Film thickness acquisition device based on slit-free spectrometer

Abstract

The utility model relates to a film thickness acquisition device based on a slit-free spectrometer. The film thickness acquisition device comprises the slit-free spectrometer, a light source module and at least one integrating sphere, wherein the incident end of each integrating sphere is respectively connected with the light source module, the irradiation port of each integrating sphere is respectively arranged right above different preset to-be-detected point positions of a to-be-detected battery, and the receiving end of each integrating sphere is respectively connected with the slit-free spectrograph. The device can reduce the time of single acquisition of the poly-s i film thickness of the solar cell and improve the acquisition efficiency, so that the test efficiency of the poly-s i film thickness of the solar cell is improved, and the device can be matched with the production takt of the solar cell. Therefore, the poly-s i film thickness of the solar cell can be tested on line when the solar cell is automatically produced.

Description

Technical Field

[0001] The utility model relates to the technical field of on-line thickness measurement of solar cell films, and particularly relates to a film thickness acquisition device based on a slitless spectrometer. Background Technique

[0002] In recent years, with the rapid development of image sensors CCD and gratings, grating spectrometers have attracted more and more attention due to their advantages such as high analysis accuracy, large measurement range, and fast speed, and have also been widely used in the detection of poly-si film thickness in the photovoltaic industry. And the on-line detection of poly-si film thickness needs to cooperate with factors such as the automated production rhythm, so the time for the spectrometer to collect the wavelength information corresponding to the poly-si film thickness once is particularly important.

[0003] Most common grating spectrometers are traditional Czerny-Turner spectrometers. The traditional Czerny-Turner structure includes a slit - collimator - grating - focusing mirror - detector. This structure requires multiple reflections through the collimation optical system and the imaging optical system, which will cause a large attenuation of light energy. Considering the light flux loss and the miniaturization of high-resolution devices, flat-field holographic concave grating spectrometers have become a hot spot. Its structure includes a slit - grating - detector. The light only needs to be reflected once, and the light flux loss is small, which can significantly improve the overall signal-to-noise ratio of the spectrometer. However, the time for this flat-field holographic concave grating spectrometer to collect the poly-si film thickness once still cannot be synchronized with the production rhythm of solar cells, resulting in difficulty in on-line testing of the poly-si film thickness of solar cells during the automated production of solar cells. Content of the Utility Model

[0004] Aiming at the deficiencies in the prior art, the utility model provides a film thickness acquisition device based on a slitless spectrometer, which solves the problem that it is difficult to perform on-line testing on the poly-si film thickness of solar cells during the automated production of solar cells in the prior art.

[0005] To solve the above technical problems, the utility model provides a film thickness acquisition device based on a slitless spectrometer, including a slitless spectrometer, a light source module, and at least one integrating sphere; wherein,

[0006] The incident ends of each of the integrating spheres are respectively connected to the light source module, the irradiation ports of each of the integrating spheres are respectively placed directly above different preset measurement points of the battery to be measured, and the receiving ends of each of the integrating spheres are respectively connected to the slitless spectrometer.

[0007] The beneficial effects of the present utility model are as follows: A detection beam is formed by the light source module. After the detection beam passes through the incident end and the irradiation port of each integrating sphere respectively, it is irradiated on the corresponding preset measurement points to be measured. The detection beam will be reflected on the preset measurement points to be measured of the battery to be measured, and the reflected beam formed after reflection returns to the integrating sphere through the irradiation port and undergoes diffuse reflection in the integrating sphere to achieve uniform illumination. Then, the integrating sphere transmits the uniformly illuminated reflected beam to the slitless spectrometer through the receiving end of the integrating sphere. In this way, the integrating sphere has a good effect of collecting scattered beams. Using the integrating sphere to collect the reflected beam can collect more reflected beams and perform uniform illumination, so that more reflected beams can be transmitted to the slitless spectrometer. Then, the slitless spectrometer is used to collect the uniformly illuminated reflected beam, thereby improving the detection accuracy of the poly-si film thickness of the solar cell. And the slitless spectrometer is used to collect the uniformly illuminated reflected beam. Since the slitless spectrometer has no incident slit, the limitation on the light flux is small, so that the uniformly illuminated reflected beam can retain sufficient light flux, which can significantly improve the overall signal-to-noise ratio of the spectrometer. Therefore, the uniformly illuminated reflected beam can be converted into the corresponding wavelength information in a relatively short time, reducing the time for single acquisition of the poly-si film thickness of the solar cell, improving the acquisition efficiency, and thus improving the test efficiency of the poly-si film thickness of the solar cell, so as to be able to match the production rhythm of the solar cell. Therefore, during the automated production of solar cells, the poly-si film thickness of the solar cell can be tested online.

[0008] Based on the above technical solutions, the present utility model can be further improved as follows:

[0009] Further, the slitless spectrometer includes a receiving end, a flat-field holographic concave grating, and a linear array detector; the receiving end of the slitless spectrometer is respectively connected to the receiving ends of each integrating sphere;

[0010] The flat-field holographic concave grating is used to receive the uniformly illuminated reflected beam transmitted by the integrating sphere through the receiving end of the slitless spectrometer, and reflect the uniformly illuminated reflected beam after spectral splitting and focusing to the linear array detector;

[0011] The linear array detector is used to convert the uniformly illuminated reflected beam after spectral splitting and focusing into the corresponding wavelength information.

[0012] The beneficial effect of adopting the above further scheme is that the incident slit in the traditional flat-field holographic concave grating spectrometer is to obtain a linear light source with good correlation to achieve high resolution, but it will limit most of the light flux, thereby affecting the time to obtain the corresponding wavelength information. When testing the poly-Si film thickness, the resolution requirement is not high, that is, it is not necessary to sacrifice the light flux in exchange for high resolution. Therefore, in the traditional flat-field holographic concave grating spectrometer, the incident slit is abandoned, and the flat-field holographic concave grating and the linear array detector are retained, so that the light flux of the reflected light beam after the uniform light transmitted by the integrating sphere can be guaranteed, and then the flat-field holographic concave grating is used for spectral focusing to increase the light flux, and the linear array detector is used to quickly convert the reflected light beam after the spectral focusing into the corresponding wavelength information, thereby reducing the time for the spectrometer to collect the poly-Si film thickness in a single time and improving the efficiency of single collection.

[0013] Furthermore, the light source module includes a light source unit and at least one first optical fiber; wherein the number of the first optical fibers is the same as the number of the integrating spheres, and one of the first optical fibers is connected to one of the integrating spheres.

[0014] The beneficial effect of adopting the above further scheme is: the light source unit is used to form a detection light beam; for each first optical fiber, it is used to transmit the detection light beam to the corresponding integrating sphere. Since the light beam has a small loss when it is transmitted in the optical fiber. In this way, the light source module is formed by using the light source unit and the first optical fiber, and the detection light beam can be transmitted to the integrating sphere with low loss, thereby reducing the light beam loss and achieving energy saving.

[0015] Furthermore, the light source unit includes an LED light source.

[0016] The beneficial effect of adopting the above further solution is: using LED light source as the light source unit can meet the demand of solar cell poly-si film thickness for detection light beam.

[0017] Furthermore, the light source unit includes a halogen lamp light source.

[0018] The beneficial effect of adopting the above further solution is: using a halogen lamp light source as the light source unit can meet the demand for the detection light beam of the poly-si film thickness of the solar cell.

[0019] Furthermore, the light source unit includes a xenon lamp light source.

[0020] The beneficial effect of adopting the above further solution is: using a xenon lamp light source as the light source unit can meet the demand for the detection light beam of the poly-si film thickness of the solar cell.

[0021] Further, a film thickness acquisition device based on a slitless spectrometer further includes at least one second optical fiber. The number of the second optical fibers is the same as the number of the integrating spheres. One end of a second optical fiber is connected to the receiving end of the corresponding integrating sphere, and the other end is connected to the receiving end of the slitless spectrometer.

[0022] The beneficial effects of adopting the above further solution are as follows: Each integrating sphere is used to homogenize the reflected light beam, and respectively transmits the homogenized reflected light beam to the slitless spectrometer through the corresponding second optical fiber. Since the loss of the light beam during conduction in the optical fiber is small, in this way, using the second optical fiber to transmit the homogenized reflected light beam to the slitless spectrometer can reduce the loss of the light beam during transmission in the optical fiber, which can not only save energy but also ensure that the slitless spectrometer receives the homogenized reflected light beam with sufficient luminous flux.

[0023] Further, a film thickness acquisition device based on a slitless spectrometer further includes: a mechanical claw and an industrial control computer; wherein,

[0024] The slitless spectrometer is provided with a signal transmission end, the signal transmission end is respectively connected to the linear array detector and the industrial control computer, and the industrial control computer is connected to the mechanical claw.

[0025] The beneficial effects of adopting the above further solution are as follows: The slitless spectrometer is used to convert each homogenized reflected light beam into corresponding wavelength information and transmit each wavelength information to the industrial control computer. The mechanical claw is used to grab the battery under test when the industrial control computer determines that the film thickness of any preset measurement point of the battery under test is abnormal based on each wavelength information. In this way, when the mechanical claw determines that any preset measurement point of the battery under test is abnormal according to the industrial control computer, it grabs the battery under test, so that the battery under test with abnormalities can be separated from the battery under test without abnormalities, which is convenient for sorting all the batteries under test.

[0026] Further, a film thickness acquisition device based on a slitless spectrometer further includes a display, and the display is connected to the industrial control computer.

[0027] The beneficial effects of adopting the above further solution are as follows: The display is used to display the film thickness of each preset measurement point of the battery under test when receiving the film thickness of all preset measurement points of the battery under test determined by the industrial control computer based on each wavelength information. In this way, the display shows the film thickness of each preset measurement point of the battery under test, which is convenient for the staff to timely understand the detection situation of the battery under test.

[0028] Further, a film thickness acquisition device based on a slitless spectrometer further includes an assembly line; wherein, the battery under test is placed on the assembly line, and the assembly line is arranged below the irradiation ports of each integrating sphere.

[0029] The beneficial effects of adopting the above further solution are as follows: A pipeline is used to separately transmit each preset measurement point of the battery to be measured to directly below each integrating sphere irradiation port. In this way, using the pipeline to output each preset measurement point of the battery to be measured to below each integrating sphere irradiation port facilitates the detection of the battery to be measured, can save the time for staff to place the battery to be measured directly below each integrating sphere irradiation port, and improve the acquisition efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 FIG. is a schematic structural diagram of a solar cell film thickness testing device provided by the present invention;

[0031] Figure 2 FIG. is a schematic structural diagram of an integrating sphere provided by the present invention;

[0032] Figure 3 FIG. is a schematic structural diagram of another solar cell film thickness testing device provided by the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] The principles and features of the present invention will be described below with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0034] The slitless spectrometer will convert the collected reflected light beam into corresponding wavelength information, and this wavelength information can be used to characterize the film thickness of the preset measurement point. If the collected light beam is uneven, it will affect the corresponding wavelength information, resulting in a large error in the detection data expressed by the wavelength information. The time for the spectrometer or slitless spectrometer to collect the corresponding wavelength information refers to the time taken for the entire process of converting the received light beam into the corresponding wavelength information. The entrance slit, as an important component of the spectrometer, determines the light flux entering the spectrometer. The time for the spectrometer to collect the wavelength information is closely related to the light flux reaching the linear array detector.

[0035] Combined with Figure 1 shown in Figure 1 A film thickness acquisition device 100 based on a slitless spectrometer is provided. For the convenience of understanding, Figure 1 only one integrating sphere and one preset measurement point are shown. The film thickness acquisition device 100 based on a slitless spectrometer includes a slitless spectrometer 101, a light source module 102, and at least one integrating sphere 103. Among them, the incident ends (not shown) of the integrating spheres 103 are respectively connected to the light source module 102, the irradiation ports 107 of the integrating spheres 103 are respectively placed directly above different preset measurement points 105 of the battery to be measured 104, and the receiving ends of the integrating spheres 103 are respectively connected to the slitless spectrometer 101.

[0036] Specifically, a light source module is configured to form a detection beam and transmit the detection beam to the incident ends of respective integrating spheres. For each integrating sphere, it is configured to directly irradiate the detection beam through the incident end and the irradiation port to a corresponding preset point to be measured, obtain a reflected beam formed after the detection beam is reflected by the corresponding preset point to be measured, and transmit the uniformly illuminated reflected beam to a slitless spectrometer through the receiving end of the integrating sphere.

[0037] By using the above-mentioned film thickness acquisition device based on a slitless spectrometer, a detection beam is formed by the light source module. After the detection beam passes through the incident end and the irradiation port of each integrating sphere respectively, it is irradiated on the corresponding preset point to be measured. The detection beam will be reflected at the preset point to be measured on the battery to be measured, and the formed reflected beam returns to the integrating sphere through the irradiation port and undergoes diffuse reflection in the integrating sphere to achieve uniform illumination. The integrating sphere then transmits the uniformly illuminated reflected beam to the slitless spectrometer through the receiving end of the slitless spectrometer.

[0038] In this way, the integrating sphere has a good effect of collecting scattered light beams. Using the integrating sphere to collect the reflected beam can collect more reflected beams and perform uniform illumination, so that more reflected beams can be transmitted to the slitless spectrometer. Then, the slitless spectrometer is used to collect the uniformly illuminated reflected beam, which can improve the detection accuracy of the poly-si film thickness of the solar cell. Since the slitless spectrometer has no incident slit, the limitation on the light flux is small, so that the uniformly illuminated reflected beam can retain sufficient light flux, which can significantly improve the overall signal-to-noise ratio of the spectrometer. Therefore, the uniformly illuminated reflected beam can be converted into corresponding wavelength information in a relatively short time, reducing the time for single acquisition of the poly-si film thickness of the solar cell, improving the acquisition efficiency, and thus improving the test efficiency of the poly-si film thickness of the solar cell, so as to be able to match the production rhythm of the solar cell. Thus, during the automated production of solar cells, the poly-si film thickness of the solar cell can be tested online.

[0039] In addition, using the integrating sphere to uniformly illuminate the reflected beam so that the light source distribution in the reflected beam is uniform, and then using the slitless spectrometer to collect the uniformly illuminated reflected beam can reduce the error caused by the non-uniform distribution of the reflected beam, thereby further improving the detection accuracy of the poly-si film thickness of the solar cell.

[0040] It can be understood that the slitless spectrometer in this embodiment is a slitless flat-field holographic concave grating spectrometer, that is, the incident slit is removed in the flat-field holographic concave grating spectrometer, and the remaining structures remain unchanged.

[0041] It can be understood that the various preset measurement points of the battery under test in this embodiment can be adjusted according to actual needs, and the positions of the respective integrating spheres are adjusted accordingly, so that each integrating sphere can irradiate the detection beam onto the corresponding preset measurement point. Since multiple integrating spheres can be used in this embodiment to simultaneously detect the poly-si film thickness at multiple preset measurement points of a battery under test, synchronous multi-point detection of the poly-si film thickness of the battery under test is achieved. At the same time, considering factors such as space size and production cycle, the film thickness acquisition device and the time for single-point acquisition and testing can be integrated and optimized.

[0042] The battery under test in this embodiment is a solar cell. The solar cell has multiple layers of films, including poly-si film, SiO2 film, etc. The light wave of the detection beam will be refracted and reflected back and forth multiple times between the 1st to nth layers at the preset measurement point of the solar cell (when the film layer at the preset measurement point is multiple layers), and then multiple coherent polarized beams are formed. After these coherent polarized beams are coherently superimposed, the coherent signal carrying the multiple thin films returns along the original path to form a reflected beam. Therefore, the coherent signal in the reflected beam carries the film thickness information of each layer of film at the preset measurement point. That is, the reflected beam carries the film thickness information of the poly-si film, SiO2 film, etc. at the preset measurement point. Therefore, in this embodiment, in addition to being able to collect the poly-si film thickness, the thickness of other film layers can also be collected. Among them, the coherent signal of the reflected beam is specifically manifested as the wavelength information of the reflected beam. Therefore, the film thickness situation can be obtained by collecting the reflected beam. In this embodiment, a slitless spectrometer is used to collect the wavelength information, that is, the coherent signal. Even under the premise of setting an integrating sphere for light homogenization, the time for the linear array detector in the slitless spectroscopic detector to convert and obtain the wavelength information can be stably controlled within 40 ms, which can match the automation cycle of the solar cell production line.

[0043] Preferably, in combination with Figure 2 as shown Figure 2An integrating sphere 200 is provided. The integrating sphere is an integrating sphere with an 8-degree angle of incidence and a 90-degree angle of reception. For example, a reflectance integrating sphere. The integrating sphere 200 includes a sphere 201. The sphere 201 is a hollow sphere with a highly reflective inner surface, and is provided with an incident end 207 (i.e., a light inlet), an irradiation port 203, and a receiving end 204 (i.e., a light outlet). For ease of understanding, a battery under test 206 is also shown in this embodiment. A collimating mirror 202 is disposed at the front end of the incident end 207, and the incident end 207 is incident at an 8-degree angle with respect to the normal line 205; the irradiation port 203 is disposed at the bottom of the sphere, and the irradiation port 203 is at a 0-degree angle with respect to the normal line, and the preset measurement point of the battery under test 206 is placed directly below the irradiation port 203; the receiving end 204 of the integrating sphere 200 is perpendicular to the normal line 205 and is connected to a slitless spectrometer. Since the integrating sphere is a relatively mature prior art and uses the functions of the integrating sphere itself to collect, dissipate, and homogenize the light beam to homogenize the received light beam, this embodiment will not be elaborated herein. In this embodiment, the light source module collimates the detection light beam into a parallel light beam through the collimating mirror and irradiates the corresponding preset measurement point at an 8-degree angle through the irradiation port, and receives the reflected light beam reflected back through the irradiation port. The reflected light beam undergoes diffuse reflection inside the sphere to achieve light homogenization, and finally the homogenized reflected light beam is output from the receiving end of the integrating sphere at a 90-degree angle and is transmitted to the slitless spectrometer.

[0044] In addition, in this embodiment, using the integrating sphere to homogenize the reflected light beam can also increase the detection span, that is, it is applicable not only to thin film measurement (the thickness of the poly-si film of the solar cell in the range of 1 - 2000 nm belongs to thin film), but also to thick film measurement (the thickness of the poly-si film of the solar cell in the range of 2 - 400 μm belongs to thick film).

[0045] Preferably, the slitless spectrometer includes a receiving end, a flat-field holographic concave grating, and a linear array detector; the receiving end of the slitless spectrometer is respectively connected to the receiving ends of each integrating sphere. The flat-field holographic concave grating is used to receive the homogenized reflected light beam transmitted by the integrating sphere through the receiving end of the slitless spectrometer, and reflect the homogenized reflected light beam after spectral splitting and focusing to the linear array detector. The linear array detector is used to convert the homogenized reflected light beam after spectral splitting and focusing into corresponding wavelength information.

[0046] In a traditional flat-field holographic concave grating spectrometer, the entrance slit is used to obtain a linear light source with good correlation to achieve high resolution, but it will limit most of the light flux, thus affecting the time to obtain the corresponding wavelength information. When testing the thickness of the poly-si film, the requirement for resolution is not high, that is, it is not necessary to sacrifice light flux in exchange for high resolution. Therefore, in a traditional flat-field holographic concave grating spectrometer, the entrance slit is discarded, and the flat-field holographic concave grating and the linear array detector are retained, so as to ensure the light flux of the evenly illuminated reflected light beam transmitted by the integrating sphere. Then, the flat-field holographic concave grating is used for spectral splitting and focusing to increase the light flux, and the linear array detector is used to quickly convert the evenly illuminated reflected light beam after spectral splitting and focusing into the corresponding wavelength information, thereby reducing the time for the spectrometer to perform a single acquisition of the poly-si film thickness and improving the efficiency of a single acquisition.

[0047] In some embodiments, the flat-field holographic concave grating can be customized according to the wavelength of the reflected light beam, and the linear array detector is a CCD linear array detector or a CMOS linear array detector. Through experiments, when manufacturing the slitless spectrometer in this embodiment, the entrance slit can be retained first, and the flat-field holographic concave grating spectrometer can be manufactured normally. After determining the positions of all components (such as the entrance slit, the flat-field holographic concave grating, the linear array detector, etc.), the entrance slit is then discarded, and the positions of the remaining components remain unchanged.

[0048] Preferably, the light source module includes a light source unit and at least one first optical fiber; wherein, the number of the first optical fibers is the same as the number of the integrating spheres, and one first optical fiber is connected to one of the integrating spheres. Specifically, one end of the first optical fiber is connected to the incident end of the integrating sphere to transmit the detection light beam to the incident end of the integrating sphere, and the other end of the first optical fiber is connected to the light source unit.

[0049] The light source unit is used to form a detection light beam; for each first optical fiber, it is used to transmit the detection light beam to the corresponding integrating sphere. Since the loss of the light beam during conduction in the optical fiber is small. In this way, by using the light source unit and the first optical fiber to form a light source module, the detection light beam can be transmitted to the integrating sphere with low loss, reducing the light beam loss and achieving energy conservation.

[0050] It can be understood that the number of the first optical fibers corresponds one-to-one to the number of the integrating spheres, and the integrating spheres connected to the first optical fibers are not repeatedly connected to other optical fibers.

[0051] Preferably, the light source unit includes an LED light source. In this way, by selecting the LED light source as the light source unit, the requirements for the detection light beam of the poly-si film thickness of the solar cell can be met.

[0052] In some embodiments, the LED light source includes a power supply and an LED bulb. The power supply is used to provide electrical energy for the LED bulb, and the LED bulb emits LED light to form a detection light beam.

[0053] Preferably, the light source unit includes a halogen light source. In this way, by selecting the halogen light source as the light source unit, the requirements of the poly-si film thickness of the solar cell for the detection beam can be met.

[0054] In some embodiments, the halogen light source includes a power supply and a halogen lamp. The power supply is used to supply electrical energy to the halogen lamp, and the halogen lamp emits halogen light to form a detection beam.

[0055] Preferably, the light source unit includes a xenon light source. In this way, by selecting the xenon light source as the light source unit, the requirements of the poly-si film thickness of the solar cell for the detection beam can be met.

[0056] In some embodiments, the xenon light source includes a power supply and a xenon lamp. The power supply is used to supply electrical energy to the xenon lamp, and the xenon lamp emits xenon light to form a detection beam.

[0057] It can be understood that the color temperatures, energy consumptions, and light brightnesses of the LED light source, the halogen light source, and the xenon light source are all different. And in different test environments, the required detection beams will also vary. Therefore, according to different test environments, selecting a light source unit that meets the test requirements among the LED light source, the halogen light source, and the xenon light source can meet the requirements of the poly-si film thickness of the solar cell for the detection beam.

[0058] Preferably, a film thickness acquisition device based on a slitless spectrometer further includes at least one second optical fiber. The number of the second optical fibers is the same as the number of the integrating spheres, and one end of a second optical fiber is connected to the receiving end of the corresponding integrating sphere, and the other end is connected to the receiving end of the slitless spectrometer.

[0059] Each integrating sphere is used to homogenize the reflected beam and respectively transmit the homogenized reflected beam to the slitless spectrometer through the corresponding second optical fiber. Since the loss of the beam during conduction in the optical fiber is small, in this way, using the second optical fiber to transmit the homogenized reflected beam to the slitless spectrometer can reduce the loss of the beam during transmission in the optical fiber, which can not only save energy but also ensure that the slitless spectrometer receives the homogenized reflected beam with sufficient luminous flux.

[0060] Preferably, a film thickness acquisition device based on a slitless spectrometer further includes: a mechanical claw and an industrial control computer. Among them, the slitless spectrometer is provided with a signal transmission end, the signal transmission end is respectively connected to the linear array detector and the industrial control computer, and the industrial control computer is connected to the mechanical claw.

[0061] The slitless spectrometer is used to convert each homogenized reflected light beam into corresponding wavelength information and transmit each wavelength information to the industrial control computer. The conversion of the light beam into corresponding wavelength information by the spectrometer is a relatively mature existing technology and will not be elaborated here. The mechanical claw is used to grab the battery under test when the industrial control computer determines that the film thickness at any preset measurement point of the battery under test is abnormal based on each wavelength information. In this way, when the mechanical claw determines that any preset measurement point of the battery under test is abnormal according to the industrial control computer, it grabs the battery under test, so that the batteries under test with abnormalities can be separated from those without abnormalities, facilitating the sorting of all batteries under test.

[0062] In some embodiments, the industrial control computer stores the wavelength information obtained under the irradiation of the detection light beam for different film thicknesses of solar cells. Since the coherent signals corresponding to different film thicknesses are different, the corresponding wavelength information will also be different. Therefore, the industrial control computer matches the wavelength information transmitted by the slitless spectrometer with the stored wavelength information, and thus determines the film thickness corresponding to the matched wavelength information as the film thickness at the preset measurement point, so as to synchronously obtain the optical parameters (thickness, refractive index, extinction coefficient) of the poly-si film at each preset measurement point and achieve accurate measurement of the overall refractive index and thickness. If the film thickness at the preset measurement point is not within the range of the preset film thickness, it is considered that the film thickness at the preset measurement point is abnormal. For example, if the preset film thickness of the poly-si film is 1 nm - 150 nm, and the film thickness of the poly-si film at the preset measurement point is 155 nm, it is considered that the film thickness at the preset measurement point is abnormal. At this time, the mechanical claw is triggered to perform the grabbing operation. It can be understood that the industrial control computer is actually an industrial control computer, which is a relatively mature existing technology and will not be elaborated here.

[0063] It can be understood that the battery under test includes a single layer film or a multi-layer film. When the film layer of the battery under test is a multi-layer film, since the interference light signals formed by the reflection of each layer of film are different, the industrial control computer can distinguish different layers of film from the transmitted interference light signals (i.e., wavelength information) and obtain the film thicknesses of films such as the pi ly-si film and the SiO2 film.

[0064] In some embodiments, in the offline mode, the staff can manually detect the film thickness at different positions of the battery cells. This mode is mostly used for experimental comparative studies. In the online mode, it is docked with automation, and TCP / IP or IO communication methods are used to realize the connection between the acquisition device and the automation. During the acquisition process, the preset measurement points of each battery to be measured are sequentially conveyed under the corresponding integrating sphere by using pipeline equipment (such as pipelines, conveyor belts, etc.). The film thickness is collected or detected by using a light source module, an integrating sphere, a slitless spectrometer, and an industrial control computer. If the film thickness parameter of a certain preset measurement point exceeds the set range, it is determined that the battery to be measured is NG, and then the preset NG signal is returned to the automation, and the NG sheet is quickly grabbed by a mechanical claw.

[0065] Preferably, a film thickness acquisition device based on a slitless spectrometer further includes: an alarm module; the alarm module is connected to the industrial control computer.

[0066] The alarm module is used to issue an alarm prompt when the industrial control computer determines that the film thickness of any preset measurement point of the battery to be measured is abnormal based on each wavelength information. In this way, when the alarm module determines that any preset measurement point of the battery to be measured is abnormal according to the industrial control computer, it issues an alarm prompt so that the staff can know in time that the film thickness of the battery to be measured is abnormal.

[0067] In some embodiments, the alarm module is an alarm. A buzzer is arranged in the alarm for emitting sound to realize the alarm prompt.

[0068] Preferably, a film thickness acquisition device based on a slitless spectrometer further includes a display, and the display is connected to the industrial control computer.

[0069] The display is used to display the film thickness of each preset measurement point of the battery to be measured when receiving the film thickness of all preset measurement points of the battery to be measured determined by the industrial control computer based on each wavelength information. In this way, the display shows the film thickness of each preset measurement point of the battery to be measured, which is convenient for the staff to timely understand the detection situation of the battery to be measured.

[0070] Preferably, a film thickness acquisition device based on a slitless spectrometer further includes a pipeline; wherein, the battery to be measured is placed on the pipeline, and the pipeline is arranged under the irradiation ports of each integrating sphere.

[0071] A pipeline is used to separately transfer each preset measurement point of the battery under test to below each integrating sphere irradiation port. In this way, by using the pipeline to output each preset measurement point of the battery under test to below each integrating sphere irradiation port, it is convenient to detect the battery under test, which can save the time for staff to place the battery under test below each integrating sphere irradiation port and improve the acquisition efficiency. It can be understood that the pipeline in this embodiment is actually a conveyor belt, which is a traditional conveying tool in industrial applications and is a relatively common existing technology, so it will not be elaborated here.

[0072] It can be understood that each preset measurement point of the battery under test in this embodiment can be adjusted according to actual needs, and the positions of the integrating spheres are adjusted accordingly, so that each integrating sphere can irradiate the detection beam to the corresponding preset measurement point. Since multiple integrating spheres can be used in this embodiment to simultaneously detect the poly-si film thickness of multiple preset measurement points of a battery under test, synchronous multi-point detection of the poly-si film thickness of the battery under test is achieved. At the same time, considering factors such as space size and production rhythm, the film thickness acquisition device and the single-point acquisition time can be integrated and optimized.

[0073] In some embodiments, as shown in Figure 3 provided, Figure 3 Another acquisition device 300 for the film thickness of a solar cell is provided, including a slitless spectrometer 301, a light source unit 302, a plurality of first optical fibers 303, a plurality of integrating spheres 304, a plurality of second optical fibers 305, an industrial control computer 306, a pipeline 307, and a display 308. Among them, the slitless spectrometer 301 includes a receiving end 311, a flat-field holographic concave grating 312, a linear array detector 313, and a signal transmission end 314. The number of the first optical fibers 303 corresponds one-to-one to the number of the integrating spheres 304. One end of each first optical fiber 303 is respectively connected to the light source unit 302, and the other end is connected to and only connected to one integrating sphere 304. For the sake of easy understanding, Figure 3 the collimating mirrors (not shown) for each first optical fiber 203 connecting each integrating sphere 304 one by one are not shown. The number of the integrating spheres 304 corresponds one-to-one to the number of the preset measurement points 310 of the battery under test 309, and the irradiation ports (not shown) of the integrating spheres 304 are respectively arranged directly above the corresponding preset measurement points 310. The number of the second optical fibers 305 corresponds one-to-one to the number of the integrating spheres 304. One end of each second optical fiber 305 is respectively connected to the receiving end (not shown) of one integrating sphere 304, and the other end is connected to the receiving end 311 of the spectral detector 301. For the sake of easy understanding, Figure 3It is not shown that each second optical fiber 305 is connected to the integrating sphere 304 and the slitless spectrometer 301 one by one. Only one second optical fiber 305 is respectively connected to the receiving end 311 of an integrating sphere 304 and a slitless spectrometer 301 as an example. The industrial control computer 306 is connected to the signal transmission end 314 of the slitless spectrometer 301 through a USB data cable, and the display 308 is connected to the industrial control computer 306 through a USB data cable. A plurality of batteries to be measured 309 are sequentially placed on the assembly line 307, and each integrating sphere 304 is set at a preset position above the assembly line 307, and the assembly line 307 can respectively transport each preset point 310 of the battery to be measured 309 to directly below the irradiation port of the corresponding integrating sphere 304.

[0074] In this way, the light source unit respectively transmits the detection light beams to the collimators of the corresponding integrating spheres through each first optical fiber. For each integrating sphere, the collimator collimates the detection light beam into a parallel light beam, and directly irradiates the parallel light beam on the preset measurement point to be measured at an angle of 8 degrees through the incident end and the irradiation port, and receives the reflected light beam reflected back through the irradiation port. The sphere of the integrating sphere performs light homogenization processing on the reflected light beam, outputs the light homogenized reflected light beam through the receiving end of the sphere at an angle of 90 degrees, and transmits it to the corresponding second optical fiber. For each second optical fiber, the light homogenized reflected light beam is transmitted to the receiving end of the slitless spectrometer. The flat-field holographic concave grating and the linear array detector of the slitless spectrometer convert each light homogenized reflected light beam into corresponding wavelength information, that is, spectral information, and transmit it to the industrial control computer through the signal transmission end. The industrial control computer determines the film thickness of each preset measurement point of the battery to be measured based on each wavelength information, and controls the display according to the module of each preset measurement point of the battery to be measured. In this way, the use of the integrating sphere can improve the accuracy of the poly-si film thickness detection of the solar cell, and the use of the slitless spectrometer can improve the efficiency of the single acquisition of the poly-si film thickness of the solar cell, so as to be able to match the production rhythm of the solar cell. Thus, when the solar cell is automatically produced, the poly-si film thickness of the solar cell can be tested online.

[0075] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0076] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0077] In the present utility model, unless otherwise clearly stipulated and defined, terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0078] In the present utility model, unless otherwise clearly stipulated and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0079] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0080] Although the embodiments of the present utility model have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present utility model. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present utility model.

Claims

1. A film thickness acquisition device based on a slitless spectrometer, characterized in that: It includes a slitless spectrometer, a light source module, and at least one integrating sphere; wherein, The incident end of each integrating sphere is connected to the light source module respectively, the irradiation port of each integrating sphere is respectively placed directly above different preset test points of the battery to be tested, and the receiving end of each integrating sphere is connected to the slitless spectrometer respectively.

2. The film thickness collection device according to claim 1, characterized in that: The slitless spectrometer comprises a receiving end, a flat-field holographic concave grating, and a linear array detector; wherein the receiving end of the slitless spectrometer is respectively connected to the receiving end of each integrating sphere; The flat-field holographic concave grating is used to receive the homogenized reflected light beam transmitted from the integrating sphere through the receiving end of the slitless spectrometer, and reflect the homogenized reflected light beam after splitting and focusing to the linear array detector; The linear array detector is used to convert the reflected light beam after light splitting and focusing and the homogenized light beam into corresponding wavelength information.

3. The film thickness collection device according to claim 2, characterized in that: The light source module includes a light source unit and at least one first optical fiber; wherein the number of the first optical fibers is the same as the number of the integrating spheres, and one of the first optical fibers is connected to one of the integrating spheres.

4. The film thickness collection device according to claim 3, characterized in that: The light source unit includes an LED light source.

5. The film thickness collection device according to claim 3, characterized in that: The light source unit includes a halogen lamp light source.

6. The film thickness collection device according to claim 3, characterized in that: The light source unit includes a xenon lamp light source.

7. The film thickness collection device according to claim 2, characterized in that: It also includes at least one second optical fiber, the number of which is the same as the number of the integrating spheres, and one end of one of the second optical fibers is connected to the receiving end of the corresponding integrating sphere, and the other end is connected to the receiving end of the slitless spectrometer.

8. The film thickness collection device according to any one of claims 2 to 7, characterized in that: It also includes a mechanical claw and an industrial computer; among them, The slitless spectrometer is provided with a signal transmission end, and the signal transmission end is respectively connected to the linear array detector and the industrial computer, and the industrial computer is connected to the mechanical claw.

9. The film thickness collection device according to claim 8, characterized in that: It also includes a display, which is connected to the industrial computer.

10. The film thickness collection device according to any one of claims 2 to 7, characterized in that: It also includes an assembly line; wherein the battery to be tested is placed on the assembly line, and the assembly line is arranged below the irradiation ports of each integrating sphere.

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