Wire arrangement jig

Abstract

The utility model provides a wire arrangement jig which is used for being fixed to a grinding machine table, the grinding machine table is provided with a motor and a rotating disc, and the motor is installed on the rotating disc. The wire arrangement jig comprises a jig main body which is provided with a channel, and the channel penetrates through the jig main body along a preset direction; the supporting component is connected with the jig main body; when the wire arranging jig is in a using state, the supporting component is fixed to the rotating disc, a wire penetrates through the channel, and the end, extending out of the channel, of the wire is connected with the motor. By means of the configuration, line routing on the grinding machine table is standardized, damage or deviation of the wires in the installation and use process can be prevented, then the risk that the wires are pulled and broken is reduced, meanwhile, the production efficiency is improved, the wiring difficulty is reduced, and electromagnetic interference and signal crosstalk are reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a wire management fixture applicable to a grinding machine. Background Art

[0002] Chemical mechanical polishing process is the most effective processing method for global planarization of wafers in the integrated circuit manufacturing process. On the one hand, this processing method uses chemical reactions to corrode the wafer surface, and on the other hand, it uses the friction between the polishing pad and the wafer to remove the corroded and softened materials, achieving the purpose of planarization.

[0003] For high-efficiency grinding, multiple wafers are generally ground simultaneously, that is, multiple grinding heads are used, and each grinding head holds a wafer. When grinding the wafer, the grinding head is driven by a motor to drive the wafer to rotate, and at the same time, the wafer is pressed against the polishing pad so that the front surface of the wafer and the polishing pad rub against each other. Finally, through the relative movement between the wafer surface and the polishing surface of the polishing pad, the wafer surface is planarized. For this reason, there are many wires inside the grinding machine. Currently, it is common to vertically drop the wires from the top of the machine and then connect them to the motor. Due to the narrow operating space and no reference objects, only visual inspection can be used, and the position of the wires is adjusted by experience. The turntable carrying the motor is rotated for fine adjustment back and forth and up and down until the wires can be pulled without being pulled within the stroke range of the turntable. However, due to the inaccuracy of visual inspection and the narrow operating space, the operator often cannot determine the position of the wires, and the wiring is difficult. Especially, it is easy for the wires to be stressed during use, and there are many wires inside the machine. A slight pull can easily cause the wires to fail and cause fragments, thus damaging the machine environment, and also reducing the production efficiency due to frequent downtime for wire replacement.

[0004] It should be noted that the information disclosed in the background art part of this application is only intended to deepen the understanding of the general background art of this application, and should not be regarded as an admission or any form of suggestion that this information constitutes the prior art known to those skilled in the art. Summary of the Utility Model

[0005] In view of this, this application provides a wire management fixture to solve the problems of difficult wiring when adjusting wires by visual inspection and experience inside the grinding machine, and the wires are easily stressed and pulled and broken.

[0006] To achieve the above object, this application provides a wire management fixture for being fixed on a grinding machine. The grinding machine is provided with a motor and a turntable, and the motor is installed on the turntable. The wire management fixture includes:

[0007] A fixture main body, the fixture main body is provided with a channel, and the channel penetrates through the fixture main body along a predetermined direction; and,

[0008] A support member, which is connected to the fixture body;

[0009] When the wire management fixture is in use, the support member is fixed on the turntable, and a wire is threaded through the channel, and one end of the wire extending out of the channel is connected to the motor.

[0010] Optionally, the channel includes a first hole extending through in a first direction; when the wire management fixture is in use, the first hole faces the vertical direction.

[0011] Optionally, the channel further includes a second hole provided in a second direction, one end of the second hole terminates in the first hole, and the other end of the second hole penetrates the fixture body; the second direction is perpendicular to the first direction.

[0012] Optionally, a plurality of the motors are provided in the grinding machine table, the plurality of motors are arranged in sequence along the circumference of the turntable, and each motor is connected to one path of the wire;

[0013] There are a plurality of the channels, and the plurality of channels are arranged circumferentially around the central axis of the fixture body; when the wire management fixture is in use, one path of the wire is threaded through each channel.

[0014] Optionally, the wire management fixture further includes: a bundling structure;

[0015] When the wire management fixture is in use, all the wires gather above the fixture body to form a bus, and the bus is bundled and constrained by the bundling structure, and / or each path of the wire is bundled and constrained by the bundling structure.

[0016] Optionally, when the wire management fixture is in use, it is fixed inside the grinding machine table and is located below the top entrance of the grinding machine table. The wire enters the grinding machine table from the top entrance and falls to the surface of the fixture body, and then runs along the surface of the fixture body until it turns and enters the channel.

[0017] Optionally, the support member includes a fixing column, one end of the fixing column is connected to the fixture body, and the other end of the fixing column is used to be fixed at the central position of the turntable.

[0018] Optionally, the support member includes a plurality of support feet, the plurality of support feet are arranged circumferentially around the central axis of the fixture body, one end of each support foot is connected to the fixture body, and the other end of each support foot is used to install one of the motors and is fixed on the turntable.

[0019] Optionally, each of the supporting legs has an inclined section that forms an angle with the central axis of the fixture body; when the wire management fixture is in use, the wire extends out of the channel and then runs along the inclined section and is connected to the motor.

[0020] Optionally, at least one of the jig body and the supporting member is made of aluminum alloy material, and / or a wire protection structure is provided in the channel.

[0021] The wire management jig provided above includes: a jig body, the jig body is provided with a channel, the channel passes through the jig body along a predetermined direction; and a supporting member, the supporting member is connected to the jig body; when the wire management jig is in use, the supporting member is fixed on the turntable, and a wire is passed through the channel, and one end of the wire extends out of the channel and is connected to the motor.

[0022] Such a configuration standardizes the wiring of the grinding machine, which can effectively prevent the damage or deviation of the wires during installation and use, greatly reduce the risk of the wires being pulled and broken, and avoid the problem of frequent machine shutdowns due to line changes, thereby improving production efficiency. In addition, it is convenient and fast to wire, reduces the experience requirements for operators, reduces the difficulty of wiring, and improves operating efficiency. In addition, it is conducive to separating the wires through channels, keeping a certain distance between the wires, avoiding crossing, so as to reduce electromagnetic interference and signal crosstalk. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The included drawings are used to provide a further understanding of the embodiments of the present application, which constitute a part of the specification, are used to illustrate the implementation of the present application, and together with the text description, explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application.

[0024] Figure 1 is an isometric structural diagram of a cable management fixture in some embodiments of the present application;

[0025] Figure 2 is a cross-sectional schematic diagram of a cable management fixture at a channel in some embodiments of the present application;

[0026] Figure 3 is a diagram of the use status of the cable management fixture in some embodiments of the present application;

[0027] Figure 4 It is a usage status diagram of the cable management fixture in other embodiments of the present application.

[0028] in,[ Figures 1-4 middle]:

[0029] 1 - Wire; 2 - Motor; 3 - Turntable; 10 - Fixture body; 11 - Channel; 111 - First hole; 112 - Second hole; 20 - Support member; 21 - Support foot; 22 - First section; 23 - Second section; 24 - Notch; 25 - Fixed column; a - Bend of the wire; α - Included angle; 1A - Bus; 1B - Branch wire; H - Height of the fixture body; W - Maximum width of the wire management fixture. Detailed implementation mode

[0030] The following further elaborates on this application with reference to the attached drawings. According to the following description, the advantages and features of this application will be clearer. It should be noted that the attached drawings are all in a very simplified form and use non-precise scales, only for the purpose of conveniently and clearly assisting in explaining the purpose of the embodiments of this application. It should be recognized that relative terms such as "above", "below", "top", "bottom", "upper" and "lower" shown in the attached drawings can be used to describe the relationships between various elements with respect to each other. These relative terms are intended to cover different orientations of the elements other than the orientations depicted in the attached drawings. For example, if the device is inverted relative to the view in the attached drawing, then an element described as "above" another element will now be below that element. In this article, "a plurality" generally means at least two.

[0031] The core of this application is to provide a wire management fixture to solve the problems of difficult wire routing when adjusting wires by visual inspection and experience within the grinding machine, and the wires are easily pulled and broken due to force. The following is described with reference to the attached drawings.

[0032] Please refer to Figures 1 to 4 As shown, the embodiment of this application provides a wire management fixture for being fixed on a grinding machine, especially inside the grinding machine. Those skilled in the art should know that the grinding machine is mainly used to grind wafers to achieve the planarization of the wafer surface.

[0033] The wire management fixture may include: a fixture body 10, and the shape of the fixture body 10 is not limited. For example, it can be circular or rectangular or various other shapes. Specifically, it can be adjusted and changed according to different usage scenarios. The fixture body 10 is provided with a channel 11, and the channel 11 penetrates through the fixture body 10 along a predetermined direction. The channel 11 can be one or more, and can be specifically adjusted according to the number of motors 2.

[0034] The wire management fixture further includes a support member 20, and the connection manner between the support member 20 and the fixture body 10 is not limited.

[0035] The wire management fixture of this embodiment should have a use state and a non-use state. When the wire management fixture is in the use state, the predetermined direction can be at least one of the vertical direction and the horizontal direction. Preferably, the predetermined direction is the vertical direction, or the predetermined direction includes the vertical direction and the horizontal direction.

[0036] The grinding machine table is provided with a motor 2 and a turntable 3. The motor 2 is installed on the turntable 3, and the turntable 3 can rotate around its own central axis to facilitate adjusting the horizontal position of the motor 2. The motor 2 needs to install a grinding head to drive the grinding head to drive the wafer to rotate for grinding.

[0037] When the wire management fixture of this embodiment is positioned and fixed, it is in the use state. In the use state, the support member 20 is fixed on the turntable 3. At the same time, a wire 1 is threaded through the channel 11, and one end of the wire 1 extending out of the channel 11 can be connected to the motor 2.

[0038] With such a configuration, the wire management fixture of this embodiment can standardize the routing of the wire 1 on the grinding machine table. In this way, on the one hand, it can prevent the wire 1 from being damaged or deviated during installation and use, greatly reducing the risk of the wire 1 being pulled and broken. Furthermore, it can also avoid the problem of frequent machine downtime due to wire replacement, thereby improving production efficiency. On the other hand, it can achieve rapid wiring, reducing the experience requirements for operators, reducing the wiring difficulty, and improving the operation efficiency. On the third hand, it is beneficial to separate the wire 1 through the channel 11, keep a certain distance between the wires 1, and avoid crossing to reduce electromagnetic interference and signal crosstalk.

[0039] It should be noted that the fixing method between the support member 20 and the turntable 3 can be detachable fixing or non-detachable fixing, and the support member 20 can be fixed on the turntable 3 through various measures. The specific fixing method is not limited. For example, optionally, the support member 20 can be fixed to the turntable 3 by screws, snap connections, welding, bonding or other conventional fixing methods. Preferably, the support member 20 is directly fixed on the turntable 3 by screws and nuts on the motor 2. Without the need to disassemble the motor 2, the wire management fixture can be directly fixed by using the screws and nuts originally used to fix the motor 2 when fixing the motor 2 and the turntable 3, which is more convenient to use and does not increase the cost.

[0040] Those skilled in the art should also know that the grinding machine table may further include a control part, and the control part is connected to the motor 2 through the wire 1, that is, one end of the wire 1 is connected to the motor 2 and the other end is connected to the control part. The arrangement of the wire 1 connecting the control part and the motor 2 can be as follows: First, fix the wire management fixture inside the grinding machine table, and then pass the wire 1 through the channel 11 of the wire management fixture. In this way, while restraining the wire 1, the connection between the control part and the motor 2 can be achieved. The control part is an integral part of the grinding machine table and can control operations such as starting, speed, stopping, and steering of the motor 2.

[0041] The orientation of the wire management fixture in the grinding machine table in this embodiment is not restricted. Generally, considering the convenience of installation and wiring, preferably, when the wire management fixture is in use, the channel 11 can be at least oriented towards the vertical direction, so that the wire 1 can be routed at least along the vertical direction. Then, after extending out of the channel 11, the wire 1 can be routed to the motor 2 for connection in a natural way. During the wiring process, the wire 1 should be kept as smooth as possible to avoid being pulled by force.

[0042] In some embodiments, when the wire management fixture is in use, it is fixed inside the grinding machine table and is located below the top entrance of the grinding machine table. The wire 1 can enter the grinding machine table from the top entrance and directly fall onto the surface of the fixture main body 10, then be routed along the surface of the fixture main body 10, and finally turn into the channel 11. In this way, the wire 1 entering the grinding machine table from the top entrance can be directly received, reducing the wiring difficulty. Preferably, the wire management fixture is fixed directly below the top entrance of the grinding machine table. The following is a demonstration.

[0043] Figure 3 and Figure 4 respectively show the states of the wire management fixture in use. It can be seen that the wire 1 dropped from the top of the grinding machine table can directly fall onto the lower fixture main body 10, then be routed along the surface of the fixture main body 10, and then turn into the channel 11. After entering the channel 11, the wire 1 can Figure 4 extend straight out from the bottom surface of the fixture main body 10 as shown, or Figure 3 turn to the horizontal direction and extend out from the side surface of the fixture main body 10 as shown. In either case, finally, after the wire 1 extends out of the channel 11, it is connected to the motor 2 below the fixture main body 10.

[0044] Continuing to refer to Figure 3 and Figure 4 , when the wire 1 is being routed, it should be in a relaxed state at the turning point a instead of a taut state to reduce the force on the wire 1.

[0045] With key reference to Figure 2, in some embodiments, the channel 11 includes a first duct 111 penetratingly provided in a first direction. The first duct 111 can have various structural forms, including cross-sectional shapes, axial cross-sectional profiles, etc. For example, the first duct 111 can be a straight hole, an inclined hole, a curved hole, a bent hole, etc., and the cross-sectional shape includes but is not limited to a circular shape. Preferably, the first duct 111 is a straight hole. In this way, the wire 1 can pass through the first duct 111 for routing. Preferably, when the wire management fixture is in use, the first duct 111 faces the vertical direction, that is, the first direction is the vertical direction.

[0046] In some embodiments, the channel 11 further includes a second duct 112 provided in a second direction. One end of the second duct 112 terminates in the first duct 111, and the other end of the second duct 112 penetrates the fixture body 10, and the second direction is different from the first direction. Preferably, the second direction is perpendicular to the first direction. Similarly, the second duct 112 can also have various structural forms, and the specific forms can refer to the first duct 111. Preferably, the second duct 112 is a straight hole.

[0047] With such a setting, when the wire 1 passes through the first duct 111, it can also turn and pass through the second duct 112. For the specific content of this part, reference can be made to Figure 3 as shown. Specifically: The wire 1 dropped from the top of the grinding machine table first falls down along the trend to the fixture body 10, then routes along the surface of the fixture body 10, further turns and enters the first duct 111, then turns again and enters the second duct 112, and finally extends out from the side surface of the fixture body 10. The existence of the second duct 112 enables the wire 1 to also extend out from the side surface of the fixture body 10, so that the wire 1 can be smoothly extended to the motor 2 for connection, further reducing the stress on the wire 1.

[0048] Or, the channel 11 only includes the first duct 111 penetratingly provided in the first direction. At this time, the wire 1 dropped from the top of the grinding machine table first falls down along the trend to the fixture body 10, then routes along the surface of the fixture body 10, and then turns and enters the first duct 111 until it extends out from the bottom surface of the fixture body 10 and finally connects to the motor 2. For the specific content, reference can be made to Figure 4 .

[0049] In view of the fact that most grinding machine tables are configured with multiple motors 2, the multiple motors 2 are sequentially arranged along the circumferential direction of the turntable 3, and each motor 2 needs to be connected to a path of wire 1. A path of wire 1 can also be referred to as a branch wire 1B.

[0050] To this end, in some embodiments, there are multiple channels 11, and the multiple channels 11 are arranged circumferentially around the central axis of the jig body 10, and can be symmetrically or asymmetrically arranged. When the wire management jig is in use, one wire 1 is threaded through each channel 11, and one end of each wire 1 extending out of the corresponding channel 11 is connected to the corresponding motor 2. In this way, even if there are many wires 1 inside the grinding machine tool, each wire 1 can be reasonably distributed through each channel 11, so that each wire 1 is arranged in an orderly manner inside the machine tool, and thus will not be kinked and entangled during the grinding movement.

[0051] In some embodiments, the wire management jig may further include a bundling structure (not shown). When the wire management jig is in use, all the wires 1 gather above the jig body 10 to form a bus wire 1A (see Figure 4 ). Optionally, the bus wire 1A is bundled and constrained by the bundling structure. Optionally, each wire 1 (see branch wire 1B) is bundled and constrained by the bundling structure. The bundling structure can be various structures such as cable ties, wire buckles, locking tapes, etc. for bundling the wires 1, which can prevent the wires 1 from being wound and knotted during movement.

[0052] The structure of the support member 20 will be further described below.

[0053] The support member 20 can be integrally formed with the jig body 10 or separately formed. When separately formed, the support member 20 and the jig body 10 can be assembled and connected together by a suitable method, such as welding, screw fixation, etc.

[0054] In various embodiments disclosed in the present application, the support member 20 can be any structure capable of supporting the jig body 10 and being fixed to the turntable 3.

[0055] For example, in some embodiments, as Figures 1 to 3 shown, the support member 20 includes a plurality of support feet 21, the plurality of support feet 21 are arranged circumferentially around the central axis of the jig body 10, one end of each support foot 21 is connected to the jig body 10, and the other end of each support foot 21 is used to mount a motor 2 and is fixed on the turntable 3. The shape of the support foot 21 is not limited, including but not limited to the two-segment bending structure shown in the drawings.

[0056] Actually, the support feet 21 can be two, three, four or more, and preferably four support feet 21, which not only simplifies the structure but also makes the structure more stable.

[0057] In some embodiments, the support feet 21 and the turntable 3 are directly fixed by screws and nuts on the motor 2 to achieve the one-time fixation of the three components of the motor 2, the support feet 21 and the turntable 3.

[0058] As Figure 2As shown, the supporting feet 21 can support the fixture main body 10, so that the fixture main body 10 has a certain height H, in order to provide a certain wire routing length and reduce the stress on the wire 1.

[0059] The height H of the fixture main body 10 can be adjusted and changed according to the size of the internal space of the grinding machine. For example, when the wafer is 12 inches, the height H of the fixture main body 10 can be set to not exceed 86 mm. Of course, the actual value is not limited to this. In addition, the maximum width W defined by the supporting feet 21 can also be adjusted and changed according to the size of the internal space of the grinding machine. For example, when the wafer is 12 inches, the maximum width W defined by the supporting feet 21 does not exceed 315.5 mm.

[0060] Optionally, each supporting foot 21 includes a first section 22 arranged obliquely and a second section 23 arranged horizontally. The first section 22 and the second section 23 are connected at the bending position, and the included angle α between the first section 22 and the second section 23 is greater than 90°; in this way, the entire wire management fixture can be stably supported. Here, the first section 22 is the inclined section, and the first section 22 forms an included angle α with the central axis of the fixture main body 10. With such a setting, while the supporting feet 21 provide a supporting function, they can also provide a wiring function. Specifically, a motor 2 is installed at one end of the supporting foot 21 away from the fixture main body 10. In this way, after the wire 1 extends out of the channel 11, it can route along the supporting foot 21 and then connect to the motor 2 smoothly. Preferably, the wire 1 routes along the inclined section on the supporting foot 21 to make the wire 1 smoother. In a specific embodiment, the wire 1 extends out from the side surface of the fixture main body 10 and directly routes along the upper surface of the supporting foot 21 away from the turntable 3.

[0061] When a motor 2 is installed at one end of the supporting foot 21 away from the fixture main body 10, the motor 2 can be directly fixed to the supporting foot 21 and the turntable with screws, and at the same time, the motor 2, the supporting foot 21 and the turntable 3 are fixed. Optionally, a notch 24 is provided at one end of the supporting foot 21 away from the fixture main body 10, and the notch 24 can allow the motor screw to pass through to facilitate the fixing of the motor 2 and the turntable 3.

[0062] Alternatively, as Figure 4 shown, the supporting member 20 can only include a fixing column 25. One end of the fixing column 25 is connected to the fixture main body 10, and the other end of the fixing column 25 is used to be fixed at the center position of the turntable 3. The fixing column 25 is equivalent to a rotating shaft, which can coaxially fix the fixture main body 10 and the turntable 3, so that the entire wire management fixture can rotate together with the turntable 3, and the rotation angle is not limited, such as 0° to 270° or other angles.

[0063] On the other hand, a wire protection structure is preferably arranged in the channel 11. The wire protection structure is, for example, a bearing, a gasket, a wire protection strip, etc., which can be used to protect the wire 1 from frictional damage. Especially at the turning point of the wire 1, the wire protection structure can also fix the wire 1, and can timely adjust the angle of the wire 1, so that the wire 1 is not easily pulled.

[0064] It should also be noted that the wire management fixture of this embodiment can be made of various common materials. Preferably, at least one of the fixture main body 10 and the support member 20 is made of aluminum alloy material, which can reduce the weight of the wire management fixture and facilitate installation and use.

[0065] It can be understood that the wire management fixture of this embodiment can be applied to the production of wafers of various specifications, such as 8-inch wafers, 6-inch wafers or 12-inch wafers, etc.

[0066] In summary, by using the technical solution provided by the embodiment of the present application, the wire management fixture can be conveniently fixed on the grinding machine table, and the angle of the wire management fixture can be adjusted, so that the wire 1 is hardly subjected to any force during the movement stroke. Especially, the wires 1 of each motor 2 are separately and independently fixed, avoiding electromagnetic interference and effectively reducing the scrap rate of products during production. In addition, since the risk of the wire 1 being pulled and broken is greatly reduced, the time wasted due to wire replacement can be significantly reduced, enabling the machine table to return to production faster, and effectively reducing the experience threshold for fixing the wire 1 and the experience requirements for operators.

[0067] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A wire management fixture for being fixed on a grinding machine table, the grinding machine table being provided with a motor and a turntable, the motor being mounted on the turntable, characterized in that, The wire management fixture includes: A fixture main body provided with a channel that penetrates the fixture main body along a predetermined direction; and, A support member connected to the fixture main body; When the wire management fixture is in use, the support member is fixed on the turntable, and a wire is threaded through the channel, and one end of the wire extending out of the channel is connected to the motor.

2. The cable management fixture according to claim 1, wherein, The channel includes a first hole penetrating in a first direction; when the wire management fixture is in use, the first hole faces the vertical direction.

3. The cable management fixture according to claim 2, wherein The channel further includes a second hole provided in a second direction, one end of the second hole terminates in the first hole, and the other end of the second hole penetrates the fixture main body; the second direction is perpendicular to the first direction.

4. The wire management fixture according to claim 1 or 2, characterized in that, A plurality of the motors are provided in the grinding machine table, and the plurality of motors are arranged in sequence along the circumference of the turntable, and each motor is connected to a path of the wire; There are a plurality of the channels, and the plurality of channels are arranged circumferentially around the central axis of the fixture main body; when the wire management fixture is in use, a path of the wire is threaded through each channel.

5. The wire management fixture according to claim 4, characterized in that It further includes: A bundling structure; When the wire management fixture is in use, all the wires gather above the fixture main body to form a bus, and the bus is bundled and constrained by the bundling structure, and / or each path of the wire is bundled and constrained by the bundling structure.

6. The wire management fixture according to claim 1 or 2, characterized in that, When the wire management fixture is in use, it is fixed inside the grinding machine table and is located below the top entrance of the grinding machine table. The wire enters the grinding machine table from the top entrance and falls to the surface of the fixture main body, and then routes along the surface of the fixture main body until it turns and enters the channel.

7. The cable management fixture according to claim 1 or 2, characterized in that The support member includes a fixing column, one end of the fixing column is connected to the fixture main body, and the other end of the fixing column is used to be fixed at the central position of the turntable.

8. The wire management fixture according to claim 1 or 2, wherein The support member includes a plurality of support feet, and the plurality of support feet are arranged circumferentially around the central axis of the fixture main body. One end of each support foot is connected to the fixture main body, and the other end of each support foot is used to mount a motor and is fixed on the turntable.

9. The cable management fixture according to claim 8, wherein Each support foot has an inclined section that forms an angle with the central axis of the fixture main body; when the wire management fixture is in use, the wire extends out of the channel and then routes along the inclined section and is connected to the motor accordingly.

10. The wire management fixture according to claim 1, characterized in that, At least one of the fixture main body and the support member is made of aluminum alloy material, and / or a wire protection structure is provided inside the channel.

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