Multi-band ultra-depth-of-field microscopic dark field high-resolution image acquisition device

Abstract

The utility model relates to a multi-band ultra-depth-of-field microscopic dark field high-resolution image acquisition device. The device sequentially comprises a lighting source (2), a sample (1), an objective lens (3), a dispersion tube lens (5), a first dichroscope (6), a reflector (7), a first focusing lens (8), a first waveband image sensor (9), a second focusing lens (10), a second dichroscope (12), a second waveband image sensor (11), a third waveband image sensor (13) and an industrial personal computer (14). The device is simple in structure and easy to operate, combines the dispersion tube lens, the first dichroscope and the second dichroscope, utilizes the three wave band image sensors to synchronously acquire images of different wave bands, uses the industrial personal computer to synthesize the images of different wave bands, and can improve the acquisition efficiency and precision of super-depth-of-field microscopic dark field high-resolution images.

Description

Technical Field

[0001] The utility model relates to the technical field of dark-field microscopy imaging, in particular to a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device. Background Technique

[0002] The dark-field microscopy imaging technology combines an optical microscope with special illumination and observation methods, enabling minute structures to be prominently presented against the background, and is particularly suitable for the observation of particles, fibers, small-scale interfaces, etc. People often increase the magnification of the microscope to detect defects with extremely small sizes. However, increasing the magnification of the microscope will result in a shallow depth of field in the microscopic imaging system, which is prone to defocus blur for non-horizontal plane samples and difficult to batch acquire high-resolution and high-clarity images of sample components. Therefore, how to improve the depth of field of high-resolution microscopic imaging is a key technical problem to be solved. Content of the Utility Model

[0003] The purpose of the utility model is to overcome the problem of defocus blur during the high-precision and high-resolution detection of non-horizontal plane sample components in the prior art, and provide a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device. By combining a dispersion tube lens, a first dichroic mirror, and a second dichroic mirror, and using three-band image sensors to synchronously collect images of different bands, and using an industrial control computer to synthesize images of different bands, the efficiency and accuracy of acquiring multi-band super-depth-of-field microscopic dark-field high-resolution images can be improved.

[0004] To achieve the above purpose, the technical solution of the utility model is:

[0005] On the one hand, a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device includes: an annular illumination light source, a non-horizontal plane sample, an objective lens, a dispersion tube lens, a first dichroic mirror, a reflector, a first focusing lens, a first-band image sensor, a second focusing lens, a second dichroic mirror, a second-band image sensor, a third-band image sensor, and an industrial control computer;

[0006] The industrial control computer is connected to the annular illumination light source to control the annular illumination light source to emit light to the non-horizontal plane sample, and the light scattered by the non-horizontal plane sample reaches the first dichroic mirror after passing through the objective lens and the dispersion tube lens;

[0007] The reflector is arranged on the reflection light path of the first dichroic mirror, and the first-band image sensor is arranged on the reflection light path of the reflector; the first focusing lens is arranged between the reflector and the first-band image sensor;

[0008] The second dichroic mirror is disposed on the transmission optical path of the first dichroic mirror. The second-band image sensor is disposed on the reflection optical path of the second dichroic mirror, and the third-band image sensor is disposed on the transmission optical path of the second dichroic mirror. A second focusing lens is disposed between the first dichroic mirror and the second dichroic mirror.

[0009] The first-band image sensor, the second-band image sensor, and the third-band image sensor are respectively connected to an industrial control computer.

[0010] Preferably, the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device further includes a first motor. The first motor is disposed below the non-horizontal plane sample, and the first motor is connected to the industrial control computer. The industrial control computer drives the first motor to drive the non-horizontal plane sample to move for focusing.

[0011] Preferably, the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device further includes a second motor. The second motor is disposed between the objective lens and the dispersion tube lens, and the second motor is connected to the industrial control computer. The industrial control computer drives the second motor to drive the objective lens to move for focusing.

[0012] Preferably, when the first-band image sensor, the second-band image sensor, and the third-band image sensor receive optical signals of the same band, they are all located at the focal plane of the same sample field of view. When receiving optical signals of three different bands from the same field of view on the sample surface, focal planes at different height positions on the sample surface are formed.

[0013] Preferably, the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device further includes a stage. The non-horizontal plane sample is placed above the stage.

[0014] The beneficial effects of the present invention are as follows:

[0015] (1) The structure of the present invention is simple and easy to operate. By combining the first dichroic mirror and the second dichroic mirror, three cameras are used to synchronously collect images of different bands, and an industrial control computer is used to fuse spectral images of different bands to achieve the acquisition of super-depth-of-field microscopic dark-field high-resolution images.

[0016] (2) The present invention uses an industrial control computer to fuse spectral images of different bands, and simultaneously performs signal control and data processing and analysis to achieve the acquisition of super-depth-of-field microscopic dark-field high-resolution images, further improving the acquisition efficiency of super-depth-of-field high-resolution images.

[0017] (3) The utility model uses a dispersion tube mirror to axially expand the spectrum of the annular light source, so that images of different wavelength bands are focused on different surface heights, avoiding to a certain extent the axial layer-by-layer scanning used in traditional depth-of-field extension methods, and avoiding image offset caused by device jitter during layer scanning. Compared with traditional depth-of-field extension methods, it has higher precision and efficiency.

[0018] (4) Compared with traditional super-depth-of-field methods, the utility model can be applied to any sample with height differences and high reflectivity. In particular, for transparent samples with large height differences, high reflectivity, and high transmittance, it has a wide range of application scenarios.

[0019] The following further elaborates on the present utility model in detail in conjunction with the drawings and embodiments, but the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device of the present utility model is not limited to the embodiments. Description of the Drawings

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for description in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0021] Figure 1 It is a schematic structural diagram of the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device according to the embodiment of the present utility model.

[0022] Reference Signs in the Drawings: 1, non-horizontal plane sample; 2, annular illumination light source; 3, objective lens; 41, first motor; 42, second motor; 5, dispersion tube mirror; 6, first dichroic mirror; 7, reflector; 8, first focusing lens; 9, first wavelength-band image sensor; 10, second focusing lens; 11, second wavelength-band image sensor; 12, second dichroic mirror; 13, third wavelength-band image sensor; 14, industrial control computer. Detailed Embodiments

[0023] In order to make the objectives, technical solutions, and advantages of the present utility model clearer, the following further describes the present utility model in detail in conjunction with the drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0024] See Figure 1As shown in the figure, this embodiment discloses a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device, including: an annular illumination light source 2, a non-horizontal plane sample 1, an objective lens 3, a dispersion tube lens 5, a first dichroic mirror 6, a reflector 7, a first focusing lens 8, a first-band image sensor 9, a second focusing lens 10, a second dichroic mirror 12, a second-band image sensor 11, a third-band image sensor 13, and an industrial control computer 14;

[0025] The industrial control computer 14 is connected to the annular illumination light source 2 to control the annular illumination light source 2 to emit light to the non-horizontal plane sample 1, and the light scattered by the non-horizontal plane sample 1 reaches the first dichroic mirror 6 after passing through the objective lens 3 and the dispersion tube lens 5;

[0026] The reflector 7 is arranged on the reflection light path of the first dichroic mirror 6, and the first-band image sensor 9 is arranged on the reflection light path of the reflector 7; the first focusing lens 8 is arranged between the reflector 7 and the first-band image sensor 9;

[0027] The second dichroic mirror 12 is arranged on the transmission light path of the first dichroic mirror 6, the second-band image sensor 11 is arranged on the reflection light path of the second dichroic mirror 12, and the third-band image sensor 13 is arranged on the transmission light path of the second dichroic mirror 12; the second focusing lens 10 is arranged between the first dichroic mirror 6 and the second dichroic mirror 12;

[0028] The first-band image sensor 9, the second-band image sensor 11, and the third-band image sensor 13 are respectively connected to the industrial control computer 14.

[0029] In this embodiment, the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device further includes a first motor 41; the first motor 41 is arranged below the non-horizontal plane sample 1, the first motor 41 is connected to the industrial control computer 14, and the industrial control computer 14 drives the first motor 41 to drive the non-horizontal plane sample 1 to move for focusing.

[0030] In another embodiment, the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device further includes a second motor 42; the second motor 42 is arranged between the objective lens 3 and the dispersion tube lens 5, the second motor 42 is connected to the industrial control computer 14, and the industrial control computer 14 drives the second motor 42 to drive the objective lens 3 to move for focusing.

[0031] It should be noted that a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device may include the above-mentioned first motor 41, or may include the above-mentioned second motor 42, or may include both the first motor 41 and the second motor 42, which is specifically set according to needs and is not limited in this embodiment.

[0032] Furthermore, when the first-band image sensor 9, the second-band image sensor 11, and the third-band image sensor 13 receive optical signals of the same band, they are all located at the focal plane of the same sample field of view; when they respectively receive optical signals of three different bands from the same field of view on the sample surface, focal planes at different height positions on the sample surface are formed.

[0033] To ensure that the super-depth-of-field range of the device is real and effective, it is first necessary to ensure that when the three image sensors receive optical signals of the same band, the focal planes obtained are at the same field of view, that is, when measuring the sample surface on the horizontal plane, optical signals of the same band are received. Furthermore, when measuring a non-horizontal plane sample, that is, when the height difference of the sample surface exceeds the depth-of-field range of the objective lens, the device of the present invention is used, and the three image sensors receive optical signals of three different bands to form focal planes at different height positions on the sample surface.

[0034] As described above, the present invention uses a dispersive tube lens 5 to axially expand the spectrum of the annular illumination light source, so that images of different bands are focused at different surface heights, avoiding to a certain extent the axial layer-by-layer scanning used in traditional depth-of-field extension methods. It only needs to drive the non-horizontal plane sample 1 to move to the working range of the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device through a motor, avoiding image offset caused by device jitter during the layer scanning process, and having higher accuracy and efficiency compared with traditional depth-of-field extension methods.

[0035] In this embodiment, a method for using a multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device includes:

[0036] S1. Start the multi-band super-depth-of-field microscopic dark-field high-resolution image acquisition device. Use the industrial control computer 14 to turn on the annular illumination light source 2. Place the non-horizontal plane sample 1 within the working range. The industrial control computer 14 drives the first-band image sensor 9, the second-band image sensor 11, and the third-band image sensor 13 to respectively receive the image focal plane information of the non-horizontal plane sample 1 in the height ranges of 0 to H1, H1 to H2, and H2 to H3, where the sum of H1, H2, and H3 is the total height difference of the non-horizontal plane sample 1. The industrial control computer 14 controls the first-band image sensor 9, the second-band image sensor 11, and the third-band image sensor 13 to synchronously collect the dark-field images of the non-horizontal plane sample 1 to be measured at the same lateral field-of-view position but different axial height positions. The first-band image sensor 9, the second-band image sensor 11, and the third-band image sensor 13 respectively transfer the collected dark-field images to the industrial control computer 14. The industrial control computer 14 performs processing and analysis to obtain a three-band multi-focus image.

[0037] Specifically, the first-band image sensor 9 receives the image focal plane information of the sample 1 in the height range of 0 to H1, the second-band image sensor 11 receives the image focal plane information of the non-horizontal plane sample 1 in the height range of H1 to H2, and the third-band image sensor 13 receives the image focal plane information of the non-horizontal plane sample 1 in the height range of 2 H to H3, and the three image sensors simultaneously acquire images within the same lateral field-of-view range. For example: When using an ordinary objective lens and a single image sensor, the acquired image information is partially blurred and partially clear. However, when using this device, the first-band image sensor 9 receives the image focal plane information of the sample 1 in the height range of 0 to H1 and the defocus information of H1 to H3; the second-band image sensor 11 receives the image focal plane information of the sample 1 in the height range of H1 to H2 and the defocus information of 0 to H1 and H2 to H3; the third-band image sensor 13 receives the image focal plane information of the sample 1 in the height range of H2 to H3 and the defocus information of 0 to H1 and H1 to H2; and a three-band multi-focus image of the same sample at the same lateral field-of-view position but different axial heights is obtained simultaneously.

[0038] S2. The industrial control computer 14 obtains the gradient information of the three-band multi-focus image based on the obtained three-band multi-focus image, determines the focused regions in the three-band multi-focus image, and extracts three focused regions.

[0039] S3. The industrial control computer 14 performs overall brightness equalization and compensation on the three extracted focused regions, and performs pixel-level image fusion on the different images of the three focused regions to obtain a super-depth-of-field microscopic dark-field high-resolution image.

[0040] S4, the industrial control computer 14 drives the first motor 41 to drive the non-horizontal plane sample 1 for layer-by-layer scanning, or the industrial control computer 14 drives the second motor 42 to drive the objective lens 3 for layer-by-layer scanning. Using the edge gradient information of the images obtained by layer-by-layer scanning, the curve between the image sharpness and the axial height Z is calibrated to obtain the ultra-depth-of-field range.

[0041] S5, the industrial control computer 14 uses the curve between the calibrated image sharpness and the axial height Z to perform autofocus imaging, extracts the clear area, and performs image fusion on the multi-focus images to obtain a high-resolution full-focus image.

[0042] The principle and operation method of the present utility model are described through the above specific implementation cases. These cases are intended to provide a clear understanding framework for readers to grasp the core idea and operation key points of the present utility model. However, it should be clear that these cases are not a limitation on the application scope of the present utility model. For those skilled in the art, various forms of improvements and innovations based on the core idea of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A multi-band ultra-depth-of-field microscopic dark-field high-resolution image acquisition device, characterized in that: include: An annular illumination light source (2), a non-horizontal plane sample (1), an objective lens (3), a dispersion tube lens (5), a first dichroic mirror (6), a reflector (7), a first focusing lens (8), a first band image sensor (9), a second focusing lens (10), a second dichroic mirror (12), a second band image sensor (11), a third band image sensor (13) and an industrial computer (14); The industrial computer (14) is connected to the annular illumination light source (2) to control the annular illumination light source (2) to emit light to the non-horizontal plane sample (1), and the light scattered by the non-horizontal plane sample (1) reaches the first dichroic mirror (6) after passing through the objective lens (3) and the dispersion tube lens (5); The reflector (7) is arranged on the light path of the reflected light of the first dichroic mirror (6); the first band image sensor (9) is arranged on the light path of the reflected light of the reflector (7); and the first focusing lens (8) is arranged between the reflector (7) and the first band image sensor (9); The second dichroic mirror (12) is arranged on the light path of the transmitted light of the first dichroic mirror (6), the second band image sensor (11) is arranged on the light path of the reflected light of the second dichroic mirror (12), and the third band image sensor (13) is arranged on the light path of the transmitted light of the second dichroic mirror (12); the second focusing lens (10) is arranged between the first dichroic mirror (6) and the second dichroic mirror (12); The first-band image sensor (9), the second-band image sensor (11) and the third-band image sensor (13) are respectively connected to an industrial computer (14).

2. The multi-band ultra-depth-of-field microscopic dark-field high-resolution image acquisition device according to claim 1, characterized in that: The invention also comprises a first motor (41); the first motor (41) is arranged below the non-horizontal plane sample (1); the first motor (41) is connected to the industrial computer (14); the industrial computer (14) drives the first motor (41) to drive the non-horizontal plane sample (1) to move and focus.

3. The multi-band ultra-depth-of-field microscopic dark-field high-resolution image acquisition device according to claim 1, characterized in that: The invention also comprises a second motor (42); the second motor (42) is arranged between the objective lens (3) and the dispersion tube lens (5); the second motor (42) is connected to the industrial computer (14); the industrial computer (14) drives the second motor (42) to drive the objective lens (3) to move and focus.

4. The multi-band ultra-depth-of-field microscopic dark-field high-resolution image acquisition device according to claim 1, characterized in that: When the first-band image sensor (9), the second-band image sensor (11) and the third-band image sensor (13) receive light signals of the same band, they are all located at the focal plane of the same sample field of view; when they respectively receive light signals of three different bands from the same field of view on the sample surface, focal planes at different height positions on the sample surface are formed.

5. The multi-band ultra-depth-of-field microscopic dark-field high-resolution image acquisition device according to claim 1, characterized in that: It also includes a stage; the non-horizontal plane sample (1) is placed on the stage.

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