Supporting structure, supporting assembly and coating equipment

Abstract

The utility model relates to a supporting structure, a supporting assembly and coating equipment. The supporting structure comprises a supporting body, the supporting body is provided with a matching surface, and the matching surface is used for bearing the graphite boat. The supporting body is further provided with an air channel which is provided with an air inlet and an air outlet, and the air outlet is located in the matching face. The supporting structure is provided with an air channel capable of being filled with air, and an air outlet of the air channel is located in the matching face. Therefore, high-pressure gas introduced from the gas inlet of the gas channel can be blown out from the gas outlet in the matching surface, namely, the supporting structure can exhaust the gas outwards. On one hand, the high-pressure gas can form a high-pressure area on the matching surface, so that the voltage required by a violent reaction can be increased, and the problem of high-frequency arcing can be relieved or solved. And on the other hand, the high-pressure gas can form a relatively high-pressure area on the matching surface and purge outwards, so that the conditions of CVD reaction in the area and deposition of an insulating film on the matching surface are inhibited, and the problems of arcing and powder discharge near the supporting structure are solved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic equipment manufacturing, and in particular, to a support structure, a support assembly, and a coating device. Background Art

[0002] The tube-type PECVD coating process is a core process in the preparation of solar cells, that is, silicon wafers are placed in a tube-type PECVD device with a graphite boat as a carrier, and reaction gases are introduced into the furnace at a certain temperature to form a required reaction film on the surface of the silicon wafers.

[0003] With the update and iteration of process technologies, higher requirements are put forward for the stability of the process. In related technologies, the support structure for supporting the graphite boat needs to be polished after the equipment cools down after 3 months of use, otherwise it will cause frequent arcing problems in the furnace, which will further lead to poor EL of the silicon wafers. However, the temperature rise and fall of the tube-type equipment have a great impact on the service life of the equipment quartz tube and the service life of the sealing ring. Summary of the Utility Model

[0004] Based on this, it is necessary to provide a support structure, a support assembly, and a coating device that can reduce the impact on the service life of the quartz tube while reducing the arcing probability for the above problems.

[0005] A support structure, the support structure includes a support body, the support body has a mating surface, and the mating surface is used to cooperate with the graphite boat;

[0006] The support body further has an air duct, the air duct has an air inlet and an air outlet, and the air outlet is located on the mating surface.

[0007] In one embodiment, the air duct includes a main channel and an air outlet channel, the main channel is opened in the support body, the air outlet channel communicates with the main channel and extends to the mating surface to form the air outlet.

[0008] In one embodiment, the support body further has a non-mating surface; the main channel penetrates through the support body, and at least one end forms a first through hole on the non-mating surface;

[0009] The support structure further includes a first plugging member, and the first plugging member is arranged on the support body to plug the first through hole.

[0010] In one embodiment, the main channel penetrates from the non-mating surface to the mating surface, and one end forms the first through hole on the non-mating surface, and the other end forms the air outlet on the mating surface.

[0011] In one embodiment, there are multiple outlet channels; the density of the outlet formed by all the outlet channels is 0.4 / cm 2 -1 piece / cm 2 ;

[0012] And / or, there are multiple air outlet channels; the interval between the air outlets formed by adjacent air outlet channels is 6mm-14mm;

[0013] And / or, the flow area of ​​the air outlet is 0.5mm 2 -5mm 2 .

[0014] In one of the embodiments, the support body further has an air supply channel, the air supply channel has an air supply inlet, and the air inlet of the air channel is connected to the air supply channel.

[0015] In one embodiment, the air supply channel penetrates the support body, and one end forms the air supply inlet on the surface of the support body, and the other end forms a second through hole on the surface of the support body;

[0016] The support structure further includes a second blocking member, which is disposed on the support body and blocks the second through hole.

[0017] In one embodiment, the air channel is a channel groove opened on the matching surface, the air inlet is opened on the groove wall of the channel groove, and the groove opening of the channel groove is formed as the air outlet.

[0018] In one embodiment, the channel groove has a groove width of 1.2 mm to 2.3 mm;

[0019] And / or, the support body has at least two channel grooves, and the interval between adjacent channel grooves is 6mm-12mm.

[0020] In one embodiment, the mating surface includes a connected bearing area and a limiting area, the bearing area is used to bear the boat foot of the graphite boat; the limiting area extends along a direction intersecting with the bearing area, and avoids and limits the boat foot in a direction parallel to the bearing area;

[0021] The air outlet is provided on the bearing area and the limiting area.

[0022] In one embodiment, the bearing area is a plane located at the top of the supporting body, the limiting area is an arc-shaped surface located at one side of the bearing area, and the bearing area is tangentially connected to the limiting area.

[0023] In one embodiment, the support structure further includes at least one shielding member, which is connected to the support body and protrudes from the periphery of the mating surface.

[0024] In one embodiment, the shielding member is a shielding plate, and the shielding plate is perpendicular to the mating surface; the support structure includes two such shielding plates, and the two shielding plates are arranged oppositely and are perpendicular to the substrate in the graphite boat.

[0025] In one embodiment, the material of the support body is stainless steel or titanium alloy;

[0026] And / or, the material of the shielding member is stainless steel.

[0027] In one embodiment, the support body has at least two air channels, and all the air channels are arranged at intervals and respectively form the air outlet;

[0028] And / or, the air channel has at least two air outlets.

[0029] A support assembly includes a gas supply pipeline and the above-mentioned support structure, and the gas supply pipeline communicates with the air inlet of the air channel;

[0030] The gas supply pipeline is made of ceramic material; and / or, the support assembly further includes a gas flange, and the gas supply pipeline is communicated with an external gas source through the gas flange.

[0031] A coating device includes the above-mentioned support structure or the above-mentioned support assembly.

[0032] The above-mentioned support structure, support assembly and coating device have air channels through which gas can be introduced, and the air outlets of the air channels are located on the mating surface. In this way, the high-pressure gas introduced from the air inlet of the air channel can be discharged outward from the air outlet on the mating surface, that is, the support structure can discharge gas outward. On the one hand, these high-pressure gases can form a high-pressure area on the mating surface, which can increase the voltage required for a violent reaction and alleviate or solve the problem of high-frequency arcing. On the other hand, these high-pressure gases can form a relatively high-pressure area on the mating surface and blow outward, inhibiting the occurrence of CVD reaction in this area and the situation of depositing an insulating film on the mating surface, alleviating the problems of arcing and powder discharging near the support structure, and the implementation process does not require the equipment to be cooled, so the influence on the life of the quartz tube is relatively small. Description of the Drawings

[0033] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0034] Figure 1 It is a schematic structural diagram of the support structure in the first embodiment of the present application.

[0035] Figure 2 For Figure 1 It is a perspective structural diagram of the support structure shown.

[0036] Figure 3 For Figure 2 It is a schematic structural diagram of the cooperation between the support structure shown and the gas supply pipeline.

[0037] Figure 4 It is a partial structural diagram of a coating device with a support structure in an embodiment of the present application.

[0038] Figure 5 For Figure 4 It is a cross-sectional structural diagram of the coating device shown.

[0039] Figure 6 For Figure 5 It is an exploded structural diagram of the coating device shown.

[0040] Figure 7 For Figure 5 It is an enlarged structural diagram of the coating device shown at A.

[0041] Figure 8 It is a schematic structural diagram of the support structure in the second embodiment of the present application.

[0042] Figure 9 For Figure 8 It is a perspective structural diagram of the support structure shown.

[0043] Figure 10 For Figure 9 It is a schematic structural diagram of the cooperation between the support structure shown and the gas supply pipeline.

[0044] Figure 11 For Figure 8 It is a schematic structural diagram of the cooperation between the support body and the shielding member in the support structure shown.

[0045] Figure 12 For Figure 4 It is a partial structural diagram of the coating device shown.

[0046] Figure 13 ForFigure 4 Another schematic structural view of a part of the coating equipment shown

[0047] Figure 14 Schematic structural view of a support assembly with a support structure in an embodiment of the present application

[0048] Explanation of reference numerals: 100, support structure; 10, support body; 11, mating surface; 111, bearing area; 113, limiting area; 13, air duct; 131, air inlet; 133, air outlet; 135, main channel; 137, air outlet channel; 15, air supply channel; 151, air supply inlet; 153, second through hole; 17, first end face; 171, first through hole; 19, threaded hole; 30, shielding member; 50, first plugging member; 70, threaded member; 200, coating equipment; 210, support rod; 230, graphite boat; 231, boat foot; 2311, support bottom; 2313, convex portion; 240, substrate; 250, electrode assembly; 300, support assembly; 310, gas pipeline; 330, gas flange; 331, through hole; 350, first adapter; 370, external joint; 390, second adapter Detailed implementation manners

[0049] To make the above objects, features and advantages of the present application more obvious and understandable, the following will describe the detailed implementation manners of the present application in conjunction with the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below

[0050] In the description of the present application, it should be understood that if there appear such terms as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application

[0051] In addition, if the term "and / or" appears, "and / or" is merely a description of the relationship between associated objects and indicates that there can be three relationships. For example, A and / or B can represent the relationship between A and B: A exists alone, A and B exist simultaneously, and B exists alone. Additionally, in this text, the character " / " generally indicates an "or" relationship between the associated objects before and after it. If terms such as "first" and "second" appear, these terms are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" can explicitly or implicitly include at least one such feature. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, four, five, etc., unless otherwise specifically and clearly defined.

[0052] In this application, unless otherwise clearly specified and limited, if terms such as "installed", "connected", "joined", "fixed", etc. appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0053] In this application, unless otherwise clearly specified and limited, if there are descriptions such as a first feature being "on" or "under" a second feature, the meaning can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature can mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher horizontal level than the second feature. The first feature being "under", "beneath", and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower horizontal level than the second feature.

[0054] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. If so, the terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used in this application are only for illustrative purposes and do not represent the only implementation.

[0055] The tube type PECVD equipment is provided with a graphite boat, a support rod and a support structure in the furnace. Among them, the graphite boat is used to carry substrates (such as silicon wafers) in the furnace, and the support structure is arranged on the support rod and used to conduct electricity for the graphite boat. However, during long-term use, the surface of the support structure is prone to film deposition and powdering, which will cause arcing between the boat feet of the graphite boat and the support structure, resulting in danger and causing problems such as poor EL of the silicon wafers. Therefore, the support structure needs to be polished regularly to remove the deposited film layer and powder layer on its surface and maintain its good electrical conductivity. As described in the background technology, although polishing the support structure can alleviate the problem of arcing in the furnace, cooling will have a negative impact on the service life of the quartz tube.

[0056] For the above problems, please refer to Figures 1 to 6 , a support structure 100 provided by an embodiment of the present application includes a support body 10. The support body 10 has a mating surface 11, and the mating surface 11 is used to cooperate with the graphite boat 230. The support body 10 also has an air passage 13. The air passage 13 has an air inlet 131 and an air outlet 133, and the air outlet 133 is located on the mating surface 11.

[0057] It can be understood that the support structure 100 is used in the coating equipment 200. The support body 10 may have an assembly hole, and the support structure 100 can be sleeved on the support rod 210 through the assembly hole. The support rod 210 is located in the furnace tube of the coating equipment 200. The support structure 100 is used to carry the graphite boat 230 on the support rod 210 and conduct electricity for the graphite boat 230. Therefore, the support structure 100 can also be called a boat support block. Among them, the graphite boat 230 is used to carry the substrate 240 for coating in the furnace tube.

[0058] Specifically, the graphite boat 230 has boat feet 231 and contacts the support structure 100 through the boat feet 231. The boat feet 231 have a support bottom 2311 and a convex portion 2313 protruding downward relative to the support bottom 2311. Among them, the surface of the support body 10 facing the support bottom 2311 and the convex portion 2313 of the boat feet 231 and cooperating with the two is the mating surface 11. A part of the mating surface 11 can directly contact the bottom surface of the support bottom 2311 to support the boat feet 231 in the height direction, thereby realizing the support of the graphite boat 230. In addition, another part of the mating surface 11 can also limit the convex portion 2313 of the boat feet 231 in the horizontal direction, prevent the graphite boat 230 carried by the support structure 100 from moving horizontally, and there may be a gap between the mating surface 11 and the boat feet 231 to avoid the convex portion 2313. In other words, the support body 10 supports and limits the graphite boat 230 through its mating surface 11.

[0059] The air passage 13 of the support body 10 has an air inlet 131 and an air outlet 133. The air inlet 131 can be used to introduce gas, and after flowing along the air passage 13, it flows out from the air outlet 133 (as Figure 1 indicated by the arrow in). Among them, the gas can be a process gas or a gas that does not participate in the reaction (such as a noble gas, etc.). Specifically, the material of the support body 10 is stainless steel or titanium alloy, and specifically can be 316 stainless steel or titanium alloy, with excellent electrical conductivity, structural strength, and corrosion resistance.

[0060] When high-pressure gas is introduced into the support body 10 through the air inlet 131 of the air passage 13, a high-pressure area can be formed on the mating surface 11 through the air outlet 133. According to Paschen's law VS = f(PD), where V is the breakdown voltage, P is the gas pressure, and D is the distance between electrodes. It can be known that on the premise that the distance between electrodes is determined, an increase in gas pressure will cause an increase in the breakdown voltage, and the voltage range provided by the RF power supply is in a stable range. An increase in the breakdown voltage will reduce the arcing probability in this area.

[0061] The above-mentioned support structure 100 has an air passage 13 capable of introducing gas, and the air outlet 133 of the air passage 13 is located on the mating surface 11. In this way, the high-pressure gas introduced from the air inlet 131 of the air passage 13 can be discharged outward from the air outlet 133 on the mating surface 11, that is, the support structure 100 can discharge gas outward. On the one hand, these high-pressure gases can form a high-pressure area on the mating surface 11, which can increase the voltage required for a violent reaction and alleviate or solve the problem of high-frequency arcing. On the other hand, these high-pressure gases can form a relatively high-pressure area on the mating surface 11 and blow outward, inhibiting the occurrence of CVD reaction in this area and the deposition of insulating film on the mating surface 11, alleviating the problems of arcing and powdering near the support structure 100, and the implementation process does not require equipment cooling. Therefore, the impact on the life of the quartz tube is relatively small.

[0062] In some other embodiments, the air passage 13 can also form an air outlet 133 on other surfaces of the support body 10 except the mating surface 11 to assist in the formation and play of the high-pressure area.

[0063] In some embodiments, the mating surface 11 includes a connected bearing area 111 and a limiting area 113. The bearing area 111 is used to bear the graphite boat 230, and the limiting area 113 extends along the direction intersecting with the bearing area 111 and avoids and limits the boat feet 231 in the direction parallel to the bearing area 111.

[0064] Understandably, the bearing area 111 is the part where the mating surface 11 directly contacts the bottom surface of the support bottom 2311 to support the boat foot 231 in the height direction. The limiting area 113 is the part where the mating surface 11 limits the convex part 2313 of the boat foot 231 in the horizontal direction.

[0065] While the support structure 100 needs to support the boat foot 231 of the graphite boat 230, it also needs to avoid the convex part 2313 thereof. The shape of the support structure 100 matches the shape of the boat foot 231. Among them, the bearing area 111 can be a plane and can be arranged horizontally. The limiting area 113 is located in the bearing area 111 and extends downward to avoid the convex part 2313. Specifically, the limiting area 113 can extend downward in an arc, obliquely downward, vertically downward, etc. relative to the bearing area 111.

[0066] Furthermore, the bearing area 111 is a plane located at the top of the support body 10, and the limiting area 113 is an arc surface located on one side of the bearing area 111. The bearing area 111 and the limiting area 113 are tangentially connected.

[0067] The bearing area 111 can be arranged horizontally. The limiting area 113 is located on one side of the bearing area 111 and extends downward in an arc. Understandably, both the bearing area 111 and the limiting area 113 are located on the circumference of the axis of the assembly hole of the support body 10.

[0068] In this way, the bearing area 111 is located at the top of the support body 10. As a plane, it can form a larger effective support surface with the boat foot 231 of the graphite boat 230 to support the graphite boat 230. There is an arc transition between the limiting area 113 and the bearing area 111, which extends downward to avoid the convex part 2313 of the boat foot 231 and limit it in the horizontal direction.

[0069] Furthermore, air outlets 133 are provided on both the bearing area 111 and the limiting area 113.

[0070] In other words, the air duct 13 forms air outlets 133 on the bearing area 111 and the limiting area 113, and the mating surface 11 can blow out the gas introduced into the air duct 13 in both its bearing area 111 and limiting area 113.

[0071] In this way, in addition to the bearing area 111 that directly supports and is in close contact with the graphite boat 230, the limiting area 113 of the support body 10 can also have air outlets 133. Whether it is the bearing area 111 that directly contacts the graphite boat 230 or the limiting area 113 that may have a gap with the graphite boat 230, a high-pressure area can be generated to fully inhibit the deposition of the thin film on the surface of the support structure 100 and reduce the problems of arcing and powder ejection on the mating surface 11.

[0072] In some embodiments, the support body 10 has at least two air channels 13, all the air channels 13 are spaced apart, and each forms an air outlet 133.

[0073] In this way, multiple air channels 13 can form an air outlet 133 with a larger coverage range, improving the air outlet coverage area to fully cover the mating surface 11.

[0074] In some embodiments, the support body 10 further has a gas supply channel 15, the gas supply channel 15 has a gas supply inlet 151, and the air inlet 131 of the air channel 13 is communicated with the gas supply channel 15.

[0075] The gas supply channel 15 can be opened in a direction intersecting the extending direction of the air channel 13 and sequentially communicate with all the air channels 13. Specifically, the gas supply channel 15 is located upstream of all the air outlets 133 and communicates with the upstream end of the air channel 13, and the gas supply channel 15 can extend along the axial direction of the assembly hole of the support body 10.

[0076] In this way, an external gas source can be connected through the gas supply inlet 151 of the gas supply channel 15 and communicated with all the air channels 13 through the gas supply channel 15.

[0077] It can be understood that in some other embodiments, the air channel 13 can also be directly communicated with an external gas source through its air inlet 131, and no specific limitation is made here.

[0078] In some embodiments, the air channel 13 has at least two air outlets 133.

[0079] It can be understood that each air channel 13 can have at least two air outlets 133, and all the air outlets 133 can be evenly arranged. Specifically, each air channel 13 can have at least two air outlets 133 located on the bearing area 111.

[0080] In this way, the coverage range that each air channel 13 can cover is the coverage range of all its air outlets 133. All the air channels 13 and the air outlets 133 on the air channels 13 are evenly arranged, and can fully and evenly cover the entire mating surface 11.

[0081] In some embodiments, the support structure 100 further includes at least one shielding member 30 (as Figure 11 shown), the shielding member is connected to the support body 10 and protrudes from the periphery of the mating surface 11.

[0082] It can be understood that at least one side of the mating surface 11 is provided with the shielding member 30. If the support structure 100 has multiple shielding members 30, all the shielding members 30 can be respectively arranged on different sides of the mating surface 11.

[0083] The shielding member 30 can produce a blocking effect on the gas blown out from the air outlet 133 on the mating surface 11 at the periphery to prevent it from diffusing to the periphery of the mating surface 11.

[0084] In this way, the shielding member 30 can gather the gas blown out from the air outlet 133, block its outward diffusion, and reduce the influence of the gas on the atmosphere around the substrate 240. In addition, the shielding member 30 does not contact the leg 231 of the graphite boat 230 to avoid increasing the installation difficulty of the graphite boat 230.

[0085] Specifically, the shielding member 30 is a shielding plate, and the shielding plate is perpendicular to the mating surface 11. The support structure 100 includes two shielding plates, which are opposite to each other and perpendicular to the substrate 240 in the graphite boat 230.

[0086] Specifically, when installing the graphite boat 230 and the substrate 240, the substrate 240 is parallel to the longitudinal direction of the support rod 210, that is, parallel to the axial direction of the assembly hole of the support body 10. In other words, the two shielding members 30 are arranged at intervals along the axial direction of the assembly hole on the opposite sides of the support body 10.

[0087] In this way, the two shielding plates can fully gather the gas blown out from the air outlet 133, reduce the probability of its outward escape and further diffusion along the surface of the substrate 240 to damage the atmosphere around the substrate 240.

[0088] In some embodiments, the material of the shielding member 30 is stainless steel, and specifically may be 304 stainless steel or 316 stainless steel.

[0089] In this way, the shielding member 30 can have excellent corrosion resistance and structural strength, and can work stably and for a long time.

[0090] In the first embodiment, the air duct 13 includes a main channel 135 and an air outlet channel 137. The main channel 135 is opened in the support body 10, and the air outlet channel 137 communicates with the main channel 135 and extends to the mating surface 11 to form the air outlet 133.

[0091] In this way, the support structure 100 can form a plurality of air outlets 133 on the mating surface 11 as needed by drilling holes.

[0092] Please refer to Figure 7 further, the support body 10 also has a non-mating surface. The main channel 135 penetrates through the support body 10, and at least one end forms a first through hole 117 on the non-mating surface. The support structure 100 further includes a first plugging member 50, and the first plugging member 50 is arranged on the support body 10 to plug the first through hole 117.

[0093] Understandably, the non-mating surface is the part of the surface of the support body 10 other than the mating surface 11. The main channel 135 can be obtained by drilling a through-hole in the support body 10, and at least one of the starting position and the ending position of the drilling is located on the non-mating surface. The opening left by the drilling on the non-mating surface is the first through-hole 117.

[0094] In this way, the air channel 13 and the air outlet 133 can be formed on the support body 10 by drilling through-holes. This method has a low process difficulty, and the opening position and quantity can be selected according to needs to determine the positions of the main channel 135, the air outlet channel 137, and the air outlet 133. As for the first through-hole 117 left outside the mating surface 11 by the drilling through-hole, it can be blocked by the first blocking member 50 to ensure that the high-pressure gas introduced into the air channel 13 is only blown out from the air outlet 133, preventing air leakage from the first through-hole 117 from affecting the normal coating process.

[0095] Furthermore, the main channel 135 penetrates from the non-mating surface to the mating surface 11, with one end forming the first through-hole 117 on the non-mating surface and the other end forming the air outlet 133 on the mating surface 11.

[0096] Specifically, the main channel 135 can be drilled from the first end face 17 of the support body 10 opposite to the limiting area 113 to the limiting area 113 of the mating surface 11, forming the first through-hole 117 on the first end face 17 and the air outlet 133 in the limiting area 113 of the mating surface 11. The air outlet channel 137 can specifically extend from the main channel 135 to the bearing area 111 of the mating surface 11 and form the air outlet 133. Understandably, the air outlet 133 of the air channel 13 includes the air outlet 133 formed by the main channel 135 extending to the limiting area 113 of the mating surface 11 and the air outlet 133 formed by the air outlet channel 137 extending to the bearing area 111 of the mating surface 11.

[0097] In this way, one end of the main channel 135 penetrates to the mating surface 11 and does not need to be blocked, and can directly serve as the air outlet 133 to convey gas to the surface of the mating surface 11, which helps to reduce the manufacturing process of the support structure 100.

[0098] Specifically, all the main channels 135 can extend along the first direction (such as Figure 2 the X direction shown), and the first direction can be perpendicular to the axial direction of the assembly hole and parallel to the bearing area 111 of the mating surface 11. The limiting area 113 of the mating surface 11 is located at one end of the bearing area 111 in the first direction, and all the main channels 135 can penetrate the limiting area 113 of the mating surface 11 to form the air outlet 133 in the limiting area 113.

[0099] During the manufacturing process of the support structure 100, a main channel 135 can be drilled from the first end face 17 of the self-supporting body 10 in the first direction to the limiting area 113. Then, a gas outlet channel 137 can be drilled downward from the bearing area 111 of the mating surface 11 to communicate with the main channel 135. Finally, the first through hole 117 left by the main channel 135 on the first end face 17 is blocked by the first blocking member 50. Among them, the first end face 17 belongs to the non-mating surface.

[0100] Specifically, the support structure 100 further includes a threaded member 70, and the first end face of the support body 10 opposite to the limiting area 113 has a threaded hole 19. The first blocking member 50 can be a blocking plate and is fixed on the first end face through the threaded member 70 and the threaded hole 19. In some other embodiments, the first blocking member 50 can also be fixed by riveting, clamping, etc., which are not specifically limited herein.

[0101] In some embodiments, the air supply channel 15 penetrates through the support body 10, and one end forms an air supply inlet 151 on the surface of the support body 10, and the other end forms a second through hole 153 on the surface of the support body 10. The support structure further includes a second blocking member (not shown in the figure), and the second blocking member is arranged on the support body to block the second through hole 153.

[0102] In this way, the air supply channel 15 can also be formed on the support body 10 by drilling a through hole, and the second blocking member can prevent the gas input from the air supply inlet 151 from leaking through the second through hole 153.

[0103] In some embodiments, the flow area of the air outlet 133 is 0.5 mm 2 -5 mm 2 , and specifically can be 1.5 mm 2 -2 mm 2 .

[0104] In this way, the gas flow rate and pressure blown out by the air outlet 133 can better meet the purpose of forming a high-pressure area on the mating surface 11 and purging.

[0105] In some embodiments, the density of the air outlets 133 formed by the air outlet channels 137 is 0.4 per cm 2 -1 per cm 2 , and specifically can be 0.6 per cm 2 -0.8 per cm 2 .

[0106] Specifically, the density of the air outlets 133 formed by the air outlet channels 137 is also the density of the air outlets 133 on the mating surface 11 in the bearing area 111.

[0107] In some embodiments, the interval between the air outlet openings 133 formed by adjacent air outlet channels 137 is 6 mm - 14 mm, and specifically can be 10 mm.

[0108] Specifically, the air outlet openings 133 formed by all the air outlet channels 137 can be arranged in a uniform array (such as a 4×4 array), and the interval between adjacent air outlet openings 133 can be 10 mm, and the interval between adjacent rows of air outlet openings 133 can also be 10 mm.

[0109] In this way, the high-pressure gas output from all the air outlet openings 133 can fully purge the mating surface 11, and at the same time, the processing difficulty is relatively low and the number of processing steps is small.

[0110] Please also refer to FIGS. 8 to Figure 10 In the second embodiment, the air passage 13 is a channel groove formed in the mating surface 11, the air inlet 131 is opened on the groove wall of the channel groove, and the groove opening of the channel groove forms the air outlet 133.

[0111] It can be understood that the air inlet 131 can be opened on the bottom wall or the side wall of the channel groove. Specifically, one end of the channel groove in the extending direction forms the air inlet 131 and communicates with the air supply channel 15, and the other end in the extending direction extends to the limiting area 113 of the mating surface 11 to form the air outlet 133. The groove opening of the channel groove is located on the mating surface 11, and the gas introduced into the channel groove can be discharged from the groove opening, that is, the air outlet 133.

[0112] During the manufacturing process of the support body 10, a channel groove can be formed by digging a groove on the mating surface 11, and then the channel groove can be communicated with the air supply channel 15.

[0113] In this way, the formation method of the air passage 13 is simple, and the coverage range of the groove opening is wider. At the same time, when used in conjunction with the shielding members 30 on both sides, the discharged gas can be gathered on the mating surface 11.

[0114] In some embodiments, the groove width of the channel groove is 1.2 mm - 2.3 mm, and specifically can be 1.5 mm - 2 mm.

[0115] In this way, the gas input from the air inlet 131 can effectively flow along the channel groove and at the same time be blown out from the groove opening to the surface of the support body 10.

[0116] In some embodiments, the support body 10 has at least two channel grooves, and the interval between adjacent channel grooves is 6 mm - 12 mm, and specifically can be 8 mm - 10 mm.

[0117] In this way, the high-pressure gas output from all the air outlet openings 133 can fully purge the entire mating surface 11.

[0118] In some other embodiments, the support body 10 has a plurality of air channels 13, some of which are in the form of channel grooves and some of which are in the form including a main channel 135 and an air outlet channel 137; alternatively, the air channels 13 of the support body 10 are arranged in segments, some segments are in the form of channel grooves, and some segments are in the form including a main channel 135 and an air outlet channel 137, which are not specifically limited herein.

[0119] For the above-mentioned support structure 100, its support body 10 has a plurality of air channels 13 through which gas can pass. Each air channel 13 has a plurality of air outlet openings 133 located on the mating surface 11, and the air outlet openings 133 are provided in both the load-bearing area 111 and the limiting area 113 of the mating surface 11. In addition, the support body 10 also has a gas supply channel 15, and the gas supply channel 15 communicates with all the air channels 13 to supply gas to them. In this way, an external high-pressure gas source supplies gas to all the air channels 13 through the gas supply channel 15, and the high-pressure gas entering the air channels 13 flows out from the air outlet openings 133 of the air channels 13 located on the mating surface 11. On the one hand, these high-pressure gases can form a high-pressure area on the mating surface 11, which can increase the voltage required for a violent reaction and alleviate or solve the problem of high-frequency arcing. On the other hand, these high-pressure gases can form a relatively high-pressure area on the mating surface 11 and blow outward, inhibiting the occurrence of CVD reaction in this area and the situation of depositing an insulating film on the mating surface 11, and alleviating the problems of arcing and powder ejection near the support structure 100. The shielding member 30 can produce a blocking effect on the gas blown out from the air outlet openings 133 on the mating surface 11 on the peripheral side to prevent it from diffusing to the peripheral side of the mating surface 11.

[0120] Please refer to Figures 12 to 14 simultaneously. The present application also provides a support assembly 300, which includes a gas supply pipeline 310 and the above-mentioned support structure 100. The gas supply pipeline 310 communicates with the air inlet 131 of the air channel 13 for supplying gas to the air channel 13.

[0121] In this way, an external gas source can supply gas to the support structure 100 located inside the furnace tube through the gas supply pipeline 310 outside the furnace tube.

[0122] In some embodiments, the gas supply pipeline 310 is made of ceramic material. Ceramic has good high-temperature resistance. In this way, the gas supply pipeline 310 can ensure the normal gas supply of the support structure 100 at the temperature of working inside the furnace.

[0123] It can be understood that in some other embodiments, the gas supply pipeline 310 can also be made of other high-temperature resistant materials, such as: metal, silicon nitride, alumina, etc., as long as it can work normally at the working temperature inside the furnace tube to supply gas to the support structure 100, which is not specifically limited herein.

[0124] In some embodiments, the support assembly 300 further includes a gas flange 330, and the gas supply pipeline 310 is communicated with an external gas source through the gas flange 330.

[0125] The gas flange 330 is provided with a perforation 331, and the perforation 331 can be arranged radially. The support assembly 300 further includes a first adapter 350 and an external joint 370. The intake pipeline is arranged along the extending direction of the support rod 210, and the external joint 370 is radially inserted into the perforation 331 through the gas flange 330. The first adapter 350 is a 90° adapter, which connects and communicates the intake pipeline with the external joint 370.

[0126] It can be understood that the gas flange 330 can be arranged at one of the furnace mouth or the furnace door of the furnace tube. Correspondingly, the other of the furnace mouth or the furnace door can also realize the connection between the gas supply pipeline 310 and the external gas source through other structures, which is not specifically limited herein.

[0127] In some embodiments, the support assembly 300 further includes a second adapter 390, and the gas supply pipeline 310 is communicated with the gas supply inlet 151 of the support structure 100 through the second adapter 390. Specifically, the second adapter 390 can be partially inserted into the gas supply channel 15.

[0128] The present application also provides a coating device 200, including the above-mentioned support structure 100 or support assembly 300.

[0129] Specifically, the coating device 200 can be, but is not limited to, a tube type PECVD device. To realize its normal functions, the coating device 200 further includes conventional furnace tubes, support rods 210, graphite boats 230, electrode assemblies 250, etc., which will not be elaborated herein. The support rod 210 is used to support the graphite boat 230 in the furnace tube. The support structure 100 is sleeved on the support rod 210, and the electrode assembly 250 realizes electrode feeding to the graphite boat 230 through the support structure 100.

[0130] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brief description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0131] The above-described embodiments only represent several implementation manners of the present application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A support structure, characterized in that, The support structure comprises a support body, wherein the support body has a mating surface, and the mating surface is used to cooperate with the graphite boat; The support body also has an air passage, wherein the air passage has an air inlet and an air outlet, and the air outlet is located on the matching surface.

2. The support structure according to claim 1, wherein The air channel includes a main channel and an air outlet channel. The main channel is opened in the supporting body. The air outlet channel is connected to the main channel and extends to the matching surface to form the air outlet.

3. The support structure according to claim 2, wherein, The support body also has a non-matching surface; the main channel penetrates the support body, and at least one end forms a first through hole on the non-matching surface; The support structure further includes a first blocking member, which is disposed on the support body and blocks the first through hole.

4. The support structure according to claim 3, wherein, The main channel penetrates from the non-matching surface to the matching surface, and one end of the main channel forms the first through hole on the non-matching surface, and the other end forms the air outlet on the matching surface.

5. The support structure according to claim 2, wherein The outlet channels are multiple; the density of the outlet formed by all the outlet channels is 0.4 pieces / cm 2 -1 piece / cm 2 ; And / or, there are multiple air outlet channels; the interval between the air outlets formed by adjacent air outlet channels is 6mm-14mm; and / or, the flow-through area of the air outlet is 0.5 mm 2 - 5 mm 2 .

6. The support structure according to claim 1, wherein The support body also has an air supply channel, the air supply channel has an air supply inlet, and the air inlet of the air channel is connected to the air supply channel.

7. The support structure according to claim 6, characterized in that, The air supply channel penetrates the support body, and one end of the air supply channel forms the air supply inlet on the surface of the support body, and the other end of the air supply channel forms a second through hole on the surface of the support body; The support structure further includes a second blocking member, which is disposed on the support body and blocks the second through hole.

8. The support structure according to claim 1, wherein, The air channel is a channel groove opened on the matching surface, the air inlet is opened on the groove wall of the channel groove, and the groove opening of the channel groove is formed as the air outlet.

9. The support structure according to claim 8, wherein The channel groove has a groove width of 1.2 mm to 2.3 mm; And / or, the support body has at least two channel grooves, and the interval between adjacent channel grooves is 6mm-12mm.

10. The support structure according to claim 1, wherein The mating surface includes a connected bearing area and a limiting area, wherein the bearing area is used to bear the boat foot of the graphite boat; the limiting area extends along a direction intersecting with the bearing area, and avoids and limits the boat foot in a direction parallel to the bearing area; The air outlet is provided on the bearing area and the limiting area.

11. The support structure according to claim 10, wherein, The bearing area is a plane located at the top of the supporting body, the limiting area is an arc-shaped surface located at one side of the bearing area, and the bearing area is tangentially connected to the limiting area.

12. The support structure according to claim 1, wherein, The support structure further includes at least one shielding member, which is connected to the support body and protrudes from the peripheral side of the matching surface.

13. The support structure according to claim 12, characterized in that, The shielding member is a shielding plate, and the shielding plate is perpendicular to the matching surface; the supporting structure includes two shielding plates, and the two shielding plates are arranged opposite to each other and perpendicular to the substrate in the graphite boat.

14. The support structure according to claim 12, wherein, The support body is made of stainless steel or titanium alloy; And / or, the shielding member is made of stainless steel.

15. The support structure according to any one of claims 1-14, characterized in that, The support body has at least two air passages, all of which are arranged at intervals and respectively form air outlets; And / or, the air passage has at least two air outlets.

16. A support component, characterized in that, Comprising an air supply pipeline and a support structure as described in any one of claims 1-15, the air supply pipeline communicating with the air inlet of the air passage; The air supply pipeline is made of ceramic material; and / or, the support assembly further includes a gas flange, and the air supply pipeline communicates with an external gas source through the gas flange.

17. A coating device, characterized in that, Comprising a support structure as described in any one of claims 1-15 or a support assembly as described in claim 16.

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