Auxiliary tool for semiconductor equipment part machining

Abstract

The utility model discloses an auxiliary tool for semiconductor equipment part processing, which comprises a moving rod, one end of the moving rod is rotatably connected with a connecting frame, the bottom of the connecting frame is fixedly connected with an air injection pipe, the bottom of the outer wall of the circumference of the air injection pipe is provided with a plurality of nozzles, and the top of the moving rod is provided with a swing assembly. The swing assembly comprises a limiting groove formed in one side of the outer wall of one end of a moving rod, a rack is slidably connected into the limiting groove, a gear ring is rotatably connected to the outer wall of one end of the moving rod, the gear ring is meshed with the rack, the gear ring fixedly sleeves the rotating shaft of the connecting frame, and a first motor is fixedly installed on the outer wall of the top of the moving rod. The swing assembly is arranged, so that the air spraying pipe can continuously swing up and down, then it is guaranteed that the direction of airflow changes all the time, cleaning liquid in gaps of parts can be blown away at the moment, and the drying efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cleaning, in particular to an auxiliary tooling for processing semiconductor equipment parts. Background Technique

[0002] During the use of semiconductor equipment parts, it is necessary to regularly clean the semiconductor equipment parts. Maintaining the cleanliness of the parts can effectively maintain the performance of the semiconductor equipment parts and extend the service life of the equipment.

[0003] After retrieval, a utility model with the Chinese patent publication number CN220942106U discloses a cleaning table for semiconductor equipment parts, which relates to the technical field of semiconductor cleaning, specifically a cleaning table for semiconductor equipment parts, including a bottom plate. It is characterized in that: there is a liquid medicine holding bucket on the upper surface of the bottom plate, a motor is installed on the upper surface of the bottom plate, a long shaft is arranged at the output end of the motor, a connecting plate is arranged on the outer surface of the long shaft, and a tray is installed at one end of the connecting plate.

[0004] The above device realizes the effect of drying parts through a drying lamp and a gas spray cavity. However, the direction of the air flow is fixed. Under the obstruction of the parts, this part of the cleaning liquid will not be able to drip to the bottom. Therefore, if you want to completely dry it, it will take a longer time, affecting the drying efficiency. Content of the Utility Model

[0005] The purpose of the utility model is to provide an auxiliary tooling for processing semiconductor equipment parts to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: an auxiliary tooling for processing semiconductor equipment parts, including a moving rod, characterized in that: one end of the moving rod is rotatably connected to a connecting frame, the bottom of the connecting frame is fixedly connected to an air spray pipe, and a plurality of nozzles are arranged at the bottom of the circumferential outer wall of the air spray pipe. A swing assembly is installed on the top of the moving rod. The swing assembly includes a limit groove opened on one side of the outer wall of one end of the moving rod. A rack is slidably connected in the limit groove. A toothed ring is rotatably connected to the outer wall of one end of the moving rod. The toothed ring meshes with the rack, and the toothed ring is fixedly sleeved outside the rotating shaft of the connecting frame.

[0007] As a further preference of this technical solution, a motor I is fixedly installed on the outer wall of the top of the moving rod. The output end of the motor I is fixedly connected to a driving rod. One end of the driving rod is rotatably connected to a connecting rod. One end of the connecting rod is rotatably connected to the top of the rack.

[0008] The air jet pipe can swing up and down continuously, so as to ensure that the direction of the air flow always changes. At this time, the cleaning liquid in the part clearance will also be blown away, greatly improving the cleaning effect. Start the motor 1 at the top of the moving rod. The motor 1 drives the driving rod to rotate. Since the rack is slidably connected in the limiting groove, the position of the rack can only be translated. The driving rod can drive the rack to move up and down reciprocally through the connecting rod rotatably connected thereto. The rack drives the toothed ring to reciprocally deflect forward and backward through meshing. The toothed ring can drive the air jet pipe to swing left and right through the connecting frame. At this time, the air flow ejected by it will also change continuously.

[0009] As a further optimization of this technical solution, a moving component is installed at one end of the moving rod. The moving component includes a reciprocating lead screw threadedly connected to one end of the moving rod. A slider adapted to the reciprocating lead screw is arranged inside the moving rod. Two limiting rods are slidably inserted at one end of the moving rod. The reciprocating lead screw is respectively located on both sides of the two limiting rods. The same mounting frame is fixedly sleeved outside the two limiting rods. The two ends of the reciprocating lead screw are respectively rotatably connected to the inner walls of both sides of the mounting frame.

[0010] As a further optimization of this technical solution, a motor 2 is fixedly installed on the outer wall of one side of the mounting frame. The output end of the motor 2 is coaxially fixed to one end of the reciprocating lead screw.

[0011] By starting the motor 2 to drive the reciprocating lead screw to rotate, since the moving rod is restricted by the two limiting rods and can only translate, the reciprocating lead screw can drive the moving rod to reciprocate along the limiting rods. Furthermore, the air jet pipe installed in the moving rod will also move synchronously, so as to ensure that the parts can be blown by strong air flow in all directions.

[0012] As a further optimization of this technical solution, a plurality of hinges are detachably installed at the bottom of the outer wall of one side of the mounting frame.

[0013] As a further optimization of this technical solution, an air inlet pipe is fixedly inserted at the top of the circumferential outer wall of the air jet pipe.

[0014] As a further optimization of this technical solution, the air inlet pipe is made of a hose material.

[0015] The utility model provides an auxiliary tooling for semiconductor equipment part processing, which has the following beneficial effects:

[0016] (1) By providing a swing assembly in the present utility model, the air jet pipe can continuously swing up and down, thereby ensuring that the direction of the air flow always changes. At this time, the cleaning liquid in the part gap will also be blown away, greatly improving the drying efficiency. Start the motor 1 at the top of the moving rod. The motor 1 drives the driving rod to rotate. Since the rack is slidably connected in the limiting groove, the position of the rack can only move horizontally. The driving rod can drive the rack to move up and down reciprocally through the connecting rod rotatably connected thereto. The rack drives the toothed ring to reciprocally rotate forward and backward through meshing, and the toothed ring can drive the air jet pipe to swing left and right through the connecting frame. At this time, the air flow ejected therefrom will also continuously change.

[0017] (2) By providing a moving assembly in the present utility model, start the motor 2 to drive the reciprocating lead screw to rotate. Since the moving rod is restricted by two limiting rods and can only move horizontally, the reciprocating lead screw can drive the moving rod to move reciprocally along the limiting rods. Furthermore, the air jet pipe installed in the moving rod will also move synchronously, thereby ensuring that the parts can be blown by strong air flow in all directions. Brief Description of the Drawings

[0018] Figure 1 is the schematic structural diagram of the whole of the present utility model from the first perspective;

[0019] Figure 2 is the schematic structural diagram of the whole of the present utility model from the second perspective;

[0020] Figure 3 is of the present utility model Figure 1 the enlarged structural diagram at A in;

[0021] Figure 4 is of the present utility model Figure 2 the enlarged structural diagram at B in;

[0022] In the figure: 1, moving rod; 2, mounting frame; 3, air jet pipe; 4, air inlet pipe; 5, hinge; 6, swing assembly; 7, moving assembly; 601, limiting groove; 602, rack; 603, toothed ring; 604, connecting rod; 605, driving rod; 606, motor 1; 701, reciprocating lead screw; 702, limiting rod; 703, motor 2. Detailed Embodiment

[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model.

[0024] The present utility model provides a technical solution: as Figure 1As shown in FIGS. 4, in this embodiment, an auxiliary tooling for processing semiconductor device parts includes a moving rod 1, characterized in that: one end of the moving rod 1 is rotatably connected to a connecting frame, the bottom of the connecting frame is fixedly connected to an air jet pipe 3, and a plurality of nozzles are arranged at the bottom of the circumferential outer wall of the air jet pipe 3. A swing assembly 6 is installed at the top of the moving rod 1. The swing assembly 6 includes a limit groove 601 formed on one side of the outer wall of one end of the moving rod 1. A rack 602 is slidably connected in the limit groove 601. A toothed ring 603 is rotatably connected to the outer wall of one end of the moving rod 1. The toothed ring 603 meshes with the rack 602, and the toothed ring 603 is fixedly sleeved outside the rotating shaft of the connecting frame.

[0025] A first motor 606 is fixedly installed on the outer wall of the top of the moving rod 1. The output end of the first motor 606 is fixedly connected to a driving rod 605. One end of the driving rod 605 is rotatably connected to a connecting rod 604, and one end of the connecting rod 604 is rotatably connected to the top of the rack 602.

[0026] Start the first motor 606 at the top of the moving rod 1. The first motor 606 drives the driving rod 605 to rotate. Since the rack 602 is slidably connected in the limit groove 601, the position of the rack 602 can only move horizontally. The driving rod 605 can drive the rack 602 to move up and down reciprocally through the connecting rod 604 rotatably connected to it. The rack 602 drives the toothed ring 603 to reciprocally rotate forward and backward through meshing. The toothed ring 603 can drive the air jet pipe 3 to swing left and right through the connecting frame. At this time, the airflow ejected by it will also continuously change.

[0027] As Figure 2 and Figure 3 shown, a moving assembly 7 is installed at one end of the moving rod 1. The moving assembly 7 includes a reciprocating lead screw 701 threadedly connected to one end of the moving rod 1. A slider adapted to the reciprocating lead screw 701 is arranged inside the moving rod 1. Two limit rods 702 are slidably inserted at one end of the moving rod 1. The reciprocating lead screw 701 is respectively on both sides of the two limit rods 702. The same mounting frame 2 is fixedly sleeved outside the two limit rods 702. The two ends of the reciprocating lead screw 701 are respectively rotatably connected to the inner walls of both sides of the mounting frame 2.

[0028] A second motor 703 is fixedly installed on the outer wall of one side of the mounting frame 2. The output end of the second motor 703 is coaxially fixed to one end of the reciprocating lead screw 701.

[0029] By starting the second motor 703 to drive the reciprocating lead screw 701 to rotate, since the moving rod 1 is restricted by the two limit rods 702 and can only move horizontally, the reciprocating lead screw 701 can drive the moving rod 1 to reciprocally move along the limit rods 702. Furthermore, the air jet pipe 3 installed in the moving rod 1 will also move synchronously, so as to ensure that the parts can be blown by strong air flow in all directions.

[0030] As Figure 1As shown in FIGS. 1 and 2, a plurality of hinges 5 are detachably installed at the bottom of the outer wall of one side of the installation frame 2. With the cooperation of the hinges 5, it can ensure that the tooling can be flipped, so that the tooling will not hinder the part cleaning work when it is not needed.

[0031] As Figure 1 As shown in FIGS. 1 and 2, an air inlet pipe 4 is fixedly inserted at the top of the circumferential outer wall of the air injection pipe 3. Through the air inlet pipe 4, it can be connected to an external air supply device. The air inlet pipe 4 is made of a hose material to ensure that the air inlet pipe 4 will not hinder the movement of the air injection pipe 3.

[0032] The present utility model provides an auxiliary tooling for semiconductor equipment part processing, and the specific working principle is as follows:

[0033] When the device works, the tooling is installed on the top of an external device. With the cooperation of the hinges 5, it can ensure that the tooling can be flipped, so that the tooling will not hinder the part cleaning work when it is not needed. After the parts are cleaned, the installation frame 2 is flipped to surround the outside of the cleaning chamber. Then, the motor two 703 is started to drive the reciprocating lead screw 701 to rotate. Since the moving rod 1 is restricted by two limiting rods 702 and can only move horizontally, the reciprocating lead screw 701 can drive the moving rod 1 to reciprocate along the limiting rods 702. Furthermore, the air injection pipe 3 installed in the moving rod 1 will also move synchronously, so as to ensure that the parts can be blown by strong air flow in all directions. During this period, the motor one 606 at the top of the moving rod 1 is started. The motor one 606 drives the driving rod 605 to rotate. The rack 602 is slidably connected in the limiting groove 601. Therefore, the position of the rack 602 can only move horizontally. The driving rod 605 can drive the rack 602 to reciprocate up and down through the connecting rod 604 rotatably connected to it. The rack 602 drives the toothed ring 603 to reciprocate and deflect in positive and negative directions through meshing. The toothed ring 603 can drive the air injection pipe 3 to swing left and right through the connecting frame. At this time, the air flow ejected by it will also change continuously.

[0034] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. An auxiliary tooling for semiconductor device part processing, including a moving rod (1), characterized in that: One end of the moving rod (1) is rotatably connected to a connecting frame. The bottom of the connecting frame is fixedly connected to an air injection pipe (3). A plurality of nozzles are arranged at the bottom of the circumferential outer wall of the air injection pipe (3). A swing assembly (6) is installed at the top of the moving rod (1). The swing assembly (6) includes a limit groove (601) formed on one side of the outer wall of one end of the moving rod (1). A rack (602) is slidably connected in the limit groove (601). A toothed ring (603) is rotatably connected to the outer wall of one end of the moving rod (1). The toothed ring (603) is engaged with the rack (602), and the toothed ring (603) is fixedly sleeved outside the rotating shaft of the connecting frame.

2. The auxiliary tooling for processing semiconductor device parts according to claim 1, characterized in that: A first motor (606) is fixedly installed on the outer wall of the top of the moving rod (1). The output end of the first motor (606) is fixedly connected to a driving rod (605). One end of the driving rod (605) is rotatably connected to a connecting rod (604). One end of the connecting rod (604) is rotatably connected to the top of the rack (602).

3. An auxiliary tooling for processing semiconductor device parts according to claim 1, characterized in that: A moving assembly (7) is installed at one end of the moving rod (1). The moving assembly (7) includes a reciprocating lead screw (701) threadedly connected to one end of the moving rod (1). A slider adapted to the reciprocating lead screw (701) is arranged inside the moving rod (1). Two limiting rods (702) are slidably inserted into one end of the moving rod (1). The reciprocating lead screw (701) is respectively located on both sides of the two limiting rods (702). The same mounting frame (2) is fixedly sleeved outside the two limiting rods (702). The two ends of the reciprocating lead screw (701) are respectively rotatably connected to the inner walls of both sides of the mounting frame (2).

4. An auxiliary tooling for semiconductor device part processing according to claim 3, characterized in that: A second motor (703) is fixedly installed on the outer wall of one side of the mounting frame (2). The output end of the second motor (703) is coaxially fixed to one end of the reciprocating lead screw (701).

5. An auxiliary tooling for processing semiconductor device parts according to claim 3, characterized in that: A plurality of hinges (5) are detachably installed at the bottom of the outer wall of one side of the mounting frame (2).

6. An auxiliary tooling for processing semiconductor device parts according to claim 1, characterized in that: An air inlet pipe (4) is fixedly inserted into the top of the circumferential outer wall of the air injection pipe (3).

7. An auxiliary tooling for processing semiconductor device parts according to claim 6, characterized in that: The air inlet pipe (4) is made of a hose material.

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