbide micropowder production equipment due to structural limitations as described in the background, the present utility model provides a new type of silicon carbide heating equipment. With the combined action of relevant mechanisms, workers only need to place the products before and after production at relevant workstations or take them away from relevant workstations, and can simply operate through a power switch to achieve semi-assembly line production. During heating, the raw materials can be vibrated and heated, improving the bonding reaction between carbon powder and silicon powder, and can perform forced air cooling on the product box after production, bringing convenience to workers and improving work efficiency and product quality.

[0005] The technical solution adopted by the present utility model to solve its technical problems is as follows:

[0006] The new type of silicon carbide heating equipment includes a bottom plate, an upper support frame, a vibration motor, an electric heating mechanism, an electric roller conveyor mechanism, an electric linear slide, and an air cooling mechanism. It is characterized in that there are at least two sets of electric roller conveyor mechanisms. The lower spacing distances of the two sets of electric roller conveyor mechanisms are respectively installed at both ends of the bottom plate, and the distance between them is greater than the width of the production box of silicon carbide micropowder. The lower ends of at least two sets of upper support frames are respectively installed on both side ends of the two sets of electric roller conveyor mechanisms. A fixing plate is installed between the upper ends of the two sets of upper support frames. At least two sets of electric linear slides are respectively installed on the lower side of the fixing plate. The lower ends of the sliding blocks of the two sets of electric linear slides are installed with a connecting plate; the electric heating mechanism includes a housing, a lower heating shell, an electric push rod, a linear bearing, and electric heating tubes. Multiple sets of electric heating tubes are respectively installed in the housing and the lower heating shell. The upper ends of the linear bearing and the electric push rod are respectively installed at the lower end of the connecting plate, and the lower ends of the electric push rod and the linear bearing are respectively installed outside the upper end of the housing; the lower end of the lower heating shell is installed with a mounting shell, the vibration motor is installed in the mounting shell, and the mounting shell is installed between the two sets of electric roller conveyor mechanisms; the air cooling mechanism is installed on one side of the bottom plate.

[0007] Further, the external dimensions of the lower heating shell are larger than those of the housing.

[0008] Further, when the lower end of the electric push rod is at the lower dead point, the lower end of the housing is sealed and located above the lower heating shell, and the internal dimensions and height of the housing are respectively larger than the external dimensions and height of the production box of silicon carbide micropowder.

[0009] Further, heat insulation plates are installed and padded between the lower end of the linear bearing, the connecting part between the lower end of the electric push rod and the outer side of the upper part of the housing, and between the outer side of the lower end of the lower heating shell and the outer side of the upper end of the mounting shell.

[0010] Further, the upper end height of the lower heating shell is in the same plane as the upper end of the roller of the electric roller conveyor mechanism.

[0011] Furthermore, the air-cooling mechanism includes a blower and an air outlet housing. The upper end of the air outlet housing is an open structure, and a ventilation pipe is installed at the lower end. The lower end of the air outlet housing has a number of air holes. The upper end of the air outlet housing is installed under the lower side of the frame of one set of electric roller conveyor mechanisms. The blower is installed on one side of the bottom plate, and the air outlet pipe of the blower is connected to the lower end of the ventilation pipe.

[0012] Furthermore, there is a spacing distance between the upper end of the air outlet housing and the lower end of the roller of the electric roller conveyor mechanism.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows: For this new type, the staff only need to place the product boxes before and after production one by one at the relevant workstations of the set of electric roller conveyor mechanisms at the left end, or take them away from the relevant workstations of the set of electric roller conveyor mechanisms at the right end. It can be simply operated through the power switch to realize semi-assembly line production, which brings convenience to the staff accordingly; the vibration motor can vibrate and heat the raw materials during the heating of the electric heating tube, improving the bonding reaction between the carbon powder and the silicon powder, and can forcibly air-cool the product boxes after production through the air-cooling mechanism, improving the work efficiency and product quality. Based on the above, the present utility model has good application prospects. Description of the Drawings

[0014] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0015] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0016] Figure 2 It is a partially enlarged schematic diagram of the structure of the present utility model.

[0017] Figure 3 It is a circuit diagram of the present utility model. Detailed Embodiment

[0018] Figure 1 、 2As shown in Figures 1, 2, and 3, the new silicon carbide heating device includes a bottom plate 1, upper support frames 2, vibration motors M, power switches, power modules A1, electric heating mechanisms, electric roller conveyor mechanisms M1 and M2, electric linear slides M5, and air-cooling mechanisms. There are two sets of electric roller conveyor mechanisms. The lower parts of the two sets of electric roller conveyor mechanisms M1 and M2 are respectively installed on the upper parts of the left and right ends of the bottom plate 1 at an interval distance through bolts, and the distance between the two is greater than the width of the left and right ends of the production box 3 of silicon carbide micropowder. The lower ends of the two sets of "Π"-shaped upper support frames 2 are respectively welded to the front and rear parts of the left and right ends of the bottom plate 1. A fixing plate 21 is welded front and rear between the upper ends of the two sets of upper support frames 2. There are two sets of electric linear slides M5. The two sets of electric linear slides M5 are horizontally distributed left and right and installed on the lower side of the fixing plate 21 at an interval distance through bolts. The lower ends of the sliding blocks of the two sets of electric linear slides M5 are longitudinally welded with a connecting plate 22 front and rear. The electric heating mechanism includes a housing 41 with an open structure at the lower end, a lower heating shell 42, an electric push rod M6, linear bearings 43 (for guiding the up and down movement of the housing), and electric heating tubes RT. There are six sets of electric heating tubes RT, which are respectively installed at the upper end, left and right ends, front and rear ends inside the housing 41, and the upper end inside the lower heating shell 42 (the wires connected to the electric heating tubes RT inside the housing 41 are respectively sleeved in ceramic insulating tubes and led out through holes at the upper end, left and right ends, and front and rear ends of the housing 41. The holes are sealed with the outside of the insulating tubes, and then the wires with length allowances are bypassed around the right side of the upper support frame and led down into the electric control box. The wires connected to the electric heating tubes RT inside the lower heating shell 42 are sleeved in ceramic insulating tubes and led out through a hole at the right end of the lower heating shell 42. The hole is sealed with the outside of the insulating tube, and then the wires with length allowances are bypassed around the right side of the bottom plate and led down into the electric control box). The upper ends of the bearing seats of the four sets of linear bearings 43 and the upper ends of the cylinders of the two sets of electric push rods M6 are respectively vertically installed at the left and right ends of the front and rear sides of the connecting plate 22 through bolts, and each set of electric push rod M6 is located between the bearing seats of two sets of linear bearings 43. The lower ends of the bearing rods of the four sets of linear bearings 43 and the lower ends of the push columns of the two sets of electric push rods M6 are respectively vertically installed around the outside of the upper end of the housing 41 through bolts. A mounting shell 44 is installed at the lower end of the lower heating shell 42. The lower end of the vibration motor M is installed in the mounting shell 44 through bolts, and the lower end of the mounting shell 44 is installed on the fixed platform 101 of the two sets of electric roller conveyor mechanisms. The air-cooling mechanism is installed at the front end of the right side of the bottom plate 1. The power switch and the power module A1 are installed in the electric control box 5, and the electric control box 5 is installed at the front part of the right side end of the bottom plate.

[0019] Figure 1 、 2, as shown in Figures 2 and 3, the electric heating tube RT is a finished "U"-shaped electric heating tube with a dry-burning stainless steel tube sheathed. The outer dimension of the lower heating shell 42 is larger than that of the cover shell 41. When the push rod of the electric push rod M6 is at the lower dead point, the lower end of the cover shell 41 is hermetically and tightly attached to the upper side around the upper end of the lower heating shell 42. The distances between the left and right, front and rear ends inside the cover shell 41 and between the inner sides of the electric heating tubes RT, and the distance between the lower part of the upper electric heating tube RT and the upper end of the lower heating shell 42 are respectively larger than the distances between the left and right ends, front and rear ends, and upper and lower ends outside the silicon carbide production box 3. Between the lower end of the shaft rod of the linear bearing 43, the lower end of the push rod of the electric push rod M6 and the upper outer side of the cover shell 41, and between the outer side of the lower end of the lower heating shell 42 and the outer side of the upper end of the mounting shell 44, ceramic heat insulation plates 6 are installed (the ceramic heat insulation plates 6 play a heat insulation role to prevent the heat of the electric heating tube RT from acting on the electric push rod and the vibration motor too much, resulting in overheating of the electric push rod and the vibration motor and affecting their operation). The upper end height of the lower heating shell 42 is in the same plane as the upper ends of the rollers of the two sets of electric roller conveyors M1 and M2. The air-cooling mechanism includes a fan M4 and an air outlet shell 71. The upper end of the air outlet shell 71 is of an open structure, and a ventilation pipe 72 communicating with its interior is welded to the outside of the middle part of the lower end. There are several air holes 721 at intervals at the lower end of the air outlet shell. The front and rear parts of the upper end of the air outlet shell 71 are respectively installed on the front and rear sides of the right end of the frame of the right-end electric roller conveyor M2. The fan M4 is installed on the lower part of the right side end of the bottom plate 1 by bolts. The air outlet pipe of the fan M4 and the lower end of the ventilation pipe 72 are connected by a pipe joint. There is a distance between the upper end of the air outlet shell and the lower end of the roller of the right-end electric roller conveyor M2.

[0020] Figure 1 , 2 , as shown in Figures 2 and 3, the two sets of electric roller conveyors M1 and M2, the six sets of electric heating tubes RT, the vibration motor M, and the fan M4 of the air-cooling mechanism are respectively connected in series through a power switch S1, S2, S6, S, and S3. The power input terminals 1 and 2 of the power module A1 and the two poles of the AC 220V power supply are respectively connected by wires. The power output terminals 3 and 4 of the power module A1 and the power input terminals 1 and 2 of the other two power switches S4 and S5 are respectively connected by wires. The power output terminals 3 and 4 and 5 and 6 of the other two power switches S4 and S5 and the positive and negative and negative and positive power input terminals of the two sets of electric linear slides M5 and the two sets of electric push rods M6 are respectively connected by wires. The handles of all the power switches are located outside the front end of the electric control box.

[0021] Figure 1 , 2, as shown in Fig. 3, before the production of this new type, multiple heating metal boxes 3 (with an open upper structure) filled with silicon carbide micropowder raw materials can be placed on the rollers of an electric roller conveyor mechanism M1 at the left end at regular intervals horizontally. After the AC 220V power supply enters the power input terminal of the power module A1, the stable DC 24V power supply output from pins 3 and 4 of the power module A1 enters the power input terminals of the power switches S4 and S5. The specific working process is as follows. (1) Turn on the power switch S6, and the six sets of electric heating tubes RT are energized simultaneously to heat the inside of the housing and the lower heating housing (turn off the power switch S6, and the six sets of electric heating tubes RT lose power and stop heating); turn on the power switch S, and the vibration motor M is energized to work and generate a vibration force that acts on the subsequent box 3 located above the lower heating housing 42 through the lower heating housing 42 (turn off the power switch S, and the vibration motor M loses power and stops working). (2) Turn on the power switch S1, and an electric roller conveyor mechanism M1 at the left end is energized to work to convey a box 3 at its right end to the upper part of the lower heating housing 42 (due to the inertia of the rollers of the electric roller conveyor mechanism M1, the box just moves to a position near the middle of the upper part of the lower heating housing), and then turn off the power switch S1; move the handle of the power switch S5 to the left, and the 1st and 2nd pins and the 3rd and 4th pins of the power switch S5 are connected respectively, and the positive and negative power input terminals of the two sets of electric push rods M6 are energized. After the push rods of the two sets of electric push rods M6 push the lower end of the housing 41 to contact the upper end of the lower heating housing 42, turn off the power switch S5. (3) The six sets of electric heating tubes heat the lower end, upper end, left and right, and front and back sides of the box 3 simultaneously. The heating speed is fast, and the vibration motor can vibrate and heat the raw materials during the heating of the electric heating tubes, improving the bonding reaction between the carbon powder and the silicon powder, ensuring the product quality and correspondingly reducing the heating time and improving the work efficiency; it should be noted that the heating synthesis of silicon carbide micropowder from carbon powder and silicon powder does not fall within the scope of protection of this application (and is an existing mature technology), so this application does not elaborate on its synthesis mechanism. (4) After the heating is completed, move the handle of the power switch S4 to the left, and the 1st and 2nd pins and the 3rd and 4th pins of the power switch S4 are connected respectively, and the positive and negative power input terminals of the two sets of electric linear slides M5 are energized. The sliders of the two sets of electric linear slides M5 drive the housing 41 to move a certain distance to the right end and then turn off the power switch S4. At this time, most of the lower part of the heated box 3 is located on the left roller of an electric roller conveyor mechanism M2 at the right end; then, move the handle of the power switch S5 to the right, and the 1st and 2nd pins and the 5th and 6th pins of the power switch S5 are connected respectively, and the negative and positive power input terminals of the two sets of electric push rods M6 are energized. The push rods of the two sets of electric push rods M6 drive the housing 41 to move up to the stop point and then turn off the power switch S5 (at this time, there is a distance between the lower end of the housing and the upper end of the box).(5) Turn on the power switch S2, and the electric roller conveyor mechanism M2 on the right end is powered on and operates. The rollers of the electric roller conveyor mechanism M2 on the right end drive the heated box body to be located above the air outlet housing 71, and then turn off the power switch S2. Then, move the handle of the power switch S4 to the right. The 1st, 2nd pins and the 5th, 6th pins of the power switch S4 are respectively connected. The positive and negative power input terminals of the two sets of electric linear slides M5 are powered on. The sliders of the two sets of electric linear slides M5 drive the cover 41 to move a certain distance to the left end, and then turn off the power switch S4 (at this moment, the lower end of the cover is perpendicular to the upper end of the lower heating shell, preparing for heating the raw materials in the next box). (6) Turn on the power switch S3, and the fan M4 is powered on and operates to blow high-speed air into the air outlet housing 71. Since there is a gap between every two rollers of the electric roller conveyor mechanism M2, in this way, the high-speed air will blow upward through several air holes 721 to cool the box body 3. After the cooling work is completed, the staff turns on the power switch S2 again, and the electric roller conveyor mechanism M2 on the right end is powered on and operates again. The rollers of the electric roller conveyor mechanism M2 on the right end drive the cooled box body to be located at the right side end of the electric roller conveyor mechanism M2 on the right end, facilitating the staff to transfer the box body away. Then, the staff turns on the power switch S1 again, and the electric roller conveyor mechanism M1 on the left end is powered on and operates again to convey a box body 3 located at the left side end of the previous heated box body to the upper end of the lower heating shell 42, which is exactly the same as the above working process (1)-(6). The present invention can also perform vibration heating synthesis of silicon carbide micropowder on the raw materials in the next box. After all production is completed, turn off all power switches.

[0022] Figure 1 , 2 , as shown in Figure 3, through the above, the staff of the present invention only needs to place the product box bodies before and after production one by one at the working station of the electric roller conveyor mechanism on the left end, or take them away from the relevant working stations of the electric roller conveyor mechanism on the right end, and can simply operate through the power switch to realize semi-automatic production in a pipeline manner, which brings convenience to the staff accordingly; since the raw materials can be vibration heated, the combination reaction between carbon powder and silicon powder is improved, and the product box body after production can be forced air-cooled, which improves the work efficiency and product quality. Figure 3 Among them, the power module A1 is a finished product of an AC 220V to DC 24V switching power supply module; the power of the fan M4 is 2KW; the power of the vibration motor M is 1KW (eccentric wheel vibration motor); the power of each set of electric heating tubes RT is 2KW (a baffle can be installed on the right side of the left set of electric heating tubes RT in the cover to increase its strength, so that when the cover drives the box body to move to the right end, the baffle can play a protective role for the electric heating tube); the electric push rod M6 is a finished product of a reciprocating electric telescopic rod with a power of 80W; the electric linear slide M5 is a finished product of an electric screw type slide; the electric roller conveyor mechanisms M1 and M2 are finished products of electric roller conveyors with a power of 5KW. The aboveFigure 3 Among them, all devices are mature products, and the working principle will not be elaborated in this application.

[0023] Those skilled in the art should understand that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art. The protection scope of this application is defined by the claims.

Claims

1. A new type of silicon carbide heating equipment, including a base plate, an upper support frame, a vibration motor, an electric heating mechanism, an electric roller conveying mechanism, an electric linear slide, and an air cooling mechanism, characterized in that: The electric roller conveying mechanism comprises at least two sets, the lower parts of the two sets of electric roller conveying mechanisms are respectively installed on the two ends of the bottom plate at a spacing distance, and the spacing between the two is greater than the width of the production box of silicon carbide micropowder, the lower ends of at least two sets of upper support frames are respectively installed on the two side ends of the two sets of electric roller conveying mechanisms, a fixed plate is installed between the upper ends of the two sets of upper support frames, at least two sets of electric linear slides are respectively installed on the lower side of the fixed plate, and the lower ends of the sliding blocks of the two sets of electric linear slides are installed with connecting plates; the electric heating mechanism comprises a cover shell, a lower heating shell, an electric push rod, a linear bearing, and an electric heating tube, and multiple sets of electric heating tubes are respectively installed in the cover shell and the lower heating shell, the upper ends of the linear bearing and the electric push rod are respectively installed at the lower end of the connecting plate, and the lower ends of the electric push rod and the linear bearing are respectively installed outside the upper end of the cover shell; the lower end of the lower heating shell is installed with a mounting shell, the vibration motor is installed in the mounting shell, and the mounting shell is installed between the two sets of electric roller conveying mechanisms; the air cooling mechanism is installed on one side of the bottom plate.

2. The novel silicon carbide heating device according to claim 1 is characterized in that: The outer dimensions of the lower heating shell are larger than the outer dimensions of the cover shell.

3. The novel silicon carbide heating device according to claim 1 is characterized in that: When the lower end of the electric push rod is located at the lower dead point, the lower end seal of the cover shell is located on the upper side of the lower heating shell, and the inner size and height of the cover shell are respectively larger than the outer size and height of the production box of silicon carbide micropowder.

4. The novel silicon carbide heating device according to claim 1 is characterized in that: The lower end of the linear bearing, the connecting part between the lower end of the electric push rod and the upper outer side of the cover shell, and between the lower end outer side of the lower heating shell and the upper end outer side of the installation shell are all installed with heat insulation plates.

5. The novel silicon carbide heating device according to claim 1 is characterized in that: The height of the upper end of the lower heating shell and the upper end of the roller of the electric roller type conveying mechanism are in the same plane.

6. The novel silicon carbide heating device according to claim 1 is characterized in that: The air cooling mechanism includes a fan and an air outlet shell. The upper end of the air outlet shell is an open structure and a ventilation duct is installed at the lower end. The lower end of the air outlet shell has a plurality of air holes. The upper end of the air outlet shell is installed on the lower side of the frame of one set of electric roller-type conveying mechanisms. The fan is installed on one side of the base plate, and the air outlet duct of the fan is connected to the lower end of the ventilation duct.

7. The novel silicon carbide heating device according to claim 6 is characterized in that: The distance between the upper end of the air outlet housing and the lower end of the roller of the electric roller conveying mechanism.

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