Static electricity eliminating device

Abstract

The utility model provides a static elimination device, and relates to the technical field of semiconductors. The electrostatic elimination device comprises a base, an ultraviolet mechanism and a lampshade mechanism, the base is provided with a wafer bearing position; the ultraviolet mechanism comprises a luminous body, and the luminous body can emit ultraviolet light; the lampshade mechanism is arranged on the base and provided with a light reflecting piece, and the light reflecting piece can reflect ultraviolet light emitted by the light emitting body to the wafer bearing position. The static electricity elimination device can improve the static electricity elimination capability and the static electricity elimination efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an electrostatic elimination device. Background Art

[0002] A wafer refers to a silicon wafer used for fabricating silicon semiconductor circuits, and its raw material is silicon. Specifically: high-purity polysilicon is dissolved and doped into a silicon crystal, and then slowly pulled out to form a cylindrical silicon ingot. After the silicon ingot is ground, polished, and sliced, a silicon wafer is formed, that is, a wafer. Before the wafer is used, it needs to be coated with a film to form a uniform and specifically functional thin film on the surface of the wafer, so as to protect the surface of the wafer from oxidation and pollution, and enhance the optical, mechanical, and electrical properties of the wafer, etc.

[0003] When coating the wafer, an electroplating process or a chemical coating process can be used. When the chemical coating process is adopted, after coating the wafer, static electricity is likely to be generated on the coating surface and inside the film. If an ion electrostatic eliminator is used to eliminate static electricity, the static electricity inside the film cannot be quickly and effectively eliminated. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an electrostatic elimination device, which can improve the electrostatic elimination ability and efficiency.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] An electrostatic elimination device, comprising:

[0007] A base having a wafer carrying position;

[0008] An ultraviolet mechanism, including a light-emitting body that can emit ultraviolet light;

[0009] A lamp cover mechanism, which is arranged on the base, and the lamp cover mechanism is provided with a reflecting member that can reflect the ultraviolet light emitted by the light-emitting body to the wafer carrying position.

[0010] As a further technical solution, the reflecting member is set as a reflecting lamp cover, the light-emitting body is located inside the reflecting lamp cover, and the opening of the reflecting lamp cover faces the wafer carrying position.

[0011] As a further technical solution, the reflecting lamp cover is set as a semi-circular shell, and along the height direction, the midline of the reflecting lamp cover is concentric with the midline of the light-emitting body.

[0012] As a further technical solution, the ultraviolet mechanism further includes a microwave component, and the light-emitting body is set as a mercury lamp;

[0013] The microwave component is connected to the lamp cover mechanism corresponding to the mercury lamp, and the microwave component can emit microwaves to excite the mercury lamp to emit ultraviolet light in a corresponding wavelength band.

[0014] As a further technical solution, the microwave component includes a power supply, a magnetron, and a waveguide. The power supply is used to excite the magnetron to generate microwaves, and the waveguide is communicated with the reflective lamp cover to direct the microwaves to the mercury lamp.

[0015] As a further technical solution, the lamp cover mechanism further includes a light-transmitting plate, and the light-transmitting plate is arranged at the open end of the reflective lamp cover so as to form a sealed space inside the reflective lamp cover.

[0016] As a further technical solution, the lamp cover mechanism further includes an annular limiting component, and the lamp cover mechanism further includes a lamp cover housing. The reflective lamp cover is arranged inside the lamp cover housing. The limiting component is connected to the open end of the lamp cover housing and cooperates with the open end of the lamp cover housing to form a first limiting groove. The lower peripheral edge of the reflective lamp cover is connected to the first limiting groove. The inner side of the limiting component has a second limiting groove, and the peripheral edge of the light-transmitting plate is limited and connected to the second limiting groove.

[0017] As a further technical solution, the limiting component includes a first limiting member and a second limiting member which are detachably connected. The first limiting member is arranged between the lamp cover housing and the second limiting member. The first limiting member and the lamp cover housing cooperate to form the first limiting groove, and the first limiting member and the second limiting member enclose to form the second limiting groove.

[0018] As a further technical solution, the base includes a bearing housing and a bearing table. The bearing housing is arranged as an open housing, and the opening of the bearing housing faces upward. The lamp cover mechanism covers the open end of the bearing housing. The bearing table is arranged inside the bearing housing, and the upper end surface is set as the wafer bearing position, and the light-emitting body is arranged opposite to the wafer bearing position.

[0019] As a further technical solution, a sealing portion is arranged between the lamp cover mechanism and the open end of the bearing housing.

[0020] Compared with the prior art, the technical advantages of the electrostatic elimination device provided by the present utility model are as follows:

[0021] 1. Since a light-emitting body is provided and the light-emitting body can emit ultraviolet light, after the coated wafer is placed on the wafer carrier position, the light-emitting body starts to work and emits ultraviolet light. When the ultraviolet light irradiates the surface of the wafer, electrons on the wafer surface are detached from atoms or molecules, forming positive ions and free electrons. The free electrons and positive ions can neutralize each other, thereby avoiding the charge accumulation inside and outside the film on the wafer, and further achieving the technical purpose of eliminating static electricity inside and outside the coating on the wafer.

[0022] 2. Since a reflector is provided and when the light-emitting body emits ultraviolet light, the reflector reflects the ultraviolet light emitted by the light-emitting body onto the wafer on the wafer carrier position, changing the point light source into a surface light source and increasing the amount of light irradiating the wafer, thereby improving the efficiency of static electricity elimination on the wafer. Brief Description of the Drawings

[0023] Figure 1 is a schematic structural diagram of the static electricity elimination device provided by an embodiment of the present invention;

[0024] Figure 2 is a cross-sectional view of the static electricity elimination device provided by an embodiment of the present invention;

[0025] Figure 3 is Figure 2 a partial enlarged view of part A in

[0026] Figure 4 is Figure 2 a partial enlarged view of part B in

[0027] In the figure:

[0028] 100, base; 110, carrier housing; 120, carrier table;

[0029] 200, ultraviolet mechanism; 210, light-emitting body; 220, waveguide tube; 230, mounting housing;

[0030] 300, lamp cover mechanism; 310, reflector; 320, lamp cover housing; 330, light-transmitting plate; 340, first limiting member; 350, second limiting member; 360, positioning member. Detailed Embodiments

[0031] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. Additionally, it should be noted that for the sake of description, only parts related to the present invention are shown in the drawings, rather than all the structures.

[0032] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0034] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0035] Combined with Figures 1 to 4 As shown, the static elimination device provided in this embodiment is used to eliminate the static electricity inside and outside the film on the coated wafer. Specifically, the static elimination device includes a base 100, an ultraviolet mechanism 200, and a lamp cover mechanism 300; the base 100 is used to carry the coated wafer; the ultraviolet mechanism 200 includes a light emitter 210, and the light emitter 210 can emit ultraviolet light; the lamp cover mechanism 300 is provided with a reflector 310, the lamp cover mechanism 300 is arranged on the base 100, the ultraviolet mechanism 200 is connected to the lamp cover mechanism 300, and the reflector 310 can reflect the ultraviolet light emitted by the light emitter 210 onto the wafer in the base 100.

[0036] Since a light-emitting body 210 is provided and the light-emitting body 210 can emit ultraviolet light, after the coated wafer is placed on the wafer carrying position, the light-emitting body 210 starts to work and emits ultraviolet light. When the ultraviolet light with a wavelength of 200nm - 300nm irradiates the surface of the wafer, ionization occurs on the wafer, causing the electrons on the wafer surface to break away from atoms or molecules, forming positive ions and free electrons. The free electrons and positive ions can neutralize each other, thereby avoiding the charge accumulation inside and outside the film on the wafer, and further achieving the technical purpose of eliminating the static electricity inside and outside the coating on the wafer. Thus, the yield loss caused by static electricity can be reduced to lower the production cost of the wafer.

[0037] Since a reflector 310 is provided, and when the light-emitting body 210 emits ultraviolet light, the reflector 310 reflects the ultraviolet light emitted by the light-emitting body 210 onto the wafer on the wafer carrying position, changing the point light source into a surface light source and increasing the amount of light irradiating the wafer, thereby improving the efficiency of eliminating static electricity on the wafer.

[0038] Furthermore, the base 100 includes a carrying housing 110 and a carrying platform 120. The carrying housing 110 is set as an open housing, and the opening of the carrying housing 110 faces upward. The lamp housing mechanism 300 covers the opening end of the carrying housing 110. The carrying platform 120 is arranged inside the carrying housing 110. The upper end surface of the carrying platform 120 is set as the wafer carrying position. The light-emitting body 210 is arranged opposite to the wafer carrying position, so that when the lamp housing mechanism 300 is connected to the opening end of the carrying housing 110, the coated wafer placed on the carrying platform 120 is within the area of the ultraviolet light reflected by the reflector 310, thereby ensuring the effect of eliminating static electricity on the wafer; the carrying housing 110 protects the carrying platform 120, preventing the reflected ultraviolet light from dispersing from the base 100, further improving the static electricity elimination effect, and at the same time preventing external components from contacting the carrying platform 120 and damaging the wafer on the carrying platform 120. In addition, coated wafers of different specifications can be placed on the carrying platform 120 to complete the elimination of static electricity on coated wafers of different specifications.

[0039] Preferably, the lamp housing mechanism 300 further includes a lamp housing outer shell 320, and the reflector 310 is set as a reflective lamp housing; the reflective lamp housing is arranged inside the lamp housing outer shell 320. The lamp housing outer shell 320 provides support and protection for the reflective lamp housing, ensuring the reflection effect of the reflective lamp housing and preventing external components from damaging the reflective lamp housing. When the ultraviolet mechanism 200 is connected to the lamp housing mechanism 300, the light-emitting body 210 is located inside the reflective lamp housing to improve the reflectivity and reflection effect of the ultraviolet light emitted by the light-emitting body 210, thereby further improving the static electricity elimination efficiency.

[0040] According to actual requirements, the reflective lamp cover can be set as a rectangular shell, a polyhedron shell, a semi-circular shell or a semi-elliptical shell. In this embodiment, the reflective lamp cover is set as a semi-circular shell. Along the height direction, the midline of the reflective lamp cover is concentric with the midline of the light-emitting body 210, and the open end of the reflective lamp cover is covered on the bearing platform 120. In this way, when the light-emitting body 210 works, the ultraviolet light emitted is diverged along the radial direction of the reflective lamp cover until it reaches the inner wall of the reflective lamp cover and then is reflected towards the open end of the reflective lamp cover, so that the entire bearing platform 120 is within the irradiation area of the reflected ultraviolet light, ensuring the static electricity elimination effect on the wafer on the bearing platform 120 and further improving the static electricity elimination efficiency.

[0041] Preferably, the ultraviolet mechanism 200 further includes a microwave component, and the light-emitting body 210 is set as a mercury lamp; the microwave component is connected to the lamp cover mechanism 300 corresponding to the mercury lamp, and the microwave component can emit microwaves to excite the mercury lamp to emit ultraviolet light in the corresponding band. Since the light-emitting body 210 is set as a mercury lamp, microwaves can be used to excite the mercury lamp to emit ultraviolet light in the corresponding band, thereby ensuring the static electricity elimination effect on the wafer.

[0042] Specifically: The microwave component includes a power supply, a magnetron and a waveguide 220, and the waveguide 220 is communicated with the reflective lamp cover; the power supply is used to excite the magnetron to generate microwaves, and the microwaves are guided to the mercury lamp through the waveguide 220 so that the mercury lamp emits ultraviolet light in the corresponding band. The magnetron is excited by a 2.45 HZ power supply to generate microwaves, and the generated microwaves are transmitted to the mercury lamp through the waveguide to excite the electrodeless mercury lamp to generate ultraviolet light in the 200 nm - 250 nm band, so that ionization occurs on the wafer to achieve the purpose of eliminating static electricity.

[0043] In addition, in this embodiment, an installation shell 230 is provided on the side of the lamp cover mechanism 300 away from the base 100. The installation shell 230 is connected to the lamp cover housing 320 and is communicated with the reflective lamp cover. The mercury lamp is connected to the installation shell 230 and extends into the reflective lamp cover, ensuring the static electricity elimination effect while reducing the volume of the reflective lamp cover to ensure the reflection effect. The installation shell 230 and the lamp cover housing 320 can be set to be fixedly connected, or can be set to be detachably connected, or integrally formed.

[0044] Preferably, a plurality of waveguides 220 are provided, and the plurality of waveguides 220 are arranged at intervals and are all communicated with the reflective lamp cover.

[0045] Specifically, a plurality of waveguides 220 are arranged at intervals along the circumferential direction of the mounting housing 230, and are all internally communicated with the inside of the reflector lamp housing through the mounting housing 230. The plurality of waveguides 220 can be arranged to be docked with the same magnetron, or a plurality of magnetrons can be arranged to be docked with the plurality of waveguides 220 in a one-to-one correspondence. Since there are a plurality of waveguides 220 internally communicated with the inside of the reflector lamp housing, ultraviolet light of a specific wavelength can excite the mercury lamp from different directions to ensure that the ultraviolet light emitted by the mercury lamp meets the requirements for eliminating static electricity on the wafer.

[0046] In some other embodiments, the microwave component is not provided, and the light-emitting body 210 is provided as an ultraviolet lamp. Alternatively, an ultraviolet lamp and a mercury lamp are both provided in the lamp housing mechanism 300.

[0047] Preferably, the lamp housing mechanism 300 further includes a light-transmitting plate 330, and the light-transmitting plate 330 is disposed at the opening end of the reflector lamp housing to form a sealed space inside the reflector lamp housing.

[0048] When the mercury lamp is excited to emit ultraviolet light, oxygen molecules in the environment can absorb a part of the ultraviolet light and be excited into ozone with a pungent smell. By disposing the light-transmitting plate 330 at the opening end of the reflector lamp housing, first, it can ensure that the reflected ultraviolet light can pass through the light-transmitting plate 330 to reach the carrier table 120 to complete the static electricity elimination of the coated wafer on the carrier table 120; second, the sealed space can prevent air flow. Therefore, at the initial stage of the operation of the static electricity elimination device, the absorption of ultraviolet light by oxygen molecules in the sealed space reaches the upper limit, and thus the absorption amount of ultraviolet light by oxygen molecules can be reduced in the later stage of operation, thereby further improving the static electricity elimination ability and efficiency; finally, ozone has a pungent smell, and the light-transmitting plate 330 can prevent ozone from volatilizing outside the lamp housing mechanism 300, which can improve the cleanliness of the working environment.

[0049] Preferably, the lampshade mechanism 300 further includes a first limiting member 340 and a second limiting member 350, both of which are arranged in an annular shape, and the first limiting member 340 is arranged at the open end of the lampshade housing 320, and cooperates with the open end of the lampshade housing 320 to form a first limiting groove (not shown in the figure), and a first limiting skirt (not shown in the figure) is arranged on one side of the reflective lampshade close to the open end of the lampshade housing 320, and the first limiting groove and the first limiting skirt are both arranged along the lampshade housing 320. 0 extends in an annular shape in the circumferential direction, and the first limiting skirt is limitedly connected to the first limiting groove; the bottom of the lampshade housing 320 is provided with a mounting through hole corresponding to the mounting shell 230, and a ring-shaped positioning member 360 is provided on the inner side of the mounting through hole, and a mounting annular channel is formed between the outer wall of the positioning member 360 and the inner wall of the mounting through hole, and the reflective lampshade is provided with a second limiting skirt (not shown in the figure) corresponding to the mounting through hole, and the second limiting skirt extends in an annular shape along the circumferential direction of the mounting through hole, and the second limiting skirt is inserted in the mounting annular channel. The second limiting skirt cooperates with the first limiting skirt to fix the reflective lampshade in the lampshade housing 320, and improve the connection strength and connection stability of the reflective lampshade when it is connected to the lampshade housing 320.

[0050] The second stopper 350 is disposed on a side of the lampshade housing 320 away from the first stopper 340, and cooperates with the first stopper 340 to form a second stopper groove, and the light-transmitting plate 330 is connected to the second stopper groove. The light-transmitting plate 330 is configured to be circular at the opening end corresponding to the reflective lampshade, and is fixedly connected to the lampshade housing 320 through the first stopper 340, thereby ensuring the connection strength and the sealing effect of the reflective lampshade.

[0051] Preferably, the second stopper 350 is connected to the open end of the bearing shell 110, and a sealing portion is provided between the second stopper 350 and the open end of the bearing shell 110. The sealing portion is used to improve the sealing between the lampshade mechanism 300 and the bearing shell 110 when the lampshade mechanism 300 is arranged at the open end of the bearing shell 110, to ensure that the reflected ultraviolet light can all reach the bearing platform 120, and to prevent the ultraviolet light from dissipating between the lampshade mechanism 300 and the bearing shell 110. In this embodiment, the sealing portion is provided on the end surface of the second stopper 350 close to the bearing shell 110, and the sealing portion extends in a ring shape along the circumference of the bearing shell 110. When the lampshade mechanism 300 is arranged at the open end of the bearing shell 110, the outer wall of the sealing portion abuts against the inner wall of the open end of the bearing shell 110. In some other embodiments, the sealing portion can be directly provided as a sealing ring, a sealing strip, etc.

[0052] Obviously, the above-mentioned embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.

Claims

1. A static eliminator, characterized in that: include: A base (100) having a wafer supporting position; The ultraviolet mechanism (200) comprises a light emitting body (210), wherein the light emitting body (210) is capable of emitting ultraviolet light; A lampshade mechanism (300), wherein the lampshade mechanism (300) is arranged on the base (100), and the lampshade mechanism (300) is provided with a reflector (310), and the reflector (310) can reflect ultraviolet light emitted by the light source (210) to the wafer supporting position.

2. The static eliminator according to claim 1, characterized in that: The reflective member (310) is configured as a reflective lampshade, the light emitter (210) is located in the reflective lampshade, and the opening of the reflective lampshade is arranged toward the wafer bearing position.

3. The static eliminator according to claim 2, characterized in that: The reflective lampshade is arranged as a semicircular shell, and along the height direction, the center line of the reflective lampshade is arranged concentrically with the center line of the light emitting body (210).

4. The static eliminator according to claim 2, characterized in that: The ultraviolet mechanism (200) further comprises a microwave component, and the light emitting body (210) is configured as a mercury lamp; The microwave component is connected to the lamp cover mechanism (300) corresponding to the mercury lamp, and the microwave component can emit microwaves to excite the mercury lamp to emit ultraviolet light of a corresponding wavelength band.

5. The static eliminator according to claim 4, characterized in that: The microwave assembly comprises a power supply, a magnetron and a waveguide (220); the power supply is used to excite the magnetron to generate microwaves; the waveguide (220) is connected to the reflective lampshade to guide the microwaves toward the mercury lamp.

6. The static eliminator according to claim 4, characterized in that: The lampshade mechanism (300) further comprises a light-transmitting plate (330), wherein the light-transmitting plate (330) is arranged at the open end of the reflective lampshade so as to form a closed space inside the reflective lampshade.

7. The static eliminator according to claim 6, characterized in that: The lampshade mechanism (300) further comprises a ring-shaped limiting component, and the lampshade mechanism (300) further comprises a lampshade shell (320), the reflective lampshade is arranged in the lampshade shell (320), the limiting component is connected to the open end of the lampshade shell (320), and cooperates with the open end of the lampshade shell (320) to form a first limiting groove, the lower periphery of the reflective lampshade is connected to the first limiting groove, the inner side of the limiting component has a second limiting groove, and the periphery of the light-transmitting plate (330) is limitedly connected to the second limiting groove.

8. The static eliminator according to claim 7, characterized in that: The limiting assembly comprises a first limiting member (340) and a second limiting member (350) which are detachably connected, the first limiting member (340) being arranged between the lampshade housing (320) and the second limiting member (350), the first limiting member (340) cooperating with the lampshade housing (320) to form the first limiting groove, and the first limiting member (340) and the second limiting member (350) together enclosing to form the second limiting groove.

9. The static eliminator according to any one of claims 1 to 8, characterized in that: The base (100) comprises a carrying shell (110) and a carrying platform (120); the carrying shell (110) is arranged as an open shell, and the opening of the carrying shell (110) is arranged upward; the lampshade mechanism (300) is arranged to cover the open end of the carrying shell (110); the carrying platform (120) is arranged in the carrying shell (110), and the upper end surface is arranged as the wafer carrying position; the light emitting body (210) is arranged opposite to the wafer carrying position.

10. The static eliminator according to claim 9, characterized in that: A sealing portion is provided between the lampshade mechanism (300) and the open end of the bearing shell (110).

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