Liquid supply system and semiconductor cleaning system

Abstract

The utility model provides a liquid supply system and a semiconductor cleaning system, and the liquid supply system comprises a recovery device which comprises a first power mechanism and a waste liquid collection mechanism; one end of the first power mechanism is connected with the waste liquid collecting mechanism, and the other end is connected with a liquid outlet of specified equipment, so that waste liquid is recycled from the specified equipment to the waste liquid collecting mechanism; the main controller is configured to obtain the recovery amount of the recovered waste liquid and determine the replenishment amount of the new liquid according to the recovery amount of the waste liquid; the liquid supply device comprises a second power mechanism and a liquid storage mechanism; one end of the second power mechanism is connected with the liquid storage mechanism, the other end of the second power mechanism is connected with a liquid inlet of the appointed equipment, and the second power mechanism is configured to extract the new liquid from the liquid storage mechanism to the appointed equipment according to the replenishment amount of the new liquid. In the liquid supply process, through cooperative operation of the main controller, the recovery device and the liquid supply device, the liquid supply precision is improved; the efficient cooperative work of the system improves the efficiency of waste liquid recovery and new liquid supply.

Description

Technical Field

[0001] The present application relates to the field of chemical liquid supply for semiconductor wet process equipment, and in particular to a liquid supply system and a semiconductor cleaning system. Background Art

[0002] The supply and recovery of chemical solutions is an important link in the semiconductor processing and manufacturing process, which involves steps such as cleaning, etching and polishing. In the cleaning step, the chemical solutions include organic solvents and deionized water, etc.; in the etching step, the chemical solutions include acidic etching solutions and alkaline etching solutions, etc.; in the polishing step, the chemical solutions include polishing solutions, etc.

[0003] The use of liquid medicine requires precise control and measurement to ensure the stable quality of semiconductor products. In the existing liquid medicine supply and recovery system, the liquid supply device transports the liquid medicine to the working tank of the equipment. After a period of use, part of the liquid medicine in the working tank will be inactivated due to physical contamination or chemical reaction. In this case, the ineffective waste liquid needs to be discharged and recycled in time. After the waste liquid is recovered, new liquid needs to be added to the working tank. However, the liquid supply device has insufficient accuracy when adding new liquid to the working tank, which is prone to over-supply or under-supply. The amount of new liquid cannot be accurately controlled. If the amount of new liquid added is insufficient, it may cause a shortage of liquid medicine in the subsequent processing process, thereby affecting the production progress and quality of semiconductor products. If the amount of new liquid added is excessive, it will lead to more raw material consumption, which will increase production costs.

[0004] Therefore, how to provide a system that can accurately supply liquid is a technical problem that technical personnel in this field urgently need to solve. Utility Model Content

[0005] The present application provides a liquid supply system and a semiconductor cleaning system. During the liquid supply process, the accuracy of the liquid supply is improved through the coordinated operation of a controller, a recovery device and an industrial device in the system.

[0006] A first aspect provides a liquid supply system, comprising:

[0007] The recovery device comprises a first power mechanism and a waste liquid collection mechanism; one end of the first power mechanism is connected to the waste liquid collection mechanism, and the other end is connected to the liquid outlet of the designated device, and is configured to recover waste liquid from the designated device to the waste liquid collection mechanism;

[0008] A main controller is configured to obtain the amount of recovered waste liquid and determine the amount of new liquid supplied according to the amount of recovered waste liquid;

[0009] The liquid supply device includes a second power mechanism and a liquid storage mechanism; one end of the second power mechanism is connected to the liquid storage mechanism, and the other end is connected to the liquid inlet of the designated device, and is configured to extract new liquid from the liquid storage mechanism to the designated device according to the supply amount of new liquid.

[0010] Specifically, the liquid supply system further includes:

[0011] A plurality of detection devices, some of which are disposed at the bottom of the waste liquid collection mechanism and configured to detect the weight of the recycled waste liquid, and the other part is disposed at the bottom of the liquid storage mechanism and configured to detect the weight of the replenished new liquid.

[0012] Preferably, the detection device includes:

[0013] A mounting base, including a base and a weighing seat disposed on the base;

[0014] A weighing plate configured to place the waste liquid collection mechanism or the liquid storage mechanism;

[0015] A weighing sensor, one end of which is connected to the weighing plate and the other end is connected to the weighing seat, and is configured to sense the weight change of the weighed object;

[0016] A protective cover, which surrounds the periphery of the weighing sensor and is configured to protect the weighing sensor.

[0017] Preferably, the recycling device further includes:

[0018] A first adjustment mechanism, which is disposed between the first power mechanism and the designated device and is configured to adjust the flow rate of the waste liquid when it flows out of the designated device.

[0019] Preferably, the waste liquid collection mechanism is in a hollow cylindrical shape;

[0020] A first power mechanism, which is disposed above the waste liquid collection mechanism along the axial direction of the waste liquid collection mechanism.

[0021] Preferably, the liquid supply device further includes:

[0022] A second adjustment mechanism, which is disposed between the second power mechanism and the designated device and is configured to adjust the flow rate of the liquid before it flows into the designated device.

[0023] Preferably, the liquid storage mechanism is in a hollow cylindrical shape and there are at least two of them. Different liquid storage mechanisms are configured to store different types of liquids;

[0024] There are at least two second power mechanisms, and each second power mechanism is connected to one of the liquid storage mechanisms and is disposed above the liquid storage mechanism along the axial direction of the liquid storage mechanism.

[0025] Specifically, the liquid supply system further includes:

[0026] A box body, including a top plate, side plates and a bottom plate. A first accommodation space is defined between the top plate, the side plates and the bottom plate; the side plates extend in a direction away from the first accommodation space to form an enclosing plate, and a second accommodation space is defined between the enclosing plate and the side plates;

[0027] One of the recovery device and the liquid supply device is disposed in the first accommodation space, and the other is disposed in the second accommodation space.

[0028] Optionally, the liquid supply system further includes a negative pressure exhaust device; an opening is provided on the top plate of the box body, and the opening is configured to install the negative pressure exhaust device.

[0029] Optionally, the bottom plate of the box body is provided with feet, which are configured to adjust the distance between the box body and the plane and move the box body along the plane when the box body is placed on the plane.

[0030] In a second aspect, a semiconductor cleaning system is provided, including:

[0031] A wet equipment;

[0032] The liquid supply system provided in the first aspect;

[0033] The liquid supply system is connected to the wet equipment.

[0034] According to the embodiments provided in the present application, the following technical effects are disclosed:

[0035] The present application provides a liquid supply system and a semiconductor cleaning system. Among them, the liquid supply system includes: a recovery device, including a first power mechanism and a waste liquid collection mechanism; one end of the first power mechanism is connected to the waste liquid collection mechanism, and the other end is connected to the liquid outlet of the designated equipment, and is configured to recover the waste liquid from the designated equipment to the waste liquid collection mechanism; a main controller, configured to obtain the recovery amount of the recovered waste liquid and determine the replenishment amount of the new liquid according to the recovery amount of the waste liquid; a liquid supply device, including a second power mechanism and a liquid storage mechanism; one end of the second power mechanism is connected to the liquid storage mechanism, and the other end is connected to the liquid inlet of the designated equipment, and is configured to draw the new liquid from the liquid storage mechanism to the designated equipment according to the replenishment amount of the new liquid. During the liquid supply process, through the coordinated operation of the main controller, the recovery device and the liquid supply device, the improvement of the liquid supply accuracy is achieved, the efficient collaborative work of the system is realized, the efficiency of waste liquid recovery and new liquid replenishment is improved, and the processing time is reduced. Description of the Drawings

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0037] Figure 1 is one of the schematic diagrams of the liquid supply system provided by the embodiments of the present application;

[0038] Figure 2 is the second schematic diagram of the liquid supply system provided by the embodiments of the present application;

[0039] Figure 3 It is the third schematic diagram of the liquid supply system provided by the embodiment of the present application;

[0040] Figure 4 It is the schematic diagram of the detection device provided by the embodiment of the present application;

[0041] Figure 5 It is one of the perspective views of the liquid supply system provided by the embodiment of the present application;

[0042] Figure 6 It is the second perspective view of the liquid supply device provided by the embodiment of the present application.

[0043] Description of the drawings: 10. Box body; 11. Top plate; 12. Side plate; 13. Bottom plate; 14. Enclosing plate; 15. Negative pressure exhaust device; 16. Floor feet; 17. Self-locking door panel; 18. Central control screen; 20. First accommodation space; 30. Second accommodation space; 40. Detection device; 401. Base; 402. Weighing seat; 403. Weighing plate; 404. Weighing sensor; 405. Protective cover; 100. Waste liquid collection mechanism; 110. First power mechanism; 120. First adjustment mechanism; 130. Third adjustment mechanism; 200. Liquid storage mechanism; 210. Second power mechanism; 220. Second adjustment mechanism; 230. Fourth adjustment mechanism; 240. Flow monitoring mechanism. Detailed implementation manners

[0044] The following describes some embodiments of the present application with reference to the drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present application and are not intended to limit the protection scope of the present application.

[0045] As described in the background art, after the waste liquid is recycled, it is necessary to replenish new liquid into the working tank. However, when the liquid supply device replenishes new liquid into the working tank, there are problems of insufficient accuracy, easy over-supplying or under-supplying, and the replenishment amount of new liquid cannot be accurately controlled. If the replenished amount of new liquid is insufficient, it may lead to a shortage of liquid medicine in the subsequent processing process, thereby affecting the production progress and quality of semiconductor products. If the replenished amount of new liquid is excessive, it will cause more raw material consumption and increase the production cost.

[0046] To solve one or more of the above problems, the core of the present application is to provide a liquid supply system and a semiconductor cleaning system, so that the replenishment amount of new liquid conforms to the recovery amount of waste liquid to improve the accuracy of liquid supply.

[0047] Embodiment 1

[0048] Embodiment 1 of the present application provides a liquid supply system, including: a main controller, a recycling device, a liquid supply device, a detection device, and a box body; there are several accommodation spaces in the box body, and each device and the main controller are arranged in the corresponding accommodation space; the main controller, as the core of the system, is responsible for detecting the operating states of each device and analyzing and processing the data information provided by each device to control the corresponding device to perform corresponding operations; the recycling device is responsible for recycling waste liquid from a specified device; the liquid supply device is responsible for supplying new liquid to the specified device; the detection device is responsible for detecting the amount of waste liquid recycled by the recycling device and the amount of new liquid supplied by the liquid supply device.

[0049] Specifically, as Figures 1 to 3 shown, it includes: a box body 10, including a top plate 11, side plates 12, and a bottom plate 13. A first accommodation space 20 is defined among the top plate 11, side plates 12, and bottom plate 13; the side plate 12 extends in a direction away from the first accommodation space 20 to form an enclosing plate 14, and a second accommodation space 30 is defined between the enclosing plate 14 and the side plate 12; one of the recycling device and the liquid supply device is arranged in the first accommodation space 20, and the other is arranged in the second accommodation space 30.

[0050] In some embodiments of the present application, the liquid supply device is arranged in the first accommodation space 20, and the recycling device is arranged in the second accommodation space 30.

[0051] Among them, the design of the box body 10 improves the space utilization rate, reduces the floor area, and simplifies the device layout.

[0052] In some embodiments of the present application, as Figure 1 shown, the system further includes: a negative pressure exhaust device 15; an opening is provided on the top plate 11 of the box body 10, configured to install the negative pressure exhaust device 15 to maintain the stability of the environment inside the box body 10 and prevent the accumulation of harmful gases.

[0053] In some embodiments of the present application, as Figures 1 to 3 shown, the bottom plate 13 of the box body 10 is provided with feet 16, configured to adjust the distance between the box body and the plane and move the box body along the plane when the box body is placed on a plane, so as to improve the flexibility of the box body 10.

[0054] In some embodiments of the present application, as Figure 1 and Figure 2 shown, the side plate 12 of the box body 10 is provided with a self-locking door panel 17, configured to be connected to one side of the side plate 12 through a hinge, which is convenient for opening and closing the door, facilitating the maintenance and inspection of the internal liquid supply device, and ensuring the safety of operations at the same time.

[0055] In some embodiments of the present application, as Figure 1 and Figure 2As shown, the side plate of the box body 10 is provided with a central control screen 18, configured to display the current operating state of the liquid supply system, receive manual instructions and transmit them to the control background to achieve human-machine interaction.

[0056] Specifically, as Figure 1 shown, the recovery device includes a first power mechanism 110 and a waste liquid collection mechanism 100; one end of the first power mechanism 110 is connected to the waste liquid collection mechanism 100, and the other end is connected to the liquid outlet of the designated device, configured to recover waste liquid from the designated device to the waste liquid collection mechanism 100; the main controller is configured to obtain the recovery amount of the recovered waste liquid and determine the replenishment amount of the new liquid according to the recovery amount of the waste liquid; wherein, the difference between the recovery amount of the waste liquid and the replenishment amount of the new liquid conforms to a preset interval; the liquid supply device includes a second power mechanism 210 and a liquid storage mechanism 200; one end of the second power mechanism 210 is connected to the liquid storage mechanism 200, and the other end is connected to the liquid inlet of the designated device, configured to draw new liquid from the liquid storage mechanism 200 to the designated device according to the replenishment amount of the new liquid.

[0057] Among them, the recovery amount of the waste liquid and the replenishment amount of the new liquid can be expressed in weight or volume. Considering that there may be some errors between the recovery amount and the replenishment amount in the actual industrial production process, this system sets a preset range interval. Only when the difference between the recovery amount and the replenishment amount conforms to this range can it be ensured that there is enough new liquid for the equipment to use.

[0058] In some embodiments of the present application, grams (g) are used as the unit of the preset liquid volume. The main controller is respectively connected to the recovery device and the liquid supply device; first, the first power mechanism 110 recovers a first preset amount x of waste liquid from the equipment to the waste liquid collection mechanism 100; then, the main controller obtains the first preset amount x, calculates a second preset amount y according to the first preset amount x using a preset mathematical model or proportional algorithm, and transmits the second preset amount y to the second power mechanism 210 in the form of a control signal; then, the second power mechanism 210 receives the control signal and draws a second preset amount y of new liquid and transports it to the equipment. In this way, during the liquid supply process, through the coordinated operation of the main controller, the recovery device and the liquid supply device, the improvement of the liquid supply accuracy, the efficient collaborative work of the system, the improvement of the waste liquid recovery and new liquid replenishment efficiency, and the reduction of the processing time are achieved.

[0059] In some embodiments of the present application, x + m ≥ y ≥ x - m; wherein, [-m, m] is the preset interval, and the value of m can be set by the staff. To improve the liquid supply accuracy, the value of m can be appropriately reduced to make the first preset amount x and the second preset amount y closer, so as to meet the requirements of the system for precise liquid supply.

[0060] It should be noted that for the technology where the main controller obtains the recovery amount of the recycled waste liquid and determines the replenishment amount of the new liquid based on the recovery amount of the waste liquid, those skilled in the art can foresee it without much creative effort and thus no creative explanation is provided here.

[0061] Embodiment 2

[0062] Based on Embodiment 1, Embodiment 2 of the present application provides the selection of the detection device and related structures.

[0063] In an alternative embodiment of the present application, there are several detection devices, including several flow meters. Some are arranged on the connecting pipes between the recovery device and the equipment and are configured to obtain the liquid volume flow rate during the execution of the recovery operation. The other part is arranged on the connecting pipes between the liquid supply device and the equipment and is configured to obtain the liquid volume flow rate during the execution of the liquid supply operation. The main controller calculates the recovered liquid amount and the replenished liquid amount based on the two obtained liquid volume flow rates.

[0064] In a specific embodiment of the present application, as Figures 1 to 3 shown, several detection devices 40 are partially arranged at the bottom of the waste liquid collection mechanism 100 and are configured to detect the weight of the recycled waste liquid, and the other part is arranged at the bottom of the liquid storage mechanism 200 and is configured to detect the weight of the replenished new liquid.

[0065] In a preferred embodiment of the present application, as Figures 1 to 4 shown, the detection device 40 includes: a mounting base, including a base 401 and a weighing base 402 provided on the base; a weighing plate 403 configured to place the weighed object; a weighing sensor 404, one end of which is connected to the weighing plate 403 and the other end is connected to the weighing base 402, and is configured to sense the weight change of the weighed object; a protective cover 405 surrounding the weighing sensor 404 and configured to protect the weighing sensor 404.

[0066] Among them, the weight of the weighed object is transmitted to the weighing sensor 404 through the weighing plate 403. The weighing sensor 404 includes at least one elastic element, and the elastic element can be a spring or a bellows and is configured to deform when stressed. The deformation of the elastic element causes changes in the resistance, capacitance or other electrical parameters inside the weighing sensor 404, thereby generating an electrical signal transmitted to the main controller. The main controller processes the received electrical signal and then determines the value of the weight of the weighed object. The protective cover 405 can protect the weighing sensor 404 from external dust and moisture interference to ensure the safety of the weighing sensor 404.

[0067] In a specific embodiment of the present application, the weighed object is the waste liquid collection mechanism 100 or the liquid storage mechanism 200.

[0068] Embodiment 3

[0069] Based on Embodiment 2 of the present application, Embodiment 3 provides the composition and operation process of the recovery device and the liquid supply device.

[0070] Specifically, as Figures 1 to 5 shown, the recovery device further includes: a first adjustment mechanism 120, disposed between the first power mechanism 110 and the designated device, configured to adjust the flow rate of the waste liquid when flowing out of the designated device.

[0071] In a preferred embodiment of the present application, as Figures 1 to 5 shown, the waste liquid collection mechanism 100 is in a hollow cylindrical shape; the first power mechanism 110 is disposed above the waste liquid collection mechanism 100 along the axial direction of the waste liquid collection mechanism 100.

[0072] Among them, the vertical arrangement of the first power mechanism 110 and the waste liquid collection mechanism 100 effectively utilizes the range of the second accommodation space, making the layout more compact. The combined use of the first power mechanism 110 and the first adjustment mechanism 120 ensures the smoothness of the waste liquid recovery process and improves the recovery efficiency.

[0073] In an alternative embodiment of the present application, the first power mechanism 110 may adopt a recovery metering pump, the waste liquid collection mechanism 100 may adopt a waste liquid bucket, and the first adjustment mechanism 120 may adopt a waste liquid suction pneumatic valve.

[0074] In some embodiments of the present application, the detection device adopts the structure of the aforementioned preferred embodiment; when the waste liquid recovery process starts, the main controller sends a control instruction to the recovery metering pump and the waste liquid suction pneumatic valve to open them, and the waste liquid in the device flows through the waste liquid suction pneumatic valve and is pumped into the waste liquid collection bucket by the recovery metering pump; the waste liquid collection bucket is placed on the weighing plate of the detection device, and the weighing sensor continuously detects the weight change of the waste liquid collection bucket. When the waste liquid has been completely pumped from the device to the waste liquid collection bucket, the main controller controls the recovery metering pump and the waste liquid suction pneumatic valve to stop working, and the weighing sensor feeds back the current weight of the waste liquid collection bucket to the main controller. The main controller calculates the recovery amount of the waste liquid based on the current weight and the weight before the pumping operation; among them, the recovery amount of the waste liquid at this time is the first preset amount.

[0075] In an alternative embodiment of the present application, as Figure 5 shown, the recovery device further includes: a third adjustment mechanism 130, disposed between the waste liquid collection mechanism 100 and the backend recovery system. When the amount of waste liquid in the waste liquid collection mechanism 100 reaches a preset value, the main controller controls the third adjustment mechanism 130 to open, and discharges the waste liquid in the waste liquid collection mechanism 100 to the backend recovery system for further recycling, improving the automation degree of waste liquid treatment.

[0076] In an alternative embodiment of the present application, the third adjustment mechanism 130 may adopt a waste liquid discharge pneumatic valve.

[0077] Specifically, as Figures 1 to 4 , Figure 6 shown, the liquid supply device further includes: a second adjustment mechanism 220, disposed between the second power mechanism 210 and the designated device, and configured to adjust the flow rate of the liquid before flowing into the designated device.

[0078] In a preferred embodiment of the present application, as Figures 1 to 4 , Figure 6 shown, the liquid storage mechanism 200 is in a hollow cylindrical shape and has at least two. Different liquid storage mechanisms 200 are configured to store different types of liquids; the second power mechanism 210 has at least two, and each second power mechanism 210 is connected to one of the liquid storage mechanisms 200 and is disposed above the liquid storage mechanism 200 along the axial direction of the liquid storage mechanism 200.

[0079] Among them, the vertical arrangement of the second power mechanism 210 and the liquid storage mechanism 200 effectively utilizes the range of the first accommodation space, making the layout more compact. The combined use of the second power mechanism 210 and the second adjustment mechanism 220 ensures the smoothness of the liquid supply process and improves the liquid supply efficiency.

[0080] In an alternative embodiment of the present application, the second power mechanism 210 may adopt a liquid supply metering pump, the liquid storage mechanism 200 may adopt a liquid storage barrel, and the second adjustment mechanism 220 may adopt a liquid supply discharge pneumatic valve.

[0081] In some embodiments of the present application, there are at least three liquid storage barrels, and different types of liquids are stored in different liquid storage barrels.

[0082] In some embodiments of the present application, the liquid storage barrel is a liquid medicine barrel, and the liquid stored therein is various types of liquid medicines.

[0083] Following the embodiment of the foregoing recovery process, the present application provides an embodiment of the liquid supply process. The liquid supply system includes a liquid preparation tank, and the detection device adopts the structure of the foregoing preferred embodiment; when the new liquid supply process starts, the main controller sends a control instruction to the liquid supply metering pump and the liquid supply discharge pneumatic valve to open them. The liquid medicines in different liquid medicine barrels are pumped by the liquid supply metering pumps connected thereto and flow into the liquid preparation tank after passing through the liquid supply discharge pneumatic valve. The liquid medicines with different components are proportioned to form the required new liquid, and then are pumped into the device for the device to use.

[0084] In an alternative embodiment of the present application, as Figure 3 shown, the liquid supply device further includes: a fourth adjustment mechanism 230, disposed between the second power mechanism 210 and the liquid storage mechanism 200, and configured to adjust the flow rate of the liquid when flowing out of the liquid storage mechanism 200, increasing the control accuracy of the system.

[0085] In an alternative embodiment of the present application, the fourth adjustment mechanism 230 may employ a pneumatic diaphragm valve.

[0086] In an alternative embodiment of the present application, as Figure 6 shown, the liquid supply device further includes: a flow rate monitoring mechanism 240, disposed between the second power mechanism 210 and the designated device, configured to display the flow rate when the liquid is pumped out from the second power mechanism 210, providing intuitive feedback to the staff.

[0087] In an alternative embodiment of the present application, the flow rate monitoring mechanism 240 may employ a digital display flow meter.

[0088] Embodiment 4

[0089] Embodiment 4 of the present application provides different setting methods for the controllers of the liquid supply system.

[0090] In some embodiments of the present application, the recycling device includes a recycling controller, which is respectively connected to the recycling metering pump, the waste liquid suction pneumatic valve, and the waste liquid discharge pneumatic valve, and is configured to control the opening and closing of the aforementioned devices; the liquid supply device includes a liquid supply controller, which is respectively connected to the recycling controller, the liquid supply metering pump, the liquid supply discharge pneumatic valve, and the pneumatic diaphragm valve, and is configured to receive the relevant command signals from the recycling controller and control the opening and closing of the aforementioned devices.

[0091] Among them, the setting of the recycling controller ensures the stability of the waste liquid recycling process, and the setting of the liquid supply controller ensures the stability of the new liquid supply process. By establishing independent controllers for the two devices respectively, the liquid supply system is modularized, enabling each device to operate independently and optimize its performance. After the recycling device extracts a first preset amount of waste liquid, the recycling controller transmits the first preset amount to the liquid supply controller in the form of a signal. After analyzing the signal, the liquid supply controller obtains the first preset amount and calculates a second preset amount based on the first preset amount, controlling the liquid supply device to supply a second preset amount of new liquid to the designated device, and feeding back a signal to the recycling controller after the supply operation is completed to indicate that the supply operation has been executed. In this way, both devices have their own controllers for controlling the operation of a single device, and the two controllers can interact with each other, improving the flexibility of control.

[0092] In some embodiments of the present application, the liquid supply system includes a main controller, which is respectively connected to the recycling device and the liquid supply device. Specifically, the main controller controls the start of the recycling device. After the recycling device extracts a first preset amount of waste liquid, the main controller calculates a second preset amount based on the first preset amount and controls the liquid supply device to start to transport a second preset amount of new liquid to the device.

[0093] Among them, the main controller, as the core, uniformly controls the recycling process and the liquid supply process, ensuring the stability and coordination of the system operation macroscopically.

[0094] In some embodiments of the present application, the liquid supply system includes an analysis device for measuring the composition and concentration information of chemical substances in a liquid, providing data support for accurate proportioning.

[0095] In some embodiments of the present application, a liquid component analyzer is used to detect the waste liquid, and it is found that its composition includes Compound A, Compound B, and Compound C, with a ratio of p1:p2:p3. Similarly, the new liquid should also be composed of Compound A, Compound B, and Compound C and maintain a similar or exactly the same ratio. The system determines the mass of each component in the new liquid based on the recovery amount of the waste liquid and according to the aforementioned data.

[0096] In a preferred embodiment of the present application, the main controller is arranged in a direction away from the liquid supply device and is configured to control different liquid supply metering pumps to extract a preset amount of liquid from the liquid storage barrels connected to them respectively.

[0097] Among them, since the liquid is composed of multiple compounds, the main controller needs to simultaneously control different liquid supply metering pumps to extract liquid from the liquid storage barrels connected to them respectively, so as to provide liquid medicine raw materials for subsequent proportioning and mixing operations.

[0098] Embodiment 5

[0099] Embodiment 5 of the present application provides a semiconductor cleaning system, including:

[0100] A wet process device, and the liquid supply system provided in Embodiments 1 to 4; the wet process device is connected to the liquid supply system.

[0101] In some embodiments of the present application, the wet process device includes an etching machine with an etching tank. The etching tank contains an etching solution for removing the oxide layer or other impurities on the silicon wafer. The liquid supply system is connected to the etching tank. When a part of the etching solution in the etching tank becomes inactivated after use, the inactivated etching solution is recovered from the etching tank through a recovery device. The detection device detects the amount of the recovered etching solution, and the analysis device analyzes the composition of the inactivated etching solution to determine the composition and ratio of the new liquid to be supplemented. After the controller calculates the replenishment amount of the new etching solution, it controls the liquid supply device to extract different liquid medicine proportions according to the replenishment amount of the new etching solution and generate a new liquid to be transmitted to the etching tank. The whole process is efficient and accurate, requiring no or only a small amount of manual intervention, improving the industrial production efficiency.

[0102] The technical solutions provided by the present application have been introduced in detail above. Specific examples are used in this article to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the method and its core idea of the present application; at the same time, for those of ordinary skill in the art, there will be changes in the specific implementation manner and application scope according to the idea of the present application. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A liquid supply system, characterized in that, Comprising: A recycling device, including a first power mechanism and a waste liquid collection mechanism; One end of the first power mechanism is connected to the waste liquid collection mechanism, and the other end is connected to the liquid outlet of a specified device, configured to recycle waste liquid from the specified device to the waste liquid collection mechanism; A main controller, configured to obtain the recycling amount of the recycled waste liquid and determine the replenishment amount of fresh liquid according to the recycling amount of the waste liquid; wherein, the difference between the recycling amount of the waste liquid and the replenishment amount of the fresh liquid conforms to a preset range; A liquid supply device, including a second power mechanism and a liquid storage mechanism; one end of the second power mechanism is connected to the liquid storage mechanism, and the other end is connected to the liquid inlet of the specified device, configured to draw fresh liquid from the liquid storage mechanism to the specified device according to the replenishment amount of the fresh liquid.

2. The liquid supply system according to claim 1, wherein Further comprising: A plurality of detection devices, some are arranged at the bottom of the waste liquid collection mechanism, configured to detect the weight of the recycled waste liquid, and some are arranged at the bottom of the liquid storage mechanism, configured to detect the weight of the replenished fresh liquid.

3. The liquid supply system according to claim 2, wherein, The detection device includes: A mounting seat, including a base and a weighing seat arranged on the base; A weighing plate, configured to place the waste liquid collection mechanism or the liquid storage mechanism; A weighing sensor, one end of which is connected to the weighing plate and the other end is connected to the weighing seat, configured to sense the weight change of the weighed object; A protective cover, surrounding the periphery of the weighing sensor, configured to protect the weighing sensor.

4. The liquid supply system according to claim 1, characterized in that, The recycling device further includes: A first adjustment mechanism, arranged between the first power mechanism and the specified device, configured to adjust the flow rate of the waste liquid when flowing out of the specified device.

5. The liquid supply system according to claim 4, wherein The waste liquid collection mechanism is in a hollow cylindrical shape; The first power mechanism is arranged above the waste liquid collection mechanism along the axial direction of the waste liquid collection mechanism.

6. The liquid supply system according to claim 1, wherein The liquid supply device further includes: A second adjustment mechanism, arranged between the second power mechanism and the specified device, configured to adjust the flow rate of the liquid before flowing into the specified device.

7. The liquid supply system according to claim 6, wherein The liquid storage mechanism is in a hollow cylindrical shape and has at least two, and different liquid storage mechanisms are configured to store different types of liquids; The second power mechanism has at least two, and each second power mechanism is connected to one of the liquid storage mechanisms and is arranged above the liquid storage mechanism along the axial direction of the liquid storage mechanism.

8. The liquid supply system according to claim 1, wherein Further comprising: A box body, including a top plate, side plates and a bottom plate, and a first accommodation space is defined between the top plate, the side plates and the bottom plate; The side plates extend in a direction away from the first accommodation space to form an enclosing plate, and a second accommodation space is defined between the enclosing plate and the side plates; One of the recycling device and the liquid supply device is arranged in the first accommodation space, and the other is arranged in the second accommodation space.

9. The liquid supply system according to claim 8, wherein The bottom plate of the box body is provided with feet, configured to adjust the distance between the box body and the plane and move the box body along the plane when the box body is placed on the plane; Or, The liquid supply system further includes: a negative pressure exhaust device; The top plate of the box body is provided with an opening, and the opening is configured to install the negative pressure exhaust device.

10. A semiconductor cleaning system, characterized in that, Including: Wet process equipment; The liquid supply system according to any one of claims 1 to 9; The liquid supply system is connected to the wet process equipment.

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