Deburring workbench for semiconductor precision parts

Abstract

The utility model discloses a deburring workbench for semiconductor precision parts, which comprises a workbench body, a storage box is arranged on the upper side of the workbench body, a sinking groove is arranged on the upper side of the workbench body, and a plurality of supporting columns for supporting the parts are fixedly arranged in the sinking groove. A discharging opening penetrating through the sinking groove in the vertical direction is formed in the groove bottom of the sinking groove, a waste box used for collecting waste is arranged at the discharging opening, and the supporting columns are arranged at intervals. According to the working table, cleaning work is more convenient and faster, it is guaranteed that the site is clean and tidy, and the working intensity of workers is relieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment processing, and particularly relates to a deburring workbench for semiconductor precision parts. Background Technique

[0002] As the foundation to support the modern electronic information industry, the types and characteristics of the core components of semiconductor equipment are directly related to the performance, stability and reliability of the equipment. Semiconductor equipment has a complex structure and is composed of multiple core subsystems, and each subsystem contains a large number of components. These components can be divided into different categories according to their functions and structures, including mechanical components, electrical components, mechatronic components, gas / liquid / vacuum system components, instrument components and optical components.

[0003] The characteristics of the core components of semiconductor equipment are mainly reflected in the following aspects: strong supply chain dependence, high degree of customization, multi-disciplinary cross-integration, high cleanliness requirements, high precision and high reliability. Since semiconductor equipment is usually used to manufacture high-precision electronic components, its core components must have extremely high precision and reliability. This not only requires excellent manufacturing processes for the components, but also strict quality control and testing. In the semiconductor manufacturing process, any tiny contamination may seriously affect the product quality. Therefore, the core components of semiconductor equipment must have extremely high cleanliness to avoid introducing impurities during the production process. The types and characteristics of the core components of semiconductor equipment directly reflect the technical level and development trend of the semiconductor industry. With the continuous progress of semiconductor technology and the continuous growth of market demand, the core components of semiconductor equipment will face higher performance requirements and stricter quality standards. In summary, it is particularly important to optimize the manufacturing process level and have a purging integrated workbench for semiconductor equipment precision parts. If the smoothness and cleanliness of the part surface cannot be guaranteed, it will cause unnecessary losses to the production of the subsequent whole machine equipment and reduce the production precision.

[0004] There is a waist-shaped part among the precision parts of semiconductor equipment, which needs to be deburred. The prior art, such as Chinese invention patent CN106975771B, discloses a bench drill working table provided with a debris recovery device. The debris recovery device includes an unfilled upper square frame-shaped fence frame. The internal space of the fence frame is square. A rectangular groove penetrating through the front and back is opened in the middle of the front side wall of the fence frame. The fence frame is inserted into the rear part of the working table in the front and back directions. The space below the fence frame and below the working table is a debris storage groove. Although this structure is used for the bench drill working table to recover debris, it cannot be directly used for deburring. There is a certain distance between the bench drill working table and the debris recovery device, and it is easy to generate dust or fall outside during the process of collecting debris. Moreover, a lot of tools are needed during the deburring process, and there is no storage space on the bench drill working table, making it inconvenient to pick up and place tools. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the Invention

[0005] The purpose of the present utility model is to provide a deburring working table for semiconductor precision parts, which makes the cleaning work more convenient, ensures the cleanliness of the site, and reduces the working intensity of the staff.

[0006] In order to achieve the above technical purpose and meet the above technical requirements, the technical solution adopted by the present utility model is: a deburring working table for semiconductor precision parts, characterized in that it includes a working table body, a storage box is arranged on the upper side of the working table body, a sunken groove is arranged on the upper side of the working table body, a plurality of support columns for supporting the parts are fixedly arranged in the sunken groove, a discharge port penetrating through it vertically is arranged at the bottom of the sunken groove, a waste box for collecting waste is arranged at the discharge port, and the support columns are arranged at intervals.

[0007] As a preferred technical solution, a fence is arranged on the edge of the upper side of the working table body along its length direction.

[0008] As a preferred technical solution, a horizontally placed flat plate is fixedly arranged inside the fence.

[0009] As a preferred technical solution, an observation hole is arranged through one side wall of the sunken groove.

[0010] As a preferred technical solution, a plurality of support feet are arranged on the bottom surface of the working table body.

[0011] As a preferred technical solution, the number of the support columns is 18, the support columns are divided into 3 rows, and 6 support columns are arranged equidistantly in each row.

[0012] As a preferred technical solution, the storage box is of a drawer structure.

[0013] As a preferred technical solution, a handle is fixedly arranged on one side of the storage box.

[0014] As a preferred technical solution, side baffles are respectively arranged on both sides of the enclosure panel. The horizontally placed flat plate is located between the two side baffles, and both ends of the horizontally placed flat plate are fixedly connected to the two side baffles respectively.

[0015] The beneficial effects of the present utility model are as follows:

[0016] 1) After the staff removes burrs as required, the excess debris will fall on the sinking groove through the gaps between the multiple support columns on the sinking groove. Then, the staff uses an air gun or other cleaning tools to blow the waste into the waste box, improving the work efficiency of the staff, avoiding damage to the surface of the parts by waste aluminum chips during the burr removal process, making the cleaning work after the process more convenient, ensuring the cleanliness of the site, and reducing the work intensity of the staff;

[0017] 2) The combination of the enclosure panel and the horizontally placed flat plate is convenient for placing tools;

[0018] 3) The observation hole is convenient for the staff to observe the waste cleaning situation, and an air gun can also be used here to blow and sweep the parts and waste, and the blowing and cleaning effect is better;

[0019] 4) The support columns have a good support effect on the parts;

[0020] 5) The storage box can be pulled out for convenient taking and placing of tools;

[0021] 6) The side baffles are convenient for fixing the horizontally placed flat plate and preventing tools from falling from one side of the horizontally placed flat plate. Description of the Drawings

[0022] Figure 1 is the working diagram of the workbench provided by an embodiment of the present utility model;

[0023] Figure 2 is the structural diagram of the workbench provided by an embodiment of the present utility model;

[0024] Figure 3 is Figure 2 the view from another direction of

[0025] In Figures 1 - 3 : 1. Workbench body; 101. Sinking groove; 102. Discharge port; 103. Observation hole; 104. Support feet; 2. Storage box; 201. Handle; 3. Support columns; 4. Waste box; 5. Enclosure panel; 6. Horizontally placed flat plate; 7. Baffle; 8. Parts. Detailed Embodiment

[0026] The present utility model will be further described below in conjunction with the drawings.

[0027] In the attached drawings of the embodiments of the present utility model, the same or similar reference numerals correspond to the same or similar components; in the description of the present utility model, it should be understood that if terms such as "head", "tail", "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the attached drawings. This is only for the convenience of describing the present utility model, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms used to describe the positional relationship in the attached drawings are only for illustrative purposes and cannot be understood as a limitation of this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0028] Please refer to Figures 1 - 3 , an embodiment of the present utility model provides a deburring workbench for semiconductor precision parts, including a workbench body 1. A storage box 2 is arranged on the upper side of the workbench body 1. A sunken groove 101 is arranged on the upper side of the workbench body 1. A plurality of support columns 3 for supporting the parts 8 are fixedly arranged in the sunken groove 101. A discharge port 102 penetrating through the sunken groove 101 vertically is arranged at the bottom of the sunken groove 101. A waste box 4 for collecting waste is arranged at the discharge port 102. The support columns 3 are arranged at intervals.

[0029] After the staff removes the burrs as required, the excess debris will fall on the sunken groove 101 through the gaps between the plurality of support columns 3 on the sunken groove 101. Then, the staff uses an air gun or other cleaning tools to blow the waste into the waste box 4, which improves the work efficiency of the staff, avoids damage to the surface of the parts by waste aluminum chips during the burr removal process, makes the cleaning work after the process more convenient, ensures the cleanliness of the site, and reduces the work intensity of the staff.

[0030] As Figures 1 - 3 shown, a flanging can be arranged on the upper side of the waste box 4, which is detachably connected to the bottom surface of the workbench body 1. When the waste in the waste box 4 is collected to a certain amount, it can be disassembled and dumped, or a discharge port can be directly opened on the waste box 4, and the waste is discharged from the discharge port.

[0031] As Figures 1 - 3 shown, a retaining plate 5 is arranged on the upper side of the workbench body 1 along the edge in its length direction. The retaining plate 5 plays a role in blocking dust. Further, a horizontally placed flat plate 6 is fixedly arranged inside the retaining plate 5. The combination of the retaining plate 5 and the horizontally placed flat plate 6 can facilitate the placement of tools.

[0032] As Figures 1 - 3As shown, an observation hole 103 is provided through one side wall of the sinking groove 101. The observation hole 103 facilitates the staff to observe the waste cleaning situation and can also be used to blow the components 8 and waste with an air gun here, and the blowing and cleaning effect is better. The observation hole 103 can also be hinged with a transparent round cover to cover the observation hole 103, which is opened when blowing is required.

[0033] As Figures 1 - 3 shown, a plurality of support feet 104 are provided on the bottom surface of the workbench body 1. Specifically, the number of the support feet 104 is 4, and the support stability is good.

[0034] As Figures 1 - 3 shown, the number of the support columns 3 is 18. The support columns 3 are divided into 3 rows, and 6 support columns 3 are arranged equidistantly in each row. The support columns 3 have a good supporting effect on the components 8.

[0035] As Figures 1 - 3 shown, the storage box 2 is of a drawer structure. Further, a handle 201 is fixedly provided on one side of the storage box 2. The staff pulls the handle 201 to pull out the storage box 2, and the storage box 2 is convenient to pull out and put tools.

[0036] As Figures 1 - 3 shown, side baffles 7 are respectively provided on both sides of the enclosing plate 5. The horizontally placed flat plate 6 is located between the two side baffles 7. Both ends of the horizontally placed flat plate 6 are fixedly connected to the two side baffles 7. The side baffles 7 are convenient for fixing the horizontally placed flat plate 6 and preventing tools from falling from one side of the horizontally placed flat plate 6.

[0037] The above embodiments are only descriptions made to clearly illustrate the present invention, rather than limitations on the implementation manners. For those skilled in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here, and the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A deburring workbench for semiconductor precision parts, characterized in that: It includes a workbench body, a storage box is arranged on the upper side of the workbench body, a sunken groove is arranged on the upper side of the workbench body, a plurality of support columns for supporting the parts are fixedly arranged in the sunken groove, a discharge port is arranged at the bottom of the sunken groove which penetrates the groove vertically, a waste box for collecting waste is arranged at the discharge port, and the support columns are arranged at intervals.

2. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: A surrounding plate is arranged on the upper side of the workbench body along the edge of the workbench body in the length direction.

3. The deburring workbench for semiconductor precision parts according to claim 2, characterized in that: A horizontally placed flat plate is fixedly arranged on the inner side of the enclosure.

4. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: An observation hole is provided through a side wall of the sinking groove.

5. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: The bottom surface of the workbench body is provided with a plurality of supporting legs.

6. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: The number of the support columns is 18, and the support columns are divided into 3 rows, with 6 support columns arranged equidistantly in each row.

7. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: The storage box is a drawer-type structure.

8. The deburring workbench for semiconductor precision parts according to claim 1, characterized in that: A handle is fixedly arranged on one side of the storage box.

9. The deburring workbench for semiconductor precision parts according to claim 3, characterized in that: Side baffles are respectively arranged on both sides of the enclosure, the horizontally placed flat plate is located between the two side baffles, and the two ends of the horizontally placed flat plate are respectively fixedly connected to the two side baffles.

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