Device for disassembling and cleaning dust filtering tank of single crystal furnace

Abstract

The utility model discloses a single crystal furnace dust removal filtering tank device which comprises a moving tank assembly, the moving tank assembly is used for filtering and storing dust, an air suction hose is connected to the moving tank assembly, a suction pipe is installed on the air suction hose, a side suction hole is formed in the side face of the suction pipe, and the side suction hole is communicated with the moving tank assembly. A suction reversing assembly is mounted in the suction pipe, and the suction reversing assembly is used for switching the suction direction of the suction pipe; the device has the beneficial effects that the suction reversing assembly is designed on the suction hose of the dust collection tank, so that the suction holes can be flexibly switched according to different thermal field components, oxide dust in a gap of a main heater can be effectively sucked, the dust suction effect is improved, the disassembly and cleaning quality of a thermal field of a single crystal furnace is improved, and the production cost is reduced. Therefore, the pulling success rate of monocrystalline silicon is ensured.

Description

Technical Field:

[0001] The utility model relates to the technical field of single crystal furnace disassembly and cleaning equipment, in particular to a single crystal furnace disassembly and cleaning dust filtering tank device. Background Art:

[0002] A single crystal furnace is the core equipment for pulling single crystal silicon. Every single crystal furnace pulls out a single crystal silicon rod every about 48 hours. After the pulling is completed, a thorough and detailed disassembly and cleaning work needs to be carried out before the next single crystal silicon rod can be pulled. The main work of the disassembly and cleaning is to remove and clean various hot field components. The purpose of the disassembly and cleaning is to remove the oxides on the hot field components (when pulling single crystal silicon, the temperature in the single crystal furnace is above 1400 degrees Celsius and the pulling is carried out in a vacuum environment. When disassembling the furnace after the pulling is completed, due to the entry of air, a light yellow oxide layer will quickly form on the surface of the hot field components). When disassembling and cleaning, first use a cleaning cloth to wipe off the oxides on the hot field components, and then use a filtering dust removal tank to suck away the oxide dust. The main heater is the most difficult hot field component to clean. As Figure 4 Shown is the structure of the main heater. There are many narrow gaps on the main heater. It is difficult for the suction hose of the filtering dust removal tank to enter the gaps for suction, and the suction effect is difficult to guarantee, which affects the normal pulling of single crystal silicon. Content of the Utility Model:

[0003] The purpose of the utility model is to provide a single crystal furnace disassembly and cleaning dust filtering tank device to solve the technical problem that the existing dust removal tank has a poor effect in sucking oxide dust in the gaps of the main heater.

[0004] The content of the utility model: A single crystal furnace disassembly and cleaning dust filtering tank device, which includes a movable tank assembly for filtering and storing dust. An air suction hose is connected to the movable tank assembly, and a suction pipe is installed on the air suction hose. Side suction holes are provided on the side of the suction pipe, and a suction direction changing assembly is installed in the suction pipe for switching the suction direction of the suction pipe.

[0005] Further, the suction direction changing assembly includes a conversion block slidably connected in the suction pipe. A central air hole is provided in the conversion block, and suction holes are provided on the side wall of the conversion block. The suction holes are communicated with the central air hole. An operating rod is installed on the conversion block, and a sliding groove is provided on the suction pipe. The operating rod is slidably connected with the sliding groove. When the operating rod is located at the outer limit position of the sliding groove, the suction holes are coaxial with the side suction holes. A spring plug assembly is installed in the suction pipe for sealing the central air hole.

[0006] Further, the plug component includes a sliding column, with a tapered plug and a limiting disc respectively connected to both ends of the sliding column. A cross beam is arranged in the suction pipe, and the sliding column is slidably connected to the cross beam. A compression spring is sleeved on the sliding column, and the compression spring is located between the tapered plug and the cross beam.

[0007] Further, magnet blocks are installed at both ends of the sliding groove, and the magnet blocks are used to brake the operating rod.

[0008] Further, a positioning column is installed on the suction pipe.

[0009] Further, the mobile tank assembly includes a tank body, a filter element is arranged in the tank body, and universal wheels and a connecting pipe are installed on the tank body.

[0010] Advantages of the present utility model: The present utility model is designed with a suction direction conversion component on the suction hose of the dust suction tank, which can flexibly switch the suction holes according to different hot field components, effectively suck the oxide dust in the gap of the main heater clean, improve the dust suction effect, improve the disassembly and cleaning quality of the single crystal furnace hot field, and thus ensure the success rate of single crystal pulling, which is worthy of popularization and use. Description of the drawings:

[0011] Figure 1 is the front view of the present utility model;

[0012] Figure 2 is the sectional view of the installation structure of the suction direction conversion component;

[0013] Figure 3 is the sectional view of the installation structure of the suction direction conversion component from other perspectives;

[0014] Figure 4 is the three-dimensional view of the main heater of the single crystal furnace hot field;

[0015] In the figure, tank body 1, suction hose 2, filter element 3, suction pipe 4, conversion block 5, central air hole 6, suction hole 7, side suction hole 8, tapered plug 9, sliding column 10, compression spring 11, limiting disc 12, sliding groove 13, positioning column 14, magnet block 15, operating rod 16, universal wheel 17, connecting pipe 18. Specific implementation manner:

[0016] As Figure 1 and Figure 2 shown, a single crystal furnace disassembly and cleaning dust filtering tank device includes a mobile tank assembly, the mobile tank assembly is used for filtering and storing dust, a suction hose 2 is connected to the mobile tank assembly, a suction pipe 4 is installed on the suction hose 2, a side suction hole 8 is opened on the side of the suction pipe 4, and a suction direction conversion component is installed in the suction pipe 4, and the suction direction conversion component is used for switching the suction direction of the suction pipe 4.

[0017] As Figure 2 and Figure 3 shown, the suction commutation assembly includes a conversion block 5 slidably connected in the suction pipe 4. A central air hole 6 is formed in the conversion block 5. A suction hole 7 is formed in the side wall of the conversion block 5. The suction hole 7 communicates with the central air hole 6. An operating rod 16 is installed on the conversion block 5. A chute is formed in the suction pipe 4. The operating rod 16 is slidably connected with the chute 13. When the operating rod 16 is located at the outer limit position of the chute 13, the suction hole 7 is coaxial with the side suction hole 8. A plug assembly is installed in the suction pipe 4. The plug assembly is used to seal the central air hole 6. The plug assembly includes a sliding column 10. A tapered plug 9 and a limit disc 12 are respectively connected to both ends of the sliding column 10. A cross beam is arranged in the suction pipe 4. The sliding column 10 is slidably connected with the cross beam. A compression spring 11 is sleeved on the sliding column 10. The compression spring 11 is located between the tapered plug 9 and the cross beam. Magnet blocks 15 are installed at both ends of the chute 13. The magnet blocks 15 are used to brake the operating rod 16. In order to facilitate more accurate suction of oxide dust in the gap of the main heater, a positioning column 14 is installed on the suction pipe 4.

[0018] As Figure 1 shown, the mobile tank assembly includes a tank body 1. A filter element 3 is arranged in the tank body 1. Universal wheels 17 and a connecting pipe 18 are installed on the tank body 1. During use, the connecting pipe 18 is connected to a compressed air source.

[0019] During specific operation, as Figures 1 to 4 shown, when sucking the dust of ordinary hot field components, the operating rod 16 is pushed inwards to the limit position. At this time, the tapered plug 9 is away from the central air hole 6 and the suction pipe 4 blocks the suction hole 7, and the dust is sucked through the central air hole 6. When sucking the oxide dust in the gap of the main heater, the operating rod 16 is pushed outwards to the limit position. At this time, the tapered plug 9 blocks the central air hole 6 and the suction hole 7 is coaxial with the side suction hole 8, and the dust is sucked through the side suction hole 8, the suction hole 7, and the central air hole 6 in sequence. At the same time, the positioning column 14 can be abutted against the inner circumferential surface of the main heater, and then the suction pipe 4 of the present invention is moved up and down, and the oxide dust in the gap of the main heater can be sucked quickly and accurately.

[0020] The above are only the preferred examples of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A dust filtration tank device for dismantling and cleaning a single crystal furnace, characterized in that: It includes a mobile tank assembly for filtering and storing dust. An inhalation hose (2) is connected to the mobile tank assembly, and a suction pipe (4) is installed on the inhalation hose (2). Side suction holes (8) are formed on the side of the suction pipe (4). A suction direction changing assembly is installed in the suction pipe (4) for changing the suction direction of the suction pipe (4).

2. The dust filtration tank device for dismantling and cleaning a single crystal furnace according to claim 1, characterized in that: The suction direction changing assembly includes a conversion block (5) slidably connected in the suction pipe (4). A central air hole (6) is formed in the conversion block (5), and suction holes (7) are formed on the side wall of the conversion block (5). The suction holes (7) communicate with the central air hole (6). An operating rod (16) is installed on the conversion block (5). A chute is formed in the suction pipe (4), and the operating rod (16) is slidably connected to the chute (13). When the operating rod (16) is located at the outer limit position of the chute (13), the suction holes (7) are coaxial with the side suction holes (8). A plug spring assembly is installed in the suction pipe (4) for sealing the central air hole (6).

3. The dust filtration tank device for disassembling and cleaning a single crystal furnace according to claim 2, wherein: The plug spring assembly includes a sliding column (10). A tapered plug (9) and a limit disk (12) are respectively connected to both ends of the sliding column (10). A cross beam is arranged in the suction pipe (4), and the sliding column (10) is slidably connected to the cross beam. A compression spring (11) is sleeved on the sliding column (10), and the compression spring (11) is located between the tapered plug (9) and the cross beam.

4. A dust filtration tank device for disassembling and cleaning a single crystal furnace according to claim 2, characterized in that: Magnet blocks (15) are installed at both ends of the chute (13) for braking the operating rod (16).

5. The dust filtration tank device for dismantling and cleaning a single crystal furnace according to claim 2, characterized in that: A positioning column (14) is installed on the suction pipe (4).

6. A dust filtration tank device for disassembling and cleaning a single crystal furnace according to any one of claims 1 to 5, characterized in that: The mobile tank assembly includes a tank body (1). A filter element (3) is arranged in the tank body (1), and universal wheels (17) and a connecting pipe (18) are installed on the tank body (1).

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