Vacuum furnace conveying mechanism capable of controlling oxygen concentration

Abstract

The utility model discloses a vacuum furnace conveying mechanism capable of controlling oxygen concentration, relates to the technical field of semiconductor welding, and aims to solve the problems that when products are fed into a current vacuum welding furnace, a large amount of air is brought into a welding chamber, the nitrogen environment in the welding chamber is seriously influenced, and the welding quality is influenced. The utility model relates to an automatic welding device, in particular to an automatic welding device which solves the technical problems that in the prior art, if the nitrogen content is reduced, a product is prone to being oxidized in the welding process, the product quality is reduced, and even the product is scrapped, and comprises a frame assembly, a conveying assembly and an oxygen control assembly, and the conveying assembly and the oxygen control assembly are arranged in the frame assembly. The automatic welding device adjusts the opening and closing sequence of a front pneumatic check curtain, a middle pneumatic check curtain and a rear pneumatic check curtain. According to the vacuum welding furnace, direct communication between the outside and the vacuum welding furnace is reduced, air isolation is provided in cooperation with the isolation air curtain, the stability of the nitrogen environment in the vacuum welding furnace is greatly guaranteed, the problem of welding oxidation caused by reduction of the nitrogen content is solved, the product quality is greatly improved, and the scrap problem is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor welding, and more specifically, to a vacuum furnace conveying mechanism capable of controlling the oxygen concentration. Background Art

[0002] With the development of semiconductor technology, electronic technology is developing towards high power, high density and integration, and higher and more comprehensive reliability requirements are put forward for the packaging and welding of high-power devices.

[0003] However, a large amount of air will be brought into the welding chamber when the existing vacuum welding furnace feeds products, seriously affecting the nitrogen environment in the welding chamber. If the nitrogen content decreases, it is easy to cause oxidation of the products during welding, resulting in reduced product quality or even scrapping problems. In view of this, we propose a vacuum furnace conveying mechanism capable of controlling the oxygen concentration. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art, meet the actual needs, and provide a vacuum furnace conveying mechanism capable of controlling the oxygen concentration, so as to solve the technical problems that a large amount of air will be brought into the welding chamber when the current vacuum welding furnace feeds products, seriously affecting the nitrogen environment in the welding chamber. If the nitrogen content decreases, it is easy to cause oxidation of the products during welding, resulting in reduced product quality or even scrapping.

[0005] To solve the above technical problems, the utility model provides the following technical solution: A vacuum furnace conveying mechanism capable of controlling the oxygen concentration, including a frame assembly, a conveying assembly arranged in the frame assembly for conveying products, and an oxygen control assembly arranged in the frame assembly and above the conveying assembly;

[0006] The oxygen control assembly includes a front pneumatic curtain, a middle pneumatic curtain, a rear pneumatic baffle arranged in the frame assembly, and two nitrogen spray bars. The nitrogen spray bars are symmetrically arranged on both sides of the middle pneumatic curtain, and drive structures are fixedly arranged below the front pneumatic curtain, the middle pneumatic curtain, and the rear pneumatic baffle;

[0007] The drive structure includes an optical axis, a cylinder lifting plate, and a cylinder body, and the piston rod of the cylinder body is connected to the cylinder lifting plate;

[0008] The nitrogen spray bar includes two nitrogen inlets and a spray bar body. The two nitrogen inlets are respectively fixedly installed on both sides inside the fixed frame, and both ends of the spray bar body are respectively installed in the corresponding nitrogen inlets. A plurality of downward air outlets are equidistantly arranged on the outer edge surface of the spray bar body, and nitrogen is sprayed out from the plurality of air outlets to form an isolation air curtain for reducing the entry of air.

[0009] The utility model completes the air isolation when feeding products through the cooperation of an oxygen control component and a conveying component. By adjusting the opening and closing sequence of the front pneumatic curtain, the middle pneumatic curtain, and the rear pneumatic baffle, the direct connection between the outside and the vacuum welding furnace is reduced. When the product enters between the front pneumatic curtain and the middle pneumatic curtain, the front pneumatic curtain closes, and when the middle pneumatic curtain is opened, two nitrogen spray rods are started. Through external air supply, an isolation air curtain is formed by the spray rod main bodies with a plurality of air outlet holes on both sides of the middle pneumatic curtain, so as to provide air isolation for the product when passing through the middle pneumatic curtain, facilitating the reduction of the mixing of air in the vacuum welding furnace when the rear pneumatic baffle is opened subsequently, greatly ensuring the stability of the nitrogen environment in the vacuum welding furnace, avoiding the problem of welding oxidation caused by the decrease in nitrogen content, greatly improving the quality of the product, and reducing the generation of scrap problems.

[0010] Preferably, the frame assembly includes a bottom plate, a front sealing plate, a rear sealing plate, a front handstand plate, an inner vertical plate, a top plate main body, and a fixed top plate;

[0011] The front sealing plate, the rear sealing plate, the front handstand plate, and the inner vertical plate are respectively installed on one side of the top of the bottom plate, the top plate main body and the fixed top plate are installed on the front handstand plate and the inner vertical plate, and the top plate main body is hinged to the inner vertical plate.

[0012] Preferably, two mounting holes are symmetrically opened on the opposite surfaces of the front handstand plate and the inner vertical plate, and the nitrogen gas inlet is fixedly arranged in the mounting holes.

[0013] Preferably, the conveying component includes a fixed conveying part, a movable conveying part, two guiding optical rods, and two driving motors;

[0014] Both ends of the two guiding optical rods are respectively fixed on one side of the opposite surfaces of the front handstand plate and the inner vertical plate, and the fixed conveying part and the movable conveying part are both installed on the guiding optical rods.

[0015] Preferably, sprocket A is arranged in both the fixed conveying part and the movable conveying part, and sprocket B is fixedly arranged on the motor shafts of the two driving motors. The two sprocket As and the two sprocket Bs are respectively connected by two sections of chains.

[0016] Preferably, both the front pneumatic curtain and the middle pneumatic curtain include a curtain main body, an upper bracket, and a lower bracket;

[0017] The upper bracket and the lower bracket are respectively installed at both ends of the curtain main body, and the upper bracket is fixedly arranged between the top parts of the opposite surfaces of the front handstand plate and the inner vertical plate.

[0018] Preferably, the lower bracket is slidably disposed between the tops of the opposite surfaces of the front hand vertical plate and the inner vertical plate, and the two optical axes are fixedly disposed on both sides of the bottom of the lower bracket, and the cylinder lifting plate is fixedly installed at the bottom ends of the two optical axes.

[0019] Preferably, the rear pneumatic baffle includes a baffle main body, the baffle main body is slidably installed between one side of the opposite surfaces of the front hand vertical plate and the inner vertical plate, and one ends of the two optical axes are respectively fixed to one side of the bottom end of the baffle main body, and the cylinder lifting plate is fixedly installed at the bottom ends of the two optical axes.

[0020] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0021] 1. The present utility model completes the air isolation when feeding the product through the oxygen control component cooperating with the conveying component. By adjusting the opening and closing sequence of the front pneumatic curtain, the middle pneumatic curtain, and the rear pneumatic baffle, the direct connection between the outside and the vacuum welding furnace is reduced. When the product enters between the front pneumatic curtain and the middle pneumatic curtain, the front pneumatic curtain closes, and when the middle pneumatic curtain is opened, two nitrogen spray rods are started. Through the external air supply, the isolation air curtain of the spray rod main body provided with a plurality of air outlet holes forms an isolation air curtain on both sides of the middle pneumatic curtain, so as to provide air isolation for the product when passing through the middle pneumatic curtain, so as to reduce the mixing of air in the vacuum welding furnace when the rear pneumatic baffle is opened subsequently, greatly ensuring the stability of the nitrogen environment in the vacuum welding furnace, avoiding the problem of welding oxidation caused by the decrease of nitrogen content, greatly improving the quality of the product, and reducing the generation of scrap problems.

[0022] 2. The present utility model also controls the opening and closing of the front pneumatic curtain, the middle pneumatic curtain, and the rear pneumatic baffle. The front pneumatic curtain and the middle pneumatic curtain form a preliminary isolation of the outside air. After the product enters between the front pneumatic curtain and the middle pneumatic curtain, the air curtain isolation is carried out through two nitrogen spray rods, and then the middle pneumatic curtain and the rear pneumatic baffle form a secondary isolation of the outside air. The product can be fed by opening the rear pneumatic baffle, effectively improving the isolation effect on the outside air and further ensuring the stability of the nitrogen environment in the vacuum welding furnace. Description of the Drawings

[0023] Figure 1 is a schematic internal structure diagram of the present utility model;

[0024] Figure 2 is a schematic structure diagram of the present utility model in a top view state.

[0025] Explanation of the reference numerals in the drawings:

[0026] 1. Roof main body; 2. Rear sealing plate; 3. Front vertical plate for hand; 4. Front sealing plate; 5. Fixed roof; 6. Inner vertical plate; 7. Cylinder main body; 8. Cylinder lifting plate; 9. Optical axis; 10. Upper bracket; 11. Lower bracket; 12. Curtain main body; 13. Baffle main body; 14. Fixed conveying part; 15. Nitrogen gas inlet; 16. Spray bar main body; 17. Movable conveying part; 18. Guide optical rod; 19. Product. Detailed implementation manner

[0027] As Figures 1 to 2 shown, a vacuum furnace conveying mechanism capable of controlling the oxygen concentration according to the present utility model includes a frame assembly, a conveying assembly arranged in the frame assembly for conveying the product 19, and an oxygen control assembly arranged in the frame assembly and above the conveying assembly. The frame assembly includes a bottom plate, a front sealing plate 4, a rear sealing plate 2, a front vertical plate for hand 3, an inner vertical plate 6, a roof main body 1, and a fixed roof 5. The front sealing plate 4, the rear sealing plate 2, the front vertical plate for hand 3, and the inner vertical plate 6 are respectively installed on one side of the top of the bottom plate. The roof main body 1 and the fixed roof 5 are installed on the front vertical plate for hand 3 and the inner vertical plate 6, and the roof main body 1 is hingedly connected to the inner vertical plate 6. Two mounting holes are symmetrically formed on the opposite surfaces of the front vertical plate for hand 3 and the inner vertical plate 6, and the nitrogen gas inlet 15 is fixedly arranged in the mounting holes.

[0028] In an embodiment of the present utility model, to drive the product 19, the conveying assembly includes a fixed conveying part 14, a movable conveying part 17, two guide optical rods 18, and two driving motors. The two ends of the two guide optical rods 18 are respectively fixed to one side of the opposite surfaces of the front vertical plate for hand 3 and the inner vertical plate 6, and the fixed conveying part 14 and the movable conveying part 17 are both installed on the guide optical rods 18. Chain wheels A are arranged in both the fixed conveying part 14 and the movable conveying part 17, and chain wheels B are fixedly arranged on the motor shafts of the two driving motors. The two chain wheels A and the two chain wheels B are respectively connected by two sections of chains. By driving the chain wheels B to rotate through the driving motors, the two chain wheels A are respectively driven to rotate through the two sections of chains, and then the product 19 is driven through the fixed conveying part 14 and the movable conveying part 17.

[0029] In an embodiment of the present utility model, to ensure the stability of the nitrogen environment in the vacuum welding furnace, the oxygen control assembly includes a front pneumatic curtain, a middle pneumatic curtain, a rear pneumatic baffle, and two nitrogen spray bars arranged in the frame assembly. The nitrogen spray bars are symmetrically arranged on both sides of the middle pneumatic curtain, and driving structures are fixedly arranged below the front pneumatic curtain, the middle pneumatic curtain, and the rear pneumatic baffle. The driving structures include an optical axis 9, a cylinder lifting plate 8, and a cylinder main body 7, and the piston rod of the cylinder main body 7 is connected to the cylinder lifting plate 8;

[0030] The front pneumatic curtain and the middle pneumatic curtain both include a curtain body 12, an upper bracket 10 and a lower bracket 11. The upper bracket 10 and the lower bracket 11 are respectively installed at both ends of the curtain body 12, and the upper bracket 10 is fixedly arranged between the top surfaces of the front vertical plate 3 and the inner vertical plate 6 facing each other. The lower bracket 11 is slidably arranged between the top surfaces of the front vertical plate 3 and the inner vertical plate 6 facing each other, and the two optical axes 9 are fixedly arranged on both sides of the bottom of the lower bracket 11. The cylinder lifting plate 8 is fixedly installed at the bottom ends of the two optical axes 9.

[0031] The rear pneumatic baffle includes a baffle body 13. The baffle body 13 is slidably installed between one side of the front vertical plate 3 and the inner vertical plate 6 facing each other. One end of each of the two optical axes 9 is fixedly arranged on one side of the bottom end of the baffle body 13, and the cylinder lifting plate 8 is fixedly installed at the bottom ends of the two optical axes 9. Through the opening and closing control of the front pneumatic curtain, the middle pneumatic curtain and the rear pneumatic baffle, the front pneumatic curtain and the middle pneumatic curtain form a preliminary isolation of the external air. After the product 19 enters between the front pneumatic curtain and the middle pneumatic curtain, a gas curtain isolation is carried out through two nitrogen spray rods. Then, the middle pneumatic curtain and the rear pneumatic baffle form a secondary isolation of the external air. The product can be sent in by opening the rear pneumatic baffle, effectively improving the isolation effect on the external air and further ensuring the stability of the nitrogen environment in the vacuum welding furnace.

[0032] In the embodiment of the present invention, to avoid the problem of welding oxidation caused by the decrease in nitrogen content, the nitrogen spray rod includes two nitrogen inlets 15 and a spray rod body 16. The two nitrogen inlets 15 are respectively fixedly installed on both sides inside the fixed frame, and both ends of the spray rod body 16 are respectively installed in the corresponding nitrogen inlets 15. A plurality of downward air outlet holes are equidistantly arranged on the outer edge surface of the spray rod body 16, and nitrogen is sprayed out from the plurality of air outlet holes to form an isolation gas curtain for reducing the entry of air. The air isolation during the feeding of the product 19 is completed through the oxygen control component and the conveying component. By adjusting the opening and closing sequence of the front pneumatic curtain, the middle pneumatic curtain and the rear pneumatic baffle, the direct connection between the outside and the vacuum welding furnace is reduced. When the product 19 enters between the front pneumatic curtain and the middle pneumatic curtain, the front pneumatic curtain is closed, and when the middle pneumatic curtain is opened, two nitrogen spray rods are started. Through the external air supply, an isolation gas curtain is formed on both sides of the middle pneumatic curtain by the isolation gas curtain of the spray rod body 16 provided with a plurality of air outlet holes, so as to provide air isolation for the product when passing through the middle pneumatic curtain, so as to reduce the mixing of air in the vacuum welding furnace when the rear pneumatic baffle is opened subsequently, greatly ensuring the stability of the nitrogen environment in the vacuum welding furnace, avoiding the problem of welding oxidation caused by the decrease in nitrogen content, greatly improving the quality of the product and reducing the generation of scrap problems.

[0033] Working principle: This embodiment provides a vacuum furnace conveying mechanism capable of controlling the oxygen concentration. During use, the product is moved through the opened front pneumatic curtain by the conveying component and enters the space between the front pneumatic curtain and the middle pneumatic curtain. Then, through two nitrogen spray bars, an isolation air curtain is formed on both sides of the middle pneumatic curtain by the isolation air curtain of the spray bar body 16 with a plurality of air outlet holes through external air supply, so as to provide air isolation for the product when passing through the middle pneumatic curtain, thereby reducing the mixing of air into the space between the middle pneumatic curtain and the rear pneumatic baffle. Then, the middle pneumatic curtain is closed, and the rear pneumatic baffle is opened, thus completing the feeding of the product 19. This can greatly reduce the mixing of air in the vacuum welding furnace, greatly ensure the stability of the nitrogen environment in the vacuum welding furnace, avoid the problem of welding oxidation caused by the decrease in nitrogen content, greatly improve the quality of the product, and reduce the generation of scrap problems.

[0034] The embodiments disclosed in this utility model are preferred embodiments, but not limited thereto. Those of ordinary skill in the art can easily understand the spirit of this utility model based on the above embodiments and make different extensions and changes. However, as long as they do not depart from the spirit of this utility model, they are within the protection scope of this utility model.

Claims

1. A vacuum furnace conveying mechanism capable of controlling oxygen concentration, characterized in that: It comprises a frame assembly, a conveying assembly arranged in the frame assembly for conveying a product (19), and an oxygen control assembly arranged in the frame assembly and above the conveying assembly; The oxygen control assembly includes a front pneumatic baffle, a middle pneumatic baffle, a rear pneumatic baffle and two nitrogen spray rods arranged in the frame assembly, the nitrogen spray rods are symmetrically arranged on both sides of the middle pneumatic baffle, and a driving structure is fixedly arranged below the front pneumatic baffle, the middle pneumatic baffle and the rear pneumatic baffle; The driving structure comprises an optical axis (9), a cylinder lifting plate (8) and a cylinder body (7), and a piston rod of the cylinder body (7) is connected to the cylinder lifting plate (8); The nitrogen spray bar comprises two nitrogen inlet ports (15) and a spray bar body (16), the two nitrogen inlet ports (15) being fixedly mounted on both sides of a fixed frame, and the two ends of the spray bar body (16) being mounted in the corresponding nitrogen inlet ports (15), and a plurality of downwardly facing air outlet holes being equally spaced on the outer edge surface of the spray bar body (16), and the nitrogen ejected from the plurality of air outlet holes forms an isolating air curtain for reducing air ingress.

2. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 1, characterized in that: The frame assembly comprises a bottom plate, a front cover plate (4), a rear cover plate (2), a front stand plate (3), an inner stand plate (6), a top plate body (1), and a fixed top plate (5); The front cover plate (4), the rear cover plate (2), the hand front stand plate (3), and the inner stand plate (6) are respectively mounted on one side of the top of the bottom plate; the top plate body (1) and the fixed top plate (5) are mounted on the hand front stand plate (3) and the inner stand plate (6); and the top plate body (1) is hingedly connected to the inner stand plate (6).

3. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 2, characterized in that: Two mounting holes are symmetrically provided on the facing surfaces of the front upright plate (3) and the inner upright plate (6), and the nitrogen inlet (15) is fixedly arranged in the mounting holes.

4. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 3, characterized in that: The conveying assembly comprises a fixed conveying portion (14), a movable conveying portion (17), two guide light rods (18) and two driving motors; The two ends of the two guide light rods (18) are respectively fixed to one side of the facing surface of the front vertical plate (3) and the inner vertical plate (6), and the fixed conveying part (14) and the movable conveying part (17) are both installed on the guide light rods (18).

5. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 4, characterized in that: The fixed conveying part (14) and the movable conveying part (17) are both provided with a sprocket A, and the motor shafts of the two driving motors are both fixedly provided with a sprocket B, and the two sprockets A and the two sprockets B are respectively connected via two sections of chains.

6. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 1, characterized in that: The front pneumatic curtain and the middle pneumatic curtain both comprise a curtain body (12), an upper bracket (10) and a lower bracket (11); The upper bracket (10) and the lower bracket (11) are respectively mounted on the two ends of the curtain body (12), and the upper bracket (10) is fixed between the tops of the facing surfaces of the front upright plate (3) and the inner upright plate (6).

7. A vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 6, characterized in that: The lower bracket (11) is slidably arranged between the tops of the facing surfaces of the front vertical plate (3) and the inner vertical plate (6), and the two optical axes (9) are fixedly arranged on both sides of the bottom of the lower bracket (11), and the cylinder lifting plate (8) is fixedly installed on the bottom ends of the two optical axes (9).

8. The vacuum furnace conveying mechanism capable of controlling oxygen concentration according to claim 1, characterized in that: The rear pneumatic baffle comprises a baffle body (13), the baffle body (13) is slidably mounted between one side of the facing surfaces of the front vertical plate (3) and the inner vertical plate (6), one end of the two optical axes (9) is fixed to one side of the bottom end of the baffle body (13), and the cylinder lifting plate (8) is fixedly mounted to the bottom ends of the two optical axes (9).

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